Abstract: An optical inspection device includes: a wafer support unit configured to support a wafer in which a plurality of Fabry-Perot interference filter portions are formed, each of the plurality of filter portions in which a distance between the first mirror portion and the second mirror portion facing each other varies by an electrostatic force, the wafer support unit configured to support the wafer such that a direction in which the first mirror portion and the second mirror portion face each other follows along a reference line; a light emission unit configured to emit light to be incident on each of the plurality of filter portions along the reference line; and a light detection unit configured to detect light transmitted through each of the plurality of filter portions along the reference line. The wafer support unit has a light passage region that allows light to pass along the reference line.

Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion disposed on the first surface, a second laminate that has a second mirror portion facing the first mirror portion via a gap on a side opposite to the substrate with respect to the first mirror portion, and an intermediate layer that defines the gap between the first laminate and the second laminate. An outer surface of the intermediate layer is curved such that an edge portion of the intermediate layer on the substrate side is positioned on an outer side of an edge portion of the intermediate layer on the side opposite to the substrate in a direction parallel to the first surface. The second laminate covers the outer surface of the intermediate layer.

Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector, and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Pert interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.

Abstract: Provided is a non-transitory computer-readable recording medium recording an optical measurement control program in a light detection device, the program causing a computer to execute a process of measuring light to be measured by acquiring an electric signal output from the light detector, the optical measurement control program causing the computer to function as: a voltage control unit controlling the potential difference generated between the pair of mirrors to gradually increase until the potential difference reaches a set potential difference corresponding to a wavelength of the light to be measured before the acquisition of the electric signal is started; and a signal acquisition unit acquiring the electric signal in a state where the voltage control unit allows the set potential difference to be generated between the pair of mirrors.

Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.

Abstract: A method of manufacturing a Fabry-Perot interference filter includes a forming step of forming a first mirror layer having a plurality of first mirror portions, a sacrificial layer having a plurality of portions expected to be removed, and a second mirror layer having a plurality of second mirror portions on a first main surface of a wafer which includes parts corresponding to a plurality of two-dimensionally arranged substrates and is expected to be cut into the plurality of substrates along each of a plurality of lines; a removing step of simultaneously removing the plurality of two-dimensionally arranged portions expected to be removed from the sacrificial layer through etching after the Ruining step; and a cutting step of cutting the wafer into the plurality of substrates along each of the plurality of lines after the removing step.

Abstract: A light detection device includes: a package including an opening configured to allow light to enter therefrom; a light transmitting unit arranged on an inner surface of the package so as to close the opening; a Fabry-Perot interference filter arranged in the package and configured to transmit light transmitted by the light transmitting unit; and a light detector arranged in the package and configured to detect the light transmitted by the Fabry-Perot interference filter. The light transmitting unit is integrally configured by including: a band pass filter arranged in the package and configured to transmit the light to be incident on the Fabry-Perot interference filter; and at least one lens unit configured to condense the light to be incident on the Fabry-Perot interference filter.

Abstract: A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.

Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.

Abstract: A SERS unit comprises an integrally formed handling board and a SERS element secured within a container space provided in the handling board so as to open to one side in a thickness direction of the handling board. The SERS element has a substrate arranged on an inner surface of the container space and an optical function part formed on the substrate, for generating surface-enhanced Raman scattering.

Abstract: A surface-enhanced Raman scattering element comprises a substrate having a principal surface; a molded layer having a support part formed on the principal surface of the substrate so as to extend along the principal surface and a fine structure part formed on the support part; a frame part formed on the principal surface of the substrate so as to surround the support part and fine structure part along the principal surface; and a conductor layer formed on at least the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering; while the fine structure part are formed integrally with the support part.

Abstract: The Fabry-Perot interference filter includes: a substrate having a first surface, a first laminate having a first mirror portion disposed on the first surface, a second laminate having a second mirror portion facing the first mirror portion with an air gap interposed therebetween, and an intermediate layer defining the air gap between the first and second laminate. The substrate has an outer edge portion positioned outside an outer edge of the intermediate layer when viewed from a direction perpendicular to the first surface. The second laminate further includes a covering portion covering the intermediate layer and a peripheral edge portion positioned on the first surface in the outer edge portion. The second mirror portion, the covering portion, and the peripheral edge portion are integrally formed so as to be continuous with each other. The peripheral edge portion is thinned along an outer edge of the outer edge portion.

Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion disposed on the first surface, a second laminate that has a second mirror portion facing the first mirror portion via a gap on a side opposite to the substrate with respect to the first mirror portion, and an intermediate layer that defines the gap between the first laminate and the second laminate. An outer surface of the intermediate layer is curved such that an edge portion of the intermediate layer on the substrate side is positioned on an outer side of an edge portion of the intermediate layer on the side opposite to the substrate in a direction parallel to the first surface. The second laminate covers the outer surface of the intermediate layer.

Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion, a second laminate that has a second mirror portion facing the first mirror portion via a gap, an intermediate layer that defines the gap between the first laminate and the second laminate, and a first terminal. The intermediate layer has a first inner surface surrounding the first terminal. The first inner surface is curved such that an edge portion of the intermediate layer on the substrate side is positioned on the first terminal side relative to an edge portion of the intermediate layer on a side opposite to the substrate.

Abstract: A light detection device includes a Fabry-Perot interference filter provided with a light transmitting region on a predetermined line, a light detector disposed on one side with respect to the Fabry-Perot interference filter on the line, a package having an opening positioned on the other side with respect to the Fabry-Perot interference filter on the line, a light transmitting member provided in the package such that the opening is blocked, and a temperature control element having an endothermic region thermally connected to the Fabry-Perot interference filter and the light detector. The endothermic region is positioned on one side with respect to the light detector on the line.

Abstract: A Fabry-Perot interference filter 10A includes a first mirror 31; a second mirror 41 being opposite to the first mirror 31 with a gap S therebetween; a first electrode 17 formed in the first mirror 31 to surround a light transmission region 11; a second electrode 18 formed in the first mirror 31 to include the light transmission region 11; and a third electrode 19 formed in the second mirror 41 to be opposite to the first electrode 17 and the second electrode 18 and connected to the same potential as the second electrode 18. The second electrode 18 is positioned at the side of the third electrode 19 or the opposite side thereof with respect to the first electrode 17 in an opposite direction D where the first mirror 31 and the second mirror 41 are opposite each other.

Abstract: A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.

Abstract: A spectral sensor 1A includes a Fabry-Perot interference filter 10 which has a light transmission region 11; a light detector 3 which detects light having transmitted the light transmission region 11; spacers 4A and 4B which support the Fabry-Perot interference filter 10 in a surrounding region of the light transmission region 11; and a die bond resin 5 which adheres the Fabry-Perot interference filter 10 and the spacers 4A and 4B to each other. The die bond resin 5 has one opening A2 communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region 11.