Abstract: A spectrometer 1A is constituted with an optical body 10, a glass member 11 formed with a light entry slit 12, and a connecting flange 20. The connecting flange 20 is provided with an opening 21 to which the glass member 11 is positioned and inserted, and with positioning rods 25 provided in positions in front of and behind the opening 21 as positioned relative to the opening 21. Using the positioning rods 25, when the spectrometer 1A is applied to the measuring apparatus, makes it possible to connect the spectrometer 1A and other components of the measuring apparatus through a passive alignment method simply with high accuracy. Thus, a spectrometer capable of favorably achieving optical connection to light to be optically separated and a measuring apparatus using the spectrometer can be realized.

Abstract: A photodiode array, having a plurality of photodiodes 12 (n-type channel regions 121), and a light entrance portion 13, formed of an opening that is used to make light to be detected by photodiodes 12 enter, are provided in a substrate 10 of a photodetector 1A having an n-type substrate 101 and a p-type epitaxial layer 102. Furthermore, a carrier capturing portion 60, for capturing carriers generated at a substrate portion near the light entrance portion 13 and removes the captured carriers to the exterior via an electrode 61, is arranged from a layer portion of the epitaxial layer 102 that is positioned between the photodiode array 11 and the light entrance portion 13. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.

Abstract: A spectrometer 1A is made up of: an optical body 10 within which a light separation path is set along which an object light to be separated propagates; a light entry slit 16 through which the object light enters; a diffraction grating 17 for spectrally separating the incident object light; and a photodiode array 18 for detecting the object light separated by the diffraction grating 17. As an optical member for optically interconnecting the optical body 10 and the photodiode array 18, an optical connection member 20 is provided, with its light entry surface 21 for the separated object light in contact with the upper surface 11 of the optical body 10, with its light exit surface 22 in contact with the photodiode array 18, with the light exit surface 22 tilted by a specified angle relative to the light entry surface 21. Thus, the spectrometer capable of bringing about sufficient accuracy of placing optical elements in a simple constitution while bringing down cost is realized.

Abstract: A spectrometer is configured by using a photodetector 1B which comprises a semiconductor substrate 10 having an upper surface 10a, a photodiode array 11 having a plurality of photodiodes 12 aligned on the upper surface 10a of the substrate 10, and a light input section 13 including an opening formed in a predetermined positional relationship to the photodiode array 11; and a main body 2 having a plate portion 20 and support portions 21 and 22 mounted on the substrate 10 of the photodetector 1B. The spectrometer is provided with a lens 23 protruded from a lower face 20b of the plate portion 20 and a planar aberration-reduced blazed reflection diffraction grating 24 provided on an upper face 20a of the plate portion 20 for separating incident light having entered through the light input section 13 and passed through the lens 23 into its spectral components, and configured to detect the spectral components with the photodiode array 11.

Abstract: A spectrometer is configured by using a photodetector 1B which comprises a semiconductor substrate 10 having an upper surface 10a, a photodiode array 11 having a plurality of photodiodes 12 aligned on the upper surface 10a of the substrate 10, and a light input section 13 including an opening formed in a predetermined positional relationship to the photodiode array 11; and a main body 2 having a plate portion 20 and support portions 21 and 22 mounted on the substrate 10 of the photodetector 1B. The spectrometer is provided with a lens 23 protruded from a lower face 20b of the plate portion 20 and a planar aberration-reduced blazed reflection diffraction grating 24 provided on an upper face 20a of the plate portion 20 for separating incident light having entered through the light input section 13 and passed through the lens 23 into its spectral components, and configured to detect the spectral components with the photodiode array 11.