Abstract: A pad-temperature regulating device is disclosed, which can improve a responsiveness of a control for a surface temperature of a polishing pad and regulate the surface temperature of the polishing pad without causing defects, such as scratches, on the substrate. The pad-temperature regulating apparatus includes: a heat exchanger disposed above the polishing pad, whose temperature is maintained at a predetermined temperature; a pad-temperature measuring device configured to measure the surface temperature of the polishing pad; a distance sensor configured to measure a separation distance between the polishing pad and the heat exchanger; an elevating mechanism for moving the heat exchanger vertically with respect to the polishing pad; and a controller configured to control operation of the elevating mechanism based on measured values of the pad-temperature measuring device.

Abstract: A control method of a plasma processing apparatus including a first electrode that places a workpiece thereon includes supplying a bias power to the first electrode, and supplying a source power having a frequency higher than that of the bias power into a plasma processing space. The source power has a first state and a second state. The control method further includes a first control process of alternately applying the first state and the second state of the source power in synchronization with a signal synchronized with a cycle of a radio frequency of the bias power, or a phase within one cycle of a reference electrical state that represents any one of a voltage, current, and electromagnetic field measured in a power feeding system of the bias power.

Abstract: A temperature adjustment system includes: a refrigeration cycle circuit including a first compressor, a heat radiator, a first expansion valve, a chiller configured to perform heat exchange using the expanded refrigerant, and a gas-liquid separator configured to perform gas-liquid separation on the refrigerant and supply a gas phase refrigerant to the first compressor; a first cooling water circuit including an external heat radiator; a second cooling water circuit configured to heat the cooling water flowing therethrough by the heat of the refrigerant radiated by the heat radiator; a third cooling water circuit configured to cool the cooling water flowing therethrough, and adjust a temperature of a device by heat exchange with the cooling water; a first valve configured to connect or disconnect the first and the second cooling water circuits; and a second valve configured to connect or disconnect the second and the third cooling water circuits.

Abstract: In one embodiment of the present invention, a cleaning member 90 is attached to the surface of a cleaning member attaching part 10. The cleaning member attaching part 10 has a main body 20, a cleaning liquid introduction part 30 extending inside the main body 20, and a plurality of cleaning liquid supply holes 40 communicating with the cleaning liquid introduction part 30. The cleaning liquid introduction part 30 is configured such that cleaning liquid flows in from a first end part 11 side, and an area proportion of the cleaning liquid supply holes 40 in a second region located on a second end part 12 side opposite to the first end part 11 to a surface of the main body 20 is larger than the area proportion of the cleaning liquid supply holes 40 in a first region located on the first end part 11 side to the surface of the main body 20.

Abstract: A work site management system includes: a traveling path generation unit that generates a traveling path; and a protection area setting unit that sets, for a target vehicle, a protection area in which entry of a second unmanned vehicle is prohibited based on a position of a first unmanned vehicle traveling in a work site along the traveling path.

Abstract: A management system for an autonomous travel vehicle includes: a work machine position acquisition unit that acquires a position of a work machine operated by an operator and having a travel device; and a target position determination unit that determines a target position of the autonomous travel vehicle based on the position of the work machine.

Abstract: A control system for an autonomous travel vehicle includes: a work machine position acquisition unit that acquires a position of a work machine; an autonomous travel vehicle position acquisition unit that acquires a position of the autonomous travel vehicle; a human information acquisition unit that acquires human information indicating whether or not a person is present inside the autonomous travel vehicle; and a command generation unit that changes control of the autonomous travel vehicle based on the human information and a positional relationship between the work machine and the autonomous travel vehicle.

Abstract: A work site management system includes: a traveling path generation unit that generates a traveling path; and a protection area setting unit that sets a protection area in which a target vehicle is to be present based on a position of a first unmanned vehicle traveling in a work site along the traveling path.

Abstract: A management system of a work site includes: a priority storage unit that stores priority related to traveling continuation of an unmanned vehicle traveling in the work site; an input signal acquisition unit that acquires an input signal related to traveling stop of the unmanned vehicle; a decision unit that decides the traveling continuation or the traveling stop for each of a plurality of the unmanned vehicles traveling in the work site based on the priority and the input signal; and an output unit that outputs a traveling stop command to the unmanned vehicle for which the traveling stop is decided.

Abstract: A safety support device includes an object detection camera and a radar device, which serve as detectors, and a controller that controls a dual-purpose speaker and a dual-purpose speaker, which serve as three-dimensional sound outputters, and a monaural speaker that serves as a sound outputter, based on detection information of a monitoring camera that serves as a monitor. The controller selects, in accordance with the positions of the ears of a driver, which are detected by the monitoring camera, whether to cause the dual-purpose speaker and the dual-purpose speaker to output a three-dimensional sound or to cause the dual-purpose speaker, the dual-purpose speaker, and the monaural speaker to output a sound.

Abstract: A safety assist device includes an object detection camera and a radar that detect the presence of an object and a position of the object on a lateral side or a rear side of an own vehicle, a vehicle speed sensor that detects a vehicle speed of the own vehicle, a driver's seat-side display and a passenger's seat-side display that are provided on a lateral side of a driver's seat inside the own vehicle, and a controller that causes the driver's seat-side display and the passenger's seat-side display to display a signal in response to the presence of the object detected by the object detection camera, the radar, and the like. The controller moves a position at which the signal is displayed toward a front side in a display range of the driver's seat-side display and the passenger's seat-side display in accordance with an increase in the vehicle speed detected.

Abstract: A control method of a plasma processing apparatus including a first electrode that places a workpiece thereon includes supplying a bias power to the first electrode, and supplying a source power having a frequency higher than that of the bias power into a plasma processing space. The source power has a first state and a second state. The control method further includes a first control process of alternately applying the first state and the second state of the source power in synchronization with a signal synchronized with a cycle of a radio frequency of the bias power, or a phase within one cycle of a reference electrical state that represents any one of a voltage, current, and electromagnetic field measured in a power feeding system of the bias power.

Abstract: A control method of a plasma processing apparatus including a first electrode that places a workpiece thereon includes supplying a bias power to the first electrode, and supplying a source power having a frequency higher than that of the bias power into a plasma processing space. The source power has a first state and a second state. The control method further includes a first control process of alternately applying the first state and the second state of the source power in synchronization with a signal synchronized with a cycle of a radio frequency of the bias power, or a phase within one cycle of a reference electrical state that represents any one of a voltage, current, and electromagnetic field measured in a power feeding system of the bias power.

Abstract: A vehicle control device includes: a steering device, a steering control device, a surroundings monitoring device, and a controller. The controller is configured to execute: a route calculating process of calculating a target route, a trajectory calculating process of calculating a target trajectory of an own vehicle in one or more roads of the target route; a steering-angle calculating process of calculating a target steering angle; a behavior detecting process of detecting information on a behavior of the own vehicle; a rut determining process of determining presence or absence of a rut on the target trajectory based on a detection result obtained by the surroundings monitoring device and/or a detection result obtained in the behavior detecting process, a drivable or non-drivable determining process of determining whether the own vehicle is drivable over the rut, and a correcting process of correcting the target trajectory and/or the target route.

Abstract: Since a compound represented by the general formula (I) (wherein definition of each group is as described in the specification), a salt thereof, a solvate thereof, or a prodrug thereof has strong and sustaining intraocular pressure lowering activity and, further, has no side effect on eyes such as ocular stimulating property (hyperemia, corneal clouding etc.), aqueous humor protein rise etc., it has high safety, and can be an excellent agent for preventing and/or treating glaucoma etc.

Abstract: Since a compound represented by the general formula (I) (wherein definition of each group is as described in the specification), a salt thereof, a solvate thereof, or a prodrug thereof has strong and sustaining intraocular pressure lowering activity and, further, has no side effect on eyes such as ocular stimulating property (hyperemia, corneal clouding etc.), aqueous humor protein rise etc., it has high safety, and can be an excellent agent for preventing and/or treating glaucoma etc.

Abstract: A substrate cleaning device that facilitates control of the amount of liquid supplied to a substrate and reduces adverse influences of the liquid supplied to a bearing part on the substrate is provided. The substrate cleaning device includes: a holding part that has a bearing part configured to rotatably hold a cleaning member for cleaning a substrate; a first supply part that has at least a part provided inside the holding part and supplies a first liquid into the cleaning member through the inside of the holding part; and a second supply part that supplies a second liquid to the bearing part.

Abstract: An object of the present invention is to improve a substrate processing apparatus using the CARE method. The present invention provides a substrate processing apparatus for polishing a processing target region of a substrate by bringing the substrate and a catalyst into contact with each other in the presence of processing liquid. The substrate processing apparatus includes a substrate holding unit configured to hold the substrate, a catalyst holding unit configured to hold the catalyst, and a driving unit configured to move the substrate holding unit and the catalyst holding unit relative to each other with the processing target region of the substrate and the catalyst kept in contact with each other. The catalyst is smaller than the substrate.

Abstract: A pad-temperature regulating apparatus is disclosed, which includes a heat exchanger capable of being cleaned in a limited space. A pad-temperature regulating apparatus includes a heat exchanger configured to contact a polishing pad to exchange heat with the polishing pad, a moving mechanism configured to move the heat exchanger between a temperature regulating position where the heat exchanger can exchange heat with the polishing pad, and a retreat position located on a side of the polishing pad, and a cleaning mechanism configured to clean the heat exchanger moved to the retreat position. The heat exchanger has an approximate triangular shape in a horizontal cross-section, and a longest side of the heat exchanger faces the polishing pad when the heat exchanger is moved to the retreat position.

Abstract: An object of the present invention is to improve a substrate processing apparatus using the CARE method. The present invention provides a substrate processing apparatus for polishing a processing target region of a substrate by bringing the substrate and a catalyst into contact with each other in the presence of processing liquid. The substrate processing apparatus includes a substrate holding unit configured to hold the substrate, a catalyst holding unit configured to hold the catalyst, and a driving unit configured to move the substrate holding unit and the catalyst holding unit relative to each other with the processing target region of the substrate and the catalyst kept in contact with each other. The catalyst is smaller than the substrate.