Patents by Inventor Toshio Hiroe

Toshio Hiroe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dipping type surface treatment apparatus
    Patent number: 5191908
    Abstract: A dipping type wafer treatment apparatus includes housing having first and second openings, a wafer treatment bath provided inside the housing, a clean air unit for producing a downflow, a flow rectifier for introducing the downflow into the housing, a communicating chamber provided below the housing being partitioned from a space inside the housing, a duct for guiding mist in the vicinity of the treatment bath in the housing into the communicating chamber together with the downflow, and a pump for forcing air out of the communicating chamber from an air outlet provided in the communicating chamber.
    Type: Grant
    Filed: December 27, 1991
    Date of Patent: March 9, 1993
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Toshio Hiroe, Kenji Sugimoto