Patents by Inventor Toshimitsu Kawai

Toshimitsu Kawai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11448869
    Abstract: A wafer includes a substrate layer, a first mirror layer having a plurality of two-dimensionally arranged first mirror portions, and a second mirror layer having a plurality of two-dimensionally arranged second mirror portions. A plurality of Fabry-Perot interference filter portions are formed in an effective area, in each of the plurality of Fabry-Perot interference filter portions a gap is formed between the first mirror portion and the second mirror portion. A plurality of dummy filter portions are formed in a dummy area disposed along an outer edge of the substrate layer and surrounding the effective area, in each of the plurality of dummy filter portions an intermediate layer is provided between the first mirror portion and the second mirror portion. At least the second mirror portion is surrounded by the first groove in each of the plurality of Fabry-Perot interference filter portions and the plurality of dummy filter portions.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: September 20, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Toshimitsu Kawai, Katsumi Shibayama, Takashi Kasahara, Masaki Hirose, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11448553
    Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.
    Type: Grant
    Filed: March 3, 2017
    Date of Patent: September 20, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki Hirose, Katsumi Shibayama, Takashi Kasahara, Toshimitsu Kawai, Hiroki Oyama
  • Patent number: 11422059
    Abstract: An optical inspection device includes: a wafer support unit configured to support a wafer in which a plurality of Fabry-Perot interference filter portions are formed, each of the plurality of filter portions in which a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force, the wafer support unit configured to support the wafer such that a direction in which the first mirror portion and the second mirror portion face each other follows along a reference line; a light emission unit configured to emit light to be incident on each of the plurality of filter portions along the reference line; and a light detection unit configured to detect light transmitted through each of the plurality of filter portions along the reference line. The wafer support unit has a light passage region that allows light to pass along the reference line.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: August 23, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11294170
    Abstract: A method for removing a foreign substance according to an embodiment includes: a step of preparing a Fabry-Perot interference filter in which a gap is formed between a portion of a first laminate at least including a first mirror portion and a portion of a second laminate at least including a second mirror portion facing each other so that a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force; a step of detecting a foreign substance adhering to a surface of the second laminate; and a step of blowing air in which an airflow peak position is adjusted on the basis of a position of the detected foreign substance onto the surface of the second laminate and thereby removing the foreign substance from the surface of the second laminate.
    Type: Grant
    Filed: November 9, 2018
    Date of Patent: April 5, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki Hirose, Katsumi Shibayama, Takashi Kasahara, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Publication number: 20220026703
    Abstract: An optical filter device includes: a Fabry-Perot interference filter that includes: a first structural body having first and second surfaces; a second structural body having a third surface; a first mirror portion provided to the first structural body; a second mirror portion provided to the second structural body so as to face the first mirror portion via an air gap; a first driving electrode provided to the first structural body; a second driving electrode provided to the second structural body; first and third terminals electrically connected to the first driving electrode; and a second terminal electrically connected to the second driving electrode. A distance between the first driving electrode and the air gap is shorter than a distance between the second surface and the air gap. A resistance measurement unit is electrically connected to the first and third terminals and measures a resistance value of the first driving electrode.
    Type: Application
    Filed: September 30, 2019
    Publication date: January 27, 2022
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi KASAHARA, Katsumi SHIBAYAMA, Masaki HIROSE, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Publication number: 20210396579
    Abstract: A spectroscopic sensor includes a wiring substrate having a main surface, a light detector disposed on the main surface of the wiring substrate, a Fabry-Perot interference filter, a spacer which is provided on the main surface of the wiring substrate and supports the Fabry-Perot interference filter so that the Fabry-Perot interference filter and the light detector are separated from each other, and a stein connected to a ground potential. A second current path which has a smaller electric resistance than that of an arbitrary first current path which extends from the Fabry-Perot interference filter to the light detector via the spacer and the wiring substrate is formed between the Fabry-Perot interference filter and the stein.
    Type: Application
    Filed: August 23, 2019
    Publication date: December 23, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Hiroki OYAMA, Katsumi SHIBAYAMA, Takashi KASAHARA, Masaki HIROSE, Toshimitsu KAWAI, Yumi KURAMOTO
  • Publication number: 20210372854
    Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.
    Type: Application
    Filed: August 10, 2021
    Publication date: December 2, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki HIROSE, Katsumi SHIBAYAMA, Takashi KASAHARA, Toshimitsu KAWAI, Takehiko YASHIRO, Mitsushi MINENO, Shigeru SUZUKI
  • Publication number: 20210362351
    Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including: a substrate; a laminated structure that is provided on the substrate and that includes a main surface facing a side opposite to the substrate; and a thinned portion that is located outside the laminated structure when viewed in a direction intersecting the main surface and that is recessed to a side of the substrate with respect to the main surface, the method including: a first step of arranging the suction collet so as to face the main surface; a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step; and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
    Type: Application
    Filed: November 9, 2018
    Publication date: November 25, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki HIROSE, Katsumi SHIBAYAMA, Takashi KASAHARA, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Publication number: 20210364681
    Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
    Type: Application
    Filed: November 9, 2018
    Publication date: November 25, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki HIROSE, Katsumi SHIBAYAMA, Takashi KASAHARA, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Patent number: 11156500
    Abstract: Provided is a non-transitory computer-readable recording medium recording an optical measurement control program in a light detection device, the program causing a computer to execute a process of measuring light to be measured by acquiring an electric signal output from the light detector, the optical measurement control program causing the computer to function as: a voltage control unit controlling the potential difference generated between the pair of mirrors to gradually increase until the potential difference reaches a set potential difference corresponding to a wavelength of the light to be measured before the acquisition of the electric signal is started; and a signal acquisition unit acquiring the electric signal in a state where the voltage control unit allows the set potential difference to be generated between the pair of mirrors.
    Type: Grant
    Filed: April 24, 2018
    Date of Patent: October 26, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11118972
    Abstract: A light detection device includes a Fabry-Perot interference filter, a light detector, a spacer that has a placement surface on which a portion outside a light transmission region in a bottom surface of the interference filter is placed, and an adhesive member that adheres the interference filter and the spacer to each other. Elastic modulus of the adhesive member is smaller than elastic modulus of the spacer. At least a part of a lateral surface of the interference filter is located on the placement surface such that a part of the placement surface of the spacer is disposed outside the lateral surface. The adhesive member is disposed in a corner portion formed by the lateral surface of the interference filter and the part of the placement surface of the spacer and contacts each of the lateral surface and the part of the placement surface.
    Type: Grant
    Filed: April 19, 2016
    Date of Patent: September 14, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki Hirose, Katsumi Shibayama, Takashi Kasahara, Toshimitsu Kawai, Takehiko Yashiro, Mitsushi Mineno, Shigeru Suzuki
  • Patent number: 11054560
    Abstract: A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.
    Type: Grant
    Filed: June 27, 2017
    Date of Patent: July 6, 2021
    Assignee: HAMAMATSU PHOTONICS K.K
    Inventors: Toshimitsu Kawai, Katsumi Shibayama, Takashi Kasahara, Masaki Hirose, Hiroki Oyama, Yumi Teramachi
  • Patent number: 11041755
    Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first mirror layer having a plurality of first mirror portions, a sacrificial layer having a plurality of portions expected to be removed, and a second mirror layer having a plurality of second mirror portions on a first main surface of a wafer which includes parts corresponding to a plurality of two-dimensionally arranged substrates and is expected to be cut into the plurality of substrates along each of a plurality of lines; a removing step of simultaneously removing the plurality of two-dimensionally arranged portions expected to be removed from the sacrificial layer through etching after the Ruining step; and a cutting step of cutting the wafer into the plurality of substrates along each of the plurality of lines after the removing step.
    Type: Grant
    Filed: May 26, 2017
    Date of Patent: June 22, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 11035726
    Abstract: A light detection device includes a package including a window, a Fabry-Perot interference filter for transmitting light incident from the window in the package, and a light detector for detecting the light transmitted by the Fabry-Perot interference filter in the package. The Fabry-Perot interference filter includes: a substrate having a first surface on the window side and a second surface on the light detector side; a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror; and a lens unit integrally formed on the second surface side, the lens unit for condensing the light transmitted by the first mirror and the second mirror onto the light detector.
    Type: Grant
    Filed: February 26, 2018
    Date of Patent: June 15, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Publication number: 20210131870
    Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
    Type: Application
    Filed: December 18, 2020
    Publication date: May 6, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi KASAHARA, Katsumi SHIBAYAMA, Masaki HIROSE, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Publication number: 20210116297
    Abstract: A light detection device includes a package including a window, a Fabry-Perot interference filter for transmitting light incident from the window in the package, and a light detector for detecting the light transmitted by the Fabry-Perot interference filter in the package. The Fabry-Perot interference filter includes: a substrate having a first surface on the window side and a second surface on the light detector side; a first layer structure arranged on the first surface, the first layer structure having a first mirror and a second mirror, and a lens unit integrally formed on the second surface side, the lens unit for condensing the light transmitted by the first mirror and the second mirror onto the light detector.
    Type: Application
    Filed: February 26, 2018
    Publication date: April 22, 2021
    Applicant: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi KASAHARA, Katsumi SHIBAYAMA, Masaki HIROSE, Toshimitsu KAWAI, Hiroki OYAMA, Yumi KURAMOTO
  • Patent number: 10935419
    Abstract: A light detection device includes: a package including an opening configured to allow light to enter therefrom; a light transmitting unit arranged on an inner surface of the package so as to close the opening; a Fabry-Perot interference filter arranged in the package and configured to transmit light transmitted by the light transmitting unit; and a light detector arranged in the package and configured to detect the light transmitted by the Fabry-Perot interference filter. The light transmitting unit is integrally configured by including: a band pass filter arranged in the package and configured to transmit the light to be incident on the Fabry-Perot interference filter; and at least one lens unit configured to condense the light to be incident on the Fabry-Perot interference filter.
    Type: Grant
    Filed: March 5, 2018
    Date of Patent: March 2, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Masaki Hirose, Katsumi Shibayama, Takashi Kasahara, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 10908022
    Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first thinned region, a first mirror layer, a sacrificial layer, and a second mirror layer are formed on a first main surface of a wafer, and the first thinned region in which at least one of the first mirror layer, the sacrificial layer, and the second mirror layer is partially thinned along each of a plurality of lines is formed; a cutting step of cutting the wafer into a plurality of substrates along each of the plurality of lines by forming a modified region within the wafer along each of the plurality of lines through irradiation of a laser light, after the forming step; and a removing step of removing a portion from the sacrificial layer through etching, between the forming step and the cutting step or after the cutting step.
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: February 2, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 10900834
    Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.
    Type: Grant
    Filed: May 1, 2017
    Date of Patent: January 26, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Takashi Kasahara, Katsumi Shibayama, Masaki Hirose, Toshimitsu Kawai, Hiroki Oyama, Yumi Kuramoto
  • Patent number: 10895501
    Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.
    Type: Grant
    Filed: October 24, 2019
    Date of Patent: January 19, 2021
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Katsumi Shibayama, Takashi Kasahara, Masaki Hirose, Toshimitsu Kawai