Abstract: Floating wafer provided with heating elements which, by means of a controller, keep the walls of the floating wafer reactor at the desired temperature. By means of the sensors arranged in the walls, this temperate is kept substantially constant. To compensate for the temperature drop occurring during the entering of a wafer, which is caused by the absorption of warmth by the comparatively cold wafer, and to limit temperature variation in the processing area as much as possible, it is proposed to immediately supply an amount of energy to the heating elements, independently of the reaction of the sensors, during entering of the wafer.

Abstract: Apparatus, method and system for the treatment of a wafer. After a treatment at elevated temperature, a wafer is taken out of the reactor in question with the help of a mechanical transport apparatus which preferably grips the wafer around the circumference and on the under side and consists of a wafer surrounding ring. The wafer is then placed in a floating wafer reactor where it is cooled in a controlled manner. Transport for further action or treatment then takes place.

Abstract: An apparatus for treating a wafer manufactured from semiconducting material, the apparatus comprising a first and a second housing part arranged for movement away front and towards each other, the two housing parts bounding a treatment chamber, while around the treatment chamber there is provided a first groove connected to gas discharge means, while in at least one of the two boundary surfaces there is provided a second groove connected to gas feed means, the first groove being located radially within the second groove, and, in use, the pressure created by the gas feed means being such that from the second groove, gas flows both in radial inward and in radial outward direction in the gap between the first and the second boundary surface.

Abstract: The drlling machine has a bogie accommodated within a gantry frame, the gantry frame carrying the drilling tools and the jacks. In the drilling position and in the gantry position of the machine the gantry frame bears by the jacks upon the ground and with the jacks lifted off the ground the frame bears upon the bogie. The drilling machine has a mechanism for lifting the bogie and a beam with a mechanism effecting displacement of the beam in a direction transverse to the longitudinal geometric axis of the bogie, as well as projectable abutments onto which the gantry frame bears in the transportation position of the drilling machine, the frame having flexible operative connection with the bogie lifting mechanism.