Patents by Inventor Tsutomu Yoshimura

Tsutomu Yoshimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11835849
    Abstract: Provided are an actinic ray-sensitive or radiation-sensitive resin composition containing a resin (A), in which the resin (A) includes a repeating unit having an acidic group and a repeating unit having an acid-decomposable group, a content of the repeating unit having an acidic group is 15% by mole or more with respect to all the repeating units in the resin (A), a content of the repeating unit having an acid-decomposable group is more than 20% by mole with respect to all the repeating units in the resin (A), a glass transition temperature of the resin (A) is 145° C. or lower, and the actinic ray-sensitive or radiation-sensitive resin composition is used for formation of a film having a film thickness of 2 ?m or more; and a resist film, a pattern forming method, and a method for manufacturing an electronic device, each using the actinic ray-sensitive or radiation-sensitive resin composition.
    Type: Grant
    Filed: February 14, 2023
    Date of Patent: December 5, 2023
    Assignee: FUJIFILM Corporation
    Inventors: Tsutomu Yoshimura, Yasunori Yonekuta, Naoya Hatakeyama, Kohei Higashi, Yoichi Nishida
  • Publication number: 20230375925
    Abstract: The present invention provides an actinic ray-sensitive or radiation-sensitive resin composition containing: (A) a resin which has a repeating unit derived from a compound represented by Formula (1) as defined herein; and (B) a compound which generates an acid by irradiation with an actinic ray or a radiation. The present invention also provides an actinic ray-sensitive or radiation-sensitive film, a pattern forming method, a method for manufacturing an electronic device, a compound and a resin.
    Type: Application
    Filed: July 21, 2023
    Publication date: November 23, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Tsutomu YOSHIMURA, Masafumi KOJIMA, Akiyoshi GOTO, Yuma KURUMISAWA
  • Publication number: 20230367210
    Abstract: An actinic ray-sensitive or radiation-sensitive resin composition containing: (A) a resin that has a repeating unit which has an aromatic ring having a halogen atom or an organic group having a halogen atom, and having a halogen atom-free substituent; and (Y) an ionic compound having a halogen atom in a cationic moiety, in which a content of the ionic compound (Y) is 5.0% by mass or more with respect to a total solid content of the composition.
    Type: Application
    Filed: July 19, 2023
    Publication date: November 16, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Tsutomu YOSHIMURA, Masafumi KOJIMA, Akiyoshi GOTO, Yuma KURUMISAWA
  • Publication number: 20230221640
    Abstract: The present invention provides an actinic ray-sensitive or radiation-sensitive resin composition having excellent defect suppressing properties, a resist film, a pattern forming method, and a method for manufacturing an electronic device. The actinic ray-sensitive or radiation-sensitive resin composition according to an embodiment of the present invention is an actinic ray-sensitive or radiation-sensitive resin composition including a resin A having a repeating unit a1 having a group represented by any one of General Formula (1), . . . , or (6), which is a nonionic group that decomposes upon irradiation with actinic rays or radiation, and an additive B that is at least any one of an acid having an acid group having a pKa of ?3.60 or more, or a salt having a structure in which a hydrogen atom of an acid group having a pKa of ?3.60 or more is substituted with a cation.
    Type: Application
    Filed: February 24, 2023
    Publication date: July 13, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Tsutomu YOSHIMURA, Akiyoshi Goto, Kyohei Sakita, Kazuhiro Karumo
  • Patent number: 11687001
    Abstract: Provided are an actinic ray-sensitive or radiation-sensitive resin composition containing a resin (A), in which the resin (A) includes a repeating unit having an acidic group and a repeating unit having an acid-decomposable group, a content of the repeating unit having an acidic group is 15% by mole or more with respect to all the repeating units in the resin (A), a content of the repeating unit having an acid-decomposable group is more than 20% by mole with respect to all the repeating units in the resin (A), a glass transition temperature of the resin (A) is 145° C. or lower, and the actinic ray-sensitive or radiation-sensitive resin composition is used for formation of a film having a film thickness of 2 ?m or more; and a resist film, a pattern forming method, and a method for manufacturing an electronic device, each using the actinic ray-sensitive or radiation-sensitive resin composition.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: June 27, 2023
    Assignee: FUJIFILM Corporation
    Inventors: Tsutomu Yoshimura, Yasunori Yonekuta, Naoya Hatakeyama, Kohei Higashi, Yoichi Nishida
  • Publication number: 20230194983
    Abstract: Provided are an actinic ray-sensitive or radiation-sensitive resin composition containing a resin (A), in which the resin (A) includes a repeating unit having an acidic group and a repeating unit having an acid-decomposable group, a content of the repeating unit having an acidic group is 15% by mole or more with respect to all the repeating units in the resin (A), a content of the repeating unit having an acid-decomposable group is more than 20% by mole with respect to all the repeating units in the resin (A), a glass transition temperature of the resin (A) is 145° C. or lower, and the actinic ray-sensitive or radiation-sensitive resin composition is used for formation of a film having a film thickness of 2 µm or more; and a resist film, a pattern forming method, and a method for manufacturing an electronic device, each using the actinic ray-sensitive or radiation-sensitive resin composition.
    Type: Application
    Filed: February 14, 2023
    Publication date: June 22, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Tsutomu YOSHIMURA, Yasunori YONEKUTA, Naoya HATAKEYAMA, Kohei HIGASHI, Yoichi NISHIDA
  • Patent number: 11650501
    Abstract: Provided are an actinic ray-sensitive or radiation-sensitive resin composition containing a resin (A), in which the resin (A) includes a repeating unit having an acidic group and a repeating unit having an acid-decomposable group, a content of the repeating unit having an acidic group is 15% by mole or more with respect to all the repeating units in the resin (A), a content of the repeating unit having an acid-decomposable group is more than 20% by mole with respect to all the repeating units in the resin (A), a glass transition temperature of the resin (A) is 145° C. or lower, and the actinic ray-sensitive or radiation-sensitive resin composition is used for formation of a film having a film thickness of 2 ?m or more; and a resist film, a pattern forming method, and a method for manufacturing an electronic device, each using the actinic ray-sensitive or radiation-sensitive resin composition.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: May 16, 2023
    Assignee: FUJIFILM Corporation
    Inventors: Tsutomu Yoshimura, Yasunori Yonekuta, Naoya Hatakeyama, Kohei Higashi, Yoichi Nishida
  • Publication number: 20230139009
    Abstract: An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition which has an excellent resolution and is capable of forming a pattern having suppressed defects. Another object of the present invention is to provide a resist film, a pattern forming method, and a method for manufacturing an electronic device, each relating to the actinic ray-sensitive or radiation-sensitive resin composition.
    Type: Application
    Filed: December 7, 2022
    Publication date: May 4, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Tsutomu YOSHIMURA, Masafumi Kojima
  • Publication number: 20230004086
    Abstract: The present invention provides an actinic ray-sensitive or radiation-sensitive resin composition containing a resin (A) which contains a repeating unit (a1) having a specific ring structure, a compound (B) which generates an acid by an irradiation with an actinic ray or a radiation, and a specific compound (C) which is decomposed by an irradiation with an actinic ray or a radiation so that an acid-trapping property is lowered; an actinic ray-sensitive or radiation-sensitive film formed of the actinic ray-sensitive or radiation-sensitive resin composition; a pattern forming method using the actinic ray-sensitive or radiation-sensitive resin composition; and a method for manufacturing an electronic device.
    Type: Application
    Filed: June 9, 2022
    Publication date: January 5, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Tsutomu Yoshimura, Akiyoshi Goto, Masafumi Kojima, Kyohei Sakita
  • Patent number: 11345765
    Abstract: A method for recovering an unreacted ?,?-ethylenically unsaturated nitrile monomer contained in a latex of a nitrile rubber obtained by emulsion polymerizing a monomer mixture comprising an ?,?-ethylenically unsaturated nitrile monomer and a carboxyl group-containing monomer is provided. The method includes the steps of: adjusting a pH of the latex of the carboxyl group-containing nitrile rubber to 6.5 or more; decompressing the latex of the carboxyl group-containing nitrile rubber having the pH adjusted to 6.5 or more under a heating condition; and recovering a component evaporated by the decompression under the heating condition.
    Type: Grant
    Filed: March 13, 2019
    Date of Patent: May 31, 2022
    Assignee: ZEON CORPORATION
    Inventors: Tsutomu Yoshimura, Tomohito Yamanoue
  • Patent number: 11198750
    Abstract: A method for producing a carboxyl group-containing nitrile rubber including the steps of: polymerizing a monomer mixture including an ?,?-ethylenically unsaturated nitrile monomer and a carboxyl group-containing monomer in a solvent; terminating a polymerization reaction by adding a nitrous acid salt and a water-insoluble hydroquinone as polymerization terminators to the polymerization system, thereby obtaining a dispersion of the carboxyl group-containing nitrile rubber having a pH of 7 or below; and coagulating the dispersion of the carboxyl group-containing nitrile rubber, thereby obtaining the carboxyl group-containing nitrile rubber in the solid state, wherein the amount of the nitrous acid salt to be used is 0.15 parts by weight or less relative to 100 parts by weight of the monomer mixture used in the polymerization reaction.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: December 14, 2021
    Assignee: ZEON CORPORATION
    Inventor: Tsutomu Yoshimura
  • Patent number: 11161920
    Abstract: A method of producing a carboxyl group-containing nitrile rubber including a coagulation step of coagulating a carboxyl group-containing nitrile rubber component by mixing a monovalent metal salt and a polymer flocculating agent into a carboxyl group-containing nitrile rubber latex having an iodine value of 120 or less, wherein the monovalent metal salt is compounded in an amount of 3 to 25 parts by weight and the polymer flocculating agent is compounded in an amount of 0.
    Type: Grant
    Filed: March 23, 2018
    Date of Patent: November 2, 2021
    Assignee: ZEON CORPORATION
    Inventors: Taiki Herai, Tsutomu Yoshimura
  • Publication number: 20210271162
    Abstract: An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition, in which the cross-sectional shape of a pattern thus formed has excellent rectangularity and a dimensional variation of the line width of the pattern thus formed hardly occurs even over time after preparation. Furthermore, another object of the present invention is to provide a resist film, a pattern forming method, and a method for manufacturing an electronic device, each using the actinic ray-sensitive or radiation-sensitive resin composition. The actinic ray-sensitive or radiation-sensitive resin composition of an embodiment of the present invention includes a resin having a polarity that increases through decomposition by an action of an acid, a compound that generates an acid upon irradiation with actinic rays or radiation, and a halogen-based solvent, in which a content of the halogen-based solvent is from 1 ppb by mass to 50 ppm by mass with respect to a total mass of the composition.
    Type: Application
    Filed: May 7, 2021
    Publication date: September 2, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Keiyu OU, Naohiro Tango, Hidenori Takahashi, Akiyoshi Goto, Takeshi Kawabata, Tsutomu Yoshimura
  • Publication number: 20210055653
    Abstract: Provided are an actinic ray-sensitive or radiation-sensitive resin composition containing a resin (A), in which the resin (A) includes a repeating unit having an acidic group and a repeating unit having an acid-decomposable group, a content of the repeating unit having an acidic group is 15% by mole or more with respect to all the repeating units in the resin (A), a content of the repeating unit having an acid-decomposable group is more than 20% by mole with respect to all the repeating units in the resin (A), a glass transition temperature of the resin (A) is 145° C. or lower, and the actinic ray-sensitive or radiation-sensitive resin composition is used for formation of a film having a film thickness of 2 ?m or more; and a resist film, a pattern forming method, and a method for manufacturing an electronic device, each using the actinic ray-sensitive or radiation-sensitive resin composition.
    Type: Application
    Filed: March 3, 2020
    Publication date: February 25, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Tsutomu YOSHIMURA, Yasunori YONEKUTA, Naoya HATAKEYAMA, Kohei HIGASHI, Yoichi NISHIDA
  • Publication number: 20210002391
    Abstract: A method for recovering an unreacted ?,?-ethylenically unsaturated nitrile monomer contained in a latex of a nitrile rubber obtained by emulsion polymerizing a monomer mixture comprising an ?,?-ethylenically unsaturated nitrile monomer and a carboxyl group-containing monomer is provided. The method includes the steps of: adjusting a pH of the latex of the carboxyl group-containing nitrile rubber to 6.5 or more; decompressing the latex of the carboxyl group-containing nitrile rubber having the pH adjusted to 6.5 or more under a heating condition; and recovering a component evaporated by the decompression under the heating condition.
    Type: Application
    Filed: March 13, 2019
    Publication date: January 7, 2021
    Applicant: ZEON CORPORATION
    Inventors: Tsutomu YOSHIMURA, Tomohito YAMANOUE
  • Publication number: 20200301281
    Abstract: A resist composition includes a resin (A) including at least one repeating unit selected from the group consisting of a repeating unit represented by General Formula (1) as defined herein and a repeating unit represented by General Formula (2) as defined herein, and a repeating unit having an acid-decomposable group.
    Type: Application
    Filed: June 9, 2020
    Publication date: September 24, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Yasunori Yonekuta, Naoya Hatakeyama, Tsutomu Yoshimura
  • Publication number: 20200283557
    Abstract: A method for producing a carboxyl group-containing nitrile rubber including the steps of: polymerizing a monomer mixture including an ?,?-ethylenically unsaturated nitrile monomer and a carboxyl group-containing monomer in a solvent; terminating a polymerization reaction by adding a nitrous acid salt and a water-insoluble hydroquinone as polymerization terminators to the polymerization system, thereby obtaining a dispersion of the carboxyl group-containing nitrile rubber having a pH of 7 or below; and coagulating the dispersion of the carboxyl group-containing nitrile rubber, thereby obtaining the carboxyl group-containing nitrile rubber in the solid state, wherein the amount of the nitrous acid salt to be used is 0.15 parts by weight or less relative to 100 parts by weight of the monomer mixture used in the polymerization reaction.
    Type: Application
    Filed: March 16, 2018
    Publication date: September 10, 2020
    Applicant: ZEON CORPORATION
    Inventor: Tsutomu YOSHIMURA
  • Publication number: 20200031955
    Abstract: A method of producing a carboxyl group-containing nitrile rubber including a coagulation step of coagulating a carboxyl group-containing nitrile rubber component by mixing a monovalent metal salt and a polymer flocculating agent into a carboxyl group-containing nitrile rubber latex having an iodine value of 120 or less, wherein the monovalent metal salt is compounded in an amount of 3 to 25 parts by weight and the polymer flocculating agent is compounded in an amount of 0.
    Type: Application
    Filed: March 23, 2018
    Publication date: January 30, 2020
    Applicant: ZEON CORPORATION
    Inventors: Taiki HERAI, Tsutomu YOSHIMURA
  • Publication number: 20200019058
    Abstract: An actinic ray-sensitive or radiation-sensitive resin composition includes: a resin, in which the actinic ray-sensitive or radiation-sensitive resin composition has a concentration of a solid content of 10% by mass or more, and in which the resin includes: a repeating unit A which is a repeating unit derived from a monomer allowing a homopolymer formed therefrom to have a glass transition temperature of 50° C. or lower, and a repeating unit B which is a repeating unit having an acid-decomposable group, a content of the repeating unit B is 20% by mole or less with respect to all the repeating units in the resin, and at least one of the repeating unit contained in the resin is a repeating unit having an aromatic ring.
    Type: Application
    Filed: September 23, 2019
    Publication date: January 16, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Naoya HATAKEYAMA, Yasunori YONEKUTA, Tsutomu YOSHIMURA, Kohei HIGASHI, Yoichi NISHIDA
  • Publication number: 20160185890
    Abstract: A nitrile copolymer rubber obtained by emulsion polymerization using 2,2,4,6,6-pentamethylheptane-4-thiol as a chain transfer agent and which has a polymer pH of 8.5 or less is provided. The polymer pH is preferably 8.0 or less. According to the present invention, a nitrile copolymer rubber which is able to give a cross-linked rubber which is excellent in heat resistance and compression set resistance can be provided.
    Type: Application
    Filed: September 30, 2014
    Publication date: June 30, 2016
    Applicant: ZEON CORPORATION
    Inventor: Tsutomu YOSHIMURA