Abstract: A cabin management apparatus according to the present disclosure is a cabin management apparatus configured to manage a cabin of a vehicle, the cabin management apparatus including a communication interface, an output interface, and a controller, wherein the controller is configured to receive, by the communication interface, emergency stop information for the vehicle, receive, by the communication interface, the degree of automated controllability over a door of the vehicle, and provide, by the output interface based on the emergency stop information, a different notification depending on the degree of automated controllability over the door.

Abstract: An operation management apparatus operates a plurality of vehicles by autonomous driving. The operation management apparatus includes a controller configured to determine, upon identifying that a reservation holder who has reserved a route on which a plurality of vehicles are operated is a hearing-impaired person, based on reservation data including an attribute of the reservation holder, whether there is a sign language operator capable of sign language among one or more remote operators who perform remote monitoring operations for each vehicle, based on operator data including an attribute of each of the one or more remote operators, and select, according to a result of determination, a dispatch vehicle to dispatch to the route reserved by the reservation holder, from among the plurality of vehicles.

Abstract: An information processing apparatus capable of communicating with a management server includes a controller configured to execute operations, the operations including acquiring sensor information from a sensor installed in a vehicle, and upon detecting, from the sensor information, an abnormality in the vehicle, notifying the management server of the content of the abnormality.

Abstract: A cabin management apparatus according to the present disclosure is a cabin management apparatus configured to manage a cabin of a vehicle, the cabin management apparatus including an acquisition interface, a communication interface, an output interface, and a controller, wherein the controller is configured to acquire, by the acquisition interface, passenger information including a characteristic and/or a boarding position of a passenger in the cabin, receive, by the communication interface, travel event information regarding a travel event that can occur during travel of the vehicle, and provide, by the output interface based on the travel event information, a notification that is different depending on the passenger information, in the cabin.

Abstract: An information processing apparatus capable of communicating with a plurality of vehicles configured to perform automated driving includes a controller configured to execute operations, the operations including receiving, from each of the plurality of vehicles, a notification of a content of an abnormality, in-vehicle images, and the number of persons in the vehicle, prioritizing the plurality of vehicles based on determination results by determining, for each of the plurality of vehicles, a load of an automated driving process and the number of persons in the vehicle, and displaying with emphasis the content of the abnormality of a vehicle of a highest priority and the in-vehicle images of the vehicle of the highest priority.

Abstract: There is provided an injector that extends in a longitudinal direction, including: a gas introduction part having a circular or a regular polygonal shape in a cross section perpendicular to the longitudinal direction and having no discharge holes; and a gas supply part having a protruded portion in one direction in the cross section perpendicular to the longitudinal direction, and having a plurality of discharge holes formed in a leading end of the protruded portion along the longitudinal direction, wherein a first end of the gas supply part in the longitudinal direction is connected to the gas introduction portion.

Abstract: An abnormality detection method includes: supplying a gas controlled to a selected rate to a gas supply pipe via the gas pipe connected to the gas supply pipe, thereby introducing the gas into a reaction region of a processing container provided in a processing apparatus from a gas hole of the gas supply pipe; measuring a pressure inside the gas pipe by a pressure gauge attached to the gas pipe; and detecting an abnormality of at least one of the gas supply pipe and the gas pipe based on the pressure measured at the measuring.

Abstract: A design support method includes: acquiring reference diagrams which are control logic diagrams created in the past, and an editing object diagram; and applying each of analysis rules to each control logic diagram, and analyzing the control logic part included in each control logic diagram. The analysis rules satisfy a relation in which a control logic part corresponding to an analysis rule at a higher hierarchy level contains a control logic part corresponding to an analysis rule at a lower hierarchy level. The design support method further includes: specifying, as a similar diagram, a reference diagram including a control logic part common with the control logic part included in the editing object diagram, among the reference diagrams, based on an analysis result; and presenting a control logic part having a hierarchical relation with the common control logic part, among control logic parts included in the similar diagram.

Abstract: There is provided a substrate processing apparatus, including: a cylindrical reaction tube having a lower end opening; a lid configured to open and close the lower end opening of the reaction tube; a substrate holder mounted on the lid and configured to hold a plurality of substrates at vertical intervals in multiple stages; and an inner tube mounted on the lid and configured to cover the substrate holder.

Abstract: A design support method includes: acquiring reference diagrams which are control logic diagrams created in the past, and an editing object diagram; and applying each of analysis rules to each control logic diagram, and analyzing the control logic part included in each control logic diagram. The analysis rules satisfy a relation in which a control logic part corresponding to an analysis rule at a higher hierarchy level contains a control logic part corresponding to an analysis rule at a lower hierarchy level. The design support method further includes: specifying, as a similar diagram, a reference diagram including a control logic part common with the control logic part included in the editing object diagram, among the reference diagrams, based on an analysis result; and presenting a control logic part having a hierarchical relation with the common control logic part, among control logic parts included in the similar diagram.

Abstract: A substrate processing apparatus includes: a substrate holder which holds a plurality of substrates; a processing vessel including an inner tube and an outer tube disposed outside the inner tube; a gas supply part which supplies a process gas in parallel to target surfaces of the substrates; an exhaust part which exhausts the process gas from the processing vessel through a gas outlet; an exhaust port formed in the inner tube; and a rectifying plate installed in an outer wall of the inner tube or an inner wall of the outer tube between the exhaust port and the gas outlet in a circumferential direction of the processing vessel. The rectifying plate is installed to extend upward from a position below a lower end of the substrate holder to a location corresponding at least to a lower end of the exhaust port.

Abstract: There is provided a substrate processing apparatus, including: a cylindrical reaction tube having a lower end opening; a lid configured to open and close the lower end opening of the reaction tube; a substrate holder mounted on the lid and configured to hold a plurality of substrates at vertical intervals in multiple stages; and an inner tube mounted on the lid and configured to cover the substrate holder.

Abstract: There is provided an injector that extends in a longitudinal direction, including: a gas introduction part having a circular or a regular polygonal shape in a cross section perpendicular to the longitudinal direction and having no discharge holes; and a gas supply part having a protruded portion in one direction in the cross section perpendicular to the longitudinal direction, and having a plurality of discharge holes formed in a leading end of the protruded portion along the longitudinal direction, wherein a first end of the gas supply part in the longitudinal direction is connected to the gas introduction portion.

Abstract: A control logic diagram analysis device that efficiently creates a control logic diagram, and a method thereof. The control logic diagram analysis device includes a control logic diagram analysis rule application unit, a control logic diagram template component generation unit, and a control logic diagram project-specific part extraction unit. The control logic diagram analysis rule application unit sequentially applies a control logic diagram analysis rule to the control logic diagram from a lower layer level. The control logic diagram template component generation unit acquires the control logic diagram analysis rule having an agreement section within the control logic diagram. The control logic diagram project-specific part extraction unit extracts an element in the control logic diagram corresponding to the control logic diagram analysis rule having the agreement section within the control logic diagram.

Abstract: An apparatus includes: a similar plant information retrieval unit retrieving plant information of a similar plant similar to a creation object plant from plant information versus control logic diagram association information stored in a plant information versus control logic diagram association information storage unit; a plant information difference detector comparing the plant information of the creation object plant with the plant information of the similar plant to acquire difference information; a plant information editor that, based on the difference information, deletes an element included in the similar plant but unnecessary for the creation object plant, and retrieves an element included in the creation object plant but not included in the similar plant from the plant information versus control logic diagram association information storage unit to add the retrieved element; and a plant information editing result display displaying a result of the plant information editor.

Abstract: An apparatus includes: a similar plant information retrieval unit retrieving plant information of a similar plant similar to a creation object plant from plant information versus control logic diagram association information stored in a plant information versus control logic diagram association information storage unit; a plant information difference detector comparing the plant information of the creation object plant with the plant information of the similar plant to acquire difference information; a plant information editor that, based on the difference information, deletes an element included in the similar plant but unnecessary for the creation object plant, and retrieves an element included in the creation object plant but not included in the similar plant from the plant information versus control logic diagram association information storage unit to add the retrieved element; and a plant information editing result display displaying a result of the plant information editor.

Abstract: There is provided a wafer boat support table that supports a wafer boat having a plurality of posts from below, the plurality of posts being configured to arrange and support a plurality of wafers at intervals in a vertical direction, the wafer boat support table including: a plurality of support points installed on each of linear lines defined by connecting a center of the wafer boat and the plurality of posts and configured to support a bottom surface of the wafer boat while being brought into contact with the bottom surface of the wafer boat.

Abstract: A control logic diagram analysis device that efficiently creates a control logic diagram, and a method thereof. The control logic diagram analysis device includes a control logic diagram analysis rule application unit, a control logic diagram template component generation unit, and a control logic diagram project-specific part extraction unit. The control logic diagram analysis rule application unit sequentially applies a control logic diagram analysis rule to the control logic diagram from a lower layer level. The control logic diagram template component generation unit acquires the control logic diagram analysis rule having an agreement section within the control logic diagram. The control logic diagram project-specific part extraction unit extracts an element in the control logic diagram corresponding to the control logic diagram analysis rule having the agreement section within the control logic diagram.

Abstract: A device embedded substrate (20), includes: an insulation layer (12) including an insulation resin material; an electric or electronic device (4) embedded in the insulation layer (12); a terminal (15) serving as an electrode included in the device (4); a conductor pattern (18) formed on the surface of the insulation layer (12); and a conducting via (21) for electrically connecting the conductor pattern (18) and the terminals (15) with each other. The conducting via (21) is made up of a large-diameter section (21a) having a large diameter and a small-diameter section (21b) having a smaller diameter than that of the large-diameter section (21a), in order starting from the conductor pattern (18) toward the terminal (15). A stepped section (17) is formed between the large-diameter section (21a) and the small-diameter section (21b). The large-diameter section (21a) is formed so as to penetrate a sheet-shaped glass cloth (11) disposed in the insulation layer (12).