Abstract: A wafer container is constructed to include a shell, a holder frame, two retaining blocks, and a handle. The shell has a coupling unit at the periphery. The retaining blocks are fastened to the holder frame, forming first pivot structure. The handle is provided with second pivot structure adapted for coupling to the first pivot structure for enabling the handle to be turned relative to the holder frame through an angle between the operative position convenient for carrying by hand, and the collapsed, non-operative position to minimize space occupation.

Abstract: A front-opening unified pod closing/opening control structure includes a transmission motor controlled to rotate a transmission shaft, causing the transmission shaft to rotate two worm gear sets through two worms, each worm gear set including a worm gear meshed with one worm, a radially extended locating plate fixedly fastened to the worm gear, and a gasket member having a rectangular center hole, two actuating bolts respectively fitted into the rectangular center hole and secured to the worm gear sets by a respective nut, keeping the locating plates of the worm gear sets maintained at right angles, two first stop pins adapted to stop the locating plates of the worm gear sets in a first position where the actuating bolts close the cover of the FOUP, and two second stop pins adapted to stop the locating plates of the worm gear sets in a second position where the actuating bolts open the cover of the FOUP.

Abstract: A wafer loading system positioning method and device, comprising a loading system, having a base and a rear plate for docking on a positioning frame of a production equipment. The main characteristic thereof is that the loading system in an upper part of the rear plate has a holding seat and the positioning frame in an upper part of a front side has an upward extending positioning element. Two eccentric cams on the holding seat and the positioning element allow to adjust a relative position of the holding seat with respect to the positioning element. A lifting mechanism enables raising of the loading system for lifting said holding seat above said positioning element, so as to enable said holding seat to engage with said positioning element.

Abstract: A two screw double-stroke and screw differential-motion mechanism is applied in a standard mechanical interface. The two mechanisms are utilized for the correlation of transmission between screws and nuts and the screw differential-motion, so as to achieve more efficient positioning and clamp retrieval and placement.

Abstract: A standard mechanical interface wafer pod gas filling system, comprising: a platform, carrying a wafer pod cover of a wafer pod; a pod hold-down latch mechanism; a port, carrying a wafer pod base, with lateral gaps between the platform and the port; a pod door lock/unlock mechanism, mounted on the lower side of the platform; a port door up/down mechanism; several nozzles, mounted on one lateral side of the platform, having widening ends, wherein the lateral gap located opposite to the nozzles is wider than the other lateral gaps; a charging box, mounted on the lower side of the platform; and a gas supply unit for supplying inert gas through the nozzles and taking out air from the wafer pod.

Abstract: A wafer cassette retainer to be used in a wafer container including a box top with an upper inner side for positioning a wafer cassette therein. The wafer cassette retainer comprises: a fixed part, mounted on the upper inner side of the box top; and an elastic part, attached to the fixed part from below. The elastic part has several elastic plates, which form a rhomboid, and a lower side with a contact arc for contacting the wafer cassette. The elastic part is elastic against vertical deformation and is deformed by contacting the wafer cassette within the wafer container, thus holding the wafer cassette securely, independent of size and shape thereof, and absorbing shocks thereon. For increased elasticity of the elastic part, additional grooves are cut into inner corners of two opposite lateral joints between the elastic plates.

Abstract: Disclosed is an improved wafer retaining mechanism comprising a canopy, and more than one set of retaining mechanisms affixed to appropriate locations of the canopy, the retaining mechanism being operative in coordination with wafers received within a wafer cassette and a chassis for urging the wafers in place. The wafer retaining mechanisms each comprises a link unit including a sliding rod, a lower link, a front link, an upper link, and associated pins, wherein thc link unit is featured with openings at respective pivots to serve as engaging sections which, in response to proper external forces, engage or disengage components of the link unit from respective pins so as to facilitate assembly or disassembly of the link unit.