Patents by Inventor Toshihide Yoshida

Toshihide Yoshida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200393051
    Abstract: Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.
    Type: Application
    Filed: March 9, 2018
    Publication date: December 17, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenta KONDO, Toshihide YOSHIDA, Masahiko TAKIMOTO, Tsutomu SHINOHARA, Tomohiro NAKATA, Takeru MIURA, Masahiko NAKAZAWA
  • Publication number: 20200386342
    Abstract: A valve device allows simple flow rate control when the bulb is opened. Valve device includes: a valve body having a first flow path and a second flow path formed therein; a valve body for closing an opening of the first flow path to shut off a gateway between the first flow path and the second flow path and for opening the first flow path to communicate the first flow path and the second flow path; an operating member for moving between a closed position for closing the opening in the valve body and an open position for opening the opening; and an adjusting actuator for defining an open position of the operating member and having an electrically driven material made of a compound that deforms in response to a change in an electric field, and for changing the defined open position by deformation of the electrically driven material.
    Type: Application
    Filed: March 9, 2018
    Publication date: December 10, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshihide YOSHIDA, Tsutomu SHINOHARA, Tomohiro NAKATA, Ryutaro TANNO, Kouji NISHINO, Katsuyuki SUGITA, Masahiko TAKIMOTO
  • Publication number: 20200370671
    Abstract: A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.
    Type: Application
    Filed: November 12, 2018
    Publication date: November 26, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masahiko TAKIMOTO, Toshihide YOSHIDA, Kenta KONDO, Ryousuke DOHI, Kouji NISHINO
  • Publication number: 20200278234
    Abstract: A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.
    Type: Application
    Filed: September 11, 2018
    Publication date: September 3, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenta KONDO, Toshihide YOSHIDA, Hidenobu SATO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
  • Publication number: 20200278033
    Abstract: A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.
    Type: Application
    Filed: September 11, 2018
    Publication date: September 3, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenta KONDO, Toshihide YOSHIDA, Kenji AIKAWA, Hidenobu SATO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
  • Publication number: 20200224776
    Abstract: A valve device includes a valve body that defines flow paths, a diaphragm provided so as to be capable of opening and closing the flow paths, an operation member provided so as to be capable of moving in opening and closing directions that open and close the flow paths by operating the diaphragm, a main actuator that applies a driving force corresponding to an operating pressure applied in the opening direction or the closing direction of the opening and closing directions with respect to the operation member, a switching mechanism capable of selectively switching a position of the operation member that regulates a degree of opening of the flow paths between a first open position and a second open position in accordance with a magnitude of the operating pressure, and regulating mechanisms capable of independently regulating the first open position and the second open position.
    Type: Application
    Filed: November 2, 2017
    Publication date: July 16, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshihide YOSHIDA, Tomohiro NAKATA, Tsutomu SHINOHARA, Toshiyuki INADA, Takashi FUNAKOSHI, Hidenobu SATO, Tomoko YUHARA
  • Publication number: 20200161147
    Abstract: A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.
    Type: Application
    Filed: July 31, 2018
    Publication date: May 21, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshihide YOSHIDA, Yukio MINAMI, Tsutomu SHINOHARA
  • Publication number: 20190285176
    Abstract: A valve device that greatly reduces man-hours for flow adjustment includes a valve body that defines a flow path, a valve element provided so as to be capable of opening and closing the flow path of the valve body, an operation member that operates the valve element and is moveably provided between a closed position where the valve element closes the flow path and an open position where the valve element opens the flow path, set in advance, in opening and closing directions that allow the valve element to open and close the flow path, a main actuator that moves the operation member in the opening direction, and a piezoelectric actuator for adjusting a position of the operation member positioned in the open position.
    Type: Application
    Filed: November 2, 2017
    Publication date: September 19, 2019
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshihide YOSHIDA, Tomohiro NAKATA, Tsutomu SHINOHARA, Toshiyuki INADA, Takashi FUNAKOSHI
  • Patent number: 10372145
    Abstract: A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: August 6, 2019
    Assignee: Fujikin Incorporated
    Inventors: Takashi Hirose, Toshihide Yoshida, Atsushi Matsumoto, Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita
  • Patent number: 9921089
    Abstract: A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1-P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
    Type: Grant
    Filed: June 2, 2016
    Date of Patent: March 20, 2018
    Assignees: Fujikin Incorporated, National University Corporation Tohuku University, Tokyo Electron Ltd.
    Inventors: Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura, Kouji Nishino, Masaaki Nagase, Katsuyuki Sugita, Kaoru Hirata, Ryousuke Dohi, Takashi Hirose, Tsutomu Shinohara, Nobukazu Ikeda, Tomokazu Imai, Toshihide Yoshida, Hisashi Tanaka
  • Patent number: 9625047
    Abstract: A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.
    Type: Grant
    Filed: March 17, 2014
    Date of Patent: April 18, 2017
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takashi Hirose, Michio Yamaji, Toshihide Yoshida, Kohei Shigyou
  • Publication number: 20160349763
    Abstract: A pressure-type flow rate controller includes a body provided with a fluid passage which communicates a fluid inlet and a fluid outlet, a control valve for pressure control fixed to the body to open and close the fluid passage, an orifice arranged in the course of the fluid passage on the downstream side of the control valve, and a pressure sensor fixed to the body to detect the internal pressure of the fluid passage between the control valve and the orifice, wherein the fluid passage comprises a first passage portion communicating the control valve and a pressure detection chamber provided on a pressure detection surface of the pressure sensor, and a second passage portion spaced away from the first passage portion and communicating the pressure detection chamber and the orifice.
    Type: Application
    Filed: November 25, 2014
    Publication date: December 1, 2016
    Inventors: Takashi Hirose, Toshihide Yoshida, Atsushi Matsumoto, Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Katsuyuki Sugita
  • Publication number: 20160274595
    Abstract: A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1?P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
    Type: Application
    Filed: June 2, 2016
    Publication date: September 22, 2016
    Inventors: Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura, Kouji Nishino, Masaaki Nagase, Katsuyuki Sugita, Kaoru Hirata, Ryousuke Dohi, Takashi Hirose, Tsutomu Shinohara, Nobukazu Ikeda, Tomokazu Imai, Toshihide Yoshida, Hisashi Tanaka
  • Patent number: 9383758
    Abstract: A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1?P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
    Type: Grant
    Filed: December 21, 2015
    Date of Patent: July 5, 2016
    Assignees: Fujikin Incorporated, National University Corporation Tohoku University, Tokyo Electron Ltd.
    Inventors: Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura, Kouji Nishino, Masaaki Nagase, Katsuyuki Sugita, Kaoru Hirata, Ryousuke Dohi, Takashi Hirose, Tsutomu Shinohara, Nobukazu Ikeda, Tomokazu Imai, Toshihide Yoshida, Hisashi Tanaka
  • Publication number: 20160109886
    Abstract: A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m(P1?P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.
    Type: Application
    Filed: December 21, 2015
    Publication date: April 21, 2016
    Inventors: Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura, Kouji Nishino, Masaaki Nagase, Katsuyuki Sugita, Kaoru Hirata, Ryousuke Dohi, Takashi Hirose, Tsutomu Shinohara, Nobukazu Ikeda, Tomokazu Imai, Toshihide Yoshida, Hisashi Tanaka
  • Publication number: 20160047483
    Abstract: A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.
    Type: Application
    Filed: March 17, 2014
    Publication date: February 18, 2016
    Applicant: Fujikin Incorporated
    Inventors: Takashi HIROSE, Michio YAMAJI, Toshihide YOSHIDA, Kohei SHIGYOU
  • Patent number: 9163748
    Abstract: This invention provides a fluid control device capable of making compact a fluid control device in which a valve and a limit switch are combined. A valve 6 includes a piston 26 as a moving member which includes a protruding portion protruding from an opening of a casing 21, and which linearly moves according to opening and closing of the valve 6 so as to abut against a limit switch 7. The limit switch 7 is made to face the piston 26 and is attached via a limit switch positioning unit 8 so as to be adjustable about its position. The limit switch positioning unit 8 includes a first bolt 42 fixed to a body 2, a second bolt 43 fixed to the limit switch 7, and a connection screw 44 which connects both the bolts 42, 43. The first bolt 42 and the second bolt 43 have different pitches from each other.
    Type: Grant
    Filed: November 25, 2010
    Date of Patent: October 20, 2015
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takashi Hirose, Hiroshi Ogawa, Toshihide Yoshida, Kohei Shigyou
  • Patent number: 9133951
    Abstract: An orifice changeable pressure type flow rate control apparatus comprises a valve body of a control valve for a pressure type flow rate control apparatus installed between an inlet side fitting block provided with a coupling part of a fluid supply pipe and an outlet side fitting block provided with a coupling part of a fluid takeout pipe; a fluid inlet side of the valve body and the inlet side fitting block, and a fluid outlet side of the valve body and the outlet side fitting block are detachably and hermitically connected respectively so a flow passage for gases through the control valve is formed; and, a gasket type orifice for a pressure type flow rate control apparatus is removably inserted between a gasket type orifice insertion hole provided on the outlet side of the valve body and a gasket type orifice insertion hole of the outlet side fitting block.
    Type: Grant
    Filed: May 10, 2006
    Date of Patent: September 15, 2015
    Assignees: Fujikin Incorporated, National University Corporation Tohoku University
    Inventors: Tadahiro Ohmi, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Masaaki Nagase, Kaoru Hirata, Katsuyuki Sugita, Tsutomu Shinohara, Takashi Hirose, Tomokazu Imai, Toshihide Yoshida, Hisashi Tanaka
  • Patent number: 9127796
    Abstract: A gasket type orifice includes a first orifice base having a through-type passage in a central area thereof, a second orifice base having in a central area thereof a through-type passage communicating with the passage of the first orifice base, and an orifice plate having an orifice hole formed in a central area thereof, wherein the orifice plate is mounted by insertion in an airtight manner between both orifice bases, and the gasket type orifice is installed in a fluid passage, in which the outer end faces of both orifice bases respectively serve as sealing faces, and an outer diameter of the second orifice base, located on the downstream side, is larger than an outer diameter of the first orifice base located on the upstream side, and an outer peripheral edge portion of an inner end face of the second orifice base serves as another sealing face.
    Type: Grant
    Filed: June 27, 2011
    Date of Patent: September 8, 2015
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takashi Hirose, Tsutomu Shinohara, Toshihide Yoshida, Kohei Shigyou, Michio Yamaji
  • Patent number: 9115813
    Abstract: This invention provides a fluid control device which is capable of visually recognizing its opening and closing states with a simple configuration. The casing 3 is formed so as to be opened upward. The piston 8 is disposed at an upper end portion of a valve rod 7 such that a piston upper end portion is exposed from an opening of the casing 3 when the valve rod 7 is located at the upper position.
    Type: Grant
    Filed: December 9, 2010
    Date of Patent: August 25, 2015
    Assignee: FUJIKIN INCORPORATED
    Inventors: Takashi Hirose, Hiroshi Ogawa, Toshihide Yoshida, Kohei Shigyou