Patents by Inventor Toshihiko Iijima
Toshihiko Iijima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10108162Abstract: A manufacturing process system includes: a plurality of processing devices which processes workpieces, with respective equipment associated with the plurality of processing devices; a transfer device which transfers the workpieces to the plurality of processing devices; a host computer which performs creating a transfer plan including information of timings at which the workpieces are carried in and out by the transfer device and acquiring an operation schedule including information of maintenance time from the plurality of processing devices; and a processing device group controller which performs acquiring the transfer plan and the operation schedule from the host computer, comparing the transfer plan and the operation schedule of each processing device, specifying the last process before maintenance for each processing device, detecting the end timing of the specified process, and instructing each processing device to be switched to an idle state at the end timing along with the associated equipment.Type: GrantFiled: May 22, 2014Date of Patent: October 23, 2018Assignee: TOKYO ELECTRON LIMITEDInventors: Taku Mizutani, Ichiro Namioka, Toshihiko Iijima, Shigenori Todate, Takahiro Ito
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Patent number: 10012980Abstract: There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.Type: GrantFiled: June 12, 2014Date of Patent: July 3, 2018Assignee: TOKYO ELECTRON LIMITEDInventors: Taku Mizutani, Ichiro Namioka, Toshihiko Iijima, Shigenori Todate
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Processing instructing device, processing instructing method, computer program and processing device
Patent number: 9696711Abstract: A processing indicating device to improve the efficiency of processing on an object. The device includes a first communication unit which communicates information with a plurality of processing devices for processing the object and a second communication unit which communicates information with a conveyance controlling device controlling conveying of the object to the plurality of processing devices. An arrival time predicting unit predicts on the basis of information received by the second communication unit, the time when the conveying device arrives at one of the processing devices. In addition, a finish time predicting unit receives information and predicts the time when the processing on the object in the one processing device finishes. A processing indicating unit causes processing control information that orders the execution of device state improvement treatment to be transmitted to the one processing device on the basis of the predicted respective times.Type: GrantFiled: July 12, 2012Date of Patent: July 4, 2017Assignee: TOKYO ELECTRON LIMITEDInventors: Teruo Asakawa, Hirofumi Yamaguchi, Supika Mashiro, Toshihiko Iijima, Hirokazu Narisawa, Kou Fujimura -
PROCESSING INSTRUCTING DEVICE, PROCESSING INSTRUCTING METHOD, COMPUTER PROGRAM AND PROCESSING DEVICE
Publication number: 20140358271Abstract: A processing indicating device to improve the efficiency of processing on an object. The device includes a first communication unit which communicates information with a plurality of processing devices for processing the object and a second communication unit which communicates information with a conveyance controlling device controlling conveying of the object to the plurality of processing devices. An arrival time predicting unit predicts on the basis of information received by the second communication unit, the time when the conveying device arrives at one of the processing devices. In addition, a finish time predicting unit receives information and predicts the time when the processing on the object in the one processing device finishes. A processing indicating unit causes processing control information that orders the execution of device state improvement treatment to be transmitted to the one processing device on the basis of the predicted respective times.Type: ApplicationFiled: July 12, 2012Publication date: December 4, 2014Applicant: TOKYO ELECTRON LIMITEDInventors: Teruo Asakawa, Hirofumi Yamaguchi, Supika Mashiro, Toshihiko Iijima, Hirokazu Narisawa, Kou Fujimura -
Patent number: 8866503Abstract: A method for correcting inclination of a wafer chuck includes obtaining in advance a correction amount for each of the semiconductor chips which corrects the inclination of the wafer chuck in the case of applying a contact load to at least each one of the semiconductor chips and storing each of the correction amounts in a data storage unit; calculating a total correction amount for correcting the inclination of the wafer chuck by calculating the correction amount of each of the semiconductor chips bringing into contact with the probes when the semiconductor wafer comes into electrical contact with the probes and adding the calculated correction amounts; and correcting the inclination of the wafer chuck based on the total correction amount.Type: GrantFiled: March 25, 2011Date of Patent: October 21, 2014Assignee: Tokyo Electron LimitedInventors: Kazunari Ishii, Toshihiko Iijima, Shuji Akiyama
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Publication number: 20140297017Abstract: There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.Type: ApplicationFiled: June 12, 2014Publication date: October 2, 2014Inventors: Taku MIZUTANI, Ichiro NAMIOKA, Toshihiko IIJIMA, Shigenori TODATE
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Publication number: 20140257546Abstract: A processing device group controller includes: a storage unit which stores an operation schedule including information of maintenance time for a plurality of processing devices for processing workpieces, with respective equipment associated with the plurality of processing devices, and a transfer plan including information of timings at which the workpieces are carried in and out of the plurality of processing devices; a detecting unit which performs a step of comparing the transfer plan and the operation schedule of each processing device, a step of specifying the last process before maintenance for each processing device, and a step of detecting the end timing of the specified process; and an instruction unit which instructs each processing device to be switched to an idle state at the end timing along with the associated equipment.Type: ApplicationFiled: May 22, 2014Publication date: September 11, 2014Applicant: TOKYO ELECTRON LIMITEDInventors: Taku MIZUTANI, Ichiro NAMIOKA, Toshihiko IIJIMA, Shigenori TODATE, Takahiro ITO
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Patent number: 8319510Abstract: Disclosed is a pre-alignment method and a computer-readable medium storing a pre-alignment program capable of reducing pre-alignment time and transfer time of a semiconductor wafer.Type: GrantFiled: June 17, 2010Date of Patent: November 27, 2012Assignee: Tokyo Electron LimitedInventors: Kazuhito Ogino, Toshihiko Iijima, Kaori Arai
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Patent number: 8121723Abstract: A substrate transfer system includes a substrate storing apparatus for storing therein one or more substrates; at least one substrate processing apparatus for performing a predetermined processing on the substrate; and a substrate transfer apparatus for transferring the substrate by moving between the substrate storing apparatus and the substrate processing apparatus, the substrate transfer apparatus including at least one substrate transfer unit for supporting the substrate, unloading the substrate from the substrate storing apparatus or the substrate processing apparatus, and loading the substrate into the substrate storing apparatus of the substrate processing apparatus. The substrate transfer apparatus moves while supporting the substrate by the substrate transfer unit.Type: GrantFiled: September 21, 2006Date of Patent: February 21, 2012Assignee: Tokyo Electron LimitedInventors: Toshihiko Iijima, Shinya Shimizu
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Publication number: 20110234247Abstract: A method for correcting inclination of a wafer chuck includes obtaining in advance a correction amount for each of the semiconductor chips which corrects the inclination of the wafer chuck in the case of applying a contact load to at least each one of the semiconductor chips and storing each of the correction amounts in a data storage unit; calculating a total correction amount for correcting the inclination of the wafer chuck by calculating the correction amount of each of the semiconductor chips bringing into contact with the probes when the semiconductor wafer comes into electrical contact with the probes and adding the calculated correction amounts; and correcting the inclination of the wafer chuck based on the total correction amount.Type: ApplicationFiled: March 25, 2011Publication date: September 29, 2011Applicant: TOKYO ELECTRON LIMITEDInventors: Kazunari ISHII, Toshihiko Iijima, Shuji Akiyama
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Publication number: 20100321052Abstract: Disclosed is a pre-alignment method and a computer-readable medium storing a pre-alignment program capable of reducing pre-alignment time and transfer time of a semiconductor wafer.Type: ApplicationFiled: June 17, 2010Publication date: December 23, 2010Applicant: TOKYO ELECTRON LIMITEDInventors: Kazuhito OGINO, Toshihiko IIJIMA, Kaori ARAI
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Patent number: 7826918Abstract: A transfer method employs a transfer system including a semiconductor handling device and an automatic transfer device. The semiconductor handling device includes a first transfer mechanism and a first optically coupled parallel I/O communications interface. The automatic transfer device includes a second transfer mechanism and a second optically coupled parallel I/O communications interface. The transfer method includes a successive transfer notifying step wherein the automatic transfer device and the semiconductor handling device notify each other that a successive transfer is possible via an optical communications between the first and the second optically coupled parallel I/O communications interface in case where a plurality of objects to be processed are able to be successively transferred one by one between the first and the second transfer mechanism; and a successive transfer step wherein the objects are transferred one by one between the first and the second transfer mechanism.Type: GrantFiled: March 15, 2006Date of Patent: November 2, 2010Assignee: Tokyo Electron LimitedInventors: Toshihiko Iijima, Shinya Shimizu, Kaori Ishihara
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Patent number: 7458469Abstract: In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40, serving as substrate mounting members. Each of the stage arms 41 has a disc-shaped wafer supporting portion 411 disposed at an approximately central portion of the main body 40 and a flat body 412 disposed in the main body 40 so as not to interfere with the moving paths of transfer arms 241 and 341. Formed at a connecting portion of the wafer supporting portion 411 and the body 412 are cutout portions 413 for preventing interference between the stage arms 41 and two prongs of leading end portions of the transfer arms 241 and 341 introduced into the main body 40.Type: GrantFiled: September 16, 2005Date of Patent: December 2, 2008Assignee: Tokyo Electron LimitedInventors: Hiroki Hosaka, Toshihiko Iijima, Shinya Shimizu
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Patent number: 7457680Abstract: The present invention relates to conveyance method for transporting a plurality of unprocessed/processed objects between an automatic transporting device (AGV) and a semiconductor manufacturing device (prober). The prober has a load port to/from which the objects are delivered from/to the AGV. The method comprises the steps of: making a communication between the AGV and the prober to decide respective timings of deliveries of the objects to/from the load port; and transporting the objects between the AGV and the prober via the load port, with the timings of the deliveries of the objects to/from the load port shifted from each other by using a holding site for provisionally holding the object. The holding site is at least one of components of the AGV and the prober other than the load port.Type: GrantFiled: October 18, 2006Date of Patent: November 25, 2008Assignee: Tokyo Electron LimitedInventors: Shuji Akiyama, Toshihiko Iijima, Hiroki Hosaka
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Patent number: 7283890Abstract: There is a jump in the number of devices formed on a single wafer, and it takes a lot of time to inspect a single wafer. In addition, if wafers are inspected every lot, detected wafers remain in staying in a prober until the inspection of all of the wafers is completed. Therefore, the time required to transfer the wafers of each lot to the subsequent step is delayed. As a result, it is difficult to shorten TAT (Turn-Around-Time), and it is difficult to flexibly operate the prober. A transfer system E according to the present invention includes: a host computer 1; a plurality of probers 2 under the control of the host computer 1; a plurality of RGVs 4 for delivering a wafer W to each of the probers 2, one by one, at its request; and a transfer operating unit 5, associated with the host computer, for operating the RGVs 4.Type: GrantFiled: December 27, 2002Date of Patent: October 16, 2007Assignee: Tokyo Electron LimitedInventors: Toshihiko Iijima, Shuji Akiyama, Hiroki Hosaka, Takashi Nakao
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Publication number: 20070150085Abstract: The present invention relates to conveyance method for transporting a plurality of unprocessed/processed objects between an automatic transporting device (AGV) and a semiconductor manufacturing device (prober). The prober has a load port to/from which the objects are delivered from/to the AGV. The method comprises the steps of: making a communication between the AGV and the prober to decide respective timings of deliveries of the objects to/from the load port; and transporting the objects between the AGV and the prober via the load port, with the timings of the deliveries of the objects to/from the load port shifted from each other by using a holding site for provisionally holding the object. The holding site is at least one of components of the AGV and the prober other than the load port.Type: ApplicationFiled: October 18, 2006Publication date: June 28, 2007Inventors: Shuji Akiyama, Toshihiko Iijima, Hiroki Hosaka
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Publication number: 20070062446Abstract: A substrate transfer system includes a substrate storing apparatus for storing therein one or more substrates; at least one substrate processing apparatus for performing a predetermined processing on the substrate; and a substrate transfer apparatus for transferring the substrate by moving between the substrate storing apparatus and the substrate processing apparatus, the substrate transfer apparatus including at least one substrate transfer unit for supporting the substrate, unloading the substrate from the substrate storing apparatus or the substrate processing apparatus, and loading the substrate into the substrate storing apparatus of the substrate processing apparatus. The substrate transfer apparatus moves while supporting the substrate by the substrate transfer unit.Type: ApplicationFiled: September 21, 2006Publication date: March 22, 2007Applicant: TOKYO ELECTON LIMITEDInventors: Toshihiko Iijima, Shinya Shimizu
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Publication number: 20070031222Abstract: In a substrate transfer apparatus, an adaptor unit 25 includes a box-shaped main body 40 having three open sides; and a plurality of stage arms 41 disposed in the main body 40, serving as substrate mounting members. Each of the stage arms 41 has a disc-shaped wafer supporting portion 411 disposed at an approximately central portion of the main body 40 and a flat body 412 disposed in the main body 40 so as not to interfere with the moving paths of transfer arms 241 and 341. Formed at a connecting portion of the wafer supporting portion 411 and the body 412 are cutout portions 413 for preventing interference between the stage arms 41 and two prongs of leading end portions of the transfer arms 241 and 341 introduced into the main body 40.Type: ApplicationFiled: September 16, 2005Publication date: February 8, 2007Applicant: TOKYO ELECTRON LIMITEDInventors: Hiroki Hosaka, Toshihiko Iijima, Shinya Shimizu
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Publication number: 20060152211Abstract: A transfer method employs a transfer system including a semiconductor handling device and an automatic transfer device. The semiconductor handling device includes a first transfer mechanism and a first optically coupled parallel I/O communications interface. The automatic transfer device includes a second transfer mechanism and a second optically coupled parallel I/O communications interface. The transfer method includes a successive transfer notifying step wherein the automatic transfer device and the semiconductor handling device notify each other that a successive transfer is possible via an optical communications between the first and the second optically coupled parallel I/O communications interface in case where a plurality of objects to be processed are able to be successively transferred one by one between the first and the second transfer mechanism; and a successive transfer step wherein the objects are transferred one by one between the first and the second transfer mechanism.Type: ApplicationFiled: March 15, 2006Publication date: July 13, 2006Applicant: TOKYO ELECTRON LIMITEDInventors: Toshihiko Iijima, Shinya Shimizu, Kaori Ishihara
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Publication number: 20050209725Abstract: A conveyance system E for wafers W includes a host computer 1 for carrying out the management of the production of semiconductor devices, a plurality of probers 2 for inspecting the electric characteristics of the wafers W under the administration of the host computer 1, an AGV 3 for automatically transporting the wafers W in block of a carrier in order to deliver the wafers W one by one to these probers 2 according to respective demands and an AGV controller 4 for controlling the operation of the AGV 3 under the administration of the host computer 1.Type: ApplicationFiled: May 16, 2005Publication date: September 22, 2005Inventors: Shuji Akiyama, Toshihiko Iijima, Hiroki Hosaka