Abstract: Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their oxides, and the ozone without any damages to wafers and reactors and application of the catalysis not only to the etching but also to chamber cleaning ensures stable operation of reactors and production of high quality devices.

Abstract: A transmitting unit has a first storing portion for storing a plurality of data programs, and a data generating portion for adding first identification data to a data program selected corresponding to selection data that is input by a user from the plurality of data programs stored in the first storing portion.

Abstract: Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their reactors and application of the catalysis not only to the etching but also to chamber cleaning ensures stable operation of reactors and production of high quality devices.

Abstract: With a view to providing a technique for highly-selective etching of Ru (ruthenium) using a photoresist as an etching mask, an Ru-film, which is an lower electrode material deposited on the side walls and bottom surface of a hole, is covered with a photoresist film, followed by isotropic dry etching in a gas atmosphere containing an ozone gas, whereby a portion of the Ru film outside of the hole is removed.

Abstract: Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their oxides, and the ozone without any damages to wafers and reactors and application of the catalysis not only to the etching but also to chamber cleaning ensures stable operation of reactors and production of high quality devices.

Abstract: A ruthenium film, an osmium film, and an oxide thereof, deposited or adhered on the inside of a semiconductor treating apparatus are effectively removed. To accomplish this, an oxygen-atom donating gas and a halogen gas are supplied to the apparatus, whereby a reaction product deposited or adhered on the inside of the apparatus can be rapidly and effectively removed. In addition, to providing a stable operation, the formation of a thin film with high qualities and the production of a semiconductor device with a high yield are also realized.

Abstract: A fabrication method of a semiconductor integrated circuit device including polishing the entire area of an edge of a wafer, for example, by using three polishing drums in which a polishing drum polishes the upper surface of the edge of the water relatively, the polishing drum polishes the central portion of the edge of the wafer relatively and a polishing drum polishes the lower surface of the edge of the wafer relatively, thereby preventing occurrence of obstacles which cause defoliation of thin films on the edge of the wafer.

Abstract: An efficient retrieval of information as well as a more rational information distribution system are realized. To this end, an arrangement is put in place where retrieval can be carried out based on various kinds of retrieval information related to download information and particularly, at a time when the download information is specified from the retrieval information, if the retrieval information is outputted to a user as an advertisement, the amount of money to be billed for the download information is reduced by what the advertisement is worth.

Abstract: Ruthenium, osmium and their oxides can be etched simply and rapidly by supplying an atomic oxygen-donating gas, typically ozone, to the aforementioned metals and their oxides through catalysis between the metals and their reactors and application of the catalysis not only to the etching but also to chamber cleaning ensures stable operation of reactors and production of high quality devices.

Abstract: An electronic apparatus in which grounding can be achieved between a casing of the main body portion of the apparatus and a slide tray mounted on the casing for being extracted forwards via an opening surface of the casing. To this end, the electronic apparatus includes a slide tray 3 mounted on the casing 2 of the main body portion of the apparatus for being extracted forwards via an opening surface 7 of the casing and carrying electrical components in need of electrical conduction with respect to the main body portion, and an electrically conductive ejection plate 9 electrically conductively connected with an electrically conductive main body portion of a tray 6 and supported on the slide tray for movement in the fore-and-aft direction. The electronic apparatus also includes an electrically conductive roll 17 supported via an electrically conductive spring plate 15 on the ejection plate 9 and adapted for rolling on an electrically conductive bottom plate 18 of the casing of the main body portion.

Abstract: An information processing apparatus comprises a receiver, a user identifier generator, a generation source identifier memory, and a transmitter. The receiver receives a request transmitted thereto from a terminal device. The user identifier generator generates a user identifier corresponding to the request. The generation source identifier memory stores a generation source identifier to identify a generation source of the user identifier. And the transmitter transmits the generated user identifier and the stored generation source identifier to the terminal device.

Abstract: In the present invention, a thin film capacitor, having a dielectric layer of a metal oxide having perovskite crystal structure, is formed on a first substrate before the capacitor is transferred onto a second substrate on which an electronic circuit has been formed. Thereafter, patterning of the capacitor and electrical connection are to be carried out.

Abstract: With a view to providing a technique for highly-selective etching of Ru (ruthenium) with a photoresist as an etching mask, an Ru film, which is an lower electrode material deposited on the side walls and bottom surface of a hole, is covered with a photoresist film, followed by isotropic dry etching in a gas atmosphere containing an ozone gas, whereby a portion of the Ru film outside of the hole is removed.

Abstract: A method for driving the motor of multiple phase, where the number of windings in the coil of each phase can be changed, either in a first mode where all the windings in the coil of each phase are used or a second mode where the number of windings used is smaller than that of the first mode. The driving method includes a source voltage detector for supplying the driving method with a source voltage, a temperature detector for detecting an ambient temperature about the motor, and a controller for switching the action of the driving method to run the motor in either the first mode or the second mode in response to a result of the detection released from the source voltage detector or the temperature detector. Accordingly, the revolution of the motor can be maintained constant hence providing a degree of energy saving.

Abstract: An active oxygen scavenger comprising as an active ingredient a pterin derivative of the formula (I): ##STR1## wherein R.sup.1 and R.sup.2 are independently a hydrogen atom, an alkyl group of 1 to 4 carbon atoms, or an acyl group of the formula R.sup.3 --CO--, R.sup.3 is an alkyl group of 1 to 4 carbon atoms, X is a formyl group or hydroxymethyl group, A is a group of the formula (Ia): ##STR2## and n is 0 or an integer of 1 or more, with the proviso that when X is a hydroxymethyl group, n is 0, or when n is an integer of 1 or more, each of R.sup.1 and R.sup.2 is a hydrogen atoms, and X is a formyl group, or a cyclic compound thereof, or a salt thereof is disclosed.

Abstract: An electronic apparatus having a casing of a main body portion and a slide tray mounted on the casing for being extracted forward via an opening surface of the casing. A resilient member is mounted on one of the casing and the slide tray for sliding in the direction of extraction. An engagement recess is formed in the other of the casing and the slide tray or the resilient member, and an engagement member is formed in the resilient member or the other of the casing and the slide tray. The engagement member is engaged in the engagement recess when the slide tray is in the pull-out position.

Abstract: The invention mainly relates to a heat radiator for performing heat radiation of electronic parts (heat generating elements) that are heated by electric supply, such as semiconductor parts to be mounted on a circuit board surface of a printed circuit board. The heat radiator (1) according to the present invention is a heat radiator in which vertical heat radiative portions are formed by bending both right and left ends of a back surface plate (2) to the front face side. The heat generating element (5) that is an electronic part is mounted on the surface on the front face side or the back face side of the back surface plate. The radiating portions are further bent inwardly to form sleeve portions (3) extending up and down. Slits (12a) are formed on outer peripheral walls of the sleeve portions (3) for ventilating air. Inside the right and left sleeve portions (3), the bent back end sides of the peripheral walls of the sleeve portions (3) form bent back portions (4) bent and formed along the back surface plate.

Abstract: An electronic apparatus in which grounding can be achieved between a casing of the main body portion of the apparatus and a slide tray mounted on the casing for being extracted forwards via an opening surface of the casing. To this end, the electronic apparatus includes a slide tray 3 mounted on the casing 2 of the main body portion of the apparatus for being extracted forwards via an opening surface 7 of the casing and carrying electrical components in need of electrical conduction with respect to the main body portion, and an electrically conductive ejection plate 9 electrically conductively connected with an electrically conductive main body portion of a tray 6 and supported on the slide tray for movement in the fore-and-aft direction. The electronic apparatus also includes an electrically conductive roll 17 supported via an electrically conductive spring plate 15 on the ejection plate 9 and adapted for rolling on an electrically conductive bottom plate 18 of the casing of the main body portion.

Abstract: A process for preparing storable vegetable juice comprising crushing vegetables to extract juice, adding an organic acid to the vegetable juice, and treating this vegetable juice with a weakly basic anion exchange resin on which an organic acid has previously been adsorbed and a food containing a vegetable juice prepared by the process. The process can produce vegetable juice which can be stored at room temperature, produces no bad odor when stored at room temperature, and is free from a resin odor which has been unavoidable when a weakly basic anion exchange resin was used.

Abstract: A disk accommodating housing and a recording apparatus which can protect written data in a divisional data area of a recording medium with certainty where the data should not be erased inadvertently or in error are disclosed. A recording medium having first and second areas is accommodated in the housing which has an indicator for indicating one of first, second and third modes. The recording apparatus detects the mode indicated by the indicator and operates in accordance with the mode. In the first mode, writing or erasing operations into or from the first and second areas of the recording medium by a recording head are enabled; in the second mode, a writing operation into the first area is enabled while a writing operation into the second area is inhibited; and in the third mode, writing operations into both of the first and second areas are inhibited.