Patents by Inventor Tuman Earl Allen, III

Tuman Earl Allen, III has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching methods, methods of removing portions of material, and methods of forming silicon nitride spacers
    Patent number: 6235213
    Abstract: In one aspect, the invention includes a method of removing at least a portion of a material from a substrate, comprising: a) first etching the material in a reaction chamber; b) second etching the material in the reaction chamber; and c) cleaning a component of the material from at least one sidewall of the reaction chamber between the first etching and the second etching.
    Type: Grant
    Filed: May 18, 1998
    Date of Patent: May 22, 2001
    Assignee: Micron Technology, Inc.
    Inventor: Tuman Earl Allen, III