Focus ring

- Tokyo Electron Limited
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Description

FIG. 1 is a bottom perspective view of a Focus Ring of the present invention;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a top plan view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is a right side view thereof;

FIG. 7 is a left side view thereof;

FIG. 8 is an enlarged sectional view thereof, taken along the line 8-8 in FIG. 5 of the portion defined by the line 801-801 in FIG. 5;

FIG. 9 is an enlarged sectional view thereof, taken along the line 8-8 in FIG. 5 of the portion defined by the line 901-901 in FIG. 5;

FIG. 10 is an enlarged view showing the portion of FIG. 8 defined by the lines 10-10;

FIG. 11 is an enlarged view showing the portion of FIG. 9 defined by the lines 11-11;

The features shown in broken lines depict environmental subject matter only and form no part of the claimed design.

The alternate long and short dash lines are merely the boundary lines between the claimed parts and the non-claimed parts.

Claims

The ornamental design for a FOCUS RING as shown and described.

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Patent History
Patent number: D992615
Type: Grant
Filed: May 22, 2019
Date of Patent: Jul 18, 2023
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Yasuharu Sasaki (Kurokawa-gun), Yohei Uchida (Kurokawa-gun), Hikaru Abe (Kurokawa-gun), Tomoya Ujiie (Kurokawa-gun)
Primary Examiner: Richard Kearney
Assistant Examiner: Benjamin M Weeks
Application Number: 29/692,040