Patents by Inventor Tzu-Hsiang HSU
Tzu-Hsiang HSU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240413018Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method comprises forming first and second semiconductor fins in first and second regions of a substrate, respectively; forming first and second dummy gate stacks over the first and second semiconductor fins, respectively, and forming a spacer layer over the first and the second dummy gate stacks; forming a first pattern layer with a thickness along the spacer layer in the first region; form a first source/drain (S/D) trench along the first pattern layer and epitaxially growing a first epitaxial feature therein; removing the first pattern layer to expose the spacer layer; forming a second pattern layer with a different thickness along the spacer layer in the second region; form a second S/D trench along the second pattern layer and epitaxially growing a second epitaxial feature therein; and removing the second pattern layer to expose the spacer layer.Type: ApplicationFiled: July 29, 2024Publication date: December 12, 2024Inventors: Shih-Hao Lin, Tzu-Hsiang Hsu, Chong-De Lien, Szu-Chi Yang, Hsin-Wen Su, Chih-Hsiang Huang
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Publication number: 20240411051Abstract: A light-emitting device array includes a first light-emitting device, a second light-emitting device, and a third light-emitting device. A first beam shaping structure of the first light-emitting device is configured to convert light emitted by a first light-emitting structure of first light-emitting device into first structured light. A second beam shaping structure of the second light-emitting device is configured to convert light emitted by a second light-emitting structure of second light-emitting device into second structured light. Speckle patterns and spatial distributions of the first structured light and the second structured light on a projection plane are the same. A third beam shaping structure of the third light-emitting device is configured to convert light emitted by a third light-emitting structure of third light-emitting device into third structured light.Type: ApplicationFiled: September 7, 2023Publication date: December 12, 2024Inventors: Jun-Da CHEN, Yu-Heng HONG, Wen-Cheng HSU, Tzu-Hsiang LAN, Hao-Chung KUO
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Publication number: 20240395866Abstract: A semiconductor structure includes a semiconductor fin disposed over a substrate, a metal gate stack disposed over the semiconductor fin, an epitaxial source/drain (S/D) feature disposed over the semiconductor fin and adjacent to the metal gate stack, and a dielectric feature embedded in the semiconductor fin, where a bottom surface of the epitaxial S/D feature is disposed on a top surface of the dielectric feature, and where sidewalls of the epitaxial S/D feature extend to define sidewalls of the dielectric feature.Type: ApplicationFiled: July 30, 2024Publication date: November 28, 2024Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 12154947Abstract: A semiconductor structure includes a semiconductor fin disposed over a substrate, a metal gate stack disposed over the semiconductor fin, an epitaxial source/drain (S/D) feature disposed over the semiconductor fin and adjacent to the metal gate stack, and a dielectric feature embedded in the semiconductor fin, where a bottom surface of the epitaxial S/D feature is disposed on a top surface of the dielectric feature, and where sidewalls of the epitaxial S/D feature extend to define sidewalls of the dielectric feature.Type: GrantFiled: March 28, 2022Date of Patent: November 26, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Publication number: 20240387731Abstract: A semiconductor device including a source/drain region having a V-shaped bottom surface and extending below gate spacers adjacent a gate stack and a method of forming the same are disclosed. In an embodiment, a method includes forming a gate stack over a fin; forming a gate spacer on a sidewall of the gate stack; etching the fin with a first anisotropic etch process to form a first recess adjacent the gate spacer; etching the fin with a second etch process using etchants different from the first etch process to remove an etching residue from the first recess; etching surfaces of the first recess with a third anisotropic etch process using etchants different from the first etch process to form a second recess extending below the gate spacer and having a V-shaped bottom surface; and epitaxially forming a source/drain region in the second recess.Type: ApplicationFiled: July 25, 2024Publication date: November 21, 2024Inventors: Chien-Wei Lee, Hsueh-Chang Sung, Yen-Ru Lee, Jyun-Chih Lin, Tzu-Hsiang Hsu, Feng-Cheng Yang
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Publication number: 20240389293Abstract: A semiconductor device includes a layer having a semiconductive material. The layer includes an outwardly-protruding fin structure. An isolation structure is disposed over the layer but not over the fin structure. A first spacer and a second spacer are each disposed over the isolation structure and on sidewalls of the fin structure. The first spacer is disposed on a first sidewall of the fin structure. The second spacer is disposed on a second sidewall of the fin structure opposite the first sidewall. The second spacer is substantially taller than the first spacer. An epi-layer is grown on the fin structure. The epi-layer protrudes laterally. A lateral protrusion of the epi-layer is asymmetrical with respect to the first side and the second side.Type: ApplicationFiled: July 26, 2024Publication date: November 21, 2024Inventors: Chun Po Chang, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Wei-Yang Lee, Tzu-Hsiang Hsu
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Patent number: 12112989Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method comprises forming first and second semiconductor fins in first and second regions of a substrate, respectively; forming first and second dummy gate stacks over the first and second semiconductor fins, respectively, and forming a spacer layer over the first and the second dummy gate stacks; forming a first pattern layer with a thickness along the spacer layer in the first region; form a first source/drain (S/D) trench along the first pattern layer and epitaxially growing a first epitaxial feature therein; removing the first pattern layer to expose the spacer layer; forming a second pattern layer with a different thickness along the spacer layer in the second region; form a second S/D trench along the second pattern layer and epitaxially growing a second epitaxial feature therein; and removing the second pattern layer to expose the spacer layer.Type: GrantFiled: July 26, 2022Date of Patent: October 8, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shih-Hao Lin, Tzu-Hsiang Hsu, Chong-De Lien, Szu-Chi Yang, Hsin-Wen Su, Chih-Hsiang Huang
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Publication number: 20240319533Abstract: An electronic device includes pixel regions and pixel spacing regions, and includes: a display layer disposed in the pixel regions and the pixel spacing regions, and including a liquid crystal material and a dye material; and reflective layers respectively disposed in the pixel regions, and at one side of the display layer. The display layer is in a scattering state under a non-display state, and light is scattered by the liquid crystal material and absorbed by the dye material when the light passes through the display layer. The display layer in the pixel regions is in a transmissive state and the display layer in the pixel spacing regions is in a scattering state under a display state, and light passes through the liquid crystal material and the dye material in the pixel regions and is reflected by the reflective layers when the light passes through the display layer.Type: ApplicationFiled: February 22, 2024Publication date: September 26, 2024Inventors: Hsu-Kuan HSU, Tzu-Chieh LAI, Chih-Chin KUO, En-Hsiang CHEN, WenQi LIN, Mao-Shiang LIN
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Publication number: 20240272469Abstract: An electronic device includes a scattering structure, a dimming structure and a controller. The dimming structure is arranged on the scattering structure. The controller is electrically connected to the dimming structure. The controller includes a first control unit, and the first control unit is provided to adjust the transmittance of the dimming structure.Type: ApplicationFiled: January 16, 2024Publication date: August 15, 2024Inventors: En-Hsiang CHEN, Chih-Chin KUO, Mao-Shiang LIN, Hsu-Kuan HSU, WenQi LIN, Tzu-Chieh LAI
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Publication number: 20240264496Abstract: An electronic device with switchable modes includes a light scattering switching element, a light absorbing switching and an image generating element. The light absorbing switching element is disposed adjacent to the light scattering switching element. The image generating element is provided for generating an image. In a projection mode, the image generated by the image generating element sequentially passes through the light scattering switching element and the light absorbing switching element to be displayed.Type: ApplicationFiled: January 3, 2024Publication date: August 8, 2024Inventors: De-Cheng CHUNG, Hsu-Kuan HSU, En-Hsiang CHEN, Chih-Chin KUO, Tzu-Chieh LAI
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Publication number: 20240248351Abstract: An electronic device includes: a panel, including: a first substrate; a second substrate disposed opposite to the first substrate; a light modulation layer disposed between the first substrate and the second substrate; a plurality of first strip electrodes disposed between the first substrate and the light modulation layer; a plurality of second strip electrodes disposed between the second substrate and the light modulation layer; a first electrode disposed between the first substrate and the plurality of first strip electrodes; and a second electrode disposed between the second substrate and the plurality of second strip electrodes, wherein the light modulation layer includes a liquid crystal material and a dye material, and an extension direction of the plurality of first strip electrodes is different from an extension direction of the plurality of second strip electrodes.Type: ApplicationFiled: January 10, 2024Publication date: July 25, 2024Inventors: Hsu-Kuan HSU, Tzu-Chieh LAI, Chih-Chin KUO, En-Hsiang CHEN, Wen-Qi LIN
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Patent number: 11996467Abstract: A semiconductor device includes first and second semiconductor fins extending from a substrate and a source/drain region epitaxially grown in recesses of the first and second semiconductor fins. A top surface of the source/drain region is higher than a surface level with top surfaces of the first and second semiconductor fins. The source/drain region includes a plurality of buffer layers. Respective layers of the plurality of buffer layers are embedded between respective layers of the source/drain region.Type: GrantFiled: May 15, 2023Date of Patent: May 28, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Publication number: 20230395673Abstract: A transistor includes a gate electrode, a gate dielectric, a channel layer and a source line and bit line. The gate electrode includes a first gate material layer and a second gate material layer disposed on the first gate material layer, wherein a work function of the first gate material layer is lower than a work function of the second gate material layer. The gate dielectric is disposed on the gate electrode. The channel layer is disposed on the gate dielectric. The source line and bit line are disposed on and connected to the channel layer.Type: ApplicationFiled: June 6, 2022Publication date: December 7, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yi-Cheng Chu, Tzu-Hsiang Hsu, Pin-Cheng Hsu, Chung-Te Lin
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Patent number: 11770642Abstract: An image sensor integrated with a convolutional neural network computation circuit is provided. The image sensor includes: a pixel array including pixels divided into pixel groups, wherein each pixel converts a light signal into a PWM signal; a convolution computation circuit controlling a turn-on time of a corresponding weighted current according to the first PWM signal of each pixel, and accumulating the weighted currents into an integrated current; a comparison circuit converting the integrated current into a second PWM signal and comparing it with that of an adjacent pixel group to output a larger one; and a classification circuit quantizing the second PWM signal to a quantization value according to a weight of a node in a fully-connected layer corresponding to each pixel group, accumulating the quantization values of all pixel groups into a feature value, and comparing the feature value with a feature threshold to obtain a classification result.Type: GrantFiled: March 9, 2022Date of Patent: September 26, 2023Assignee: National Tsing Hua UniversityInventors: Chih-Cheng Hsieh, Tzu-Hsiang Hsu
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Publication number: 20230290861Abstract: A semiconductor device includes first and second semiconductor fins extending from a substrate and a source/drain region epitaxially grown in recesses of the first and second semiconductor fins. A top surface of the source/drain region is higher than a surface level with top surfaces of the first and second semiconductor fins. The source/drain region includes a plurality of buffer layers. Respective layers of the plurality of buffer layers are embedded between respective layers of the source/drain region.Type: ApplicationFiled: May 15, 2023Publication date: September 14, 2023Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Publication number: 20230275153Abstract: A semiconductor device including a source/drain region having a V-shaped bottom surface and extending below gate spacers adjacent a gate stack and a method of forming the same are disclosed. In an embodiment, a method includes forming a gate stack over a fin; forming a gate spacer on a sidewall of the gate stack; etching the fin with a first anisotropic etch process to form a first recess adjacent the gate spacer; etching the fin with a second etch process using etchants different from the first etch process to remove an etching residue from the first recess; etching surfaces of the first recess with a third anisotropic etch process using etchants different from the first etch process to form a second recess extending below the gate spacer and having a V-shaped bottom surface; and epitaxially forming a source/drain region in the second recess.Type: ApplicationFiled: May 2, 2023Publication date: August 31, 2023Inventors: Chien-Wei Lee, Hsueh-Chang Sung, Yen-Ru Lee, Jyun-Chih Lin, Tzu-Hsiang Hsu, Feng-Cheng Yang
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Patent number: 11735668Abstract: An embodiment is a semiconductor structure. The semiconductor structure includes a substrate. A fin is on the substrate. The fin includes silicon germanium. An interfacial layer is over the fin. The interfacial layer has a thickness in a range from greater than 0 nm to about 4 nm. A source/drain region is over the interfacial layer. The source/drain region includes silicon germanium.Type: GrantFiled: July 28, 2022Date of Patent: August 22, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Yun Chin, Chii-Horng Li, Chien-Wei Lee, Hsueh-Chang Sung, Heng-Wen Ting, Roger Tai, Pei-Ren Jeng, Tzu-Hsiang Hsu, Yen-Ru Lee, Yan-Ting Lin, Davie Liu
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Patent number: 11710792Abstract: A semiconductor structure includes a substrate, first fins extending from the substrate with a first fin pitch, and second fins extending from the substrate with a second fin pitch smaller than the first fin pitch. The semiconductor structure also includes first gate structures engaging the first fins with a first gate pitch and second gate structures engaging the second fins with a second gate pitch smaller than the first gate pitch. The semiconductor structure also includes first epitaxial semiconductor features partially embedded in the first fins and adjacent the first gate structures and second epitaxial semiconductor features partially embedded in the second fins and adjacent the second gate structures. A bottom surface of the first epitaxial semiconductor features is lower than a bottom surface of the second epitaxial semiconductor features.Type: GrantFiled: June 7, 2021Date of Patent: July 25, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Yang Lee, Tzu-Hsiang Hsu, Ting-Yeh Chen, Feng-Cheng Yang
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Patent number: 11688794Abstract: A semiconductor device includes first and second semiconductor fins extending from a substrate and a source/drain region epitaxially grown in recesses of the first and second semiconductor fins. A top surface of the source/drain region is higher than a surface level with top surfaces of the first and second semiconductor fins. The source/drain region includes a plurality of buffer layers. Respective layers of the plurality of buffer layers are embedded between respective layers of the source/drain region.Type: GrantFiled: February 21, 2022Date of Patent: June 27, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 11683605Abstract: An image sensor chip and a sensing method thereof are provided. The image sensor chip includes a pixel array. The pixel array includes a plurality of pixel units, and each of the pixel units includes a light sensing circuit, a reset switch and an output circuit. The reset switch is coupled to a first terminal of the light sensing circuit. The reset switch resets the light sensing circuit during reset period. The output circuit is coupled to the first terminal of the light sensing circuit. The output circuit of the pixel unit outputs difference information corresponding to the difference between the first sensing result of the light sensing circuit in a first frame period and the second sensing result of the light sensing circuit in a second frame period after the first frame period to a corresponding one of a plurality of readout lines of the pixel array.Type: GrantFiled: February 8, 2021Date of Patent: June 20, 2023Assignee: Egis Technology Inc.Inventors: Chih-Cheng Hsieh, Yen-Kai Chen, Tzu-Hsiang Hsu