Abstract: A fluid identification device of long life for identification of a target fluid. The device uses at least two liquid type detection parts each of which is equipped with both of a temperature detector and a heating element, selects electrical conduction to any one of the heating elements, and identifies the target fluid based on a fluid temperature detection signal of the temperature detector in the fluid detection part not including the heating element whose electrical conduction has been selected and an output of the fluid type detection circuit.

Abstract: A semiconductor manufacturing apparatus includes a first program on a controller and a second program on an interface board between the controller and controlled devices. Both of the programs update their own counters and exchange their counter values with each other, serving as bi-directional software watchdog timers (WDT). If a counter value of the first program on the controller sent to the second program on the interface board is determined to be abnormal by the second program, the second program on the interface board sends commands to the controlled devices to terminate output so that the apparatus is navigated to a safe mode. The first program similarly monitors the counter values of the second program for anomalies. This bi-directional software WDT can be implemented as add-on to software programs that already exist in the controller and the interface board, therefore, this implementation does not incur extra cost of hardware of the apparatus.

Abstract: A fluid identification sensor that includes a fluid identification element and a fluid temperature detecting element that is disposed separately at a predefined distance from the fluid identification element is used. A voltage is applied to the fluid identification element for a prescribed time to heat a identification target fluid. A first output value that is an electrical output value corresponding to a first temperature of a fluid identification element and a second output value that is an electrical output value corresponding to a second temperature of a fluid identification element are obtained. A fluid identification is carried out by comparing a rate of change of the first output value and the second output value with a rate of change of a first output value and a second output value for a reference fluid, which has been measured in advance.

Abstract: A device for detecting leakage of liquid in a tank, capable of detecting the leakage at high accuracy and sensitivity for a wide range of a leakage quantity. A flow rate sensor section attached to a measurement fine tube (13b) includes temperature sensors (133, 134) and an indirectly heated sensor (135). A leakage detection control section connected to a pressure sensor (137) for measuring a liquid level and to the flow rate sensor section has a voltage generation circuit (67) for applying a voltage to a heater (163) of the indirectly heated sensor, a first leakage detection circuit (71), and a second leakage detection circuit for generating an output corresponding to temperature sensed by the indirectly heated sensor (135).

Abstract: A device for detecting leakage of liquid in a tank, capable of detecting the leakage at high accuracy and sensitivity for a wide range of a leakage quantity. A flow rate sensor section attached to a measurement fine tube (13b) includes temperature sensors (133, 134) and an indirectly heated sensor (135). A leakage detection control section connected to a pressure sensor (137) for measuring a liquid level and to the flow rate sensor section has a voltage generation circuit (67) for applying a voltage to a heater (163) of the indirectly heated sensor, a first leakage detection circuit (71), and a second leakage detection circuit for generating an output corresponding to temperature sensed by the indirectly heated sensor (135).

Abstract: A processing apparatus includes: a tank configured to store water; vapor generating unit configured to turn the water supplied from the tank into vapor; a processing chamber in which vapor supplied from the vapor generating unit is used to remove residues from a workpiece; cooling unit; and filtering unit. The cooling unit cools waste liquid ejected from the processing chamber. The filtering unit is provided between the cooling unit and the tank, and the filtering unit filters the waste liquid cooled in the cooling unit. A processing method includes: supplying vapor into a processing chamber; removing residues from a workpiece using the vapor; cooling waste liquid containing the removed residues to precipitate the residues as solids; and filtering the waste liquid containing the precipitates.

Abstract: A apparatus for detecting leakage of a liquid in a tank, where erroneous detection is suppressed and which is capable of fine and accurate display and warning that depend on the degree of increase and decrease in the quantity of the liquid. The apparatus performs a first liquid quantity variation detection for detecting liquid quantity variation based on a flow rate corresponding value that is calculated using an output of a flow rate sensor section and also performs a second liquid quantity variation detection for detecting liquid quantity variation based on a time variation rate of a liquid level that is measured by the pressure sensor.

Abstract: A cleaning apparatus to remove organic substances deposited onto a substrate, the apparatus includes a transport unit configured to transport the substrate, a water steam ejection unit configured to eject a heated water steam to a face of the substrate to be transported deposited with the organic substances, and a physical force applying unit configured to apply a physical force to the organic substances deposited onto the substrate to be transported.

Abstract: A recipe operation system includes (i) at least one recipe comprised of multiple operation steps arranged in order; and (ii) a recipe execution program including a subroutine which is called every time steps are changed, to select a next step to be executed from the steps arranged in order. The steps are executed in order different from the arranged order, and at least one step is repeated.

Abstract: There is disclosed a method including an applying step of applying a sealing agent onto either one of two substrates, a dropping step of dropping a predetermined amount of a liquid crystal onto either one of the two substrates, a leaving step of leaving the substrate on which the liquid crystal has been dropped to stand under a reduced pressure atmosphere for a predetermined time, and a bonding step of bonding the two substrates onto each other under the reduced pressure atmosphere, after leaving the substrate on which the liquid crystal has been dropped under the reduced pressure atmosphere for the predetermined time.

Abstract: A bus bar for power supply is comprised of a pipe-shaped outer conductor and at least one inner conductor inserted therein. The inner conductor is also formed in a pipe shape and serves as a coolant flow passage. Insulation is interposed between the outer conductor and the inner conductor to electrically isolate them from each other.

Abstract: A running insulator coated cable is straightened in a straightening section and then passed through a length measurement section for measuring a length of cable. The cable is then temporarily held stationary, and its coating insulator is circumferentially cut at a given point. The cable is then run again, and a given portion of its coating insulator is longitudinally cut in relation to the circumferentially cut point. Two further circumferential cuts are made on the coating insulator, and a portion of coating between these circumferential cuts is longitudinally cut. The cable is then separated at a given point on a portion of cable corresponding to the latter longitudinally cut coating portion.