Abstract: An ion-beam source comprising: a plasma-generation unit for generating plasma and an ion-extraction unit for extraction and acceleration of ions from the aforementioned plasma, where the ion-extraction unit is made in the form of at least one grid under a negative potential. The plasma generating unit consists of a working chamber having a deeply immersed antenna cell. The cell contains a ferromagnetic core, a heat conductor with a heat sink, at least one inductive coil wound onto the ferromagnetic core, and a cap made from a dielectric material that sealingly covers the ferromagnetic core and the inductive coil.

Abstract: A method and apparatus are provided for processing a substrate with a radiofrequency inductive plasma in the manufacture of a device. The inductive plasma is maintained with an inductive plasma applicator having one or more inductive coupling elements. There are thin windows between the inductive coupling elements and the interior of the processing chamber. Various embodiments have magnetic flux concentrators in the inductive coupling elements and feed gas holes interspersed among the inductive coupling elements. The thin windows, magnetic flux concentrators, and interspersed feed gas holes are useful to effectuate uniform processing, high power transfer efficiency, and a high degree of coupling between the applicator and plasma. In some embodiments, capacitive current is suppressed using balanced voltage to power an inductive coupling element.

Abstract: The plasma reactor of the invention is intended for treating the surfaces of objects such as semiconductor wafers and large display panels, or the like, with plasma. The main part of the plasma reactor is an array of RF antenna cells, which are deeply immersed into the interior of the working chamber. Each antenna cell has a ferromagnetic core with a heat conductor and a coil wound onto the core. The core and coil are sealed in the protective cap. Deep immersion of the antenna cells having the structure of the invention provides high efficiency of plasma excitation, while the arrangement of the plasma cells and possibility of their individual adjustment provide high uniformity of plasma distribution and possibility of adjusting plasma parameters, such as plasma density, in a wide range.

Abstract: An electrodeless fluorescent lamp 10 has an envelope 12 that includes a chamber 14. A core 16 of magnetic material, preferably ferrite, is positioned in the chamber 14 and has a first winding 18 surrounding the core and having first and second lead-in wires 20, 22, attached to a high frequency voltage supply or ballast 24. A second winding 26 surrounds the core 16, respective turns of the second winding 26 being located adjacent turns of the first winding 18 and electrically insulated therefrom. The second winding 26 has a free end 28 and has another end 30 connected to one of the lead-in wires, for example 20. A braided sheath 32 surrounds the other of the lead-in wires 22. The first winding 18 is generally called the RF antenna. The braided sheath 32 is connected to the local ground. This inexpensive solution alone reduces the conductive EMI level sufficiently to pass all existing regulations on such interference with significant reserve.

Abstract: An electrodeless fluorescent lamp (10) having a burner (20), a ballast housing (30) containing a ballast (40) and a screw base (50) for connection to a power supply. A reentrant cavity (60) is formed in the burner (20) and an amalgam receptacle (70) containing amalgam (75) is formed as a part of the reentrant portion and in communication with the burner (20). A housing cap (80), formed of a suitable plastic, connects the burner (20) to the ballast housing (30) and a suitable adhesive (31) fixes the burner to the housing cap (80). An EMI cup (90) is formed as an insert to fit into the ballast housing (30), which also is formed of a suitable plastic, and has a bottom portion (100) and an EMI cap (110) with an aperture (120) therein closing an upper portion (140). The EMI cup (90) and the EMI cap (110) are preferably formed from 0.5 mm brass. The amalgam receptacle (70) extends through the aperture (120) and into the cup (90).

Abstract: An electrodeless fluorescent lamp 10 has an envelope 12 that includes a chamber 14. A core 16 of magnetic material, preferably ferrite, is positioned in the chamber 14 and has a first winding 18 surrounding the core and having first and second lead-in wires 20, 22, attached to a high frequency voltage supply or ballast 24. A second winding 26 surrounds the core 16, respective turns of the second winding 26 being located adjacent turns of the first winding 18 and electrically insulated therefrom. The second winding 26 has a free end 28 and has another end 30 connected to one of the lead-in wires, for example 20. A braided sheath 32 surrounds the other of the lead-in wires 22. The first winding 18 is generally called the RF antenna. The braided sheath 32 is connected to the local ground. This inexpensive solution alone reduces the conductive EMI level sufficiently to pass all existing regulations on such interference with significant reserve.

Abstract: An electrodeless fluorescent lamp (10) having a burner (20), a ballast housing (30) containing a ballast (40) and a screw base (50) for connection to a power supply. A reentrant cavity (60) is formed in the burner (20) and an amalgam receptacle (70) containing amalgam (75) is formed as a part of the reentrant portion and in communication with the burner (20). A housing cap (80), formed of a suitable plastic, connects the burner (20) to the ballast housing (30) and a suitable adhesive (31) fixes the burner to the housing cap (80). An EMI cup (90) is formed as an insert to fit into the ballast housing (30), which also is formed of a suitable plastic, and has a bottom portion (100) and an EMI cap (110) with an aperture (120) therein closing an upper portion (140). The EMI cup (90) and the EMI cap (110) are preferably formed from 0.5 mm brass. The amalgam receptacle (70) extends through the aperture (120) and into the cup (90).

Abstract: An inductively coupled plasma source with one or more sets of chamber (202a, 202b) compartments divided (completely or partially) by a flat casing (204a, 204b) including encased toroidal ferromagnetic inductors (206, 208) with the induced discharge current passing between the divided sub-chambers in closed loops through passages in such toroidal ferromagnetic inductors (206, 208). The chamber has a gas inlet (222) and an outlet (223) for flowing the working gas mixture.

Abstract: An electric lamp assembly includes an electrodeless lamp having an electrodeless lamp envelope enclosing a fill material for supporting a low pressure discharge, a driving inductor including a magnetic core disposed in proximity to the lamp envelope and an input winding disposed on the magnetic core, a compensation loop disposed in proximity to the lamp envelope, a radio frequency power source and a compensation loop network. The compensation loop network has an input coupled to the radio frequency power source and outputs coupled to the input winding and to the compensation loop. The radio frequency power source and the compensation loop network supply radio frequency energy to the electrodeless lamp to produce a discharge in the lamp envelope and supply radio frequency energy to the compensation loop to generate a magnetic field that substantially counteracts a magnetic field produced by the discharge.

Abstract: An electric lamp assembly includes an electrodeless lamp having a closed-loop, tubular envelope enclosing mercury vapor and a buffer gas at a pressure less than about 0.5 torr, a transformer core disposed around the lamp envelope, an input winding disposed on the transformer core and a radio frequency power source coupled to the input winding. The radio frequency source supplies sufficient radio frequency energy to the mercury vapor and the buffer gas to produce in the lamp envelope a discharge having a discharge current equal to or greater than about 2 amperes. The electrodeless lamp preferably includes a phosphor on an inside surface of the lamp envelope for emitting radiation in a predetermined wavelength range in response to ultraviolet radiation emitted by the discharge.

Abstract: A simple and effective technique for reducing an external magnet flux emitted from a driven inductor surrounded by an ionizable gaseous medium. This technique includes surrounding the inductor with at least one shielding conductive loop, terminating the shielding loop in a capacitive termination to resonate, and maintaining a resonant frequency of the capacitive termination in series with an inductance of the shielding loop below the predetermined driving frequency of the inductor.

Abstract: A fluorescent light source includes a fluorescent lamp having first and second electrodes at or near the ends thereof for capacitive coupling of RF electrical energy to a low pressure discharge within the fluorescent lamp and an RF source having a first output lead electrically coupled to the first electrode and a second output lead electrically coupled to the second electrode. The electrodes include circuitry for inducing an RF magnetic field within the fluorescent lamp in the region of the electrodes. The RF magnetic field improves the performance of the capacitively coupled RF light source by creating an auxiliary inductive RF discharge near the capacitive coupling electrodes. The inductive discharge locally increases the plasma density and the electrode sheath capacitance and provides a reduction in RF voltage across the capacitively coupled fluorescent lamp.

Abstract: A fluorescent light source includes multiple fluorescent lamp tubes driven in parallel by a single RF source. The fluorescent lamp tubes can be twin tube fluorescent lamps or straight fluorescent lamps. RF electrical energy is capacitively coupled to low pressure discharges within each fluorescent lamp tube. External capacitive coupling electrodes can be formed at or near the ends of each fluorescent lamp tube. Alternatively, cold cathode electrodes can be located within the fluorescent lamp tubes. Ballasting of the fluorescent lamp tubes is provided by capacitive coupling between the plasma of the low pressure discharge and the electrodes, thus eliminating the need for external ballasting components.

Abstract: A fluorescent light source includes a fluorescent lamp having first and second electrodes at or near the ends thereof for capacitive coupling of RF electrical energy to a low pressure discharge within the fluorescent lamp and an RF source having a first output lead electrically coupled to the first electrode and a second output lead electrically coupled to the second electrode. The electrodes include circuitry for inducing an RF magnetic field within the fluorescent lamp in the region of the electrodes. The RF magnetic field improves the performance of the capacitively coupled RF light source by creating an auxiliary inductive RF discharge near the capacitive coupling electrodes. The inductive discharge locally increases the plasma density and the electrode sheath capacitance and provides a reduction in RF voltage across the capacitively coupled fluorescent lamp.

Abstract: A fluorescent light source includes a twin tube fluorescent lamp having first and second electrodes at or near the ends thereof for capacitive coupling of RF electrical energy to a low pressure discharge within the fluorescent lamp and a RF source having a first output lead electrically coupled to the first electrode and a second output lead electrically coupled to the second electrode. The capacitive coupling electrodes can be conductive layers on the outside surface of the twin tube fluorescent lamp. In an alternative configuration, the electrodes are cold cathode electrodes located within the twin tube fluorescent lamp. Filaments for emitting electrons are not required. When the RF voltage applied to the fluorescent lamp is not sufficient to initiate discharge, a starting device can be utilized. The fluorescent light source preferably includes a lamp base for supporting the fluorescent lamp. The RF source can be mounted within the lamp base.

Abstract: An AC operated glow lamp having a cathode electrode and a pair of anode electrodes driven from a capacitively ballasted autotransformer that provides phase inversion so as to enable a full wave rectification of the discharge current thus operating in a DC regime from an AC line. The double anode lamp and ballast circuitry provides for rapid lamp starting as well as continuous cathode heating during lamp operation.

Abstract: A method and apparatus which prevent mercury and fill gas loss in capacitively coupled electrodeless lamps operated at low frequencies (below 100 MHz). The lamp includes a lamp envelope with an inner coating of phosphor. Outer electrodes coupled to a radio frequency source are positioned around the outer surface of the lamp envelope. The lamp contains a fill gas (e.g. mercury and argon) which forms a plasma causing UV radiation which excites the phosphor. Mercury loss is prevented by providing a pair of inner conductors aligned with the outer conductors but electrically insulated therefrom. The inner conductors prevent the mercury and fill gas ions from embedding themselves in the lamp envelope.

Abstract: An integrated light source for use in a large scale video display. The light source includes a cylindrical housing containing at least one electrodeless fluorescent lamp and a circuit for starting and operating the lamp. The circuit includes a radio-frequency generator whose output is capacitively coupled to the electrodeless lamp by means of a pair of coupling members mounted adjacent the exterior surface of the lamp's envelope. A strong electric field produced between the coupling members is sufficient to cause breakdown and excitation of the electrodeless lamp fill material. In a preferred embodiment, a circuit coupled to the input of the radio-frequency generator controls operation of the lamp in response to a low voltage control signal. The integrated light source of the present invention overcomes problems in the prior art of premature lamp life due to failures of the electrode or the glass to metal seal.

Abstract: A video display for use in conveying information as, for example, in a sports stadium. The video display includes a plurality of electrodeless lamps mounted in a metallic housing which is defined by a back wall and a front wall. The front wall is provided with a plurality of holes formed therein and is spaced from the back wall by means of side walls. An electrodeless lamp is located within each of the holes in the front wall and is surrounded by a cylindrical wall formed in the front wall. One end of each lamp is in proximity to a conductive plate which is formed to provide an equipotential surface to the lamps. Radio-frequency (RF) energy of from 10 to 100 megahertz is coupled from an external RF power supply to the housing. A strong electric field produced between the portion of the conductive plate in proximity to one end of a lamp and the cylindrical surface surrounding the lamp is sufficient to cause breakdown and excitation of the electrodeless lamp fill material.