Abstract: A micro-opto-electromechanical systems (MOEMS) device comprises a micro-electromechanical systems (MEMS) device and a silicon optical-bench (SiOB) device or system. The MEMS device interacts with the SiOB mechanically or electromagnetically. In one embodiment, the MEMS device is operable to provide a switching function for the SiOB device. The MEMS device comprises an actuator that is mechanically linked to an optical interruptor that prevents at least a portion of an optical signal incident thereon from propagating therethrough. In an actuated state, the actuator causes the optical interrupter to move into an optical path of an optical signal traveling through an SiOB device. The signal is at least partially reflected or absorbed such that only a portion of the signal propagates beyond the point of contact with the optical interrupter.

Abstract: A self-assembling micron-sized mechanical device is described. The device comprises hinged plates attached to a support. A beam having a first end free to move in an upwardly-directed arc is associated with each hinged plate comprising the device. The beam has a first engagement member, including a first angled edge, disposed at its freely-movable first end. Each hinged plate includes a second engagement member, including a second angled edge. In the unassembled state, at least a portion of the first engagement member lies beneath the second engagement member on the support. Actuation force is applied to the beam by an actuator, the force causing the first end of the beam to lift. As it does so, the first and second angled edges slide over another, and the hinged plate is rotated upwardly about its hinges away from the support. The mechanical advantage provided by the angled edges allows a hinged plate to be rotated fully ninety degrees away from the support.

Abstract: A wavelength-selective add-drop multiplexer is disclosed for adding and/or dropping spectral components from a wavelength-division-multiplexed optical signal. (1.times.1) or (2.times.2) optical switches are used, either alone or in conjunction with other optical elements, to separate spectral components identified for drop from other spectral components.

Abstract: A micromachined xyz stage, and microscopes utilizing such a stage, are disclosed. The xyz stage includes co-planar x- and y-drive means linked to a sample stage. Such x- and y- drive means are operable to position the sample stage in an x-y plane. The xyz stage further includes z-drive operable to moves the sample stage out of the x-y plane. The z-drive can be implemented by suspending a flat-plate electrode over the sample stage using hinged plate supports. As a voltage is applied across the plate electrode and the sample stage, an electrostatic force is generated, causing the sample stage to move towards the plate electrode. The hinged plate supports facilitate assembly of the z-drive, in addition to providing support for it in its assembled configuration. By incorporating an optical fiber, the aperture of which has be drawn down to submicron size, a near-field scanning optical microscope can be formed.

Abstract: A method for forming micron-sized or smaller drops of liquid, and the use of the method in fabricating micro electro mechanical and micro mechanical devices is disclosed. A micropipette is formed having an inside diameter no larger than the size of the drops to be formed. The micropipette is connected to a system capable of developing a positive and optionally negative pressure within the micropipette. The tip of the micropipette is placed in liquid. The liquid is drawn into the micropipette via capillary action or from the negative pressure developed by the system. The micropipette is then positioned to deliver liquid to an intended location on a surface. To deliver the liquid, a positive pressure is developed within the micropipette. The positive pressure forces a micron-sized or smaller drop of liquid out of the micropipette. The method can be used to form micron-sized or smaller drops of adhesive for fixing in place various structural members that form microdevices.

Abstract: A bypass-exchange switch for switching the path of at least one optical signal includes a telecentric imaging device for high efficiency coupling of the optical signal into either of two outputs. The switch also includes an optical director for changing the operating mode of the switch from an exchange state to a bypass state wherein the different outputs are selected. The optical director is implemented as a variable reflectivity mirror, or a mechanically-actuated mirror. The switch may include a wavelength selective filter for permanently bypassing or exchanging preselected wavelengths of the optical signals.

Abstract: Optical switches utilizing electrostatically-driven actuators formed from micro machined plates are disclosed. Under an applied voltage, a movable plate moves toward a fixed plate or a conductive region of an underlying support. The switches further include a mechanical linkage from the actuator to an optical device. The displacement of the movable plate generated at the actuator is transferred, via the mechanical linkage, to the optical device. The optical device, which is positioned in close proximity to optically-aligned spaced optical fibers, is movable into and out of an optical path defined by the optical cores of the optical fibers by the action of the actuator. An "in-plane" optical switch includes an actuator having two vertically-oriented electrodes, which generates a substantially horizontally-directed displacement of the movable plate and the linked optical device.

Abstract: A hinged mask and a method for its use in manufacturing MEMS device are disclosed. According to the invention, the hinged mask and a portion of the MEMS device are formed at the same time on a support. Openings are formed in the mask, the openings defining a pattern that is transferable in the form of a patterned layer. After release of the MEMS device, the hinged mask is rotated out-of-plane about 180.degree. to lie on top of the MEMS device. The hinged mask is used as a micro-sized shadow mask to deposit a patterned film of arbitrary composition on the MEMS device. Since the hinged plate is formed by the original lithography, it is aligned to the MEMS device with a high degree of accuracy.