Patents by Inventor Tzu Chung TSAI

Tzu Chung TSAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11527713
    Abstract: The present disclosure, in some embodiments, relates to a memory device. The memory device includes a bottom electrode disposed over a lower interconnect within a lower inter-level dielectric (ILD) layer over a substrate. A data storage structure is over the bottom electrode. A first top electrode layer is disposed over the data storage structure, and a second top electrode layer is on the first top electrode layer. The second top electrode layer is less susceptible to oxidation than the first top electrode layer. A top electrode via is over and electrically coupled to the second top electrode layer.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: December 13, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bi-Shen Lee, Hai-Dang Trinh, Hsun-Chung Kuang, Tzu-Chung Tsai, Yao-Wen Chang
  • Publication number: 20220367810
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming a memory device. The method includes forming a bottom electrode over a substrate. A data storage structure is formed on the bottom electrode. The data storage structure comprises a first atomic percentage of a first dopant and a second atomic percentage of a second dopant. The first atomic percentage is different from the second atomic percentage. A top electrode is formed on the data storage structure.
    Type: Application
    Filed: July 19, 2022
    Publication date: November 17, 2022
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Hsing-Lien Lin, Tzu-Chung Tsai, Fa-Shen Jiang, Bi-Shen Lee
  • Publication number: 20220359823
    Abstract: The present disclosure, in some embodiments, relates to a method of forming a memory device. The method includes forming a data storage layer on a bottom electrode layer over a substrate, forming a first top electrode layer over the data storage layer, and forming a second top electrode layer over the first top electrode layer. The first top electrode layer has a smaller corrosion potential than the second top electrode layer. A first patterning process is performed on the first top electrode layer and the second top electrode layer to define a multi-layer top electrode. A second patterning process is performed on the data storage layer and the bottom electrode layer to define a data storage structure and a bottom electrode.
    Type: Application
    Filed: July 20, 2022
    Publication date: November 10, 2022
    Inventors: Bi-Shen Lee, Hai-Dang Trinh, Hsun-Chung Kuang, Tzu-Chung Tsai, Yao-Wen Chang
  • Publication number: 20220342149
    Abstract: A method of fabricating a photonic device includes: forming a photonic device structure that includes a SOI substrate, which includes a bulk substrate layer, a buried oxide layer on the bulk substrate layer and an active semiconductor layer on the buried oxide layer; forming an electrically conducting layer in electrical contact of the buried oxide layer, and forming a BEOL structure on a surface of the active silicon layer.
    Type: Application
    Filed: December 22, 2021
    Publication date: October 27, 2022
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yueh Ying Lee, Tzu-Chung Tsai, Chien-Ying Wu, Jhih-Ming Lin
  • Publication number: 20220301981
    Abstract: A die includes: a semiconductor substrate having a front side and an opposing backside; a dielectric structure including a substrate oxide layer disposed on the front side of the semiconductor substrate and interlayer dielectric (ILD) layers disposed on the substrate oxide layer; an interconnect structure disposed in the dielectric structure; a through-silicon via (TSV) structure extending in a vertical direction from the backside of the semiconductor substrate through the front side of the semiconductor substrate, such that a first end of the TSV structure is disposed in the interconnect structure; and a TSV barrier structure including a barrier line that contacts the first end of the TSV structure, and a first seal ring disposed in the substrate oxide layer and that that surrounds the TSV structure in a lateral direction perpendicular to the vertical direction.
    Type: Application
    Filed: September 10, 2021
    Publication date: September 22, 2022
    Inventors: Jen-Yuan CHANG, Chia-Ping Lai, Shih-Chang Chen, Tzu-Chung Tsai, Chien-Chang Lee
  • Publication number: 20220254744
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes an interconnect structure disposed over a substrate. The interconnect structure includes a plurality of interconnect layers disposed within a dielectric structure. A bond pad structure is disposed over the interconnect structure. The bond pad structure includes a contact layer. A first masking layer including a metal-oxide is disposed over the bond pad structure. The first masking layer has interior sidewalls arranged directly over the bond pad structure to define an opening. A conductive bump is arranged within the opening and on the contact layer.
    Type: Application
    Filed: April 26, 2022
    Publication date: August 11, 2022
    Inventors: Julie Yang, Chii-Ming Wu, Tzu-Chung Tsai, Yao-Wen Chang
  • Publication number: 20220238802
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming a lower conductive structure over a substrate. A data storage structure is formed on the lower conductive structure. A bandgap of the data storage structure discretely increases or decreases at least two times from a top surface of the data storage structure in a direction towards the substrate. An upper conductive structure is formed on the data storage structure.
    Type: Application
    Filed: April 12, 2022
    Publication date: July 28, 2022
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Cheng-Yuan Tsai, Tzu-Chung Tsai, Fa-Shen Jiang
  • Publication number: 20220173290
    Abstract: A method for manufacturing reflective structure is provided. The method includes the operations as follows. A metallization structure is received. A plurality of conductive pads are formed over the metallization structure. A plurality of dielectric stacks are formed over the conductive pads, respectively, wherein the thicknesses of the dielectric stacks are different. The dielectric stacks are isolated by forming a plurality of trenches over a plurality of intervals between each two adjacent dielectric stacks.
    Type: Application
    Filed: February 18, 2022
    Publication date: June 2, 2022
    Inventors: CHIA-HUA LIN, YAO-WEN CHANG, CHII-MING WU, CHENG-YUAN TSAI, EUGENE I-CHUN CHEN, TZU-CHUNG TSAI
  • Patent number: 11322464
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method includes forming a plurality of bond pad structures over an interconnect structure on a front-side of a semiconductor body. The plurality of bond pad structures respectively have a titanium contact layer. The interconnect structure and the semiconductor body are patterned to define trenches extending into the semiconductor body. A dielectric fill material is formed within the trenches. The dielectric fill material is etched to expose the titanium contact layer prior to bonding the semiconductor body to a carrier substrate. The semiconductor body is thinned to expose the dielectric fill material along a back-side of the semiconductor body and to form a plurality of integrated chip die. The dielectric fill material is removed to separate the plurality of integrated chip die.
    Type: Grant
    Filed: October 1, 2019
    Date of Patent: May 3, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Julie Yang, Chii-Ming Wu, Tzu-Chung Tsai, Yao-Wen Chang
  • Patent number: 11309491
    Abstract: Various embodiments of the present disclosure are directed towards a memory cell including a data storage structure. A top electrode overlies a bottom electrode. The data storage structure is disposed between the top electrode and the bottom electrode. The data storage structure includes a first data storage layer, a second data storage layer, and a third data storage layer. The second data storage layer is disposed between the first and third data storage layers. The second data storage layer has a lower bandgap than the third data storage layer. The first data storage layer has a lower bandgap than the second data storage layer.
    Type: Grant
    Filed: February 12, 2020
    Date of Patent: April 19, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Cheng-Yuan Tsai, Tzu-Chung Tsai, Fa-Shen Jiang
  • Patent number: 11257997
    Abstract: A semiconductor structure is provided. The semiconductor structure includes metallization structure, a plurality of conductive pads, and a dielectric layer. The plurality of conductive pads is over the metallization structure. The dielectric layer is on the metallization structure and covers the conductive pad. The dielectric layer includes a first dielectric film, a second dielectric film, and a third dielectric film. The first dielectric film is on the conductive pad. The second dielectric film is on the first dielectric film. The third dielectric film is on the second dielectric film. The a refractive index of the first dielectric film is smaller than a refractive index of the second dielectric film, and the refractive index of the second dielectric film is smaller than a refractive index of the third dielectric film.
    Type: Grant
    Filed: December 31, 2019
    Date of Patent: February 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chia-Hua Lin, Yao-Wen Chang, Chii-Ming Wu, Cheng-Yuan Tsai, Eugene I-Chun Chen, Tzu-Chung Tsai
  • Patent number: 11131025
    Abstract: In some embodiments, the present disclosure relates to a process tool which includes a housing that defines a vacuum chamber. A wafer chuck is in the housing, and a carrier wafer is on the wafer chuck. A structure that is used for deposition processes is arranged at a top of the housing. A camera is integrated on the wafer chuck such that the camera faces a top of the housing. The camera is configured to wirelessly capture images of the structure used for deposition processes within the housing. Outside of the housing is a wireless receiver. The wireless receiver is configured to receive the images from the camera while the vacuum chamber is sealed.
    Type: Grant
    Filed: June 22, 2020
    Date of Patent: September 28, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Chung Tsai, Chii-Ming Wu, Hai-Dang Trinh
  • Publication number: 20210242399
    Abstract: The present disclosure, in some embodiments, relates to a memory device. The memory device includes a bottom electrode disposed over a lower interconnect within a lower inter-level dielectric (ILD) layer over a substrate. A data storage structure is over the bottom electrode. A first top electrode layer is disposed over the data storage structure, and a second top electrode layer is on the first top electrode layer. The second top electrode layer is less susceptible to oxidation than the first top electrode layer. A top electrode via is over and electrically coupled to the second top electrode layer.
    Type: Application
    Filed: July 6, 2020
    Publication date: August 5, 2021
    Inventors: Bi-Shen Lee, Hai-Dang Trinh, Hsun-Chung Kuang, Tzu-Chung Tsai, Yao-Wen Chang
  • Publication number: 20210217642
    Abstract: An apparatus having a first portion including a first front wall, a first rear wall, and a bottom wall integrally coupled to the first front wall and the first rear wall, and pivotal pin structures integrally coupled to and extending from the first rear wall. The apparatus includes a second portion having a second front wall, a second rear wall, and a top wall integrally coupled to the second front wall and the second rear wall, and pin holders integrally coupled to and extending from the second rear wall and at an offset angle with reference to the top wall. The pivotal pin structure includes a base support connected to the first rear wall and a shaft connected to the base support, and the pin holder defines an opening sized and shaped to accept the shaft. The first and second portions are sized and shaped to be pivotally movable between open and closed configurations.
    Type: Application
    Filed: March 29, 2021
    Publication date: July 15, 2021
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tzu-Chung TSAI, Ping-Cheng KO, Fang-yu LIU, Jhih-Yuan YANG
  • Publication number: 20210202809
    Abstract: A semiconductor structure is provided. The semiconductor structure includes metallization structure, a plurality of conductive pads, and a dielectric layer. The plurality of conductive pads is over the metallization structure. The dielectric layer is on the metallization structure and covers the conductive pad. The dielectric layer includes a first dielectric film, a second dielectric film, and a third dielectric film. The first dielectric film is on the conductive pad. The second dielectric film is on the first dielectric film. The third dielectric film is on the second dielectric film. The a refractive index of the first dielectric film is smaller than a refractive index of the second dielectric film, and the refractive index of the second dielectric film is smaller than a refractive index of the third dielectric film.
    Type: Application
    Filed: December 31, 2019
    Publication date: July 1, 2021
    Inventors: CHIA-HUA LIN, YAO-WEN CHANG, CHII-MING WU, CHENG-YUAN TSAI, EUGENE I-CHUN CHEN, TZU-CHUNG TSAI
  • Patent number: 11024774
    Abstract: Various embodiments of the present disclosure are directed towards a display device. The display device includes an isolation structure disposed over a semiconductor substrate. An electrode is disposed at least partially over the isolation structure. A light-emitting structure is disposed over the electrode. A conductive reflector is disposed below the isolation structure and electrically coupled to the electrode. The conductive reflector is disposed at least partially between sidewalls of the light-emitting structure. The conductive reflector comprises a non-metal-doped aluminum material.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: June 1, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yao-Wen Chang, Tzu-Chung Tsai, Yen-Chang Chu, Chia-Hua Lin
  • Publication number: 20210111312
    Abstract: Various embodiments of the present disclosure are directed towards a display device. The display device includes an isolation structure disposed over a semiconductor substrate. An electrode is disposed at least partially over the isolation structure. A light-emitting structure is disposed over the electrode. A conductive reflector is disposed below the isolation structure and electrically coupled to the electrode. The conductive reflector is disposed at least partially between sidewalls of the light-emitting structure. The conductive reflector comprises a non-metal-doped aluminum material.
    Type: Application
    Filed: October 15, 2019
    Publication date: April 15, 2021
    Inventors: Yao-Wen Chang, Tzu-Chung Tsai, Yen-Chang Chu, Chia-Hua Lin
  • Publication number: 20210098398
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method includes forming a plurality of bond pad structures over an interconnect structure on a front-side of a semiconductor body. The plurality of bond pad structures respectively have a titanium contact layer. The interconnect structure and the semiconductor body are patterned to define trenches extending into the semiconductor body. A dielectric fill material is formed within the trenches. The dielectric fill material is etched to expose the titanium contact layer prior to bonding the semiconductor body to a carrier substrate. The semiconductor body is thinned to expose the dielectric fill material along a back-side of the semiconductor body and to form a plurality of integrated chip die. The dielectric fill material is removed to separate the plurality of integrated chip die.
    Type: Application
    Filed: October 1, 2019
    Publication date: April 1, 2021
    Inventors: Julie Yang, Chii-Ming Wu, Tzu-Chung Tsai, Yao-Wen Chang
  • Publication number: 20210066587
    Abstract: Various embodiments of the present disclosure are directed towards a memory cell including a data storage structure. A top electrode overlies a bottom electrode. The data storage structure is disposed between the top electrode and the bottom electrode. The data storage structure includes a first data storage layer, a second data storage layer, and a third data storage layer. The second data storage layer is disposed between the first and third data storage layers. The second data storage layer has a lower bandgap than the third data storage layer. The first data storage layer has a lower bandgap than the second data storage layer.
    Type: Application
    Filed: February 12, 2020
    Publication date: March 4, 2021
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Cheng-Yuan Tsai, Tzu-Chung Tsai, Fa-Shen Jiang
  • Publication number: 20210066591
    Abstract: Various embodiments of the present disclosure are directed towards a memory cell including a co-doped data storage structure. A bottom electrode overlies a substrate and a top electrode overlies the bottom electrode. The data storage structure is disposed between the top and bottom electrodes. The data storage structure comprises a dielectric material doped with a first dopant and a second dopant.
    Type: Application
    Filed: March 3, 2020
    Publication date: March 4, 2021
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Hsing-Lien Lin, Tzu-Chung Tsai, Fa-Shen Jiang, Bi-Shen Lee