Abstract: A piezoelectric valve includes: a valve main part including a gas pressure chamber receiving compressed gas supplied from outside; a plate inside the valve main part, and an actuator fixed to the plate and inside the valve main part, which is a case with an opening on a front surface. The plate includes a gas discharge path and a valve seat coming into contact with a valve element of the actuator opening and closing the gas discharge path. A lid member that closes the opening of the case has a gas discharge opening communicating with the gas discharge path of the plate; is welded and fixed to a front surface of the plate, where the gas discharge path opens, on an annular welded part surrounding the gas discharge opening; and is welded and fixed to an end surface of the case on an annular welded part on the outer peripheral part.

Abstract: A piezoelectric valve includes: a valve main part including a gas pressure chamber receiving compressed gas supplied from outside; a plate inside the valve main part, and an actuator fixed to the plate and inside the valve main part, which is a case with an opening on a front surface. The plate includes a gas discharge path and a valve seat coming into contact with a valve element of the actuator opening and closing the gas discharge path. A lid member that closes the opening of the case has a gas discharge opening communicating with the gas discharge path of the plate; is welded and fixed to a front surface of the plate, where the gas discharge path opens, on an annular welded part surrounding the gas discharge opening; and is welded and fixed to an end surface of the case on an annular welded part on the outer peripheral part.

Abstract: Provided is a piezoelectric actuator that can reduce a risk of air leakage due to weakening of pressing force of a valve element against a valve seat surface and airtightness. The piezoelectric actuator is used for a piezoelectric valve that opens and closes a valve utilizing displacement of a laminated piezoelectric element. The piezoelectric actuator includes: a valve element; a laminated piezoelectric element that generates a driving force, required for operation of the valve element, as a displacement; and a displacement enlargement mechanism that enlarges a displacement of a laminated piezoelectric element and causes the enlarged displacement to act on the valve element. In the piezoelectric actuator, a surface of the valve element to be in contact with a valve seat of the piezoelectric valve is made flat and smooth in a state in which a tensile load is applied to the laminated piezoelectric element.

Abstract: Provided is a piezoelectric valve in which the valve is opened/closed utilizing a displacement of a laminated piezoelectric element, including: a valve main body having a gas pressure chamber that receives compressed gas supplied externally; and an actuator having a valving element, the laminated piezoelectric element that generates a driving force required for operating the valving element as the displacement, and a displacement enlarging mechanism that enlarges the displacement of the laminated piezoelectric element to be acted on the valving element, the actuator being disposed in the valve main body, in which a surface of the laminated piezoelectric element is coated with silicone in a state in which the laminated piezoelectric element is integrated into the actuator.

Abstract: A piezoelectric valve, having superior responsiveness during valve opening and capability to stabilize gas supply at an early stage, includes a gas pressure chamber receiving compressed gas and an exhaust path discharging the compressed gas from the gas pressure chamber; a valve disc placed in the gas pressure chamber to open and close the exhaust path; a piezoelectric element generating a driving force for operation of the valve disc, as a displacement; a displacement magnifying mechanism magnifying the displacement of the piezoelectric element and applying the magnified displacement to the valve disc; and driving means including a signal generator generating a signal including a first prepulse, a second prepulse, and a main pulse, applies a drive voltage to the piezoelectric element using the signal generated by the signal generator, as an input signal to a drive circuit, and drives and opens the valve disc by expanding the piezoelectric element.

Abstract: A deposition apparatus includes a dome rotatable around the central axis; a loop chain surrounding the central axis on the dome; a power transmission shaft transmitting rotational motion of the dome; a first gear section transforming the rotational motion of the dome to rotational motion of the shaft; a second gear section provided with a chain-driving sprocket and configured to transform the rotational motion of the shaft to rotational motion of the sprocket; and a tray holder located beside the loop chain, the tray holder including a first internal power transmission shaft and a rotating portion holding a tray. The sprocket is rotated through the rotation of the dome to drive the loop chain, the first internal power transmission shaft of the tray holder is rotated by motion of the loop chain, and the rotating portion is rotated through rotation of the first internal power transmission shaft.

Abstract: A piezoelectric valve, having superior responsiveness during valve opening and capability to stabilize gas supply at an early stage, includes a gas pressure chamber receiving compressed gas and an exhaust path discharging the compressed gas from the gas pressure chamber; a valve disc placed in the gas pressure chamber to open and close the exhaust path; a piezoelectric element generating a driving force for operation of the valve disc, as a displacement; a displacement magnifying mechanism magnifying the displacement of the piezoelectric element and applying the magnified displacement to the valve disc; and driving means including a signal generator generating a signal including a first prepulse, a second prepulse, and a main pulse, applies a drive voltage to the piezoelectric element using the signal generated by the signal generator, as an input signal to a drive circuit, and drives and opens the valve disc by expanding the piezoelectric element.

Abstract: A deposition apparatus includes a deposition source; a rotatable dome provided with an opening which covers the source; a first lever provided outside of the dome; and a tray holder including a frame including a first rotating member and a rotating part including a second rotating member and being attached to the frame such that the rotating part rotates with the second rotating member around an axis supported by the frame. The rotating part includes work-holding trays arranged around the axis, the tray holder is installed on the dome such that a side of one of the trays covers the opening, the first rotating member is rotated by the first lever during rotation of the dome, and the second rotating member is rotated with the rotating part by the first rotating member so as to change the tray a side of which covers the opening to another one.

Abstract: An ejector for a granular matter color sorter reducing burdens such as cleaning and maintenance in particular associated with a nozzle unit is to be provided. The ejector 10 comprises a nozzle unit 15, a solenoid valve unit 13, and a manifold unit 14. The nozzle unit 15 is constituted by a plurality of nozzle devices 16 that are independent from each other. The solenoid valve unit 13 is constituted by a plurality of solenoid valve devices 19. The respective nozzle devices 16 and the respective solenoid valve devices 19 correspond to each other on a one-on-one basis so that air flow passages of them are connected by an air flow passage of a manifold. The nozzle device 16 and the manifold 29 are detachably connected and made integral in a state where a surface of the nozzle device 16 in which the air flow passage opens and a surface of the manifold 29 in which the air flow passage opens are brought into abutment with each other.

Abstract: A method and an apparatus for producing various types of microdroplets are provided. The apparatus has a cross intersection portion 7 at which a first continuous phase 2, a first dispersion phase 4, and a second dispersion phase 6 intersect with each other; a first liquid feed device 12 controlling the first dispersion phase 4; a second liquid feed device 13 controlling the second dispersion phase 6; and a control device 11 connected to the first liquid feed device 12 and the second liquid feed device 13, in which the first liquid feed device 12 and the second liquid feed device 13 are controlled by a signal from the control device 11 so that microdroplets 9 formed of the first dispersion phase 4 and microdroplets 10 formed of the second dispersion phase 6 are sequentially produced.

Abstract: A gripper mechanism and a movement mechanism which utilize an electromagnetic actuator which can secure a sufficient thrust force at least at a certain level over a wide range of displacement. The movement mechanism includes a pair of electromagnetic actuators disposed inside a pair of rails and an intermediate actuator provided between the electromagnetic actuators. The electromagnetic actuators function as a gripper mechanism to be gripped by the rails. The electromagnetic actuators each include a displacement amplification mechanism including a magnetic body, and coils provided in the displacement amplification mechanism. A magnetic flux is generated in the magnetic body by passing an electric current through the coils so as to displace the displacement amplification points of the displacement amplification mechanism.

Abstract: A deposition apparatus includes a dome rotatable around the central axis; a loop chain surrounding the central axis on the dome; a power transmission shaft transmitting rotational motion of the dome; a first gear section transforming the rotational motion of the dome to rotational motion of the shaft; a second gear section provided with a chain-driving sprocket and configured to transform the rotational motion of the shaft to rotational motion of the sprocket; and a tray holder located beside the loop chain, the tray holder including a first internal power transmission shaft and a rotating portion holding a tray. The sprocket is rotated through the rotation of the dome to drive the loop chain, the first internal power transmission shaft of the tray holder is rotated by motion of the loop chain, and the rotating portion is rotated through rotation of the first internal power transmission shaft.

Abstract: There is provided an electromagnetic actuator which can secure a sufficient thrust force at least at a certain level over a wide range of displacement. The electromagnetic actuator 1 having a point of amplified displacement includes: a displacement amplification mechanism 1A made of a magnetic material and having two surfaces 2as, 2bs that form a gap 5 therebetween; and a coil 6 provided in the displacement amplification mechanism 1A. A magnetic flux is generated by passing an electric current through the coil 6, thereby generating an attraction force between the surfaces 2as, 2bs. The attraction force displaces the point of amplified displacement.

Abstract: A deposition apparatus includes a deposition source; a rotatable dome provided with an opening which covers the source; a first lever provided outside of the dome; and a tray holder including a frame including a first rotating member and a rotating part including a second rotating member and being attached to the frame such that the rotating part rotates with the second rotating member around an axis supported by the frame. The rotating part includes work-holding trays arranged around the axis, the tray holder is installed on the dome such that a side of one of the trays covers the opening, the first rotating member is rotated by the first lever during rotation of the dome, and the second rotating member is rotated with the rotating part by the first rotating member so as to change the tray a side of which covers the opening to another one.

Abstract: A gripper mechanism and a movement mechanism which utilize an electromagnetic actuator which can secure a sufficient thrust force at least at a certain level over a wide range of displacement. The movement mechanism includes a pair of electromagnetic actuators disposed inside a pair of rails and an intermediate actuator provided between the electromagnetic actuators. The electromagnetic actuators function as a gripper mechanism to be gripped by the rails. The electromagnetic actuators each include a displacement amplification mechanism including a magnetic body, and coils provided in the displacement amplification mechanism. A magnetic flux is generated in the magnetic body by passing an electric current through the coils so as to displace the displacement amplification points of the displacement amplification mechanism.

Abstract: A piezoelectric valve stably supplies gas even for a long gas ejection time, with a high responsivity to opening the valve, is provided. The piezoelectric valve, including a gas-pressure-chamber for receiving a compressed gas supplied from outside, a gas-discharge-channel through which the compressed gas is discharged from the gas-pressure-chamber, comprises: a valve body disposed in the gas-pressure-chamber and opens/closes the gas-discharge-channel; a piezoelectric element for producing a driving force to move the valve body as a displacement; a displacement-enlarging-mechanism for enlarging the displacement of the piezoelectric element to act on the valve body; and a driving unit having a signal-generating-unit for generating a signal comprising a pre-pulse and a main pulse and provides the signal generated by the signal-generating-unit to a driving circuit as an input signal to apply a driving voltage to the piezoelectric element to make the piezoelectric element expand and drive the valve body open.

Abstract: A piezoelectric valve whose assembly work can be efficiently performed. A piezoelectric valve according to this invention includes a valve main body having a gas pressure chamber which receives compressed gas supplied from the outside, a plate which is disposed inside the valve main body and is fixed to the valve main body, and actuators each of which has a valve element, a piezoelectric element generating, in the form of a displacement, driving force required for operation of the valve element, and a displacement magnification mechanism for magnifying a displacement of the piezoelectric element and causing the magnified displacement to act on the valve element, are fixed to each of two surfaces of the plate, and are disposed inside the valve main body together with the plate.

Abstract: A piezoelectric valve stably supplies gas even for a long gas ejection time, with a high responsivity to opening the valve, is provided. The piezoelectric valve, including a gas-pressure-chamber for receiving a compressed gas supplied from outside, a gas-discharge-channel through which the compressed gas is discharged from the gas-pressure-chamber, comprises: a valve body disposed in the gas-pressure-chamber and opens/closes the gas-discharge-channel; a piezoelectric element for producing a driving force to move the valve body as a displacement; a displacement-enlarging-mechanism for enlarging the displacement of the piezoelectric element to act on the valve body; and a driving unit having a signal-generating-unit for generating a signal comprising a pre-pulse and a main pulse and provides the signal generated by the signal-generating-unit to a driving circuit as an input signal to apply a driving voltage to the piezoelectric element to make the piezoelectric element expand and drive the valve body open.