Patents by Inventor Uday Shah

Uday Shah has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050048791
    Abstract: A method for making a semiconductor device is described. That method comprises forming a high-k gate dielectric layer on a substrate, and modifying a first portion of the high-k gate dielectric layer to ensure that it may be removed selectively to a second portion of the high-k gate dielectric layer.
    Type: Application
    Filed: August 28, 2003
    Publication date: March 3, 2005
    Inventors: Justin Brask, Uday Shah, Mark Doczy, Jack Kavalieros, Robert Chau, Robert Turkot, Matthew Metz
  • Publication number: 20040265750
    Abstract: A method of protecting a sensitive layer from harsh chemistries. The method includes forming a first sensitive layer, forming a second layer upon the first layer, then forming a third layer over the second layer. The third layer is utilized as a mask during patterning of the second layer. During patterning, however, the second layer is only partially etched, thus leaving a buffer layer overlying the first layer. The third layer is completely removed while the buffer layer protects the first layer from the harsh chemicals that are utilized to remove the third layer. Then, the buffer layer is carefully removed down to the surface of the first layer.
    Type: Application
    Filed: June 26, 2003
    Publication date: December 30, 2004
    Inventors: Justin K. Brask, Bruce A. Block, Uday Shah