Abstract: The present invention provides a pattern measuring apparatus (600) that: acquires the image contour of a circuit pattern formed by transferring design data; classifies the acquired image contour into shape structures; calculates normal vectors for each shape structure; maps the shape structures to the image contour; uses at least one normal direction for each shape structure to stabilize the normal directions to the image contour; and uses the normal vectors for each shape structure to determine the position of a SEM contour.

Abstract: An image correcting device includes an image input section, an image storage section, a correction table storage section, a geometry correcting section for geometrically correcting an input image stored in the image storage section, based on a correction table, and an image output section for output of the input image corrected by the geometry correcting section, wherein the correction table is created by calculating longitudes and latitudes that correspond to respective pixel positions on an output image that becomes the corrected image; calculating corrected latitudes through correction of the latitudes, based on the longitudes and the latitudes; calculating light directions in a subject space, the light directions corresponding to the longitudes and the corrected latitudes; and calculating positions on the input image as resampling positions, the positions corresponding to the respective light directions; and associating the resampling positions with the pixel positions on the output image.

Abstract: An image correcting device includes an image input section, image storage section, correction table storage section, geometry correcting section subjecting an input image to geometrical correction based on a correction table, and image output section outputting the input image as a corrected image. The table is created by: calculating a pair of angles (?, ?) corresponding to each pixel position on the output image as the corrected image; calculating a light direction based on an intersection line between a plane obtained by rotating a YZ plane by angle ? about Y axis and that by rotating an XZ plane by angle ? about X axis, in three dimensional Cartesian coordinate system with origin at a projection center of the input image; calculating a position on the input image corresponding to the light direction, as a resampling position; and associating the resampling position with the pixel position on the output image.

Abstract: A dimension measuring apparatus for measuring a dimension between a first contour data which is an evaluation reference of a pattern to be evaluated and a second contour data which is the pattern to be evaluated generates first correspondence information between a point on the first contour data and a point on the second contour data, determines consistency of a correspondence included in the first correspondence information, corrects an inconsistent correspondence, and generates second correspondence information, when associating a point on the first contour data and a point on the second contour data with each other.

Abstract: A defect inspection method comprising: picking up an image of a subject under inspection to thereby acquire an inspection image; extracting multiple templates corresponding to multiple regions, respectively from design data of the subject under inspection; finding a first misregistration amount between the inspection image and the design data using a first template as any one template selected from among the plural templates; finding a second misregistration amount between the inspection image and the design data using a second template other than the first template, the second template being selected from among the plural templates, and the first misregistration-amount; and converting the design data, misregistration thereof being corrected using the first misregistration-amount, and the second misregistration-amount, into a design data image, and comparing the design data image with the inspection image to thereby detect a defect of the subject under inspection.

Abstract: An image correction device geometrically corrects an input image, based on the correction table, which is generated by obtaining a light-direction vector in an objective space corresponding to each pixel position on a corrected image, based on a first projection center located on the rear side of a second projection center as the projection center of the input image in the objective space with respect to the direction of an optical axis corresponding to the input image, obtaining from the light-direction vector an origin-based light-direction vector indicating a direction from the second projection center in which a point corresponding to each pixel position exists in the objective space, exacting a position on the input image corresponding to the origin-based light-direction vector, and recording in the correction table the resampling position in correspondence with each pixel position in the corrected image.

Abstract: The present invention provides a pattern measuring apparatus (600) that: acquires the image contour of a circuit pattern formed by transferring design data; classifies the acquired image contour into shape structures; calculates normal vectors for each shape structure; maps the shape structures to the image contour; uses at least one normal direction for each shape structure to stabilize the normal directions to the image contour; and uses the normal vectors for each shape structure to determine the position of a SEM contour.

Abstract: An image correction device geometrically corrects an input image, based on the correction table, which is generated by obtaining a light-direction vector in an objective space corresponding to each pixel position on a corrected image, based on a first projection center located on the rear side of a second projection center as the projection center of the input image in the objective space with respect to the direction of an optical axis corresponding to the input image, obtaining from the light-direction vector an origin-based light-direction vector indicating a direction from the second projection center in which a point corresponding to each pixel position exists in the objective space, exacting a position on the input image corresponding to the origin-based light-direction vector, and recording in the correction table the resampling position in correspondence with each pixel position in the corrected image.

Abstract: An image correcting device includes an image input section, image storage section, correction table storage section, geometry correcting section subjecting an input image to geometrical correction based on a correction table, and image output section outputting the input image as a corrected image. The table is created by: calculating a pair of angles (?, ?) corresponding to each pixel position on the output image as the corrected image; calculating a light direction based on an intersection line between a plane obtained by rotating a YZ plane by angle ? about Y axis and that by rotating an XZ plane by angle ? about X axis, in three dimensional Cartesian coordinate system with origin at a projection center of the input image; calculating a position on the input image corresponding to the light direction, as a resampling position; and associating the resampling position with the pixel position on the output image.

Abstract: An image correcting device includes an image input section, an image storage section, a correction table storage section, a geometry correcting section for geometrically correcting an input image stored in the image storage section, based on a correction table, and an image output section for output of the input image corrected by the geometry correcting section, wherein the correction table is created by calculating longitudes and latitudes that correspond to respective pixel positions on an output image that becomes the corrected image; calculating corrected latitudes through correction of the latitudes, based on the longitudes and the latitudes; calculating light directions in a subject space, the light directions corresponding to the longitudes and the corrected latitudes; and calculating positions on the input image as resampling positions, the positions corresponding to the respective light directions; and associating the resampling positions with the pixel positions on the output image.

Abstract: Provided is an image input device which includes a laser range finder and a camera, and is capable of automatically calibrating the laser range finder and the camera at an appropriate timing without using special equipment. The image input device includes the laser range finder which measures distance information of an object by using invisible light and the camera which measures color information of the object. In order to detect a calibration error between the laser range finder and the camera, an invisible light filter which blocks visible light and transmits invisible light is automatically attached to a lens of the camera by a switching operation between two kinds of lenses. By the camera to which the invisible light filter is being attached, a pattern of the invisible light projected onto the object from the laser range finder is photographed as a visible image.

Abstract: In a stereoscopic display system, comprising a display and a lens array, it is difficult to manufacture the lens array with lens spacing at high accuracy as designed, and it is also difficult to attain high installation accuracy when the display and the lens array are combined together. An image of a stereoscopic display 27 with a display 1 and a lens array 2 integrated with each other is taken by a camera 3, and a positional relation of each pixel of the display 1 and each lens center of the lens array 2 is determined by a measuring system 4. Based on the matching positional relation information of the lenses and the pixels thus acquired, a stereoscopic image generating/outputting system 12 generates a stereoscopic image and supplies the image to the stereoscopic display 27.

Abstract: Provided is an image input device which includes a laser range finder and a camera, and is capable of automatically calibrating the laser range finder and the camera at an appropriate timing without using special equipment. The image input device includes the laser range finder which measures distance information of an object by using invisible light and the camera which measures color information of the object. In order to detect a calibration error between the laser range finder and the camera, an invisible light filter which blocks visible light and transmits invisible light is automatically attached to a lens of the camera by a switching operation between two kinds of lenses. By the camera to which the invisible light filter is being attached, a pattern of the invisible light projected onto the object from the laser range finder is photographed as a visible image.

Abstract: In a stereoscopic display system, comprising a display and a lens array, it is difficult to manufacture the lens array with lens spacing at high accuracy as designed, and it is also difficult to attain high installation accuracy when the display and the lens array are combined together. An image of a stereoscopic display 27 with a display 1 and a lens array 2 integrated with each other is taken by a camera 3, and a positional relation of each pixel of the display 1 and each lens center of the lens array 2 is determined by a measuring system 4. Based on the matching positional relation information of the lenses and the pixels thus acquired, a stereoscopic image generating/outputting system 12 generates a stereoscopic image and supplies the image to the stereoscopic display 27.