Abstract: A CVD reactor apparatus includes a substrate clamp for clamping a peripheral edge of the front of a substrate disposed in a CVD reactor and, dividing a space in the reactor into a first space adjacent the front of the substrate and a second space adjacent the backside of the substrate. The apparatus also includes a unit for cooling the surface temperature of an inner wall of the reactor to a temperature equal to or less than a deposition lower limit, and a unit for supplying a CVD gas to the first space adjacent the substrate front and supplying an inert gas to the second space adjacent the substrate backside at different pressures and causing a reaction at only the substrate front, a reaction gas monitor and a substrate temperature monitor.

Abstract: The present invention relates to a method for filling small via holes provided to insulating film on a wafer to expose parts of the underlayer of the wafer by metal by means of CVD, and an apparatus therefor. The gist of the present invention lies in that, before CVD is conducted, a surface cleaning treatment of small via hole bottom underlayer surface and a stabilization treatment of insulating film surface activated thereby are carried out successively or simultaneously and optionally an anti-corrosive treatment is applied to underlayer surface, and then the CVD treatment is conducted without exposing the underlayer metal subjected to above treatments to the air. The present invention provides an effect of enabling via filling by metal which shows good selectivity and gives a low interfacial resistance between underlayer metal and filled metal.

Abstract: A magnetic disk device, where a slip pad is adhered on a hub table secured to a spindle, is disclosed, in which the hub table has a circular groove portion formed in the disk hub attracting surface portion coaxially to the spindle and at least a part of the outer peripheral portion of the slip pad is installed in the groove portion.

Abstract: The procedure of the present invention may be applied to mold a composite material having a predetermined configuration. The first step of the present procedure is to form the dimples of the core in accordance with a super-plasticizing molding procedure, so that the dimples may exhibit a height higher than that in its final configuration which corresponds with the above-described predetermined configuration, and its top surface is formed in a convexed configuration. Then, pressure is applied to the core to flatten it by forcibly deforming it prior to or at the moment of jointing the skins of the predetermined configuration, so that the dimples may come into contact with the internal surface of the skin at their top surfaces. Thereafter or simultaneously with this operation, the skins of the predetermined configuration are jointed.

Abstract: A bearing structure for motors is provided, wherein a rotary shaft is supported by a pair of rolling bearings for rotation with respect to a housing, said rotary shaft being mounted on said pair of rolling bearings for slidable movement in the axial direction thereof.

Abstract: An apparatus for depositing metal thin film on predetermined portions of an underlayer of a substrate by a chemical deposition method with good selectivity, good reproducibility and high deposition rate. Hydrogen atoms are prevented from adhering to portions of the substrate not to be deposited with a metal using a light source for heating only the substrate while cooling other portions exposed to starting material gases or a special gas flow controlling plate or shading plate.

Abstract: A metal thin film is deposited on predetermined portions of an underlayer of a substrate by a chemical deposition method with good selectivity, good reproducibility and high deposition rate by preventing hydrogen atoms from the adhesion to portions of the substrate not to be deposited with a metal using a special means for heating only the substrate or a special gas flow controlling means.

Abstract: A screen for projection television set comprising a foamed support and a reflective film adhered to the concave side of the support, said support having the outer layers with a high density such as 0.7 to 1.2 g/cm.sup.3 and the inner portion with a low density so as to make the density of the foamed support as a whole 0.2 to 0.5 g/cm.sup.3, has good projection properties, surface hardness with sufficiently strong support. When said support is foam molded by using a polyurethane having special polyol components, its heat resistance is remarkably increased and can be foam molded at high temperatures without deformation.

Abstract: In a composition for producing polyurethane foam which comprises an organic polyisocynate compound, a compound having at least one active hydrogen atom in the molecule, a foaming agent and a catalyst as essential components, an aminoalkylsilane represented by the following general formula is contained: ##STR1## wherein n is 1 or 2, and R.sub.1 to R.sub.5 are alkyl groups. By use of such a catalyst polyurethane foam having a even color distribution and excellent mechanical properties is produced.

Abstract: Integral skin polymethane foams can be produced in a short time by impingement mixing a solution comprising polyols containing as an essential component a polyol derived from aromatic amine, a blowing agent and a special catalyst of tertiary amine salt having a hetero ring in the molecule, with a solution comprising one or more polyisocyanates, followed by injection into a closed mold and foaming and curing therein.

Abstract: A transfer molding machine for filling at least one cavity of a mold with a resin by means of a plunger including a resin pressure sensor for sensing the resin pressure in the mold, and a control device for controlling the pressure applied to the plunger to drive same in such a manner that an arbitrarily selected primary pressure higher than a holding pressure is applied to the plunger to drive same until the pressure of the resin charged into the mold which pressure is detected by the resin pressure sensor in the mold reaches a predetermined pressure level and a secondary pressure corresponding to the holding pressure is applied to the plunger to drive same after the predetermined pressure level has been exceeded by the pressure of the resin being charged into the mold sensed by the resin pressure sensor in the mold, and a warning device that issues a warning when the pressure applied to the plunger to drive has exceeded a predetermined pressure.

Abstract: A composition for polyurethane foam comprising (a) polyols containing at least one of alkylene oxide adducts of aniline-formaldehyde condensates and alkylene oxide adducts of reduced compounds of nitrated toluenes in an amount of 30 to 70% by weight of the polyols, (b) at least one isocyanate of the formula: ##STR1## a fire retardant, together with one or more conventional catalysts, foam stabilizers, blowing agents and the like additives, can give fire retardant, high impact and heat resistant urethane foams.

Abstract: Rigid polyurethane foams having excellent heat resistance and impact resistance can be produced with good workability due to good flow properties by using a composition comprising a polyol, a polyisocyanate, a blowing agent and a reaction accelerator as essential component, characterized by using as the polyol, a mixture of (a) an alkylene oxide adduct of 4,4'-diaminodiphenylmethane having OH value of 280-600 mg KOH/g, (b) an aliphatic polyether having a hdyroxyl value of 450-800 mg KOH/g and 3 or 4 hydroxyl groups in the molecule, and (c) a polyether having a hydroxyl value of 30 to 100 mg KOH/g and 2 or 3 hydroxyl groups in the molecule, in limited amounts.

Abstract: An earth and sand conveyor system comprising a hopper adapted to receive dumped earth and sand, a trough connected to the hopper, a screw conveyor rotatably mounted within the hopper and the trough, a consolidating pipe connected to the trough, a molding pipe connected to the consolidating pipe, a conveyor pipe connected to the molding pipe, a first nozzle formed in the wall of the molding pipe, a second nozzle formed in the wall of the conveyor pipe, an air compressor connected to the first and second nozzles, and a directional control valve disposed between the air compressor and the first and second nozzles for alternately supplying the compressed air to the first and second nozzles.

Abstract: Apparatus for pneumatically transporting powdery or granular materials from a material supply unit through a transport pipeline to a material receiver unit. A spherical secondary transport medium with an outside diameter slightly less than the inside diameter of the transport pipe is supplied one by one by a secondary transport medium supply device into the transport pipe so as to be located just behind the powdery or granular materials. Thus, the materials can be intermittently transported together with the spherical secondary transport medium through the transport pipeline at a relatively low speed.