Patents by Inventor Tzu-Hsiang HSU
Tzu-Hsiang HSU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 12204163Abstract: An optical system affixed to an electronic apparatus is provided, including a first optical module, a second optical module, and a third optical module. The first optical module is configured to adjust the moving direction of a first light from a first moving direction to a second moving direction, wherein the first moving direction is not parallel to the second moving direction. The second optical module is configured to receive the first light moving in the second moving direction. The first light reaches the third optical module via the first optical module and the second optical module in sequence. The third optical module includes a first photoelectric converter configured to transform the first light into a first image signal.Type: GrantFiled: February 5, 2024Date of Patent: January 21, 2025Assignee: TDK TAIWAN CORP.Inventors: Chao-Chang Hu, Chih-Wei Weng, Chia-Che Wu, Chien-Yu Kao, Hsiao-Hsin Hu, He-Ling Chang, Chao-Hsi Wang, Chen-Hsien Fan, Che-Wei Chang, Mao-Gen Jian, Sung-Mao Tsai, Wei-Jhe Shen, Yung-Ping Yang, Sin-Hong Lin, Tzu-Yu Chang, Sin-Jhong Song, Shang-Yu Hsu, Meng-Ting Lin, Shih-Wei Hung, Yu-Huai Liao, Mao-Kuo Hsu, Hsueh-Ju Lu, Ching-Chieh Huang, Chih-Wen Chiang, Yu-Chiao Lo, Ying-Jen Wang, Shu-Shan Chen, Che-Hsiang Chiu
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Patent number: 12204195Abstract: An electronic device includes a scattering structure, a dimming structure and a controller. The dimming structure is arranged on the scattering structure. The controller is electrically connected to the dimming structure. The controller includes a first control unit, and the first control unit is provided to adjust the transmittance of the dimming structure.Type: GrantFiled: January 16, 2024Date of Patent: January 21, 2025Assignee: INNOLUX CORPORATIONInventors: En-Hsiang Chen, Chih-Chin Kuo, Mao-Shiang Lin, Hsu-Kuan Hsu, WenQi Lin, Tzu-Chieh Lai
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Publication number: 20250015191Abstract: A semiconductor device includes a FEOL structure and a BEOL structure. The BEOL structure is formed over the FEOL structure and includes a barrier dielectric layer, a transistor and a first barrier. The barrier dielectric layer has an upper surface and a lower surface. The transistor is partially formed in the barrier dielectric layer and includes an electrode element, and the electrode element has a first lateral surface, wherein the first lateral surface extends from the upper surface toward the lower surface. The first barrier covers the entirety of the first lateral surface of the electrode element.Type: ApplicationFiled: July 6, 2023Publication date: January 9, 2025Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao HUANG, Tzu-Hsiang HSU, Kuo-Chang CHIANG, Katherine H. CHIANG
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Publication number: 20250006505Abstract: A method for manufacturing a semiconductor structure includes: forming an interconnect level structure having a first device region, a first side region aside the first device region, a second device region and a second side region aside the second device region; forming a dielectric layer over the interconnect structure, the dielectric layer including a first dielectric portion, a second dielectric portion, a first patterned portion and a second patterned portion that are respectively formed over the first device region, the second device region, the first side region, and the second side region, the first patterned portion and the second patterned portion being formed with different patterns; performing a planarization process on the dielectric layer; forming first recesses and second recesses respectively in the planarized first dielectric portion and the planarized second dielectric portion; and forming contact portion respectively in the first recesses and the second recesses.Type: ApplicationFiled: June 27, 2023Publication date: January 2, 2025Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Hsiang HSU, Sun-Yi CHANG, Katherine H. CHIANG
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Publication number: 20240413018Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method comprises forming first and second semiconductor fins in first and second regions of a substrate, respectively; forming first and second dummy gate stacks over the first and second semiconductor fins, respectively, and forming a spacer layer over the first and the second dummy gate stacks; forming a first pattern layer with a thickness along the spacer layer in the first region; form a first source/drain (S/D) trench along the first pattern layer and epitaxially growing a first epitaxial feature therein; removing the first pattern layer to expose the spacer layer; forming a second pattern layer with a different thickness along the spacer layer in the second region; form a second S/D trench along the second pattern layer and epitaxially growing a second epitaxial feature therein; and removing the second pattern layer to expose the spacer layer.Type: ApplicationFiled: July 29, 2024Publication date: December 12, 2024Inventors: Shih-Hao Lin, Tzu-Hsiang Hsu, Chong-De Lien, Szu-Chi Yang, Hsin-Wen Su, Chih-Hsiang Huang
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Publication number: 20240395866Abstract: A semiconductor structure includes a semiconductor fin disposed over a substrate, a metal gate stack disposed over the semiconductor fin, an epitaxial source/drain (S/D) feature disposed over the semiconductor fin and adjacent to the metal gate stack, and a dielectric feature embedded in the semiconductor fin, where a bottom surface of the epitaxial S/D feature is disposed on a top surface of the dielectric feature, and where sidewalls of the epitaxial S/D feature extend to define sidewalls of the dielectric feature.Type: ApplicationFiled: July 30, 2024Publication date: November 28, 2024Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 12154947Abstract: A semiconductor structure includes a semiconductor fin disposed over a substrate, a metal gate stack disposed over the semiconductor fin, an epitaxial source/drain (S/D) feature disposed over the semiconductor fin and adjacent to the metal gate stack, and a dielectric feature embedded in the semiconductor fin, where a bottom surface of the epitaxial S/D feature is disposed on a top surface of the dielectric feature, and where sidewalls of the epitaxial S/D feature extend to define sidewalls of the dielectric feature.Type: GrantFiled: March 28, 2022Date of Patent: November 26, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Publication number: 20240389293Abstract: A semiconductor device includes a layer having a semiconductive material. The layer includes an outwardly-protruding fin structure. An isolation structure is disposed over the layer but not over the fin structure. A first spacer and a second spacer are each disposed over the isolation structure and on sidewalls of the fin structure. The first spacer is disposed on a first sidewall of the fin structure. The second spacer is disposed on a second sidewall of the fin structure opposite the first sidewall. The second spacer is substantially taller than the first spacer. An epi-layer is grown on the fin structure. The epi-layer protrudes laterally. A lateral protrusion of the epi-layer is asymmetrical with respect to the first side and the second side.Type: ApplicationFiled: July 26, 2024Publication date: November 21, 2024Inventors: Chun Po Chang, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Wei-Yang Lee, Tzu-Hsiang Hsu
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Publication number: 20240387731Abstract: A semiconductor device including a source/drain region having a V-shaped bottom surface and extending below gate spacers adjacent a gate stack and a method of forming the same are disclosed. In an embodiment, a method includes forming a gate stack over a fin; forming a gate spacer on a sidewall of the gate stack; etching the fin with a first anisotropic etch process to form a first recess adjacent the gate spacer; etching the fin with a second etch process using etchants different from the first etch process to remove an etching residue from the first recess; etching surfaces of the first recess with a third anisotropic etch process using etchants different from the first etch process to form a second recess extending below the gate spacer and having a V-shaped bottom surface; and epitaxially forming a source/drain region in the second recess.Type: ApplicationFiled: July 25, 2024Publication date: November 21, 2024Inventors: Chien-Wei Lee, Hsueh-Chang Sung, Yen-Ru Lee, Jyun-Chih Lin, Tzu-Hsiang Hsu, Feng-Cheng Yang
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Patent number: 12112989Abstract: Semiconductor device and the manufacturing method thereof are disclosed herein. An exemplary method comprises forming first and second semiconductor fins in first and second regions of a substrate, respectively; forming first and second dummy gate stacks over the first and second semiconductor fins, respectively, and forming a spacer layer over the first and the second dummy gate stacks; forming a first pattern layer with a thickness along the spacer layer in the first region; form a first source/drain (S/D) trench along the first pattern layer and epitaxially growing a first epitaxial feature therein; removing the first pattern layer to expose the spacer layer; forming a second pattern layer with a different thickness along the spacer layer in the second region; form a second S/D trench along the second pattern layer and epitaxially growing a second epitaxial feature therein; and removing the second pattern layer to expose the spacer layer.Type: GrantFiled: July 26, 2022Date of Patent: October 8, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shih-Hao Lin, Tzu-Hsiang Hsu, Chong-De Lien, Szu-Chi Yang, Hsin-Wen Su, Chih-Hsiang Huang
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Patent number: 11996467Abstract: A semiconductor device includes first and second semiconductor fins extending from a substrate and a source/drain region epitaxially grown in recesses of the first and second semiconductor fins. A top surface of the source/drain region is higher than a surface level with top surfaces of the first and second semiconductor fins. The source/drain region includes a plurality of buffer layers. Respective layers of the plurality of buffer layers are embedded between respective layers of the source/drain region.Type: GrantFiled: May 15, 2023Date of Patent: May 28, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Publication number: 20230395673Abstract: A transistor includes a gate electrode, a gate dielectric, a channel layer and a source line and bit line. The gate electrode includes a first gate material layer and a second gate material layer disposed on the first gate material layer, wherein a work function of the first gate material layer is lower than a work function of the second gate material layer. The gate dielectric is disposed on the gate electrode. The channel layer is disposed on the gate dielectric. The source line and bit line are disposed on and connected to the channel layer.Type: ApplicationFiled: June 6, 2022Publication date: December 7, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yi-Cheng Chu, Tzu-Hsiang Hsu, Pin-Cheng Hsu, Chung-Te Lin
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Patent number: 11770642Abstract: An image sensor integrated with a convolutional neural network computation circuit is provided. The image sensor includes: a pixel array including pixels divided into pixel groups, wherein each pixel converts a light signal into a PWM signal; a convolution computation circuit controlling a turn-on time of a corresponding weighted current according to the first PWM signal of each pixel, and accumulating the weighted currents into an integrated current; a comparison circuit converting the integrated current into a second PWM signal and comparing it with that of an adjacent pixel group to output a larger one; and a classification circuit quantizing the second PWM signal to a quantization value according to a weight of a node in a fully-connected layer corresponding to each pixel group, accumulating the quantization values of all pixel groups into a feature value, and comparing the feature value with a feature threshold to obtain a classification result.Type: GrantFiled: March 9, 2022Date of Patent: September 26, 2023Assignee: National Tsing Hua UniversityInventors: Chih-Cheng Hsieh, Tzu-Hsiang Hsu
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Publication number: 20230290861Abstract: A semiconductor device includes first and second semiconductor fins extending from a substrate and a source/drain region epitaxially grown in recesses of the first and second semiconductor fins. A top surface of the source/drain region is higher than a surface level with top surfaces of the first and second semiconductor fins. The source/drain region includes a plurality of buffer layers. Respective layers of the plurality of buffer layers are embedded between respective layers of the source/drain region.Type: ApplicationFiled: May 15, 2023Publication date: September 14, 2023Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Publication number: 20230275153Abstract: A semiconductor device including a source/drain region having a V-shaped bottom surface and extending below gate spacers adjacent a gate stack and a method of forming the same are disclosed. In an embodiment, a method includes forming a gate stack over a fin; forming a gate spacer on a sidewall of the gate stack; etching the fin with a first anisotropic etch process to form a first recess adjacent the gate spacer; etching the fin with a second etch process using etchants different from the first etch process to remove an etching residue from the first recess; etching surfaces of the first recess with a third anisotropic etch process using etchants different from the first etch process to form a second recess extending below the gate spacer and having a V-shaped bottom surface; and epitaxially forming a source/drain region in the second recess.Type: ApplicationFiled: May 2, 2023Publication date: August 31, 2023Inventors: Chien-Wei Lee, Hsueh-Chang Sung, Yen-Ru Lee, Jyun-Chih Lin, Tzu-Hsiang Hsu, Feng-Cheng Yang
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Patent number: 11735668Abstract: An embodiment is a semiconductor structure. The semiconductor structure includes a substrate. A fin is on the substrate. The fin includes silicon germanium. An interfacial layer is over the fin. The interfacial layer has a thickness in a range from greater than 0 nm to about 4 nm. A source/drain region is over the interfacial layer. The source/drain region includes silicon germanium.Type: GrantFiled: July 28, 2022Date of Patent: August 22, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chih-Yun Chin, Chii-Horng Li, Chien-Wei Lee, Hsueh-Chang Sung, Heng-Wen Ting, Roger Tai, Pei-Ren Jeng, Tzu-Hsiang Hsu, Yen-Ru Lee, Yan-Ting Lin, Davie Liu
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Patent number: 11710792Abstract: A semiconductor structure includes a substrate, first fins extending from the substrate with a first fin pitch, and second fins extending from the substrate with a second fin pitch smaller than the first fin pitch. The semiconductor structure also includes first gate structures engaging the first fins with a first gate pitch and second gate structures engaging the second fins with a second gate pitch smaller than the first gate pitch. The semiconductor structure also includes first epitaxial semiconductor features partially embedded in the first fins and adjacent the first gate structures and second epitaxial semiconductor features partially embedded in the second fins and adjacent the second gate structures. A bottom surface of the first epitaxial semiconductor features is lower than a bottom surface of the second epitaxial semiconductor features.Type: GrantFiled: June 7, 2021Date of Patent: July 25, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei-Yang Lee, Tzu-Hsiang Hsu, Ting-Yeh Chen, Feng-Cheng Yang
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Patent number: 11688794Abstract: A semiconductor device includes first and second semiconductor fins extending from a substrate and a source/drain region epitaxially grown in recesses of the first and second semiconductor fins. A top surface of the source/drain region is higher than a surface level with top surfaces of the first and second semiconductor fins. The source/drain region includes a plurality of buffer layers. Respective layers of the plurality of buffer layers are embedded between respective layers of the source/drain region.Type: GrantFiled: February 21, 2022Date of Patent: June 27, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tzu-Hsiang Hsu, Ting-Yeh Chen, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
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Patent number: 11683605Abstract: An image sensor chip and a sensing method thereof are provided. The image sensor chip includes a pixel array. The pixel array includes a plurality of pixel units, and each of the pixel units includes a light sensing circuit, a reset switch and an output circuit. The reset switch is coupled to a first terminal of the light sensing circuit. The reset switch resets the light sensing circuit during reset period. The output circuit is coupled to the first terminal of the light sensing circuit. The output circuit of the pixel unit outputs difference information corresponding to the difference between the first sensing result of the light sensing circuit in a first frame period and the second sensing result of the light sensing circuit in a second frame period after the first frame period to a corresponding one of a plurality of readout lines of the pixel array.Type: GrantFiled: February 8, 2021Date of Patent: June 20, 2023Assignee: Egis Technology Inc.Inventors: Chih-Cheng Hsieh, Yen-Kai Chen, Tzu-Hsiang Hsu
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Publication number: 20230188865Abstract: An image sensor integrated with a convolutional neural network computation circuit is provided. The image sensor includes: a pixel array including pixels divided into pixel groups, wherein each pixel converts a light signal into a PWM signal; a convolution computation circuit controlling a turn-on time of a corresponding weighted current according to the first PWM signal of each pixel, and accumulating the weighted currents into an integrated current; a comparison circuit converting the integrated current into a second PWM signal and comparing it with that of an adjacent pixel group to output a larger one; and a classification circuit quantizing the second PWM signal to a quantization value according to a weight of a node in a fully-connected layer corresponding to each pixel group, accumulating the quantization values of all pixel groups into a feature value, and comparing the feature value with a feature threshold to obtain a classification result.Type: ApplicationFiled: March 9, 2022Publication date: June 15, 2023Applicant: National Tsing Hua UniversityInventors: Chih-Cheng Hsieh, Tzu-Hsiang Hsu