Abstract: A clean container having an elastic positioning structure includes a support element and a back positioning element on a base. A cover is disposed for covering the base, and a positioning part is disposed between the cover and the base, which has two elastic arms extended laterally, and each elastic arm extends with a pushing surface respectively. When a plate of brittle material is placed on the base, and the cover is closed, the pushing surfaces are elastically pressed against and push the plate respectively, so that the plate moves backwards and presses against the back positioning element. Therefore, the plate is prevented from being damaged. Additionally, the base, the cover, and the positioning part are made of a conductive material, so that the electrostatic charges for the plate is conducted out of the clean container, and has a protective function of an electrostatic discharge.

Abstract: A fastening structure of a clean container is combined on a cover of the clean container with a dismountable fastener member, such that the cover is closed or opened on a base of the clean container. The fastener member includes a body, a positioning portion, and an elastic fastening arm, that are one-piece formed. The positioning portion extends from one side of the body to form a flat spring. A flange is formed on the flat spring to fasten the fastener member on the cover. The elastic fastening arm has an elastic arm, and a lateral flange is formed on one end of the elastic arm, and extends into the base to be buckled. The fastener member further includes an elastic auxiliary arm formed between the elastic arm and the body, so as to increase an elastic strength of the elastic fastening arm.

Abstract: Disclosed is a clean container module, which includes a container body with a front opening, a rack inserted through the front opening into the inside of the container body, a top access board provided above the top panel of the container body, a bottom access board provided below the bottom panel of the container body, and the rack affix to the top access board and the bottom access board. Therefore, the rack, the top access board, and the bottom access board can provide a reasonable effect force transferring path when carrying the load, preventing obstruction of precision due to deformation of the container body during transportation. Further, the rack, the top access board, and the bottom access board can provide a satisfactory electrostatic protection.

Abstract: A workpiece holder is provided inside a clean container such that when covering a housing of the clean container on a base of the clean container, the vertical slide of the workpiece holder is stopped at the base, and a locating member is continuously lowered with the housing, thereby causing the vertical slide to slide upwardly along the locating member and to turn a link, and then causing a holder member to be driven by the link to force a thrust face against workpieces, and therefore the workpieces are pushed into position in a cassette on the base. Because the vertical slide does not displace relative to the base when covering the housing on the base, neither friction nor particles are produced, and workpieces are well protected against contamination.

Abstract: Disclosed is a six-bar linkage positioning mechanism mounted inside a clean container formed of a locating member and a four-bar linkage and a driving module which, when moved, has the slide of the driving module stopped at the base of the cleaning container and be forced to move upwards relative to a sliding way inside the locating member and to cause the driving link of the driving module to drive the four-bar linkage upwards and to further force the second link of the four-bar linkage to push workpieces in respective insertion slots in a cassette on the clean container. The six-bar linkage positioning mechanism has only one degree of freedom so that it moves workpieces horizontally in the cassette into position by means of contact at a point, preventing contamination due to friction and also improving moving stability.

Abstract: Disclosed is a clean container module, which includes a container body with a front opening, a rack inserted through the front opening into the inside of the container body, a top access board provided above the top panel of the container body, a bottom access board provided below the bottom panel of the container body, and the rack affix to the top access board and the bottom access board. Therefore, the rack, the top access board, and the bottom access board can provide a reasonable effect force transferring path when carrying the load, preventing obstruction of precision due to deformation of the container body during transportation. Further, the rack, the top access board, and the bottom access board can provide a satisfactory electrostatic protection.

Abstract: The present invention proposes an apparatus for loading and unloading wafers to and from the semiconductor fabrication equipment. The present invention uses two U-shaped port plate supporters of high rigidity to respectively join with drive devices such as lead screws, shaft bearings, and a lead device, and then join with components such as a port plate, a port door, and a base. The assembly is driven by a motor via timing pulleys, timing belts, idle wheels, a pair of lead screws, shaft bearings, and a lead device. An encoder is matched for feedback control. Thereby, accurate positioning of the main mechanism of the wafer pod responsible for upward and downward movement can be achieved so as to increase the accuracy and reliability of positioning transfer of wafers. Secondarily, the contamination of particles resulted from the motion of the main mechanism can be reduced by using an intake filtering system.

Abstract: A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking plate pivoted to one end of the link, and a guide block adapted to guide the locking plate sliding into an insertion hole in the container body of the wafer container by using a straight guide means and a curved guide means of the guide block and then to turn the locking plate about pivot rods at the link, causing the locking plate to withstand against part of the container body and to hold down the door toward the inside of the container body and to lock the door in an airtight status.

Abstract: The invention includes mainly a machine base, a carrier, a sliding control mechanism, a latch mechanism, a horizontal shifting mechanism, and a lifting mechanism. The FOUP (front-opening unified pod) is put on the carrier and latched by a locking plate of the latch at an accurate position. The carrier moves forwardly to tightly engage the FOUP to a gate on an access at a backboard of the machine base, and thus a cover of the FOUP is opened by a headstock gear at the back of the gate then carried backwardly away from the FOUP by the horizontal shifting mechanism and lowered by the lifting mechanism. Reversely, the cover is closed on the FOUP. As such, the cover is loaded and opened automatically, as well as in closed, which can be a part of automation and prevents wafers from contamination.

Abstract: A workpiece holder is provided inside a clean container such that when covering a housing of the clean container on a base of the clean container, the vertical slide of the workpiece holder is stopped at the base, and a locating member is continuously lowered with the housing, thereby causing the vertical slide to slide upwardly along the locating member and to turn a link, and then causing a holder member to be driven by the link to force a thrust face against workpieces, and therefore the workpieces are pushed into position in a cassette on the base. Because the vertical slide does not displace relative to the base when covering the housing on the base, neither friction nor particles are produced, and workpieces are well protected against contamination.

Abstract: An air vent plug for clean container is disclosed, which includes a mounting ring, a plug body, and a plug cap, the plug cap having an inner ring fitted into the plug body, retaining notches forced into engagement with respective hooks of the plug body, an outer ring fitted over the outer surface of the mounting ring, and top hooks extended from the outer ring and hooked on respective pegs at the outer surface of the mounting ring. An O-ring is mounted outside the plug body and stopped between a collar of the plug body and a bottom edge of the mounting ring for sealing. A filter is mounted inside the plug body to prevent contamination from air passing through the plug body and the air vent of the clean container.

Abstract: A wafer container having a latching mechanism utilized to lock the door of the wafer container in an airtight status. The latching mechanism comprises a cam rotated to move a link and a locking plate pivoted to one end of the link, and a guide block adapted to guide the locking plate sliding into an insertion hole in the container body of the wafer container by using a straight guide means and a curved guide means of the guide block and then to turn the locking plate about pivot rods at the link, causing the locking plate to withstand against part of the container body and to hold down the door toward the inside of the container body and to lock the door in an airtight status.

Abstract: A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

Abstract: A Modified door for wafer container, includes a rotatable cammed member, two first links coupled to the rotatable cammed member and vertically aligned and moved in and out of respective first latch holes on the wafer transport module upon rotary motion of the rotatable cammed member, and two second links respectively coupled to the first links and horizontally moved in and out of respective second latch holes on the wafer transport module upon movement of the first links. The links each have a slope adapted to be moved with the respective link over a respective bearing means of the door body to force the door body inwards against the wafer transport module, keeping the wafer transport module well sealed.

Abstract: A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at least one frame bar, retaining portions and positioning elements respectively extended from the at least one frame bar for fastening to respective locating elements at the inner surface of the door panel and retaining portions at the lateral sidewall of a recessed area, and a plurality of spring arms respectively extended from the at least one frame bar at different elevations and adapted to hold a corresponding storage wafer in the wafer carrier, each spring arm having a smoothly arched top end adapted to contact one point of the corresponding storage wafer to minimize friction.

Abstract: A personal guided transport vehicle is disclosed to include a horizontal motion unit, a vertical motion unit, and a gear set coupled between a shaft of the horizontal motion unit and a shaft of the vertical motion unit for enabling the shafts to be interlocked. When operating a horizontal operating lever of the horizontal motion unit, a lock pin is forced into engagement with a mounting hole of the shaft of the vertical motion unit. The horizontal motion unit and the vertical motion unit each have a spring plunger for self-lock. A docking mechanism is disclosed to enable the vehicle to be easily positioned in a docking flange. The docking mechanism includes a locating plate and a coupling plate, the locating plate having a locating notch for quick alignment, the coupling plate having hooks for hooking on the docking flange to hold the vehicle in position.

Abstract: A wafer retainer is disclosed to be fastened to the inner surface of the door panel of a wafer carrier without making openings in the inner surface of the door panel, the wafer retainer having at least one frame bar, retaining portions and positioning elements respectively extended from the at least one frame bar for fastening to respective locating elements at the inner surface of the door panel and retaining portions at the lateral sidewall of a recessed area, and a plurality of spring arms respectively extended from the at least one frame bar at different elevations and adapted to hold a corresponding storage wafer in the wafer carrier, each spring arm having a smoothly arched top end adapted to contact one point of the corresponding storage wafer to minimize friction.

Abstract: An air vent plug for clean container is disclosed, which includes a mounting ring, a plug body, and a plug cap, the plug cap having an inner ring fitted into the plug body, retaining notches forced into engagement with respective hooks of the plug body, an outer ring fitted over the outer surface of the mounting ring, and top hooks extended from the outer ring and hooked on respective pegs at the outer surface of the mounting ring. An O-ring is mounted outside the plug body and stopped between a collar of the plug body and a bottom edge of the mounting ring for sealing. A filter is mounted inside the plug body to prevent contamination from air passing through the plug body and the air vent of the clean container.

Abstract: A personal guided transport vehicle is disclosed to include a horizontal motion unit, a vertical motion unit, and a gear set coupled between a shaft of the horizontal motion unit and a shaft of the vertical motion unit for enabling the shafts to be interlocked. When operating a horizontal operating lever of the horizontal motion unit, a lock pin is forced into engagement with a mounting hole of the shaft of the vertical motion unit. The horizontal motion unit and the vertical motion unit each have a spring plunger for self-lock. A docking mechanism is disclosed to enable the vehicle to be easily positioned in a docking flange. The docking mechanism includes a locating plate and a coupling plate, the locating plate having a locating notch for quick alignment, the coupling plate having hooks for hooking on the docking flange to hold the vehicle in position.

Abstract: This invention uses the pattern-based signal to accelerate the evaluation process as a means to replace complicated computing procedures. This invention is constructed through implementing absolute coordinates to produce pattern-based signals by position and two optical sensor signals, and through conducting the feature extraction process. This process produces feature signals of sidelong and overlapped issues. Furthermore, through transforming signals, feature signals can be handled by the digital data processor. Thus, this invention can achieve the three main objectives of wafer mapping.