Reactor tube for semiconductor production devices

- Tokyo Electron Limited
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Description

FIG. 1 is a front view of a reactor tube for semiconductor production devices, showing our new design;

FIG. 2 is an enlarged cross-sectional view, along line 2-2 in FIG. 1;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof; and,

FIG. 7 is a cross-sectional view, along line 7-7 in FIG. 6, shown with additional environment related to use being shown in broken lines.

The broken lines shown in the drawings represent portions of the reactor tube for semiconductor production devices that form no part of the claimed design. The rear view of the reactor tube for semiconductor production devices has been omitted because it does not illustrate the claimed design.

Claims

The ornamental design for a reactor tube for semiconductor production devices, as shown and described.

Referenced Cited
U.S. Patent Documents
1995204 March 1935 Ford
D114756 May 1939 Fuller
D137905 May 1944 Kardux
2532329 December 1950 Premo
D192383 March 1962 Rogers
D340874 November 2, 1993 Nicholson
D367926 March 12, 1996 Lin
D434440 November 28, 2000 Lawton
D569996 May 27, 2008 Zhu
D621526 August 10, 2010 Falligant
D668975 October 16, 2012 Phillips
D719114 December 9, 2014 Yamazaki
20070098605 May 3, 2007 Johns
Patent History
Patent number: D800080
Type: Grant
Filed: Sep 20, 2016
Date of Patent: Oct 17, 2017
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Tomoyuki Nagata (Iwate)
Primary Examiner: Jeffrey D Asch
Assistant Examiner: Tracey J Bell
Application Number: 29/578,225