Abstract: In a configuration in which a printhead including a plurality of first printing elements for discharging ink droplets and a plurality of second printing elements for discharging ink droplets larger than ink droplets discharged by the first printing elements is used, the first and second plurality of printing elements are divided into multiple blocks in such a manner that the first printing elements belong to one block and the second printing elements belong to another block. The blocks are individually driven in a time-divisional manner. In the time-divisional driving, the block consisting of the plurality of first printing elements is driven first and then the block consisting of the second printing elements is driven.

Abstract: A method for retrofitting a pulverized coal boiler in an air combustion boiler system is disclosed, which has a plurality of burners over a plurality of stages along the vertical direction on a wall surface of a furnace of the pulverized coal boiler and an after-air port for introducing air for two-stage combustion located above the burners to retrofit into a two-stage combustion pulverized coal boiler in an oxyfuel combustion boiler system.

Abstract: A substrate processing method is arranged to perform a heat process on a substrate with a coating film formed thereon to bake and cure the coating film. At first, the substrate, with the coating film formed thereon, is held at a preparatory temperature lower than a lower limit of temperature for baking and curing the coating film, to adjust distribution of a predetermined component in the coating film. Then, the substrate, with distribution of the predetermined component thus adjusted, is subjected to a heat process at a temperature not lower than the lower limit of temperature.

Abstract: The present invention discloses a carbon dioxide capture power generation system provided with a boiler to combust a fuel in the oxygen atmosphere, a carbon dioxide capture equipment to remove carbon dioxide in the wake flow of the boiler, a piping branching from the wake flow of the boiler to recycle the combustion exhaust gas to the boiler, and a desulfurization equipment to remove sulfur oxides and a sulfuric acid removal equipment to remove a sulfuric acid gas in the upstream of carbon dioxide capture equipment and in the wake flow of the boiler.

Abstract: An oxyfuel combustion boiler plant comprising: a boiler having an air separation unit for manufacturing oxygen by separating nitrogen from air, a burner for burning the oxygen supplied from the air separation unit and pulverized coal, and a primary system pipe for supplying the pulverized coal to the burner, exhaust gas recirculation system pipe for supplying combustion exhaust gas discharged from the boiler to the primary system pipe, a carbon dioxide capture unit for capturing carbon dioxide in the exhaust gas discharged from the boiler, the oxyfuel combustion boiler plant is further comprising: an oxygen buffer tank disposed on a downstream side of the air separation unit; an oxygen supply pipe for supplying oxygen to the primary system pipe of the burner from the oxygen buffer tank; and a nitrogen supply pipe for supplying a part of nitrogen generated from the air separation unit or an air supply pipe for supplying air from outside which is connected to the oxygen supply pipe on a downstream side of th

Abstract: An oxyfuel combustion boiler plant comprising: an air separation unit for manufacturing oxygen by separating nitrogen from air, a boiler having a burner for burning the oxygen supplied from the air separation unit and pulverized coal, and a primary system pipe for supplying the pulverized coal to the burner, an exhaust gas recirculation system pipe for supplying combustion exhaust gas discharged from the boiler to the primary system pipe, and a carbon dioxide capture unit for capturing carbon dioxide in the exhaust gas discharged from the boiler, the oxyfuel combustion boiler plant is further comprising: an oxygen supply pipe for supplying the oxygen manufactured by the air separation unit to the primary system pipe in the burner, and a pipe for supplying the combustion exhaust gas discharged from the boiler to the oxygen supply pipe, wherein an injection port of the oxygen supply pipe is disposed on an upstream side of an injection portion of the burner.

Abstract: In a pattern measuring unit installed in a coating and developing treatment system, the height of a pattern formed on a substrate is measured using the Scatterometry method. Based on the measured height of the pattern, an appropriate number of rotations of the substrate during application of a coating solution is calculated, so that the rotation of the substrate during the application is controlled by the calculated number of rotations of the substrate. Since the number of rotations of the substrate when the coating solution is applied to the substrate is controlled, it is unnecessary to stop the system which performs photolithography processing on the substrate, resulting in improved productivity of the substrate.

Abstract: A substrate processing method is arranged to perform a heat process on a substrate with a coating film formed thereon to bake and cure the coating film. At first, the substrate, with the coating film formed thereon, is held at a preparatory temperature lower than a lower limit of temperature for baking and curing the coating film, to adjust distribution of a predetermined component in the coating film. Then, the substrate, with distribution of the predetermined component thus adjusted, is subjected to a heat process at a temperature not lower than the lower limit of temperature.

Abstract: An oxyfuel boiler structured so as to mix oxygen separated from air with a part of exhaust gas branched from exhaust gas discharged from the boiler for generating vapor and supplying to a vapor demand facility by burning coal fuel, and supply the mixed gas to the boiler as an oxidizing gas for burning the coal, wherein an air separation unit for separating air and manufacturing oxygen from air, an oxygen supply system for leading the oxygen manufactured by the air separation unit to the oxyfuel boiler, a recirculation system for leading a part of exhaust gas branched from the exhaust gas discharged from the oxyfuel boiler to the oxyfuel boiler, and a recirculation fan for supplying the exhaust gas to the recirculation system are installed, respectively.

Abstract: The present invention provides an ink jet printing apparatus configured to allow the ejection performance of a print head with a large number of nozzles densely arranged therein to be kept in a favorable condition by preliminary ejection and to enable degradation of images caused by the preliminary ejection to be alleviated. Preliminary ejection data generation unit is provided which generates preliminary ejection data designed to allow ink not contributing to image printing to be ejected through nozzles 103A and 103B in a print head 21-1. The preliminary ejection data generation unit generates preliminary ejection data designed to allow the ink to be preliminarily ejected onto a print medium through the nozzles 103B, which are included in the plural types of nozzles and which offer a smaller ejection amount than the other nozzles 103A.

Abstract: In the present invention, a plurality of heat treatment plates are provided side by side in a linear form on a base of a heat treatment apparatus in a coating and developing treatment system. In the heat treatment apparatus, three transfer member groups are provided which transfer a substrate in zones between adjacent heat treatment plates. At the time when performing a pre-baking treatment in the heat treatment apparatus, the substrate is transferred in order to the heat treatment plates at the same temperature, whereby the heat treatment is dividedly performed on the heat treatment plates. According to the present invention, substrates are subjected to heat treatment along the same route, so that the thermal histories are made uniform among the substrates.

Abstract: In a multipass printing system, a quality image is printed even when the number of passes is reduced to increase a printing speed. For this purpose, in a multipass printing system which repetitively alternates a printing scan, which causes the print head to eject ink from the nozzles as it moves in the main scan direction, and a feeding operation, which feeds a print medium in a sub scan direction, the feed distance of the print medium is set according to a density of an image being printed on the print medium.

Abstract: In the present invention, a plurality of heat treatment plates are provided side by side in a linear form on a base of a heat treatment apparatus in a coating and developing treatment system. In the heat treatment apparatus, three transfer member groups are provided which transfer a substrate in zones between adjacent heat treatment plates. At the time when performing a pre-baking treatment in the heat treatment apparatus, the substrate is transferred in order to the heat treatment plates at the same temperature, whereby the heat treatment is dividedly performed on the heat treatment plates. According to the present invention, substrates are subjected to heat treatment along the same route, so that the thermal histories are made uniform among the substrates.

Abstract: A lithography apparatus includes a resist processing apparatus to perform a process of applying a resist on a substrate, a process of heating a resist film on the substrate, and a process of developing the resist film on the substrate, an immersion exposure apparatus including a projection optical system which projects an image of a pattern on a photomask onto the resist film and configured to perform exposure through liquid located on an optical path between the projection optical system and resist film, a transporting apparatus connected to the resist processing and immersion exposure apparatuses to perform transportation of the substrate between the resist processing and immersion exposure apparatuses, and a temperature/humidity control apparatus configured to control at least one of temperature and humidity in at least one of the resist processing and transporting apparatuses based on temperature and humidity or the in humidity the immersion exposure apparatus.

Abstract: An oxyfuel combustion boiler plant having a first boiler and a second boiler for injecting gas including oxygen in higher concentration than that in the air, gas including carbon dioxide in higher concentration than that in the air, and fuel from a burner and generating steam by combustion gas in a furnace, respectively, comprising: an exhaust gas supply pipe for supplying exhaust gas discharged from the first boiler to a burner of the second boiler, and a gas flow rate control apparatus for controlling a flow rate of exhaust gas flowing through the exhaust gas supply pipe.

Abstract: There is provided an ink jet printing apparatus capable of printing an image having few joining stripes. Dot count is performed regarding an image printed in the vicinity of the joining stripe, and print duty is judged. Next, a dot count value is determined from the print duty. Then, a print data correction rank is determined beforehand in accordance with properties of the printing apparatus, and image data to be printed in the vicinity of the joining stripe is added or thinned out. Thus, an image can be printed which has few black and white stripes.

Abstract: An inkjet printing apparatus, which ejects ink from a printing head to print, is provided for reducing an ejection amount increase caused by a temperature increase of the printing head due to ink ejection in the case of high speed printing, thereby suppressing density unevenness which occurs in a printing area in the main scanning direction due to the ejection amount increase. A scanning region of the printing head is divided into a plurality of count areas provided for counting the number of times of ink ejection based on image data and the count is carried out for each of the plurality of the counting areas. The scanning region of the printing head is divided into a plurality of printing areas provided for correcting the image data in response to the count value to print the image data and the correction of the image data is carried out for each of the plurality of the printing areas. In this way, the count of image data and their correction are carried out in one main scanning region.

Abstract: The oxyfuel boiler system comprises: an oxygen generator; a coal mill; a burner to burn pulverized coal; an after-gas port to which oxygen generated at the oxygen generator is supplied; a boiler provided with the burner and the after-gas port on its wall; a flue introducing combustion exhaust gas from the boiler to the outside; a recirculation gas supply pipe having an exhaust gas tapping port in the midway of the flue and supplying recirculation exhaust gas to the coal mill, the burner, and the after gas port; and an oxygen supply pipe supplying oxygen from the oxygen generator to the burner and the after-gas port, wherein the exhaust gas tapping port is disposed downstream of a dry dust-removing apparatus arranged in the flue, and there is provided an oxygen controlling apparatus for making a concentration of oxygen to be supplied to the after-gas port lower than that of oxygen to be supplied to the burner.

Abstract: An oxyfuel boiler 1 is equipped with an oxygen separation apparatus 23 to produce oxygen by separating oxygen from the air, a recirculation fan 26 to supply a portion of combustion flue gas branched from the combustion flue gas discharged from the boiler to the oxyfuel boiler 1, a temperature sensor 14a to detect gas temperature at a boiler outlet 1d in the oxyfuel boiler 1, and a control apparatus 150 to calculate gas temperature at a furnace outlet 1c in the boiler from the gas temperature at the boiler outlet 1d detected by the temperature sensor 14a and control the operating condition of the recirculation fan 26 so that the calculated gas temperature at the furnace outlet 1c becomes a desired preset gas temperature.

Abstract: The present invention allows a high-speed printing by a print head in which nozzles are arranged with a high density to reduce eddy flow caused between the print head and a print medium, providing an image with a high quality. Thus, the present invention allows the same printing region of the print medium to be sequentially printed by the respective nozzle arrays provided in the print head in accordance with image data thinned-out by the mask pattern M, thereby completing the image by multi-pass. Then, a plurality of pieces of image printed to be printed to the same printing region at which the nozzle arrays pass in one pass are alternately thinned-out by different high and low thinning-out ratios in the direction in which the nozzles are arranged.