Patents by Inventor Toshihiko Miyajima

Toshihiko Miyajima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200033308
    Abstract: Provided is sensor built-in filter structure arranged in a wafer accommodation container, comprising: a first filter; a second filter arranged closer to a wafer accommodation chamber of the wafer accommodation container than to the first filter; and a gas detection sensor arranged between the first filter and the second filter to detect a state of a gas.
    Type: Application
    Filed: July 29, 2019
    Publication date: January 30, 2020
    Applicant: TDK CORPORATION
    Inventors: Tatsuhiro KOTSUGAI, Toshihiko MIYAJIMA, Takeshi KAGAYA
  • Publication number: 20200035530
    Abstract: Provided is a load port apparatus including: a mounting unit on which a pod housing a housed object is mounted; a frame portion provided to stand adjacent to the mounting unit and having a frame opening to which a main opening of the pod is connected; a door engageable with a lid for the main opening of the pod for opening and closing the frame opening and the main opening; a door drive mechanism which drives the door; an inner gas exhaust unit provided below an inner side of the frame opening to exhaust a gas from an inside of a mini environment connected to the pod through the main opening and the frame opening; and a corrosive gas detection sensor arranged between the frame opening and the inner gas exhaust unit or in an exhaust flow path of the inner gas exhaust unit.
    Type: Application
    Filed: July 29, 2019
    Publication date: January 30, 2020
    Applicant: TDK CORPORATION
    Inventors: Tatsuhiro KOTSUGAI, Toshihiko MIYAJIMA, Takeshi KAGAYA
  • Patent number: 10276415
    Abstract: A gas purge unit introduces a cleaning gas into a container with a main opening there through for taking a housed object in and out. The gas purge unit includes a blowout member and a supply portion. The blowout member with a cylindrical shape has an elongated hollow extending in a longitudinal direction and a discharge portion of a porous body connecting between the elongated hollow and the outside to discharge the cleaning gas. The supply portion is connected to the elongated hollow through a connection hole formed at one end of the blowout member to supply the cleaning gas to the elongated hollow.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: April 30, 2019
    Assignee: TDK CORPORATION
    Inventors: Takuya Kudo, Toshihiko Miyajima
  • Publication number: 20170025297
    Abstract: A gas purge unit introduces a cleaning gas into a container with a main opening there through for taking a housed object in and out. The gas purge unit includes a blowout member and a supply portion. The blowout member with a cylindrical shape has an elongated hollow extending in a longitudinal direction and a discharge portion of a porous body connecting between the elongated hollow and the outside to discharge the cleaning gas. The supply portion is connected to the elongated hollow through a connection hole formed at one end of the blowout member to supply the cleaning gas to the elongated hollow.
    Type: Application
    Filed: March 31, 2016
    Publication date: January 26, 2017
    Inventors: Takuya KUDO, Toshihiko MIYAJIMA
  • Patent number: 9543177
    Abstract: An object is to prevent the partial pressure of oxidative gas over time in an FOUP mounted on an FIMS system and left open. A surface purge unit is provided on a side opposite to the opening of the FOUP in such a way that wafers supported in the FOUP is located between the opening and the surface purge unit. The surface purge unit ejects inert gas from a plurality of vent holes provided in its surface toward the opening. Uniform purging or replacement of the interior of the FOUP with inert gas can be achieved by creating inert gas flow from an inert gas supply part extending over a surface in the direction from the interior of the FOUP toward the opening along the wafer surface.
    Type: Grant
    Filed: February 27, 2015
    Date of Patent: January 10, 2017
    Assignee: TDK Corporation
    Inventors: Toshihiko Miyajima, Tadamasa Iwamoto, Jun Emoto
  • Patent number: 9536765
    Abstract: A load port unit can prevent or control leakage of inert gas from an EFEM system to the outside. The load port unit used in the EFEM system is provided with an air inlet that opens on a side facing a mini-environment between the upper end of an opener driving unit and the lower end of the pod. The width of the air inlet opening is larger than the width of the opening of the pod. With this arrangement, surplus gas is sucked from the pod when gas purging is performed on the pod.
    Type: Grant
    Filed: May 30, 2014
    Date of Patent: January 3, 2017
    Assignee: TDK Corporation
    Inventors: Tadamasa Iwamoto, Jun Emoto, Toshihiko Miyajima, Hidenori Tsutsui
  • Publication number: 20150311100
    Abstract: To suppress dust or the like from being drawn into a delivery zone when opening a lid of a pod in an EFEM system, a load port unit in the EFEM system includes a sealing member arranged on an external space side of a base, which defines a delivery zone and has an opening portion formed therein, and a sealing member arranged on the delivery zone side. A surface of a door that closes the opening portion on an external opening side protrudes toward the external space side with respect to an imaginary plane defined by a sealing region of the sealing member on the external opening side.
    Type: Application
    Filed: April 23, 2014
    Publication date: October 29, 2015
    Applicant: TDK Corporation
    Inventors: Toshihiko MIYAJIMA, Hiroshi IGARASHI
  • Patent number: 9153468
    Abstract: To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: October 6, 2015
    Assignee: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima
  • Publication number: 20150243538
    Abstract: An object is to prevent the partial pressure of oxidative gas over time in an FOUP mounted on an FIMS system and left open. A surface purge unit is provided on a side opposite to the opening of the FOUP in such a way that wafers supported in the FOUP is located between the opening and the surface purge unit. The surface purge unit ejects inert gas from a plurality of vent holes provided in its surface toward the opening. Uniform purging or replacement of the interior of the FOUP with inert gas can be achieved by creating inert gas flow from an inert gas supply part extending over a surface in the direction from the interior of the FOUP toward the opening along the wafer surface.
    Type: Application
    Filed: February 27, 2015
    Publication date: August 27, 2015
    Applicant: TDK Corporation
    Inventors: Toshihiko MIYAJIMA, Tadamasa IWAMOTO, Jun EMOTO
  • Patent number: 8978718
    Abstract: To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to the purge nozzle and the curtain nozzle, the gas being supplied from the gas supply pipe to the purge nozzle in a direction orthogonal to an extending direction of the gas supply pipe; and a conductance adjusting unit arranged at an end portion of the gas supply pipe, for generating a pressure loss in a gas flow in a configuration in which the gas is supplied to the curtain nozzle at the end portion of the gas supply pipe.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: March 17, 2015
    Assignee: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima
  • Patent number: 8979463
    Abstract: To prevent an overload from being imposed on a door drive mechanism when driving a door increased in weight due to upsizing so that reproducibility of a stop position of the door can be ensured, provided is a load port apparatus in which the door drive mechanism for driving the door in a direction perpendicular to an opening-portion forming plane is constituted by: a rotary cylinder capable of pivoting a cam follower from an angle of 0° to an angle of 180°; and a slider including a cam groove capable of housing the cam follower within a plane perpendicular to a rotational axis of the rotary cylinder, the cam groove extending in a vertical direction, and in which the door is supported by the slider.
    Type: Grant
    Filed: September 9, 2011
    Date of Patent: March 17, 2015
    Assignee: TDK Corporation
    Inventors: Hiroshi Igarashi, Toshihiko Miyajima
  • Publication number: 20140363258
    Abstract: A load port unit can prevent or control leakage of inert gas from an EFEM system to the outside. The load port unit used in the EFEM system is provided with an air inlet that opens on a side facing a mini-environment between the upper end of an opener driving unit and the lower end of the pod. The width of the air inlet opening is larger than the width of the opening of the pod. With this arrangement, surplus gas is sucked from the pod when gas purging is performed on the pod.
    Type: Application
    Filed: May 30, 2014
    Publication date: December 11, 2014
    Applicant: TDK Corporation
    Inventors: Tadamasa Iwamoto, Jun Emoto, Toshihiko Miyajima, Hidenori Tsutsui
  • Patent number: 8876173
    Abstract: The substrate storage pod includes an engagement portion in an outer side surface of a lid of the pod, and an insertion slot through which the engagement portion can be accessed from an external space; the insertion slot is formed in a flange portion arranged around the periphery of an opening in the pod and into which the lid can be fitted, and a latch mechanism supported so as to be slidable in a direction parallel to a flange side wall in a pod main body-surface of the flange portion. An engaging portion of the latch mechanism reaches the engagement portion via the insertion slot. The engagement portion is switched between an engaged state and a non-engaged state in response to movement of the latch mechanism.
    Type: Grant
    Filed: March 7, 2011
    Date of Patent: November 4, 2014
    Assignee: TDK Corporation
    Inventors: Hiroshi Igarashi, Toshihiko Miyajima, Tsutomu Okabe
  • Publication number: 20140157722
    Abstract: The partial pressure of an oxidizing gas within a FOUP fixed to a FIMS system and placed in an open state is prevented from increasing with the lapse of time. To that end, a gas supply port is arranged in the bottom face of the FOUP to enable nitrogen supply into the FOUP through the gas supply port with a pod mounted on the FIMS system. A nitrogen supply system for supplying nitrogen with the FOUP mounted is controlled so as to make a nitrogen supply at such a low flow rate and pressure as to be able to prevent dust or the like having such sizes as to possibly cause problems in wiring lines to be formed on a wafer from being stirred up from the gas supply port or the like.
    Type: Application
    Filed: December 3, 2013
    Publication date: June 12, 2014
    Applicant: TDK Corporation
    Inventors: Tadamasa IWAMOTO, Jun Emoto, Toshihiko Miyajima
  • Patent number: 8657346
    Abstract: The FIMS system is for use with a pod composed of a lid having an engaged portion provided on the outer surface thereof and a pod body having a latch mechanism including an engagement portion that engages the engaged portion as it moves along a predetermined axis to fix the lid to the pod. The FIMS system has a latch mechanism drive means for driving the latch mechanism along a certain axis and an engagement portion position sensor that can generate a signal indicating whether the engagement portion is at an engagement position or non-engagement position when the latch mechanism drive means drives the latch mechanism. The latch mechanism drive means and the engagement portion position sensor are provided in the vicinity of a first opening portion of the FIMS system.
    Type: Grant
    Filed: November 24, 2009
    Date of Patent: February 25, 2014
    Assignee: TDK Corporation
    Inventors: Tsutomu Okabe, Toshihiko Miyajima, Hiroshi Igarashi
  • Patent number: 8562273
    Abstract: Provided is a load port apparatus having a structure capable of resisting against a moment generated at a time of driving of a door increased in weight owing to upsizing. A pair of rectangular main bases, which project perpendicularly to an attachment surface of the load port apparatus and elongated parallel to the attachment surface, are coupled to each other with a coupling shaft, and the structural body including those components is fixed to the attachment surface through intermediation of I-shaped plates capable of being held in close surface contact with the attachment surface. Mechanisms of a door drive mechanism, a placing table, and the like are arranged on an inner side between the pair of main bases of the structural body.
    Type: Grant
    Filed: August 18, 2011
    Date of Patent: October 22, 2013
    Assignee: TDK Corporation
    Inventors: Hiroshi Igarashi, Toshihiko Miyajima
  • Patent number: 8528947
    Abstract: In a pod used in an FIMS system, diffusion of dust particles or the like adhering on the lid of the pod to the interior of the system is reduced. An engaged portion is provided inside the outer surface of the lid of the pod, and a flange portion provided around a pod opening to which the lid can be fitted is provided with an insertion hole that allows access to the engaged portion from the exterior space. A latch mechanism is supported on the pod body side surface of the flange portion in such a way that the latch mechanism can slide along a direction parallel to the side wall of the flange. An engagement portion of the latch mechanism reaches the engaged portion through the insertion hole, and the state of the latch mechanism changes between an engaged state and a disengaged state with movement of the latch mechanism.
    Type: Grant
    Filed: June 25, 2009
    Date of Patent: September 10, 2013
    Assignee: TDK Corporation
    Inventors: Hiroshi Igarashi, Toshihiko Miyajima, Tsutomu Okabe
  • Patent number: 8522836
    Abstract: The substrate storage pod includes a pod case which includes a hollow inner space for storing a substrate, and an opening; a lid member which is capable of sealing the opening; an exhaust port for exhausting a replacement gas in the hollow inner space of the pod case; and an exhaust space which is defined in the hollow inner space so as to communicate to the exhaust port. The exhaust space is defined in the hollow inner space by a multi-hole partition member including multiple holes and by an inner surface of the pod case. In the substrate storage pod, back pressure on an exhaust side can be lowered, and hence dust in the pod can be collected to the exhaust side.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: September 3, 2013
    Assignee: TDK Corporation
    Inventors: Tsutomu Okabe, Toshihiko Miyajima
  • Publication number: 20130042945
    Abstract: To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer side of side edges of the opening portion; a curtain nozzle arranged above an upper edge of the opening portion; a gas supply pipe arranged in parallel to each purge nozzle, for supplying an inert gas to the purge nozzle and the curtain nozzle, the gas being supplied from the gas supply pipe to the purge nozzle in a direction orthogonal to an extending direction of the gas supply pipe; and a conductance adjusting unit arranged at an end portion of the gas supply pipe, for generating a pressure loss in a gas flow in a configuration in which the gas is supplied to the curtain nozzle at the end portion of the gas supply pipe.
    Type: Application
    Filed: August 14, 2012
    Publication date: February 21, 2013
    Applicant: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima
  • Publication number: 20130011223
    Abstract: To prevent an inert gas from stagnating in an internal space of a mount base of a load port apparatus, the load port apparatus includes: an outside air supply device for introducing an air from an external space, in which an operator works, into the internal space of the mount base; a casing surrounding a space in which a drive mechanism for a door is arranged; and a duct through which a gas inside the internal space of the casing is dischargeable.
    Type: Application
    Filed: July 3, 2012
    Publication date: January 10, 2013
    Applicant: TDK Corporation
    Inventors: Jun Emoto, Tadamasa Iwamoto, Toshihiko Miyajima