Abstract: A decontamination device capable of confirming accurate operations of a mist circulation dispersion means before and after or during a decontamination operation and guaranteeing the overall operation as a decontamination device. The device includes a mist supply means, a mist circulation dispersion means, and an ultrasonic detection means. The mist supply means converts a chemical for decontamination of the inside of a working chamber of the device into a mist for decontamination and supplies such mist to the inside of the working chamber. The mist circulation dispersion means subjects a vibrating board (which includes a plurality of ultrasonic transmitters) to ultrasonic vibration to generate sound flows with ultrasound from board surfaces in the vertical direction and presses the mist with acoustic radiation pressure of the sound flows in order to circulate and disperse the mist for decontamination in the working chamber.

Abstract: A method for decontaminating a low-temperature article, the method comprising: an applying step including applying a decontamination agent to external surfaces of a low-temperature article and supplying a mist of decontamination agent to a first external surface of said low-temperature article to form a condensed film of the decontamination agent on said first external surface; and a drying step including ultrasonically vibrating vibration boards disposed on a periphery of the low-temperature article to generate sound flows from board surfaces by an ultrasound in a vertical direction, irradiating with ultrasonic waves the low-temperature article with the decontamination agent applied thereto, subjecting said first external surface of the low-temperature article to ultrasonic vibration and acoustic radiation pressure, supplying dry air to the first external surface and drying said first external surface.

Abstract: The present invention can provide an incubator having not only a favorable cell culture function but also an autonomous decontamination function that saves the need for connection to an external decontamination device. The incubator provided with a culture vessel, a circulating means, a temperature-regulating means, and a gas supplying means for supplying a decontamination gas or a humidifying water vapor. The gas supplying means includes a compressed gas generating means, a decontamination solution supplying means, a water supplying means, a mixed gas/liquid regulator, and a vaporizer for generating a decontamination gas or a water vapor.

Abstract: The present invention achieves a decontamination effect with a proper amount of hydrogen peroxide mist supplied to a room to be decontaminated by further refining such hydrogen peroxide mist supplied to the room for dispersion/diffusion, and reducing the duration of operations such as aeration to increase efficiency of decontamination. The decontamination system includes a mist generation means, a mist discharge port, and a mist dispersion/diffusion means. The mist generation means converts a decontamination liquid into a mist to generate a mist for decontamination. The mist discharge port is opened at an upper portion on an internal side wall surface of the room to discharge a such mist into the inside of the room.

Abstract: A decontamination system not requiring large-scale equipment such as large-diameter ducts and anti-condensation heaters and for that reason capable of efficiently using a decontamination liquid. Long pipes can be installed for each of a plurality of rooms to be decontaminated, a decontamination liquid is not present in supply pipes as a residual dead liquid, and a proper amount of decontamination liquid can essentially be supplied for each room to cause no failure of an ultrasonic vibrator. The decontamination system employs a decontamination mist and includes a compressed air generating means and a decontamination liquid supplying means, and each room to be decontaminated is provided with a primary mist generating means and a secondary mist generating means.

Abstract: A pass box configured to accommodate and decontaminate an article by concentrating a mist of decontamination agent on an article's surface and to reduce a duration of aeration operations. The box includes a decontamination chamber, an aeration chamber in which residue of the decontamination agent is removed from the article's surface, a decontamination agent supply device, a decontamination agent control device, a moving device configured to reposition the article, and an air supply and exhaust device. The decontamination agent supply device converts a chemical into the mist and supplies it into the decontamination chamber. The decontamination agent control device includes vibration boards that are adjacent to internal wall surfaces of the decontamination chamber and that are ultrasonically vibrated to generate sound flows in the vertical direction thereby pressing the mist with acoustic radiation to concentrate the mist on the external surfaces of the article.

Abstract: A decontamination device configured to provide, on a short time scale, uniform decontamination of target articles without using expensive electron accelerators and to treat articles to be decontaminated in large quantities. The device includes a device body composed of a decontamination region and an aeration region, a conveyance means for conveying an article, a mist supply means, a mist control means, and an aeration means. The mist supply means converts a decontamination agent into a decontamination agent mist and supplies the same to the inside of the decontamination region. The mist control means includes vibration boards adjacent to internal wall surfaces of the decontamination region, and these boards are ultrasonically vibrated to generate sound flows from board surfaces by an ultrasound in the vertical direction.

Abstract: The present invention provides a decontamination device capable of accomplishing a decontamination effect with a proper amount of decontamination agent by employing a mist control mechanism and concentrating a mist for decontamination on the surface of an article to be conveyed, and reducing the duration of operations such as aeration to achieve more efficient decontamination works, and a pass box in which the decontamination device is disposed. The decontamination device of the present invention includes a mist supply means and a mist control mechanism, and the mist supply means converts a chemical for decontamination into a mist for decontamination, and supplies the same to the inside of a working chamber that accommodates the article. The mist control mechanism includes vibration boards disposed adjacent to internal wall surfaces of the working chamber, and the vibration boards are ultrasonically vibrated to generate sound flows from board surfaces by an ultra sound in the vertical direction.

Abstract: A mist supply device configured to decontaminate a target with a proper amount of decontamination agent supplied to the target by converting such agent into a fine mist, and reducing the duration of operations such as aeration to increase decontamination efficiency. The device includes a mist generation means, a mist microparticulating means, and a supply port. The mist generation means converts the decontamination agent into a primary mist and supplies it to the mist microparticulating means, which includes at least one vibration board that is subjected to ultrasonic vibration to generate sound flows from board surfaces by an ultrasound in the vertical direction. The supplied primary mist is subjected to ultrasonic vibration by the sound flows to reduce the primary mist into a secondary mist of smaller size. The generated secondary mist is supplied to the inside of the room through the supply port.

Abstract: A method for decontaminating a low-temperature article to accomplish decontaminating a surface of the such article, and to reduce duration of operations to increase efficiency of decontamination, and a pass box used in such method. The method includes an applying step of applying a decontamination agent to external surfaces of the article, and a drying step of irradiating the article with agent thereon with ultrasonic waves and drying the surface. In the applying step, a gas, fog or mist of the decontamination agent is supplied to a target surface to form a condensed film of the agent on the target surface. In the drying step, dry air is supplied to the target surface.

Abstract: An incubator which can uniformly maintain a temperature/humidity in a culture chamber and prevent dew condensation from occurring in the culture chamber is provided. Further, an incubator which raises an air pressure in a culture chamber higher than that of the external environment to maintain an aseptic environment and prevents water vapor to be supplied from adversely affecting the inner aseptic environment is provided. An incubator includes a culture chamber including an insulated door and insulated wall, circulating means for circulating air in the culture chamber, temperature regulating means for regulating a temperature of the air in the culture chamber, and humidifying means for humidifying the air in the culture chamber.

Abstract: The present invention provides a decontamination device capable of accomplishing a decontamination effect with a proper amount of decontamination agent supplied to a room to be decontaminated by employing a mist circulation dispersion mechanism and reducing the duration of operations such as aeration to achieve more efficient decontamination works. The decontamination device of the present invention includes a mist supply means and a mist circulation dispersion mechanism, and the mist supply means converts a chemical for decontamination into a mist for decontamination, and supplies the same to the inside of a working chamber. The mist circulation dispersion mechanism includes vibration boards disposed adjacent to internal wall surfaces of the working chamber, and the vibration boards are subjected to ultrasonic vibration to generate sound flows from board surfaces by an ultrasound in the vertical direction.

Abstract: The present invention provides a cleaning-performance evaluation system that can acquire evaluation results in real time as quantitative values without such factors as the experience of evaluators causing variations in evaluations. The present invention includes: a contamination means for administering a mock contaminant to the inside of a work chamber; a waste liquid recovery means for performing a cleaning operation and recovering a cleaning waste-liquid that contains the mock contaminant; a mist generation means for generating a mist of the cleaning waste-liquid; a collection means for collecting inspection air that includes the generated mist; and a detection means for detecting the amount of the mock contaminant included in the inspection air collected by the collection means. The present invention evaluates the cleaning operation by confirming that the amount of the mock contaminant detected by the detection means is at or below a prescribed value.

Abstract: An incubator which can uniformly maintain a temperature/humidity in a culture chamber and prevent dew condensation from occurring in the culture chamber is provided. Further, an incubator which raises an air pressure in a culture chamber higher than that of the external environment to maintain an aseptic environment and prevents water vapor to be supplied from adversely affecting the inner aseptic environment is provided. An incubator includes a culture chamber including an insulated door and insulated wall, circulating means for circulating air in the culture chamber, temperature regulating means for regulating a temperature of the air in the culture chamber, and humidifying means for humidifying the air in the culture chamber.

Abstract: The present invention provides a cleaning-performance evaluation system that can acquire evaluation results in real time as quantitative values without such factors as the experience of evaluators causing variations in evaluations. The present invention includes: a contamination means for administering a mock contaminant to the inside of a work chamber; a waste liquid recovery means for performing a cleaning operation and recovering a cleaning waste-liquid that contains the mock contaminant; a mist generation means for generating a mist of the cleaning waste-liquid; a collection means for collecting inspection air that includes the generated mist; and a detection means for detecting the amount of the mock contaminant included in the inspection air collected by the collection means. The present invention evaluates the cleaning operation by confirming that the amount of the mock contaminant detected by the detection means is at or below a prescribed value.

Abstract: A light emitting element manufacturing method of allowing a semiconductor laminated part which includes a light emitting layer and comprises a group-III nitride semiconductor to grow on a substrate surface in which protrusions are formed in a period which is larger than an optical wavelength of light emitted from the light emitting layer and is smaller than a coherent length of the light, the method includes: forming a buffer layer along the substrate surface having the protrusions; allowing crystal nuclei which have facet surfaces and are separated from each other to grow on the buffer layer such that the crystal nuclei include at least one protrusion; and allowing a planarization layer to grow on the buffer layer in which the crystal nuclei are formed, wherein the crystal nuclei have a flat upper surface.

Abstract: An LED element includes a substrate, a semiconductor lamination part that includes a light-emitting layer formed on a front surface of the substrate, a reflecting portion formed on a back surface of the substrate, and an electrode formed on the semiconductor lamination part. The electrode includes a diffusion electrode layer formed on the semiconductor lamination part and a moth-eye layer which is formed on the diffusion electrode layer and of which the front surface forms the transmissive moth-eye surface having depression parts or projection parts formed with a period smaller than twice the optical wavelength of the light emitted from the light-emitting layer.

Abstract: A light emitting element manufacturing method of allowing a semiconductor laminated part which includes a light emitting layer and includes a group-III nitride semiconductor to grow on a substrate surface in which protrusions are formed in a period which is larger than an optical wavelength of light emitted from the light emitting layer and is smaller than a coherent length of the light, includes: forming a buffer layer along the substrate surface having the protrusions; allowing crystal nuclei which have facet surfaces and are separated from each other to grow on the buffer layer such that the crystal nuclei include at least one protrusion; and allowing a planarization layer to grow on the buffer layer in which the crystal nuclei are formed.

Abstract: An LED element capable of further improving the light extraction efficiency and its manufacturing method are provided.

Abstract: A light emitting element manufacturing method of allowing a semiconductor laminated part which includes a light emitting layer and includes a group-III nitride semiconductor to grow on a substrate surface in which protrusions are formed in a period which is larger than an optical wavelength of light emitted from the light emitting layer and is smaller than a coherent length of the light, includes: forming a buffer layer along the substrate surface having the protrusions; allowing crystal nuclei which have facet surfaces and are separated from each other to grow on the buffer layer such that the crystal nuclei include at least one protrusion; and allowing a planarization layer to grow on the buffer layer in which the crystal nuclei are formed.