Abstract: It is an object to obtain a calorimeter characterized by excellent mechanical strength, and a manufacturing method thereof, when a plurality of calorimeters are arranged inside a single substrate. The calorimeter has an absorbent for converting energy of radioactive rays into heat and a resistor for converting heat into an electrical signal using superconductive transition are arranged on a membrane for determining thermal conductivity with the membrane being attached to a substrate, the substrate having a tri-layer structure comprising an etching layer, an etching stop layer and a support substrate, the membrane being arranged separated by the thickness of the etching stop layer and the etching layer.

Abstract: A superconducting radiation detector uses the abruptness of a superconducting transition edge, converts a slight heat generated by an X-ray into a high signal current, and uses an electrothermal self-feedback mechanism, thereby having a high energy resolution and a high counting rate. In a calorimeter that includes an absorber for absorbing X-rays, a resistor provided under the absorber, a resistance value thereof being changed by heat generated in the absorber, superconducting wires connecting the resistor and an external current detector, and a membrane on which the resistor is superimposed, the resistor being constituted by a superconductor, the calorimeter allowing Joule heat generated by steadily flowing a current in the resistor and the heat generated in the absorber to be thermally balanced and transfer in the membrane, an insulating film is provided between the resistor and the absorber, the film having a hole penetrating the film in the thickness direction.

Abstract: There is provided a radiation detector that allows accurate irradiation to a detection area and has a high detection efficiency. A collimator that has an opening for transmitting radiation to irradiate the detection area and a function as a shielding plate for preventing radiation from irradiating a part other than the detection area is installed on the same board that forms an energy/electricity converter (radiation detector). The radiation detector is constructed such that the alignment of the opening of the collimator and the detection area is easy, and the detection area and the opening of the collimator are close so that the detection efficiency is increased.

Abstract: A colorimeter has an absorber for absorbing radiation energy and converting the radiation energy into thermal energy. A resistor is connected to the absorber for converting thermal energy into an electrical signal. A membrane is connected to the resistor for controlling a thermal discharge from the resistor. A substrate is connected to the membrane and has a tri-layer structure comprised of an etching layer having a preselected thickness, an etching stop layer and a support substrate. The membrane is spaced-apart from a main surface of the etching stop layer by the preselected thickness of the etching layer.

Abstract: A signal detector has a SQUID, a bias current supply circuit for supplying a bias current to the SQUID, and a drive circuit for detecting a magnetic flux by receiving a voltage signal of the SQUID and reading out the input signal as an output voltage. The drive circuit has two systems including a flux-locked loop system for converting a voltage signal of the SQUID into a current signal and making a magnetic flux inside the SQUID constant by feeding back a signal whereto, and an output system separate from and operating independently of the flux-locked loop system for converting a voltage signal of the SQUID and reading out the converted voltage signal without feeding back a signal to the SQUID.

Abstract: The present invention is intended to provide a calorimeter for converting a quite small amount of heat into an electrical signal, especially a radiation detector providing improved energy resolution and count rate, by using a superconducting transition edge. The calorimeter has an absorber for absorbing radiation and producing heat. This absorber is formed on a resistor whose resistance value is varied by the heat. The resistor is formed on a membrane that controls escape of the heat. The calorimeter is characterized in that it is further fitted with a heat dissipation device for letting active electrons produced in the calorimeter escape to the outside.

Abstract: A drive circuit for magnetic flux detection for converting to an output voltage corresponding to an input signal is made up of two systems, being a flux-locked loop system for converting to a current signal corresponding to a voltage signal Vs of a superconducting quantum interference device and making magnetic flux inside a superconducting ring constant by feeding back to a modulation coil as a feedback signal If, and an output system for converting to a voltage signal Vo in response to the voltage signal Vs of the superconducting quantum interference device, and not feeding back to the modulation coil but outputting as an output voltage Vout.

Abstract: It is an object to obtain a calorimeter characterized by excellent mechanical strength, and a manufacturing method thereof, when a plurality of calorimeters are arranged inside a single substrate. The calorimeter has an absorbent for converting energy of radioactive rays into heat and a resistor for converting heat into an electrical signal using superconductive transition are arranged on a membrane for determining thermal conductivity with the membrane being attached to a substrate, the substrate having a tri-layer structure comprising an etching layer, an etching stop layer and a support substrate, the membrane being arranged separated by the thickness of the etching stop layer and the etching layer.

Abstract: A superconducting quantum interference device is provided which can accurately measure only a magnetic field detected by a detection coil where the superconducting quantum interference device is used for a fluxmeter. A superconductor for enclosing a loop to be formed by a washer coil is formed at an upper portion or lower portion of the washer coil. Otherwise, a ground plane layer is formed with an interlayer insulation film sandwiched, in a position, except for a detection coil, particularly, of an upper layer or lower layer, of a washer coil being magnetically coupled to a feedback-modulation coil to which a signal is sent from an external control system. As a result, it is possible to prevent an external magnetic field from being coupled to other regions than the detection coil and hence accurately measure a magnetic field linked to the detection coil. In particular, the invention is effective for a reduced detection area of a detection coil thus suited for measurement on high spatial resolution.

Abstract: A bias wiring layer for supplying a bias current to a DC-SQUID is disposed above or below the superconductive ring of the DC-SQUID. The bias wiring layer is routed such that it passes through an axis of symmetry so that the center of the wiring layer passes through the middle of the superconductive ring. By providing a bias wiring layer rather than external bias wire, it is possible to prevent the generation of a magnetic flux caused by a bias current. Since no magnetic flux is produced by a bias current and the DC-SQUID and the vicinity thereof are not interfered with by a bias current, elements integrated on the same substrate are not adversely affected. It is thus easy to match the phases of the magnetic flux-voltage characteristics of plural DC-SQUIDs constituting a SQUID array, which is significantly effective in increasing the modulated voltage.

Abstract: A detecting coil of a SQUID is made of a superconductive film material having a critical temperature higher than a critical temperature of a superconductive film material composing a Josephson junction part. It is possible to measure the sample even when its temperature is higher than the critical temperature of the Josephson junction section by increasing the critical temperature of the detecting coil than that of the Josephson junction section.

Abstract: A nondestructive inspection apparatus having a SQUID is made with compact configuration and is capable of detecting a metallic or non-metallic metal for defects, corrosion, and the like, by forming the SQUID and a magnetic field applying coil on the same substrate. The SQUID comprises two Josephson junctions, a washer coil connected to the Josephson junctions to form a superconducting loop, shunt resistors, a damping resistor, and a feedback modulation coil, all of which are formed from a superconducting thin film on a supporting substrate. A magnetic field applying coil is formed on the same supporting substrate with a superconducting thin film or a normal conducting metal thin film. The magnetic field applying coil, which generally has plural turns around the SQUID, applies a dc or ac magnetic field to a sample. The change in magnetic field caused by a defect in the sample is detected by the washer coil, and the position and size of the defect may thus be determined.

Abstract: A superconducting loop is formed by two Josephson junctions connected to both ends of a washer coil which serves also as a pick-up coil. The washer coil which is a magnetic field detection portion is constituted by two coils, i.e., a coil having a radius r.sub.1 and a number of turns n.sub.1 and a coil having a radius r.sub.2 and a number of turns n.sub.2 which are in the form of concentric circular loops. The two coils are coupled in opposite directions and are designed so that effective areas n.sub.1 .pi.r.sub.1.sup.2 and n.sub.2 .pi.r.sub.2.sup.2 are equal to each other. Since a magnetic field is directly detected by the washer coil, sensitivity to a magnetic field is enhanced. This makes it possible to obtain sufficient sensitivity to a magnetic field even if the area of the magnetic field detection portion is reduced to improve spatial resolution.