Abstract: A molding die has a lower holder, an intermediate holder, an upper holder, a lock member, an upper link bar, a lower link bar, a restriction member, and a drive part. A movement of the lock member in a molding die opening direction or a molding die closing direction is restricted by the intermediate holder. The upper link bar has a first retaining groove in which the lock member fits when being located at a molding die closing position. The lower link bar has a second retaining groove in which the lock member fits and a release portion that enables the lock member to be released from the first retaining groove. The restriction member is movable between a restriction position that prevents the lock member from fitting in the second retaining groove and a free position that enables the lock member to fit in the second retaining groove.

Abstract: Provided is an imprint apparatus that imprints a pattern formed on a mold onto a substrate. The imprint apparatus includes a substrate holder that holds the substrate and can move in a direction along the surface of the substrate; a gas supply unit for supplying a gas into a space between a pattern part of the mold and the substrate; and a wall part that is disposed so as to enclose the space that is supplied with gas, wherein at a position opposed to the substrate and the mold, the wall part faces the substrate holder or the substrate with a gap therebetween.

Abstract: A liquid supply apparatus which supplies a liquid to an object, includes a discharger configured to discharge a liquid; a driving mechanism configured to arrange the discharger at a plurality of positions including a first position and a second position; a first exhaust port arranged so as to face the discharger arranged at the first position and configured to exhaust heat generated by the discharger arranged at the first position; and a second exhaust port arranged so as to face the discharger arranged at the second position and configured to exhaust heat generated by the discharger arranged at the second position.

Abstract: The present invention provides an imprint apparatus including a chamber configured to define a first space including a processing unit which includes a discharge unit configured to discharge an imprint material onto a substrate and is configured to perform an imprint process of forming a pattern of the imprint material on the substrate by using a mold, and an enclosure configured to define a second space including a tank configured to store the imprint material supplied to the discharge unit, wherein the tank has a first opening open to the second space, and the enclosure has a supply port configured to supply, to the second space via the first opening, a gas cleaner than a gas supplied to the first space.

Abstract: A head cleaning method performed by a liquid discharge apparatus including a head configured to discharge a resist containing an acrylic monomer as a main component is provided. The method comprises using a cleaning solution to clean a discharge surface of the head and a vicinity of the discharge surface, wherein a difference between a dissolution parameter (SP value) of the cleaning solution and a dissolution parameter of the resist falls within a range of ±2.

Abstract: A liquid discharge apparatus comprises a head including a discharge port surface, a first reservoir that stores the liquid to be supplied to the head, a flexible member, separating an inner space of the first reservoir into a first chamber that stores the liquid and a second chamber that stores an operation liquid, a second reservoir communicating with the second chamber, the second reservoir storing the operation liquid to be supplied to the second chamber, the second reservoir being disposed in such a manner that a liquid surface of the operation liquid stored in the second reservoir is positioned below the discharge port surface, and an adjustment unit that performs adjustment in such a manner that a position of the liquid surface of the operation liquid in the second reservoir falls within a predetermined range in a state where the second reservoir is opened to atmosphere.

Abstract: An imprint material discharging device includes a container member that includes a container section that contains an imprint material, a channel that is connected to the container section, and a discharging member that includes a discharge port and an energy generating element. The channel has a first opening and a second opening, the first opening supplying the imprint material into the channel, the second opening supplying the imprint material supplied from the first opening to the container section. A filter that filters the imprint material is disposed between the first opening and the second opening of the channel, and the imprint material supplied into the channel from the first opening is supplied to the container section from the second opening without passing through a region disposed between the energy generating element and the discharge port.

Abstract: The present invention provides an imprint apparatus which forms a pattern on an imprint material on a shot region on a substrate by using a mold, the apparatus comprising a supply unit having a plurality of discharge outlets each of which is configured to discharge the imprint material, and configured to supply the imprint material to the substrate, and a control unit configured to control the supply unit so as to supply the imprint material from the plurality of discharge outlets onto the shot region, wherein the control unit determines discharge outlets to be used to supply the imprint material to the shot region among the plurality of discharge outlets based on discharge history information indicating a history of discharge of the imprint material from each of the plurality of discharge outlets.

Abstract: A dielectric heating system which is provided with a high frequency oscillator, a housing which forms part of a waveguide and is provided with a loading opening and unloading opening, first and second conductive closing members which respectively close the loading opening and the unloading opening from the inner side of the housing, and a first position holding member which holds the object to be heated inside the housing, which makes the first conductive closing member slide to open the loading opening and charges the object to be heated into the housing, and which makes the second conductive closing member slide to open the unloading opening and unload the object to outside the housing.

Abstract: A digital pen includes: a light emitting section; a writing section which has a tip part and transmits light emitted from the light emitting section; and a main body section which supports the writing section in a displaceable manner, detects a pressing on the writing section and causes the light emitting section to emit light. The writing section includes a support member supported by the main body section, and an elastic member which has the tip part and is held by the support member.

Abstract: A liquid discharge apparatus includes: a container divided by a dividing member into a first chamber configured to contain a first liquid to be discharged from a discharge port and a second chamber configured to contain a second liquid; a supply unit configured to supply the second liquid into the second chamber in accordance with decrease of the first liquid contained in the first chamber; and a measurement unit configured measure flow of the first liquid into the second chamber.

Abstract: A liquid discharge apparatus includes: a container divided into a first chamber and a second chamber by a dividing member, the first chamber including a discharge outlet that discharges a liquid and configured to contain the liquid, the second chamber configured to contain a fluid; a tank configured to store the fluid; a connecting portion that provides fluid communication between the tank and the second chamber; a measurement unit configured to measure an amount of the fluid supplied from the tank to the second chamber; and a controller configured to obtain an amount of the liquid contained in the first chamber based on a measurement result from the measurement unit.

Abstract: The present invention provides an imprint apparatus which performs an imprint process of dispensing an imprint material on a substrate and forming the imprint material dispensed on the substrate by using a mold, the apparatus comprising a dispensing unit configured to dispense an imprint material on the substrate, and including a tank which contains an imprint material, a dispenser which discharges the imprint material contained in the tank to the substrate, and a detection unit which detects a remaining amount of imprint material contained in the tank; and a control unit configured to perform control to supply an imprint material to the tank or exchange the dispensing unit based on a detection result obtained by the detection unit.

Abstract: Provided is an application device capable of extracting an imprinting material in which impurities are mixed from a container of the application device and supplying new imprinting material to the container of the application device. An application device according to the present disclosure is used to supply an imprinting material to a substrate in an imprinting apparatus that forms a pattern on the imprinting material on the substrate by using a mold. The application device includes a container unit that contains the imprinting material, and an ejecting unit that is provided on the container unit and that ejects the imprinting material contained in the container unit toward the substrate. The application device is detachably attachable to the imprinting apparatus.

Abstract: The present invention provides an imprint apparatus which performs an imprint process of molding an imprint material on a substrate using a mold and forming a pattern on the substrate, the apparatus including a substrate chuck configured to hold the substrate, a protective plate configured to surround the substrate chuck, and a suction mechanism configured to suction at least a part of a gap between the substrate chuck and the protective plate, wherein while the suction mechanism suctions at least the part of the gap, the substrate chuck holds a plate which is different from the substrate on which the pattern is to be formed.

Abstract: The present invention provides an imprint apparatus which forms a pattern on a substrate, the apparatus including a supply unit including a discharge outlet which discharges the imprint material and configured to supply the imprint material onto the substrate via the discharge outlet, and a generation unit configured to generate ions by irradiating, with soft X-rays, a second space away from a first space between the mold and the substrate, wherein the discharge outlet and the generation unit are arranged to sandwich a side face of the mold, and a charge is removed in the first space by supplying the ions generated in the second space to the first space.

Abstract: A manufacturing method of a fiber-containing dispersion includes obtaining a crude dispersion 20 containing fibers 10 and removing foreign substances by passing the crude dispersion 20 through a filter medium 40. The filter medium 40 is constituted with a plate material having a plurality of opening portions 42 through which the crude dispersion 20 is passed and non-opening portions 44 which partition the plurality of opening portions 42 from one another. The filter medium 40 satisfies the following relational expressions. ½ of average major-axis length of fibers?Minor-axis width of opening portions 42?5 times the average major-axis length of fibers 10??(1) Minimum width of non-opening portions 44?Average major-axis length of fibers 10??(2) Aperture ratio of filter medium 40?0.9%.

Abstract: The present invention provides an imprint, apparatus which performs an imprint process of transferring a pattern onto a substrate, the apparatus comprising a deforming unit configured to deform the pattern surface by applying a force to the mold, an obtaining unit configured to obtain thickness information of the mold, a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by the obtaining unit, so that the pattern surface has a target, shape in the imprint process, and a control unit configured to control the deforming unit, to apply the force calculated by the calculation unit to the mold in the imprint process.

Abstract: Provided is an imprint apparatus that imprints a pattern formed on a mold onto a substrate. The imprint apparatus includes a substrate holder that holds the substrate and can move in a direction along the surface of the substrate; a gas supply unit for supplying a gas into a space between a pattern part of the mold and the substrate; and a wall part that is disposed so as to enclose the space that is supplied with gas, wherein at a position opposed to the substrate and the mold, the wall part faces the substrate holder or the substrate with a gap therebetween.

Abstract: A method of producing a semiconductor module which includes a resin molded package and a coolant passage is provided. The resin molded package is made up of a thermosetting resin-made mold and a thermoplastic resin-made mold. The resin molded package is formed by making the thermoplastic resin-made mold, placing the thermoplastic resin-made mold and a semiconductor sub-assembly made up of a power semiconductor chip, heat spreaders, terminals, etc., and then forming the thermosetting resin-made mold. Specifically, the thermosetting resin-made mold is made after the thermoplastic resin-made mold, thereby creating a high degree of adhesion of the thermosetting resin-made mold to the thermoplastic resin-made mold before the thermosetting resin-made mold is hardened completely, thereby forming firmly an adhered interface between the thermosetting resin-made mold and the thermoplastic resin-made mold.