Patents by Inventor Ulrich Starker
Ulrich Starker has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8411269Abstract: In the spectroscopy module 1, a light detecting element 4 is provided with a light passing opening 4b through which light made incident into a body portion 2 passes. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing opening 4b and a light detection portion 4a of the light detecting element 4. Further, an optical element 7, which guides light made incident into the body portion 2, is arranged at the light passing opening 4b. Therefore, light, which is to be made incident into the body portion 2, is not partially blocked at a light incident edge portion of the light passing opening 4b, but light, which is to be made incident into the body portion 2, can be guided securely. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.Type: GrantFiled: July 10, 2012Date of Patent: April 2, 2013Assignee: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Helmut Teichmann, Tomofumi Suzuki, Dietmar Hiller, Ulrich Starker
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Patent number: 8368885Abstract: In the spectroscopy module 1, a light detecting element 4 is provided with a light passing opening 4b through which light made incident into a body portion 2 passes. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing opening 4b and a light detection portion 4a of the light detecting element 4. Further, an optical element 7, which guides light made incident into the body portion 2, is arranged at the light passing opening 4b. Therefore, light, which is to be made incident into the body portion 2, is not partially blocked at a light incident edge portion of the light passing opening 4b, but light, which is to be made incident into the body portion 2, can be guided securely. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.Type: GrantFiled: June 5, 2008Date of Patent: February 5, 2013Assignee: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Helmut Teichmann, Tomofumi Suzuki, Dietmar Hiller, Ulrich Starker
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Publication number: 20120276287Abstract: In the spectroscopy module 1, a light detecting element 4 is provided with a light passing opening 4b through which light made incident into a body portion 2 passes. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing opening 4b and a light detection portion 4a of the light detecting element 4. Further, an optical element 7, which guides light made incident into the body portion 2, is arranged at the light passing opening 4b. Therefore, light, which is to be made incident into the body portion 2, is not partially blocked at a light incident edge portion of the light passing opening 4b, but light, which is to be made incident into the body portion 2, can be guided securely. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.Type: ApplicationFiled: July 10, 2012Publication date: November 1, 2012Inventors: Katsumi SHIBAYAMA, Helmut Teichmann, Tomofumi Suzuki, Dietmar Hiller, Ulrich Starker
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Patent number: 8125636Abstract: A photodiode array, having a plurality of photodiodes 12 (n-type channel regions 121), and a light entrance portion 13, formed of an opening that is used to make light to be detected by photodiodes 12 enter, are provided in a substrate 10 of a photodetector 1A having an n-type substrate 101 and a p-type epitaxial layer 102. Furthermore, a carrier capturing portion 60, for capturing carriers generated at a substrate portion near the light entrance portion 13 and removes the captured carriers to the exterior via an electrode 61, is arranged from a layer portion of the epitaxial layer 102 that is positioned between the photodiode array 11 and the light entrance portion 13. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.Type: GrantFiled: November 24, 2004Date of Patent: February 28, 2012Assignee: Hamamatsu Photonics K.K.Inventors: Mitsuaki Kageyama, Katsumi Shibayama, Seiichiro Mizuno, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Patent number: 8068224Abstract: In the spectroscopy module 1, a light absorbing layer 6 having a light-passing hole 6a through which light L1 advancing into a spectroscopic portion 3 passes and a light-passing hole 6b through which light L2 advancing into a light detecting portion 4a of a light detecting element 4 passes is integrally formed by patterning. Therefore, it is possible to prevent deviation of the relative positional relationship between the light-passing hole 6a and the light-passing hole 6b. Further, since the occurrence of stray light is suppressed by the light absorbing layer 6 and the stray light is absorbed, the light detecting portion 4a of the light detecting element 4 can be suppressed from being made incident. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.Type: GrantFiled: June 5, 2008Date of Patent: November 29, 2011Assignee: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Takafumi Yokino, Tomofumi Suzuki, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Patent number: 8068223Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a light incident opening 42a of the light-passing hole 42 is partially covered by a light transmitting plate 16.Type: GrantFiled: June 5, 2008Date of Patent: November 29, 2011Assignee: Hamamatsu Photonics K.K.Inventors: Tomofumi Suzuki, Katsumi Shibayama, Takashi Iida, Takafumi Yokino, Masashi Ito, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Patent number: 8049887Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of to the light detecting element 4 to transmit the light L1, L2.Type: GrantFiled: June 5, 2008Date of Patent: November 1, 2011Assignee: Hamamatsu Photonics K.K.Inventors: Tomofumi Suzuki, Katsumi Shibayama, Takafumi Yokino, Masashi Ito, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Patent number: 8045155Abstract: The spectroscopy module is provided with a body portion for transmitting light, a spectroscopic portion for dispersing light made incident from the front plane of the body portion into the body portion to reflect the light on the front plane, a light detecting element having a light detecting portion for detecting the light dispersed and reflected by the spectroscopic portion and electrically connected to a wiring formed on the front plane of the body portion by face-down bonding, and an underfill material filled in the body portion side of the light detecting element to transmit the light. The light detecting element is provided with a light-passing hole through which the light advancing into the spectroscopic portion passes, and a reservoir portion is formed on a rear plane of the body portion side in the light detecting element so as to enclose a light outgoing opening of the light-passing hole.Type: GrantFiled: June 5, 2008Date of Patent: October 25, 2011Assignee: Hamamatsu Photonics K.K.Inventors: Tomofumi Suzuki, Katsumi Shibayama, Takafumi Yokino, Masashi Ito, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Patent number: 8045157Abstract: Since a spectroscopic module (1) has a plate-shaped body section (2), the spectroscopic module can be reduced in size by reducing the thickness of the body section (2). Moreover, since the body section (2) is plate-shaped, the spectroscopic module (1) can be manufactured, for example, by using a wafer process. More specifically, by providing lens sections (3), diffraction layers (4), reflection layers (6) and light detecting elements (7) in a matrix form on a glass wafer which becomes many body sections (2) and dicing the glass wafer, many spectroscopic modules (1) can be manufactured. This enables easy mass production of spectroscopic modules (1).Type: GrantFiled: June 5, 2008Date of Patent: October 25, 2011Assignee: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Helmut Teichmann, Takafumi Yokino, Tomofumi Suzuki, Dietmar Hiller, Ulrich Starker
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Patent number: 8045160Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.Type: GrantFiled: April 13, 2011Date of Patent: October 25, 2011Assignee: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Takafumi Yokino, Tomofumi Suzuki, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Publication number: 20110205538Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.Type: ApplicationFiled: April 13, 2011Publication date: August 25, 2011Inventors: Katsumi SHIBAYAMA, Takafumi YOKINO, Tomofumi SUZUKI, Helmut TEICHMANN, Dietmar HILLER, Ulrich STARKER
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Patent number: 7961317Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.Type: GrantFiled: June 10, 2008Date of Patent: June 14, 2011Assignee: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Takafumi Yokino, Tomofumi Suzuki, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Publication number: 20100315633Abstract: Alignment marks 12a, 12b, 12c, and 12d are formed on the flat plane 11a of the peripheral edge portion 11 formed integrally with the diffracting layer 8, and when the lens portion 7 is mounted onto the substrate 2, these alignment marks 12a, 12b, 12c and 12d are positioned to the substrate 2, thereby making exact alignment of the diffracting layer 8 with respect to the light detecting portion 4a of the light detecting element 4, for example, not by depending on a difference in curvature radius of the lens portion 7. In particular, the alignment marks 12a, 12b, 12c and 12d are formed on the flat plane 11a, thereby image recognition is given to exactly detect positions of the alignment marks 12a, 12b, 12c and 12d, thus making it possible to make exact alignment.Type: ApplicationFiled: June 10, 2008Publication date: December 16, 2010Applicant: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Takafumi Yokino, Tomofumi Suzuki, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Publication number: 20100238439Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a lisht detecting element 4 having a lisht detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the lisht detecting element 4 to transmit the light L1, L2. The lisht detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a raised portion 43 in a rectangular annular shape is formed on a rear plane 4a of the body portion 2 side in the lisht detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.Type: ApplicationFiled: June 5, 2008Publication date: September 23, 2010Inventors: Tomofumi Suzuki, Katsumi Shibayama, Takafumi Yokino, Masashi Ito, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Publication number: 20100214563Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a reservoir portion 43 is formed on a rear plane 4a of the body portion 2 side in the light detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.Type: ApplicationFiled: June 5, 2008Publication date: August 26, 2010Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Tomofumi Suzuki, Katsumi Shibayama, Takafumi Yokino, Masashi Ito, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Publication number: 20100208257Abstract: In the spectroscopy module 1, a light detecting element 4 is provided with a light passing opening 4b through which light made incident into a body portion 2 passes. Therefore, it is possible to prevent deviation of the relative positional relationship between the light passing opening 4b and a light detection portion 4a of the light detecting element 4. Further, an optical element 7, which guides light made incident into the body portion 2, is arranged at the light passing opening 4b. Therefore, light, which is to be made incident into the body portion 2, is not partially blocked at a light incident edge portion of the light passing opening 4b, but light, which is to be made incident into the body portion 2, can be guided securely. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.Type: ApplicationFiled: June 5, 2008Publication date: August 19, 2010Applicant: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Helmut Teichmann, Tomofumi Suzuki, Dietmar Hiller, Ulrich Starker
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Publication number: 20100208259Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a light incident opening 42a of the light-passing hole 42 is partially covered by a light transmitting plate 16.Type: ApplicationFiled: June 5, 2008Publication date: August 19, 2010Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Tomofumi Suzuki, Katsumi Shibayama, Takashi Iida, Takafumi Yokino, Masashi Ito, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Publication number: 20100201980Abstract: In the spectroscopy module 1, a light absorbing layer 6 having a light-passing hole 6a through which light L1 advancing into a spectroscopic portion 3 passes and a light-passing hole 6b through which light L2 advancing into a light detecting portion 4a of a light detecting element 4 passes is integrally formed by patterning. Therefore, it is possible to prevent deviation of the relative positional relationship between the light-passing hole 6a and the light-passing hole 6b. Further, since the occurrence of stray light is suppressed by the light absorbing layer 6 and the stray light is absorbed, the light detecting portion 4a of the light detecting element 4 can be suppressed from being made incident. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.Type: ApplicationFiled: June 5, 2008Publication date: August 12, 2010Applicant: HAMAMATSU PHTONICS K.K.Inventors: Katsumi Shibayama, Takafumi Yokino, Tomofumi Suzuki, Helmut Teichmann, Dietmar Hiller, Ulrich Starker
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Publication number: 20100103412Abstract: Since a spectroscopic module (1) has a plate-shaped body section (2), the spectroscopic module can be reduced in size by reducing the thickness of the body section (2). Moreover, since the body section (2) is plate-shaped, the spectroscopic module (1) can be manufactured, for example, by using a wafer process. More specifically, by providing lens sections (3), diffraction layers (4), reflection layers (6) and light detecting elements (7) in a matrix form on a glass wafer which becomes many body sections (2) and dicing the glass wafer, many spectroscopic modules (1) can be manufactured. This enables easy mass production of spectroscopic modules (1).Type: ApplicationFiled: June 5, 2008Publication date: April 29, 2010Applicant: Hamamatsu Photonics K.K.Inventors: Katsumi Shibayama, Helmut Teichmann, Takafumi Yokino, Tomofumi Suzuki, Dietmar Hiller, Ulrich Starker
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Patent number: 7605917Abstract: A spectrometer 1A is made up of: an optical body 10 within which a light separation path is set along which an object light to be separated propagates; a light entry slit 16 through which the object light enters; a diffraction grating 17 for spectrally separating the incident object light; and a photodiode array 18 for detecting the object light separated by the diffraction grating 17. As an optical member for optically interconnecting the optical body 10 and the photodiode array 18, an optical connection member 20 is provided, with its light entry surface 21 for the separated object light in contact with the upper surface 11 of the optical body 10, with its light exit surface 22 in contact with the photodiode array 18, with the light exit surface 22 tilted by a specified angle relative to the light entry surface 21. Thus, the spectrometer capable of bringing about sufficient accuracy of placing optical elements in a simple constitution while bringing down cost is realized.Type: GrantFiled: July 8, 2005Date of Patent: October 20, 2009Assignee: Hamamatsu Photonics K.K.Inventors: Helmut Teichmann, Dietmar Hiller, Ulrich Starker