Reactor tube for semiconductor production devices
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The broken lines shown in the drawings represent portions of the reactor tube for semiconductor production devices that form no part of the claimed design. The rear view of the reactor tube for semiconductor production devices has been omitted because it does not illustrate the claimed design.
Claims
The ornamental design for a reactor tube for semiconductor production devices, as shown and described.
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Type: Grant
Filed: Sep 20, 2016
Date of Patent: Oct 17, 2017
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Tomoyuki Nagata (Iwate)
Primary Examiner: Jeffrey D Asch
Assistant Examiner: Tracey J Bell
Application Number: 29/578,225