Patents by Inventor Vishnu Agarwal

Vishnu Agarwal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240080172
    Abstract: Methods, systems, and devices for wireless communications are described. A user equipment (UE) may determine a first antenna array and a second antenna array are active for the UE operating in a full duplex operation mode, where uplink signaling at the UE corresponds to the first antenna array and downlink signaling at the UE corresponds to the second antenna array. The first antenna array and the second antenna array may be associated with one or more operating parameters of the UE. The UE may select one antenna array of the first antenna array or the second antenna array to use for both the uplink signaling and the downlink signaling based on a value of the one or more operating parameters of the UE satisfying a first threshold value. The UE may communicate, in the full duplex operation mode, the uplink signaling and the downlink signaling using the selected antenna array.
    Type: Application
    Filed: September 7, 2022
    Publication date: March 7, 2024
    Inventors: Rishav Agarwal, Arnab Pal, Vishnu Namboodiri Karakkad Kesavan Namboodiri
  • Publication number: 20220375239
    Abstract: A method for detecting stressed plants in an indoor farm includes the steps of receiving two consecutively taken images of a plantation area in the indoor farm captured consecutively at a predetermined interval. The two images are combined to form a composite image. To the composite image is applied an object detection network to segment the composite image into images of single plants. Pre-trained convolution neuronal networks can be applied to the images of single plants classifying the single plants as healthy or stressed.
    Type: Application
    Filed: December 29, 2021
    Publication date: November 24, 2022
    Inventors: Vishnu Agarwal, Naman Agarwal
  • Patent number: 7535047
    Abstract: An ultra thin dielectric film or dielectric layer on a semiconductor device is disclosed. In one embodiment, an oxide layer is formed over a substrate. A silicon-containing material is deposited over the oxide layer. The deposited material and oxide layer are processed in a plasma to form the dielectric layer or ultra thin dielectric film. The silicon-containing dielectric layer can allow for improved or smaller semiconductor devices. The silicon containing dielectric layer can be fabricated at low temperatures. Improved or smaller semiconductor devices may be accomplished by reducing leakage, increasing the dielectric constant or fabricating at lower temperatures.
    Type: Grant
    Filed: August 20, 2004
    Date of Patent: May 19, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Vishnu Agarwal, Garry Anthony Mercaldi
  • Publication number: 20080019634
    Abstract: The present technique relates to a device including an optical integrated circuit amplifier and another type of optical integrated circuit. The optical integrated circuit amplifiers and other optical integrated circuits are coupled together through optical paths. The optical integrated circuit amplifiers and other optical integrated circuits of the optical components are fabricated on the same substrate. The optical integrated circuit amplifiers and other optical integrated circuit amplifiers maybe fabricated on different levels of the same substrate.
    Type: Application
    Filed: September 24, 2007
    Publication date: January 24, 2008
    Inventor: Vishnu Agarwal
  • Publication number: 20070207588
    Abstract: Systems, devices, structures, and methods are described that inhibit dielectric degradation at high temperatures. An enhanced capacitor is discussed. The enhanced capacitor includes a first electrode, a dielectric that includes ditantalum pentaoxide, and a second electrode having a compound. The compound includes a first substance and a second substance. The second electrode includes a trace amount of the first substance. The morphology of the semiconductor structure remains stable when the trace amount of the first substance is oxidized during crystallization of the dielectric. In one embodiment, the crystalline structure of the dielectric describes substantially a (001) lattice plane.
    Type: Application
    Filed: April 30, 2007
    Publication date: September 6, 2007
    Inventors: Cem Basceri, Vishnu Agarwal, Dan Gealy
  • Publication number: 20070093025
    Abstract: In accordance with one embodiment of the present invention, a method of interfacing a poly-metal structure and a semiconductor substrate is provided where an etch stop layer is provided in a polysilicon region of the structure. The present invention also addresses the relative location of the etch stop layer in the polysilicon region and a variety of structure materials and oxidation methods.
    Type: Application
    Filed: November 21, 2006
    Publication date: April 26, 2007
    Inventor: Vishnu Agarwal
  • Publication number: 20070007572
    Abstract: A capacitor fabrication method may include atomic layer depositing a conductive barrier layer to oxygen diffusion over the first electrode. A method may instead include chemisorbing a layer of a first precursor at least one monolayer thick over the first electrode and chemisorbing a layer of a second precursor at least one monolayer thick on the first precursor layer, a chemisorption product of the first and second precursor layers being comprised by a layer of a conductive barrier material. The barrier layer may be sufficiently thick and dense to reduce oxidation of the first electrode by oxygen diffusion from over the barrier layer. An alternative method may include forming a first capacitor electrode over a substrate, the first electrode having an inner surface area per unit area and an outer surface area per unit area that are both greater than an outer surface area per unit area of the substrate. A capacitor dielectric layer and a second capacitor electrode may be formed over the dielectric layer.
    Type: Application
    Filed: September 8, 2006
    Publication date: January 11, 2007
    Inventors: Vishnu Agarwal, Garry Mercaldi
  • Publication number: 20070001206
    Abstract: The invention comprises capacitors having a capacitor dielectric layer comprising a metal oxide having multiple different metals bonded with oxygen. In one embodiment, a capacitor includes first and second conductive electrodes having a high k capacitor dielectric region positioned therebetween. The high k capacitor dielectric region includes a layer of metal oxide having multiple different metals bonded with oxygen. The layer has varying stoichiometry across its thickness. The layer includes an inner region, a middle region, and an outer region. The middle region has a different stoichiometry than both the inner and outer regions.
    Type: Application
    Filed: August 3, 2006
    Publication date: January 4, 2007
    Inventors: Vishnu Agarwal, Husam Al-Shareef
  • Publication number: 20060261421
    Abstract: A diffusion barrier layer comprising TiNxBy is disclosed for protection of gate oxide layers in integrated transistors. The diffusion barrier layer can be fabricated by first forming a TiN layer and then incorporating boron into the TiN layer. The diffusion barrier layer can also be fabricated by forming a TiNxBy layer using a TDMAT process including boron. The diffusion barrier layer can also be fabricated by forming a TiNxBy layer using a CVD process. The diffusion barrier layer is of particular utility in conjunction with tungsten or tungsten silicide conductive layers formed by CVD.
    Type: Application
    Filed: July 25, 2006
    Publication date: November 23, 2006
    Inventors: Vishnu Agarwal, Gurtej Sandhu
  • Publication number: 20060245682
    Abstract: The present technique relates to a method for fabricating an optical integrated circuit amplifier with another type of optical integrated circuit. In optical networks, optical components exchange optical signals to communicate between different systems coupled to the optical components. The optical components may include optical integrated circuit amplifiers and other optical integrated circuits coupled together through optical paths. The optical integrated circuit amplifiers and other optical integrated circuits of the optical components are fabricated on the same substrate to reduce the cost of fabrication, maintenance and installation, while enhancing the performance of the optical component.
    Type: Application
    Filed: June 16, 2006
    Publication date: November 2, 2006
    Inventor: Vishnu Agarwal
  • Publication number: 20060234465
    Abstract: In one aspect, the invention includes a method of forming a material comprising tungsten and nitrogen, comprising: a) providing a substrate; b) depositing a layer comprising tungsten and nitrogen over the substrate; and c) in a separate step from the depositing, exposing the layer comprising tungsten and nitrogen to a nitrogen-containing plasma. In another aspect, the invention includes a method of forming a capacitor, comprising: a) forming a first electrical node; b) forming a dielectric layer over the first electrical node; c) forming a second electrical node; and d) providing a layer comprising tungsten and nitrogen between the dielectric layer and one of the electrical nodes, the providing comprising; i) depositing a layer comprising tungsten and nitrogen; and ii) in a separate step from the depositing, exposing the layer comprising tungsten and nitrogen to a nitrogen-containing plasma.
    Type: Application
    Filed: June 13, 2006
    Publication date: October 19, 2006
    Inventors: Vishnu Agarwal, Gurtej Sandhu
  • Publication number: 20060180844
    Abstract: The invention comprises integrated circuitry and to methods of forming capacitors. In one implementation, integrated circuitry includes a capacitor having a first capacitor electrode, a second capacitor electrode and a high K capacitor dielectric region received therebetween. The high K capacitor dielectric region has a high K substantially amorphous material layer and a high K substantially crystalline material layer. In one implementation, a capacitor forming method includes forming a first capacitor electrode layer over a substrate. A substantially amorphous first high K capacitor dielectric material layer is deposited over the first capacitor electrode layer. The substantially amorphous high K first capacitor dielectric material layer is converted to be substantially crystalline. After the converting, a substantially amorphous second high K capacitor dielectric material layer is deposited over the substantially crystalline first high K capacitor dielectric material layer.
    Type: Application
    Filed: February 24, 2006
    Publication date: August 17, 2006
    Inventor: Vishnu Agarwal
  • Publication number: 20060131615
    Abstract: Systems, devices, structures, and methods are described that inhibit dielectric degradation at high temperatures. An enhanced capacitor is discussed. The enhanced capacitor includes a first electrode, a dielectric that includes ditantalum pentaoxide, and a second electrode having a compound. The compound includes a first substance and a second substance. The second electrode includes a trace amount of the first substance. The morphology of the semiconductor structure remains stable when the trace amount of the first substance is oxidized during crystallization of the dielectric. In one embodiment, the crystalline structure of the dielectric describes substantially a (001) lattice plane.
    Type: Application
    Filed: January 31, 2006
    Publication date: June 22, 2006
    Inventors: Cem Basceri, Vishnu Agarwal, Dan Gealy
  • Publication number: 20060076597
    Abstract: Capacitors having increased capacitance include an enhanced-surface-area (rough-surfaced) electrically conductive layer or other layers that are compatible with the high-dielectric constant materials. In one approach, an enhanced-surface-area electrically conductive layer for such capacitors is formed by processing a ruthenium oxide layer at high temperature at or above 500° C. and low pressure 75 torr or below, most desirably 5 torr or below, to produce a roughened ruthenium layer having a textured surface with a mean feature size of at least about 100 Angstroms. The initial ruthenium oxide layer may be provided by chemical vapor deposition techniques or sputtering techniques or the like. The layer may be formed over an underlying electrically conductive layer. The processing may be performed in an inert ambient or in a reducing ambient.
    Type: Application
    Filed: September 26, 2005
    Publication date: April 13, 2006
    Inventors: Vishnu Agarwal, Garo Derderian, Gurtej Sandhu, Weimin Li, Mark Visokay, Cem Basceri, Sam Yang
  • Publication number: 20060043453
    Abstract: The invention includes semiconductor devices. In one implementation, semiconductor device includes a first conductive material. A first layer of a dielectric material is over the first conductive material. A second layer of the dielectric material is on the first layer. A second conductive material is over the second layer of the dielectric material. A device in accordance with an implementation of the invention can include a pair of capacitor electrodes having capacitor dielectric material therebetween comprising a composite of two immediately juxtaposed and contacting, yet discrete, layers of the same capacitor dielectric material.
    Type: Application
    Filed: October 25, 2005
    Publication date: March 2, 2006
    Inventors: Vishnu Agarwal, Garo Derderian
  • Publication number: 20060013524
    Abstract: The present technique relates to a method and apparatus for fabricating an optical integrated circuit amplifier with another type of optical integrated circuit. In optical networks, optical components exchange optical signals to communicate between different systems coupled to the optical components. The optical components may include optical integrated circuit amplifiers and other optical integrated circuits coupled together through optical paths. The optical integrated circuit amplifiers and other optical integrated circuits of the optical components are fabricated on the same substrate to reduce the cost of fabrication, maintenance and installation, while enhancing the performance of the optical component.
    Type: Application
    Filed: July 19, 2004
    Publication date: January 19, 2006
    Inventor: Vishnu Agarwal
  • Publication number: 20060006450
    Abstract: The invention comprises capacitors having a capacitor dielectric layer comprising a metal oxide having multiple different metals bonded with oxygen. In one embodiment, a capacitor includes first and second conductive electrodes having a high k capacitor dielectric region positioned therebetween. The high k capacitor dielectric region includes a layer of metal oxide having multiple different metals bonded with oxygen. The layer has varying stoichiometry across its thickness. The layer includes an inner region, a middle region, and an outer region. The middle region has a different stoichiometry than both the inner and outer regions.
    Type: Application
    Filed: August 30, 2005
    Publication date: January 12, 2006
    Inventors: Husam Al-Shareef, Vishnu Agarwal
  • Publication number: 20060003472
    Abstract: Integrated memory circuits, key components in thousands of electronic and computer products, have been made using ferroelectric materials, which offer faster write cycles and lower power requirements than some other materials. However, the present inventors have recognized, for example, that conventional techniques for working with the polymers produce polymer layers with thickness variations that compromise performance and manufacturing yield. Accordingly, the present inventors devised unique methods and structures for polymer-based ferroelectric memories. One exemplary method entails forming an insulative layer on a substrate, forming two or more first conductive structures, with at least two of the first conductive structures separated by a gap, forming a gap-filling structure within the gap, and forming a polymer-based ferroelectric layer over the gap-filling structure and the first conductive structures. In some embodiments, the gap-filling structure is a polymer, a spin-on-glass, or a flow-fill oxide.
    Type: Application
    Filed: August 30, 2005
    Publication date: January 5, 2006
    Inventors: Vishnu Agarwal, Howard Rhodes
  • Publication number: 20050266773
    Abstract: Planarizing machines, planarizing pads, and methods for planarizing or endpointing mechanical and/or chemical-mechanical planarization of microelectronic substrates. One particular embodiment is a planarizing machine that controls the movement of a planarizing pad along a pad travel path to provide optical analysis of a substrate assembly during a planarizing cycle. The planarizing machine can include a table having an optical opening at an illumination site in a planarizing zone and a light source aligned with the illumination site to direct a light beam through the optical opening in the table. The planarizing machine can further include a planarizing pad and a pad advancing mechanism. The planarizing pad has a planarizing medium and at least one optically transmissive window along the pad travel path. The pad advancing mechanism has an actuator system coupled to the pad and a position monitor coupled to the actuator system.
    Type: Application
    Filed: August 3, 2005
    Publication date: December 1, 2005
    Applicant: Micron Technology, Inc.
    Inventor: Vishnu Agarwal
  • Publication number: 20050266624
    Abstract: A diffusion barrier layer comprising TiNxBy is disclosed for protection of gate oxide layers in integrated transistors. The diffusion barrier layer can be fabricated by first forming a TiN layer and then incorporating boron into the TiN layer. The diffusion barrier layer can also be fabricated by forming a TiNxBy layer using a TDMAT process including boron. The diffusion barrier layer can also be fabricated by forming a TiNxBy layer using a CVD process. The diffusion barrier layer is of particular utility in conjunction with tungsten or tungsten silicide conductive layers formed by CVD.
    Type: Application
    Filed: April 29, 2005
    Publication date: December 1, 2005
    Inventors: Vishnu Agarwal, Gurtej Sandhu