Patents by Inventor Toshihide Yoshida

Toshihide Yoshida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11911785
    Abstract: An electrostatic atomizing apparatus includes: a liquid nozzle portion for releasing a liquid column into an open space; a liquid conduit portion for introducing pressurized liquid into the liquid nozzle portion; a liquid-side electrode disposed inside the liquid conduit portion for coming into contact with the pressurized liquid; a gas conduit portion made of an insulation material and having a gas nozzle portion disposed around the liquid nozzle portion for converting the liquid column into fine particles to generate an atomized stream by making a gas stream from the gas nozzle portion act at an atomization point of the liquid column released into the open space from the liquid nozzle portion; and a ring-shaped induction electrode disposed around the atomization point located in the open space and having an electrode conductor made of a conductive material and coated with an insulation material.
    Type: Grant
    Filed: June 9, 2021
    Date of Patent: February 27, 2024
    Assignee: HOCHIKI CORPORATION
    Inventors: Toshihide Tsuji, Tetsuo Yoshida
  • Patent number: 11873916
    Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
    Type: Grant
    Filed: June 15, 2021
    Date of Patent: January 16, 2024
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masahiko Takimoto, Toshihide Yoshida, Tsutomu Shinohara, Kouji Nishino
  • Publication number: 20230244251
    Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.
    Type: Application
    Filed: June 15, 2021
    Publication date: August 3, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Masahiko TAKIMOTO, Toshihide YOSHIDA, Tsutomu SHINOHARA, Kouji NISHINO
  • Publication number: 20230136494
    Abstract: [Problem] To provide a valve system capable of monitoring in real time a mass of gas supplied from a valve that is periodically opened and closed, and that is capable of adjusting the output mass of gas supplied from the valve to be close to a target mass. [Solution] The valve system operates a main actuator 60 to make a diaphragm periodically open and close a flow path (step S2), calculate an output mass of fluid that passes through the a between the diaphragm and a valve seat and output from the diaphragm valve based on displacement data detected by a displacement sensor (step S3), determines an adjustment lift amount based on the calculated output mass, and adjusts a lift amount Lf of the diaphragm 20 by the determined adjustment lift amount (step S4).
    Type: Application
    Filed: March 1, 2021
    Publication date: May 4, 2023
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshihide YOSHIDA, Tsutomu SHINOHARA, Tomohiro NAKATA, Ryutaro TANNO, Yuya SUZUKI
  • Patent number: 11598430
    Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.
    Type: Grant
    Filed: January 17, 2020
    Date of Patent: March 7, 2023
    Assignee: FUJIKIN INCORPORATED
    Inventors: Daihi Tsuchiguchi, Toshihide Yoshida, Ryutaro Tanno, Yuya Suzuki, Kenta Kondo, Tomohiro Nakata, Tsutomu Shinohara, Masahiko Takimoto
  • Patent number: 11569101
    Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies a fluid in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied fluid stored in the tank toward the processing chamber, and a heating means provided to a flow path communicating with a discharge side of the pump and for partially changing the liquid in the flow path to a supercritical fluid.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: January 31, 2023
    Assignees: FUJIKIN INCORPORATED, TOKYO ELECTRON LTD.
    Inventors: Toshihide Yoshida, Yukio Minami, Tsutomu Shinohara
  • Patent number: 11512993
    Abstract: A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: November 29, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenta Kondo, Toshihide Yoshida, Hidenobu Sato, Tomohiro Nakata, Tsutomu Shinohara, Masahiko Takimoto
  • Patent number: 11506290
    Abstract: A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.
    Type: Grant
    Filed: September 11, 2018
    Date of Patent: November 22, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenta Kondo, Toshihide Yoshida, Kenji Aikawa, Hidenobu Sato, Tomohiro Nakata, Tsutomu Shinohara, Masahiko Takimoto
  • Publication number: 20220275871
    Abstract: To provide a control valve with excellent durability performance without being restricted in terms of applications, such as usages under high pressures or high temperatures, as well as reduced generation of particles. A valve body forming an inflow passage and an outflow passage of a fluid; a valve seat formed at a peripheral edge of the inflow passage in the valve body; a diaphragm configured to connect and shut off the inflow passage and the outflow passage by coming into and out of contact with the valve seat; a diaphragm holder configured to press a central portion of the diaphragm; and an actuator configured to move the diaphragm holder are provided, includes a regulation mechanism configured to adjust a closing pressure generated between the valve seat and the diaphragm to a predetermined pressure.
    Type: Application
    Filed: June 8, 2020
    Publication date: September 1, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Keisuke Ishibashi, Toshihide Yoshida, Tadayuki Yakushijin, Michio Yamaji, Tsutomu Shinohara
  • Publication number: 20220196163
    Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.
    Type: Application
    Filed: January 17, 2020
    Publication date: June 23, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Daihi TSUCHIGUCHI, Toshihide YOSHIDA, Ryutaro TANNO, Yuya SUZUKI, Kenta KONDO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
  • Patent number: 11322372
    Abstract: A fluid supply device includes a condenser, a tank that stores the fluid, a pump that pressure-feeds the fluid toward a processing chamber, a main pipe connecting the tank and the pump and transferring the liquid stored in the tank to the pump using a weight of the liquid, and a discharging pipe that is connected to the main pipe at a lowest position of the main pipe at one end, is opened to the atmosphere at the other end, and vaporizes and discharges the liquid in the tank and the main pipe to the outside. The discharging pipe is formed so that, after the liquid in the tank and the main pipe is fully discharged, a liquid pool that separates a space on the atmosphere side and a space on the main pipe side of the discharging pipe is temporarily produced in the discharging pipe.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: May 3, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Toshihide Yoshida, Yukio Minami, Tsutomu Shinohara
  • Publication number: 20220082176
    Abstract: A valve device with which a flow rate can be adjusted precisely includes: an operating member for operating a diaphragm provided in such a way as to be capable of moving between a closed position in which the diaphragm closes a flow path and an open position in which the diaphragm opens the flow path; a main actuator for moving the operating member to the open position or the closed position in response to the pressure of a supplied driving fluid; an adjustment actuator for adjusting the position of the operating member positioned in the open position; and a position detecting mechanism for detecting displacement of the operating member with respect to a valve body.
    Type: Application
    Filed: January 23, 2020
    Publication date: March 17, 2022
    Applicant: FUJIKIN INCORPORATED
    Inventors: Ryutaro TANNO, Toshihide YOSHIDA, Daihi TSUCHIGUCHI, Yuya SUZUKI, Kenta KONDO, Tomohiro NAKATA, Tsutomu SHINOHARA, Masahiko TAKIMOTO
  • Patent number: 11242934
    Abstract: Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.
    Type: Grant
    Filed: March 9, 2018
    Date of Patent: February 8, 2022
    Assignee: FUJIKIN INCORPORATED
    Inventors: Kenta Kondo, Toshihide Yoshida, Masahiko Takimoto, Tsutomu Shinohara, Tomohiro Nakata, Takeru Miura, Masahiko Nakazawa
  • Publication number: 20210372532
    Abstract: A valve device includes: a body in which an in-flow path and an out-flow path are formed; a valve element that is configured to open and close the in-flow path and the out-flow path; a stem that is configured to move closer to and away from the body in order to cause the valve element to allow and block communication between the in-flow path and the out-flow path; a stroke adjustment portion that is configured to adjust an amount of stroke of the stem; and a displacement sensor that is configured to detect displacement of the stem.
    Type: Application
    Filed: August 18, 2021
    Publication date: December 2, 2021
    Inventors: Ryutaro TANNO, Tomohiro NAKATA, Toshihide YOSHIDA, Kenta KONDO, Yuya SUZUKI, Tsutomu SHINOHARA
  • Patent number: 11187346
    Abstract: A control device for a valve device can detect open/close state of the valve device without using limit switches. The valve device includes a diaphragm for opening and closing a flow path for flowing a fluid, a coil spring for biasing the diaphragm in the closing direction of flow path, a main actuator for driving it against the biasing force of the coil spring, and an adjusting actuator using a piezoelectric element for adjusting the opening degree of the flow path determined by the diaphragm. The controller detects the open/close state of flow path based on the voltage generated by the piezoelectric element of the adjusting actuator, and controls valve device using the detection signal.
    Type: Grant
    Filed: November 12, 2018
    Date of Patent: November 30, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Masahiko Takimoto, Toshihide Yoshida, Kenta Kondo, Ryousuke Dohi, Kouji Nishino
  • Patent number: 11098819
    Abstract: A valve device that greatly reduces man-hours for flow adjustment includes a valve body that defines a flow path, a valve element provided so as to be capable of opening and closing the flow path of the valve body, an operation member that operates the valve element and is moveably provided between a closed position where the valve element closes the flow path and an open position where the valve element opens the flow path, set in advance, in opening and closing directions that allow the valve element to open and close the flow path, a main actuator that moves the operation member in the opening direction, and a piezoelectric actuator for adjusting a position of the operation member positioned in the open position.
    Type: Grant
    Filed: November 2, 2017
    Date of Patent: August 24, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Toshiyuki Inada, Takashi Funakoshi
  • Patent number: 11022224
    Abstract: A valve device includes a valve body that defines flow paths, a diaphragm provided so as to be capable of opening and closing the flow paths, an operation member provided so as to be capable of moving in opening and closing directions that open and close the flow paths by operating the diaphragm, a main actuator that applies a driving force corresponding to an operating pressure applied in the opening direction or the closing direction of the opening and closing directions with respect to the operation member, a switching mechanism capable of selectively switching a position of the operation member that regulates a degree of opening of the flow paths between a first open position and a second open position in accordance with a magnitude of the operating pressure, and regulating mechanisms capable of independently regulating the first open position and the second open position.
    Type: Grant
    Filed: November 2, 2017
    Date of Patent: June 1, 2021
    Assignee: FUJIKIN INCORPORATED
    Inventors: Toshihide Yoshida, Tomohiro Nakata, Tsutomu Shinohara, Toshiyuki Inada, Takashi Funakoshi, Hidenobu Sato, Tomoko Yuhara
  • Publication number: 20210125840
    Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies a fluid in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied fluid stored in the tank toward the processing chamber, and a heating means provided to a flow path communicating with a discharge side of the pump and for partially changing the liquid in the flow path to a supercritical fluid.
    Type: Application
    Filed: July 31, 2018
    Publication date: April 29, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshihide YOSHIDA, Yukio MINAMI, Tsutomu SHINOHARA
  • Publication number: 20210125839
    Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies carbon dioxide in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied carbon dioxide stored in the tank toward the processing chamber, and a damper part that is provided to a flow path communicating with a discharge side of the pump and suppresses periodic pressure fluctuations of the liquid discharged from the pump. The damper part includes a spiral tube formed into a spiral shape that is fixed at both end portions in predetermined positions, and allows the liquid discharged from the pump to flow therethrough.
    Type: Application
    Filed: July 31, 2018
    Publication date: April 29, 2021
    Applicant: FUJIKIN INCORPORATED
    Inventors: Toshihide YOSHIDA, Yukio MINAMI, Tsutomu SHINOHARA
  • Publication number: 20200393051
    Abstract: Provided is a valve device which can precisely adjust the flow rate while ensuring the flow rate of the fluid. A valve device includes a main actuator which receives a pressure of a supplied drive fluid and moves an operating member to an open position or closed position; an adjusting actuator arranged to receive at least a part of a force generated by the main actuator and for adjusting the position of the operating member positioned at the open position; and a pressure regulator provided in a feed path of the drive fluid to the main actuator and for regulating the pressure of the supplied drive fluid to suppress fluctuation of the pressure of the drive fluid supplied to the main actuator.
    Type: Application
    Filed: March 9, 2018
    Publication date: December 17, 2020
    Applicant: FUJIKIN INCORPORATED
    Inventors: Kenta KONDO, Toshihide YOSHIDA, Masahiko TAKIMOTO, Tsutomu SHINOHARA, Tomohiro NAKATA, Takeru MIURA, Masahiko NAKAZAWA