Patents by Inventor Toru Fujimura

Toru Fujimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11391756
    Abstract: As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Therefore, it is necessary to associate probes and the efficient layout of the electrode pad. The purpose of the present invention is to provide a technique for associating probes and the layout of an electrode pad of a TEG to facilitate the evaluation of electrical characteristics. According to the present invention, the above described problem can be solved by arranging a plurality of probes in a fan shape or manufacturing the probes with micro electro mechanical systems (MEMS) technology.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: July 19, 2022
    Assignee: Hitachi High-Tech Corporation
    Inventors: Ryo Hirano, Takayuki Mizuno, Tomohisa Ohtaki, Toru Fujimura, Shigehiko Kato, Yasuhiko Nara, Katsuo Ohki, Akira Kageyama, Masaaki Komori
  • Publication number: 20210149172
    Abstract: It is not preferable to use a material other than materials that are used in the related art in order to prevent a section from peeling from a microscope slide. This is because, even if adhesiveness is improved, it is necessary to eliminate influence on processes such as dyeing. An object of the invention is to provide a technique for preventing a section from peeling off without applying an additional material. In the invention, the above-described problem is solved by etching at least a part of a region of a surface of a substrate with reactive ions.
    Type: Application
    Filed: April 17, 2018
    Publication date: May 20, 2021
    Inventor: Toru FUJIMURA
  • Publication number: 20210048450
    Abstract: As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Therefore, it is necessary to associate probes and the efficient layout of the electrode pad. The purpose of the present invention is to provide a technique for associating probes and the layout of the electrode pads of a TEG so as to facilitate the evaluation of electrical characteristics. According to a method for manufacturing a semiconductor device of the present invention, the above-described problems can be solved by providing a layout of a TEG electrode pad corresponding to a plurality of probes arranged in a fan shape or probes manufactured by Micro Electro Mechanical Systems (MEMS) technology.
    Type: Application
    Filed: February 6, 2018
    Publication date: February 18, 2021
    Inventors: Tomohisa OHTAKI, Takayuki MIZUNO, Ryo HIRANO, Toru FUJIMURA, Shigehiko KATO, Yasuhiko NARA, Katsuo OHKI, Akira KAGEYAMA, Masaaki KOMORI
  • Publication number: 20210033642
    Abstract: As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Therefore, it is necessary to associate probes and the efficient layout of the electrode pad. The purpose of the present invention is to provide a technique for associating probes and the layout of an electrode pad of a TEG to facilitate the evaluation of electrical characteristics. According to the present invention, the above described problem can be solved by arranging a plurality of probes in a fan shape or manufacturing the probes with micro electro mechanical systems (MEMS) technology.
    Type: Application
    Filed: February 6, 2018
    Publication date: February 4, 2021
    Inventors: Ryo HIRANO, Takayuki MIZUNO, Tomohisa OHTAKI, Toru FUJIMURA, Shigehiko KATO, Yasuhiko NARA, Katsuo OHKI, Akira KAGEYAMA, Masaaki KOMORI
  • Publication number: 20210025936
    Abstract: As a semiconductor device is miniaturized, a scribe area on a wafer also tends to decrease. Accordingly, it is necessary to reduce the size of a TEG arranged in the scribe area, and efficiently arrange an electrode pad for probe contact. Therefore, it is necessary to associate probes and the efficient layout of the electrode pad. The purpose of the present invention is to provide a technique for associating probes and the layout of the electrode pads of a TEG so as to facilitate the evaluation of electrical characteristics. According to an evaluation apparatus for a semiconductor device of the present invention, the above described problems can be solved by providing a plurality of probes arranged in a fan shape or probes manufactured by Micro Electro Mechanical Systems (MEMS) technology.
    Type: Application
    Filed: February 6, 2018
    Publication date: January 28, 2021
    Inventors: Tomohisa OHTAKI, Takayuki MIZUNO, Ryo HIRANO, Toru FUJIMURA, Shigehiko KATO, Yasuhiko NARA, Katsuo OHKI, Akira KAGEYAMA, Masaaki KOMORI
  • Patent number: 9291548
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: March 22, 2016
    Assignee: HITACHI, LTD.
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Publication number: 20150086425
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Application
    Filed: December 2, 2014
    Publication date: March 26, 2015
    Inventors: Toru FUJIMURA, Kosuke KUWABARA, Tatsuro IDE
  • Patent number: 8922765
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Grant
    Filed: August 7, 2013
    Date of Patent: December 30, 2014
    Assignee: Hitachi, Ltd.
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Publication number: 20130315784
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Application
    Filed: August 7, 2013
    Publication date: November 28, 2013
    Applicant: Hitachi, Ltd.
    Inventors: Toru FUJIMURA, Kosuke Kuwabara, Tatsuro Ide
  • Patent number: 8525985
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Grant
    Filed: October 24, 2012
    Date of Patent: September 3, 2013
    Assignee: Hitachi, Ltd.
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Patent number: 8325335
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Grant
    Filed: November 23, 2011
    Date of Patent: December 4, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Publication number: 20120069333
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Application
    Filed: November 23, 2011
    Publication date: March 22, 2012
    Applicant: Hitachi, Ltd.
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Patent number: 8089624
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Grant
    Filed: October 12, 2010
    Date of Patent: January 3, 2012
    Assignee: Hitachi, Ltd.
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Publication number: 20110058162
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Application
    Filed: October 12, 2010
    Publication date: March 10, 2011
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Publication number: 20110012108
    Abstract: A semiconductor device includes a cell array and a plurality of process failure detection circuits each having a layout pattern substantially identical to that of a cell of the cell array in a dummy region arranged around the cell array. Each of the process failure detection circuits includes a dummy pattern that equalizes a degree of density/sparsity of a peripheral part of the cell array with that of a central part of the cell array. The process failure detection circuits include a process failure detection circuit having a layout pattern formed with a stricter pattern margin in at least one manufacturing process, compared with the layout pattern of the cell of the cell array.
    Type: Application
    Filed: June 29, 2010
    Publication date: January 20, 2011
    Applicant: NEC Electronics Corporation
    Inventor: Toru Fujimura
  • Patent number: 7834998
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Grant
    Filed: May 12, 2010
    Date of Patent: November 16, 2010
    Assignee: Hitachi, Ltd.
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Publication number: 20100220322
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the refection spectrum.
    Type: Application
    Filed: May 12, 2010
    Publication date: September 2, 2010
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Patent number: 7742165
    Abstract: The invention makes it possible to measure binding of a biochemical substance with a high throughput and with high sensitivity using a small cell capable of being filled with a small amount of chemical solution. A space between a first substrate and a second substrate such that probes are immobilized on their mutually facing planes is used as a cell that houses a specimen solution. Light is irradiated from a first substrate side, and reflected light is subjected to spectroscopy. Binding of the target with the probe is detected by a wavelength shift in the reflection spectrum.
    Type: Grant
    Filed: January 30, 2007
    Date of Patent: June 22, 2010
    Assignee: Hitachi, Ltd.
    Inventors: Toru Fujimura, Kosuke Kuwabara, Tatsuro Ide
  • Patent number: 7726004
    Abstract: A processing cell of automatic machining system configured in that it is easy to decide or change the number of steps and to design, and to reduce the installation cost. The control unit of the processing cell comprises an operation data storing means for storing every position necessary data for operation at each position of the processing cell installed in the machining section of the automatic machining system, and a position designating means for designating the after-installation position. The control unit reads necessary data for operation out of the operation data storing means in accordance with the position designated by the position designating means. Thus, the operation of each cell can be switched in accordance with the position, and the processing cells can be easily changed in position and adjusted in quantity.
    Type: Grant
    Filed: January 31, 2008
    Date of Patent: June 1, 2010
    Assignee: Nissin Manufacturing Co., Ltd.
    Inventors: Hiroyuki Ooe, Toru Fujimura, Kazuhiko Tsuji, Yasuo Tomita
  • Patent number: 7439073
    Abstract: An object of the present invention is to provide a simple biochemical sensor making use of the light interference effect of an optical film which is capable of measuring binding of biochemical substances at a high throughput. In the present invention, a solution containing samples 18 is passed through the sensor having probes 17 provided on an optical film with a refractive index of not less than 1.8 and not greater than 3 on a substrate, and binding of the probes 17 and samples 18 is detected from the change of intensity of the reflected light. This makes it possible to measure binding of biochemical substances at a high throughput with high precision.
    Type: Grant
    Filed: February 25, 2003
    Date of Patent: October 21, 2008
    Assignee: Hitachi, Ltd.
    Inventors: Toru Fujimura, Juergen Pipper