Abstract: A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a washing/development processing block, and an interface block. An exposure device is arranged adjacent to the interface block. A resist film is formed on a substrate by the resist film processing block. The substrate is washed and dried by the washing processing unit in the washing/development processing block before the substrate is subjected to the exposure processing by the exposure device.

Abstract: A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a drying/development processing block, and an interface block. An exposure device is arranged adjacent to the interface block. The drying/development processing block comprises a drying processing group. The interface block comprises an interface transport mechanism. A substrate is subjected to exposure processing by the exposure device, and subsequently transported to the drying processing group by the interface transport mechanism. The substrate is cleaned and dried by the drying processing group.

Abstract: A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a development processing block, and an interface block. An exposure device is arranged adjacent to an interface block. The interface block comprises a drying processing group including two drying processing units and an interface transport mechanism. After a substrate is subjected to exposure processing by the exposure device, the substrate is transported to the drying processing units in the drying processing group by the interface transport mechanism, where the substrate is subjected to cleaning and drying processings.

Abstract: A substrate processing apparatus comprises an indexer block, an anti-reflection film processing block, a resist film processing block, a development processing block, and an interface block. An exposure device is arranged adjacent to the interface block. The interface block comprises washing processing units and an interface transport mechanism. Before a substrate is subjected to exposure processing by the exposure device, the substrate is transported to a washing processing unit by the interface transport mechanism. The substrate is washed and dried by the washing processing unit.

Abstract: A substrate processing apparatus that removes an unwanted material on a surface of a peripheral portion of a substrate through etching by supplying etching liquid to the surface of the peripheral portion. The apparatus includes an etching liquid supplying mechanism that supplies the etching liquid to the peripheral portion of the substrate, and an annular member that has an inner periphery on or inside an outer periphery of the substrate and thereby defines a processing width to be processed by the etching liquid on the surface of the peripheral portion of the substrate. The annular member may be placed in close proximity to the surface of the peripheral portion of the substrate while securing a certain gap such that allows the annular member to come in contact with a liquid film of the etching liquid formed on the surface of the peripheral portion.

Abstract: A rolling bearing such as a rolling bearing for an alternator of an automobile, the life period of which is prevented from being shortened due to the temporal reduction of a radial internal clearance even in a high temperature environment. The rolling bearing includes a plurality of rolling elements rotatably arranged between an inner race and an outer race, and at least the inner race and the outer race are made of a steel material. An austenite residual rate of the inner race is smaller than an austenite residual rate of the outer race. The amount of dimensional expansion of the outer race due to the martensite transformation of residual austenite is larger than that of the inner race, so that the occurrence of clearance loss is suppressed even when dimensional expansion of the rolling elements occurs.

Abstract: The object of the invention is to prevent, in a rolling bearing such as a rolling bearing for an alternator of an automobile, the life period from being shortened due to the temporal reduction of a radial internal clearance even in a high temperature environment, particularly without increasing the cost as compared with a conventional rolling bearing of such a type. In order to attain the object, according to the invention, in a rolling bearing in which a plurality of rolling elements are rotatably disposed between an inner race and an outer race, and at least the inner race and the outer race are made of a steel material, an austenite residual rate of the inner race is smaller than an austenite residual rate of the outer race. The amount of dimensional expansion of the outer race due to the martensite transformation of residual austenite is larger than that of the inner race, so that the occurrence of clearance loss is suppressed even when dimensional expansion of the balls occurs.

Abstract: A resin coated bearing has an arrangement wherein the outer circumference of a resin coat piece is partially projected from a circumferential groove extended along the outer circumference of an outer ring of the bearing so that variations of the outside diameter of the resin coat piece may be reduced by a portion hidden by the circumferential groove.

Abstract: A sealing device for a bearing comprises a first bearing member having a peripheral shoulder portion, a second bearing member, and a seal member integrally connected to the second bearing member and having an inner peripheral portion and an inner peripheral seal lip extending from the inner peripheral portion. The inner peripheral seal lip has first projections extending in a first direction towards a surface of the peripheral shoulder portion of the first bearing member and second projections extending in a second direction opposite the first direction. One of the first projections is initially disposed in contact with the surface of the peripheral shoulder portion of the first bearing member.

Abstract: A method of forming a thin film on the surface of a substrate using a roll coater without forming a projection of the thin film near the rear edge of the substrate includes the steps of: loading a substrate on a stage, moving the stage in a predetermined direction up to a certain position where at least a portion of the surface of the substrate comes into contact with the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is a predetermined value, and further moving the stage in the predetermined direction to cancel the contact between the surface of the substrate and the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is relatively reduced.

Abstract: A ball bearing cage is formed with pockets each having an inwardly curved spherical pocket face similar to a ball in shape. At least one of the pockets has a protrusion projecting inwardly thereof from one of inner and outer circumferential edge portions of the pocket face. A ball bearing comprises balls retained between inner and outer bearing rings and equispaced circumferentially thereof by a cage. The cage is formed with pockets each having an inwardly curved spherical pocket face similar to the ball in shape, at least one of the pockets having a protrusion projecting inwardly thereof from an edge portion of the face close to the fixed one of the rings.

Abstract: A bearing apparatus is capable of detecting rotational speed of a driven shaft of an automobile. The bearing apparatus has a rotational speed detector and a detected member. The detected member is fixed to an inside member rotating with the driven shaft. The detected member has a hollow cylindrical portion which extends in an axial direction and is provided with a plurality of projections at even intervals in a circumferential direction on its inner peripheral surface. The rotational speed detector is fixed to a cover for covering the rotational speed detector and the detected member. A detector portion of the rotational speed detector is positioned within the hollow cylindrical portion so as to oppose the projections.This is a divisional application of application Ser. No. 07/626,311, filed on Dec. 13, 1990, now abandoned which is a continuation application of now abandoned application Ser. No. 07/469,183, filed on Jan. 24, 1990.

Abstract: An automobile wheel bearing unit has an external member to be mounted on the chassis of an automobile, an internal member on one end of which is mounted a wheel, rolling elements interposed between the external member and the internal member, and a cage. The internal member is rotatably mounted to the external member via the rolling elements by a nut. An annular member having a plurality of projections on an end surface thereof is mounted on the other end of the internal member opposite to the end thereof to which the wheel is mounted, and rotates in conjunction with the internal member. The nut and annular member are covered with a sealing member mounted on the external member. A rotational detector is mounted to the sealing member, and positioned between an inner peripheral surface of the sealing member and an outer peripheral surface of the nut so as to face the projections of the annular member and detects a rotational speed of the annular member.

Abstract: A bearing assembly for an axle shaft of a vehicle. An inner ring includes a cylindrical body and an outer flange for mounting a wheel. On a portion of the cylindrical body adjacent the flange is mounted a revolution detection ring which has a seal contact portion and a gear-shaped detected portion having a plurality of projections circumferentially spaced on the outer peripheral surface thereof. The bearing assembly also has an outer ring which is coupled with the inner ring through rolling elements and mounted to the chassis of the vehicle. A sensor is mounted on the outer ring such that it confronts the gear-shaped portion of the revolution detection ring and detects the projections passing by the sensor so as to determine the annular speed of the wheel. The assembly also has a bearing seal which is mounted on the outer ring and kept in contact with the seal contact portion of the revolution detection ring so as to prevent contamination by sand, mud, or the like.