Patents by Inventor Toshihiko Ishihara
Toshihiko Ishihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 6352563Abstract: A printed cloth in which a dye is deposited in dots on the cloth to form a desired printed pattern. Said dot deposition is formed in a length of 0.05 to 0.3 mm to the longitudinal direction of the fiber in single fiber unit of the yarn constituting said cloth. A fine printed pattern is deposited clearly in good reproducibility. The printed pattern can be formed by using the dyes of the three primary colors or of the three primary colors and black color. It is preferred that Dyes I , II and III having a perceived chromaticity index (a) and (b) defined in the color range [CIE 1976 (L, a, b) space] on the cloth within the following range are used as said dyes of three primary colors and DyeIV is used as said black dye.Type: GrantFiled: February 22, 2000Date of Patent: March 5, 2002Assignee: Kanebo, Ltd.Inventors: Kazuo Kusaki, Toshikazu Fuse, Tohru Morita, Toshihiko Ishihara, Kazuyoshi Morimoto, Kazuo Iwata, Michiyo Nishimura
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Patent number: 6330261Abstract: The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz with a full width half, maximum bandwidth of about 0.6 pm or less. Replaceable modules include a laser chamber, a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control.Type: GrantFiled: March 17, 1999Date of Patent: December 11, 2001Assignee: Cymer, Inc.Inventors: Toshihiko Ishihara, Thomas P. Duffey, John T. Melchior, Herve A. Besaucele, Richard G. Morton, Richard M. Ness, Peter C. Newman, William N. Partlo, Daniel A. Rothweil, Richard L. Sandstrom
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Patent number: 6188710Abstract: The present invention provides a very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. Very small quantities of a stablizing additive consisting of oxygen or a heavy noble gas (xenon or radon for KrF lasers, or krypton, xenon or radon for ArF lasers), are added to the gas mixture. Tests performed show substantial improvements in energy stability with the addition of about 30 ppm of xenon to a KrF laser. Tests show improved performance for the ArF lasers with the addition of about 6-10 ppm of Xe or 40 ppm of Kr. In a preferred embodiment very narrow bandwidth is achieved on a KrF laser by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line-narrowing module were replaced with calcium fluoride prisms.Type: GrantFiled: July 27, 1999Date of Patent: February 13, 2001Assignee: Cymer, Inc.Inventors: Herve A. Besaucele, Toshihiko Ishihara, Thomas Hofmann
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Patent number: 6051036Abstract: A printed cloth in which a dye is deposited in dots on the cloth to form a desired printed pattern. Said dot deposition is formed in a length of 0.05 to 0.3 mm to the longitudinal direction of the fiber in single fiber unit of the yarn constituting said cloth. A fine printed pattern is deposited clearly in good reproducibility. The printed pattern can be formed by using the dyes of the three primary colors or of the three primary colors and black color. It is preferred that Dyes I, II and III having a perceived chromaticity index (a) and (b) defined in the color range [CIE 1976 (L, a, b) space] on the cloth within the following range are used as said dyes of three primary colors and DyeIV is used as said black dye.______________________________________ I Yellow: (a) -20.about.0 (b) 50.about.90 II Red: (a) 50.about.70 (b) 0.about.20 III Blue: (a) -50.about.-1 (b) -50.about.-20 IV Black: (a) -6.about.6 (b) -6.about.Type: GrantFiled: June 3, 1997Date of Patent: April 18, 2000Assignee: Kanebo, Ltd.Inventors: Kazuo Kusaki, Toshikazu Fuse, Tohru Morita, Toshihiko Ishihara, Kazuyoshi Morimoto, Kazuo Iwata, Michiyo Nishimura
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Patent number: 6034978Abstract: A gas discharge laser with fast response gas temperature control to maintain laser gas temperature within desired limits during burst mode operation. Preferred embodiments include a passive temperature stabilizer having fins with surface areas exposed to flowing laser gas at least equal to the surface area of the cooling fins of a laser gas heat exchanger. Preferred embodiments utilize heating elements and coolant flow control to regulate laser gas temperatures using processors programmed to anticipate idle periods.Type: GrantFiled: May 12, 1999Date of Patent: March 7, 2000Assignee: Cymer, Inc.Inventors: Richard C. Ujazdowski, Robert A. Shannon, Dmitry Berger, William N. Partlo, Tom A. Watson, Paul S. Thompson, Toshihiko Ishihara, Carl E. Tedesco, II, Donald G. Larson, Steven M. Harrington, Richard G. Morton, James H. Azzola, I. Roger Oliver, Thomas P. Duffey, Igor V. Fomenkov
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Patent number: 6018537Abstract: The present invention provides a reliable modular production quality excimer laser capable of producing 10 mJ laser pulses in the range of 1000 Hz to 2000 Hz or greater. Replaceable modules include a laser chamber; a pulse power system comprised of three modules; an optical resonator comprised of a line narrowing module and an output coupler module; a wavemeter module, an electrical control module, a cooling water module and a gas control module. Important improvements have been provided in the pulse power unit to produce faster rise time and improved pulse energy control. These improvements include an increased capacity high voltage power supply with a voltage bleed-down circuit for precise voltage trimming, an improved commutation module that generates a high voltage pulse from the capacitors charged by the high voltage power supply and amplifies the pulse voltage 23 times with a very fast voltage transformer having a secondary winding consisting of a single four-segment stainless steel rod.Type: GrantFiled: March 19, 1999Date of Patent: January 25, 2000Assignee: Cymer, Inc.Inventors: Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, Thomas P. Duffey, John T. Melchior, Herve A. Besaucele, Richard G. Morton, Richard M. Ness, Peter C. Newman, William N. Partlo, Daniel A. Rothweil, Richard L. Sandstrom
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Patent number: 6014398Abstract: The present invention provides a very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. Very small quantities of a stablizing additive consisting of oxygen or a heavy noble gas (xenon or radon for KrF lasers, or krypton, xenon or radon for ArF lasers), are added to the gas mixture. Tests performed show substantial improvements in energy stability with the addition of about 30 ppm of xenon to a KrF laser. Tests show improved performance for the ArF lasers with the addition of about 6-10 ppm of Xe or 40 ppm of Kr. In a preferred embodiment very narrow bandwidth is achieved on a KrF laser by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line-narrowing module were replaced with calcium fluoride prisms.Type: GrantFiled: May 20, 1998Date of Patent: January 11, 2000Assignee: Cymer, Inc.Inventors: Thomas Hofmann, Toshihiko Ishihara, Palash P. Das, Alexander I. Ershov
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Patent number: 6014397Abstract: A coated ceramic insulator in a laser chamber that is exposed to a gaseous environment where impurities in the ceramic insulator are prevented from detrimentally contaminating the laser chamber by a high-purity insulating coating. The insulating coating prevents chemical interactions between the ceramic insulator and the gaseous environment. In particular, the coating prevents contamination, by impurities in the ceramic insulator, of the lasing gas.Type: GrantFiled: June 2, 1998Date of Patent: January 11, 2000Assignee: Cymer, Inc.Inventors: Toshihiko Ishihara, Richard G. Morton
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Patent number: 5982800Abstract: A very narrow band pulse excimer laser capable of producing pulses at a rate in the range of about 500 to 2000 Hz with enhanced energy dose control and reproducibility. A prior art burst mode "slug effect" occuring at one gas circulation time after the beginning of a burst of pulses is eliminated by the addition of a minute quantity of oxygen. In a preferred embodiment very narrow bandwidth is achieved by reducing fluorine partial pressure to less than 0.10 percent and by increasing the reflectance of the output coupler to greater than 25 percent. In a preferred embodiment, prior art fused silica beam expansion prisms used in the prior art line narrowing module were replaced with calcium fluoride prisms.Type: GrantFiled: October 10, 1997Date of Patent: November 9, 1999Assignee: Cymer, Inc.Inventors: Toshihiko Ishihara, Thomas Hofmann, Palash P. Das, Alexander I. Ershov
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Patent number: 5345863Abstract: According to the invention, there is provided a continuous web printing apparatus comprising transport means including an endless belt having a sticky surface, a plurality of support rollers having said endless belt entrained therearound and a drive means for rotating said support rollers to move said endless belt, a press means for pressing a continuous web, such as a fabric or transfer sheet, against said endless belt to stick said continuous web to said endless belt, an ink jet head disposed between said support rollers in opposed relation to the surface of said continuous web stuck to said endless belt, an abutment adapted to abut against said endless belt, said abutment being opposed to said ink jet head with the continuous web and said endless belt interposed therebetween, head gap adjusting means for moving at least either of said ink jet head or said abutment in a direction in which the two are opposed to each other, and recovering means for peeling said continuous web, which has passed by said ink jeType: GrantFiled: July 26, 1993Date of Patent: September 13, 1994Assignees: Kanebo Ltd., Tosmin Kogyo Co., Ltd.Inventors: Shuichi Kurata, Shiro Ichinose, Kazuo Kusaki, Toshihiko Ishihara, Naozumi Ueno, Toru Morita