Patents by Inventor Tzong-Ming Wu

Tzong-Ming Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20060032786
    Abstract: Disclosed is a clean container module, which includes a container body with a front opening, a rack inserted through the front opening into the inside of the container body, a top access board provided above the top panel of the container body, a bottom access board provided below the bottom panel of the container body, and the rack affix to the top access board and the bottom access board. Therefore, the rack, the top access board, and the bottom access board can provide a reasonable effect force transferring path when carrying the load, preventing obstruction of precision due to deformation of the container body during transportation. Further, the rack, the top access board, and the bottom access board can provide a satisfactory electrostatic protection.
    Type: Application
    Filed: November 10, 2004
    Publication date: February 16, 2006
    Inventors: Tzong-Ming Wu, Tien-Lu Ho
  • Patent number: 6997664
    Abstract: The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system.
    Type: Grant
    Filed: July 19, 2000
    Date of Patent: February 14, 2006
    Assignee: Industrial Technology Research Institute
    Inventors: Muh-Wang Liang, Chun-Kai Huang, Jiann-Cherng Chen, Tzong-Ming Wu, Ping-Yu Hu, Kuan-Chou Chen
  • Patent number: 6902063
    Abstract: A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking plate pivoted to one end of the link, and a guide block adapted to guide the locking plate sliding into an insertion hole in the container body of the wafer container by using a straight guide means and a curved guide means of the guide block and then to turn the locking plate about pivot rods at the link, causing the locking plate to withstand against part of the container body and to hold down the door toward the inside of the container body and to lock the door in an airtight status.
    Type: Grant
    Filed: December 31, 2002
    Date of Patent: June 7, 2005
    Assignee: Industrial Technology Research Institute
    Inventors: Wei-Ming Pai, Dar-Zen Chen, Tzong-Ming Wu, Jyh-Jone Lee, Ching-Ko Lin
  • Patent number: 6896470
    Abstract: The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.
    Type: Grant
    Filed: November 6, 2000
    Date of Patent: May 24, 2005
    Assignee: Industrial Technology Research Institute
    Inventors: Kuan-Chou Chen, Ping-Yu Hu, Kuei-Jung Chen, Tzong-Ming Wu, Wu-Lang Lin, Wen-Yo Lee
  • Publication number: 20050087476
    Abstract: A workpiece holder is provided inside a clean container such that when covering a housing of the clean container on a base of the clean container, the vertical slide of the workpiece holder is stopped at the base, and a locating member is continuously lowered with the housing, thereby causing the vertical slide to slide upwardly along the locating member and to turn a link, and then causing a holder member to be driven by the link to force a thrust face against workpieces, and therefore the workpieces are pushed into position in a cassette on the base. Because the vertical slide does not displace relative to the base when covering the housing on the base, neither friction nor particles are produced, and workpieces are well protected against contamination.
    Type: Application
    Filed: February 20, 2004
    Publication date: April 28, 2005
    Inventors: Wei-Ming Pai, Dar-Zen Chen, Jyh-Jone Lee, Tzong-Ming Wu, Hui-Chih Lin
  • Patent number: 6732877
    Abstract: An air vent plug for clean container is disclosed, which includes a mounting ring, a plug body, and a plug cap, the plug cap having an inner ring fitted into the plug body, retaining notches forced into engagement with respective hooks of the plug body, an outer ring fitted over the outer surface of the mounting ring, and top hooks extended from the outer ring and hooked on respective pegs at the outer surface of the mounting ring. An O-ring is mounted outside the plug body and stopped between a collar of the plug body and a bottom edge of the mounting ring for sealing. A filter is mounted inside the plug body to prevent contamination from air passing through the plug body and the air vent of the clean container.
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: May 11, 2004
    Assignee: Industrial Technology Research Institute
    Inventors: Tzong-Ming Wu, Wu-Chen Su, Sheng-Fu Tsai
  • Publication number: 20040040884
    Abstract: A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking plate pivoted to one end of the link, and a guide block adapted to guide the locking plate sliding into an insertion hole in the container body of the wafer container by using a straight guide means and a curved guide means of the guide block and then to turn the locking plate about pivot rods at the link, causing the locking plate to withstand against part of the container body and to hold down the door toward the inside of the container body and to lock the door in an airtight status.
    Type: Application
    Filed: December 31, 2002
    Publication date: March 4, 2004
    Inventors: Wei-Ming Pai, Dar-Zen Chen, Tzong-Ming Wu, Jyh-Jone Lee, Ching-Ko Lin
  • Patent number: 6669185
    Abstract: A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.
    Type: Grant
    Filed: December 8, 2000
    Date of Patent: December 30, 2003
    Assignee: Industrial Technology Research Institute
    Inventors: Wu-Lang Lin, Kuan-Chou Chen, Ping-Yu Hu, Muh-Wang Liang, Kuei-Jung Chen, Tzong-Ming Wu
  • Patent number: 6622883
    Abstract: A Modified door for wafer container, includes a rotatable cammed member, two first links coupled to the rotatable cammed member and vertically aligned and moved in and out of respective first latch holes on the wafer transport module upon rotary motion of the rotatable cammed member, and two second links respectively coupled to the first links and horizontally moved in and out of respective second latch holes on the wafer transport module upon movement of the first links. The links each have a slope adapted to be moved with the respective link over a respective bearing means of the door body to force the door body inwards against the wafer transport module, keeping the wafer transport module well sealed.
    Type: Grant
    Filed: August 24, 2000
    Date of Patent: September 23, 2003
    Assignee: Industrial Technology Research Institute
    Inventors: Tzong-Ming Wu, Jen-Rong Huang, Muh-Wang Liang
  • Patent number: 6591987
    Abstract: A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at least one frame bar, retaining portions and positioning elements respectively extended from the at least one frame bar for fastening to respective locating elements at the inner surface of the door panel and retaining portions at the lateral sidewall of a recessed area, and a plurality of spring arms respectively extended from the at least one frame bar at different elevations and adapted to hold a corresponding storage wafer in the wafer carrier, each spring arm having a smoothly arched top end adapted to contact one point of the corresponding storage wafer to minimize friction.
    Type: Grant
    Filed: November 14, 2001
    Date of Patent: July 15, 2003
    Assignee: Industrial Technology Research Institute
    Inventors: Tzong-Ming Wu, Chih-Lun Hsieh, Tien-Lu Ho
  • Patent number: 6592322
    Abstract: A personal guided transport vehicle is disclosed to include a horizontal motion unit, a vertical motion unit, and a gear set coupled between a shaft of the horizontal motion unit and a shaft of the vertical motion unit for enabling the shafts to be interlocked. When operating a horizontal operating lever of the horizontal motion unit, a lock pin is forced into engagement with a mounting hole of the shaft of the vertical motion unit. The horizontal motion unit and the vertical motion unit each have a spring plunger for self-lock. A docking mechanism is disclosed to enable the vehicle to be easily positioned in a docking flange. The docking mechanism includes a locating plate and a coupling plate, the locating plate having a locating notch for quick alignment, the coupling plate having hooks for hooking on the docking flange to hold the vehicle in position.
    Type: Grant
    Filed: November 14, 2001
    Date of Patent: July 15, 2003
    Assignee: Industrial Technology Research Institute
    Inventors: Tung-Fang Yang, Cheng-Yao Lin, Sheng-Fu Tsai, Tzong-Ming Wu, Muh-Wang Liang
  • Publication number: 20030047476
    Abstract: A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at least one frame bar, retaining portions and positioning elements respectively extended from the at least one frame bar for fastening to respective locating elements at the inner surface of the door panel and retaining portions at the lateral sidewall of a recessed area, and a plurality of spring arms respectively extended from the at least one frame bar at different elevations and adapted to hold a corresponding storage wafer in the wafer carrier, each spring arm having a smoothly arched top end adapted to contact one point of the corresponding storage wafer to minimize friction.
    Type: Application
    Filed: November 14, 2001
    Publication date: March 13, 2003
    Inventors: Tzong-Ming Wu, Chih-Lun Hsieh, Tien-Lu Ho
  • Publication number: 20030047562
    Abstract: An air vent plug for clean container is disclosed, which includes a mounting ring, a plug body, and a plug cap, the plug cap having an inner ring fitted into the plug body, retaining notches forced into engagement with respective hooks of the plug body, an outer ring fitted over the outer surface of the mounting ring, and top hooks extended from the outer ring and hooked on respective pegs at the outer surface of the mounting ring. An O-ring is mounted outside the plug body and stopped between a collar of the plug body and a bottom edge of the mounting ring for sealing. A filter is mounted inside the plug body to prevent contamination from air passing through the plug body and the air vent of the clean container.
    Type: Application
    Filed: November 21, 2001
    Publication date: March 13, 2003
    Inventors: Tzong-Ming Wu, Wu-Chen Su, Sheng-Fu Tsai
  • Publication number: 20030049115
    Abstract: A personal guided transport vehicle is disclosed to include a horizontal motion unit, a vertical motion unit, and a gear set coupled between a shaft of the horizontal motion unit and a shaft of the vertical motion unit for enabling the shafts to be interlocked. When operating a horizontal operating lever of the horizontal motion unit, a lock pin is forced into engagement with a mounting hole of the shaft of the vertical motion unit. The horizontal motion unit and the vertical motion unit each have a spring plunger for self-lock. A docking mechanism is disclosed to enable the vehicle to be easily positioned in a docking flange. The docking mechanism includes a locating plate and a coupling plate, the locating plate having a locating notch for quick alignment, the coupling plate having hooks for hooking on the docking flange to hold the vehicle in position.
    Type: Application
    Filed: November 14, 2001
    Publication date: March 13, 2003
    Inventors: Tung-Fang Yang, Cheng-Yao Lin, Sheng-Fu Tsai, Tzong-Ming Wu, Muh-Wang Liang
  • Patent number: 6452201
    Abstract: This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.
    Type: Grant
    Filed: July 19, 2000
    Date of Patent: September 17, 2002
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Sheng Wang, Chien-Rong Huang, Kuan-Chou Chen, Ping-Yu Hu, Tzong-Ming Wu
  • Patent number: 6398033
    Abstract: A wafer container is constructed to include a shell, a holder frame, two retaining blocks, and a handle. The shell has a coupling unit at the periphery. The retaining blocks are fastened to the holder frame, forming first pivot structure. The handle is provided with second pivot structure adapted for coupling to the first pivot structure for enabling the handle to be turned relative to the holder frame through an angle between the operative position convenient for carrying by hand, and the collapsed, non-operative position to minimize space occupation.
    Type: Grant
    Filed: August 24, 2000
    Date of Patent: June 4, 2002
    Assignee: Industrial Technology Research Institute
    Inventors: Tzong-Ming Wu, Tien-Lu Ho, Jen-Rong Huang
  • Patent number: 6382896
    Abstract: A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.
    Type: Grant
    Filed: November 6, 2000
    Date of Patent: May 7, 2002
    Assignee: Industrial Technology Research Institute
    Inventors: Ping-Yu Hu, Kuan-Chou Chen, Tzong-Ming Wu, Wu-Lang Lin
  • Publication number: 20020041066
    Abstract: A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.
    Type: Application
    Filed: December 8, 2000
    Publication date: April 11, 2002
    Inventors: Wu-Lang Lin, Kuan-Chou Chen, Ping-Yu Hu, Muh-Wang Liang, kuei-Jung Chen, Tzong-Ming Wu
  • Patent number: 6352005
    Abstract: A two screw double-stroke and screw differential-motion mechanism is applied in a standard mechanical interface. The two mechanisms are utilized for the correlation of transmission between screws and nuts and the screw differential-motion, so as to achieve more efficient positioning and clamp retrieval and placement.
    Type: Grant
    Filed: April 6, 2000
    Date of Patent: March 5, 2002
    Assignee: Industrial Technology Reseach Institute
    Inventors: Wu-Lang Lin, Kuei-Jung Chen, Tzong-Ming Wu, Jiann-Cherng Chen
  • Patent number: 6135168
    Abstract: A standard mechanical interface wafer pod gas filling system, comprising: a platform, carrying a wafer pod cover of a wafer pod; a pod hold-down latch mechanism; a port, carrying a wafer pod base, with lateral gaps between the platform and the port; a pod door lock/unlock mechanism, mounted on the lower side of the platform; a port door up/down mechanism; several nozzles, mounted on one lateral side of the platform, having widening ends, wherein the lateral gap located opposite to the nozzles is wider than the other lateral gaps; a charging box, mounted on the lower side of the platform; and a gas supply unit for supplying inert gas through the nozzles and taking out air from the wafer pod.
    Type: Grant
    Filed: December 22, 1999
    Date of Patent: October 24, 2000
    Assignee: Industrial Technology Research Institute
    Inventors: Tung-Fang Yang, Tzong-Ming Wu