Abstract: The present invention relates to a corrosion-resistant multilayer ceramic member consisting at least of: a ceramic support substrate; an electrode layer formed on the ceramic support substrate; a power-supply member connected to the electrode layer; an insulating protection layer formed on the ceramic support substrate to cover the electrode layer; and a ceramic protection substrate of which at least a part is provided on the insulating protection layer. Thereby, there is provided a long-life corrosion-resistant multilayer ceramic member excellent in corrosion resistance even when exposed to a corrosive gas.

Abstract: There is provided an elongating method of an optical fiber base material which can easily correct a distorted portion of an optical fiber base material with it being possible to elongate the optical fiber base material to reduce its diameter. According to such an elongating method, in an elongating process of elongating an optical fiber base material by heating the optical fiber base material in a heating furnace so that a diameter of the optical fiber base material is reduced, before the optical fiber base material is elongated from an end thereof, a distorted portion of the optical fiber base material is connected by being heated to be softened in the heating furnace. To do so, the optical fiber base material is attached to a hanging mechanism so as to be hung in an electric furnace, the distorted portion of the optical fiber base material is heated to be softened.

Abstract: An electrostatic chuck apparatus for holding a workpiece such as a semiconductor wafer or glass substrate comprises a support substrate, an electrode formed on one surface of the support substrate, and an insulating layer covering the electrode and having a bearing surface for the workpiece. The insulating layer comprises pyrolytic boron nitride containing carbon and at least one element selected from silicon, aluminum, yttrium, and titanium, and has a Vickers hardness Hv of 50 to 1000.

Abstract: The invention provides an electrostatic chuck in which a workpiece-chucking surface is made flat.

Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p having a nitrogen gas permeability of 1×10?2 cm2/sec or less or being made of a compound containing a dopant formed on the protection layer 4.

Abstract: There is disclosed a heating element 10 comprising: at least a heat-resistant base member 1; a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member; a protection layer 4 with an insulating property formed on the conductive layer; and a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost.

Abstract: Provided is a processing method and a processing apparatus of a glass base material, with which a welding process of a large glass base material and a process of forming ends of the glass base material into spindle shapes are easily and safely performed without causing core deviation or causing an accident of falling off of the glass base material.

Abstract: The method, in which base material ingot 1 is heated and softened in an electric furnace 3, drawn with a pair of pinch roller 6 and 6, and elongated to make base material rod 7 having a smaller diameter than the ingot, features: forming either a roller groove 11 having a curvature radius which is larger than the outer diameter of the base material rod 7 or a V-shaped roller groove 11 having the cross section consisting of straight lines on the surface of the pinch roller 6 made of metal; nipping with the facing roller grooves 11 and 11 respectively formed on the surfaces of a pair of said pinch rollers 6 and 6; and drawing said base material rod.

Abstract: An object of the present invention is to provide an optical fiber base material and a connection processing method and apparatus capable of simply connecting ends of an optical fiber base material and a dummy member with a large diameter at short times without breaking and crack in a connected portion when heating and melting the ends of them to weld and connect both. A connection processing method of an optical fiber base material 1 for heating and melting ends of an optical fiber base material 1 and a dummy member 2 or ends of two optical fiber base materials 1 or ends of two dummy members 2 to weld and connect both. The connection processing method includes: gripping an end of at least one of the bodies to be welded with gripping mechanism to face both with each other; selecting the interval between both the bodies to be welded within 1 to 20 mm; and heating and melting ends of both the bodies to be welded to weld and connect both.

Abstract: There is provided an elongating method of an optical fiber base material which can easily correct a distorted portion of an optical fiber base material with it being possible to elongate the optical fiber base material to reduce its diameter. According to such an elongating method, in an elongating process of elongating an optical fiber base material by heating the optical fiber base material in a heating furnace so that a diameter of the optical fiber base material is reduced, before the optical fiber base material is elongated from an end thereof, a distorted portion of the optical fiber base material is connected by being heated to be softened in the heating furnace. To do so, the optical fiber base material is attached to a hanging mechanism so as to be hung in an electric furnace, the distorted portion of the optical fiber base material is heated to be softened.

Abstract: A stretching method and apparatus of an optical fiber base material including gripping both ends in a longitudinal direction of an optical fiber base material by a pair of gripping devices, and, while pulling the optical fiber base material by moving one or both of the pair of the gripping devices in a first direction parallel to the longitudinal direction, moving a heating device relative to the optical fiber base material in a second direction opposite to the first direction, wherein stretch of the optical fiber base material is performed while changing the relative moving speed Vb(x) in accordance with expression (1): Vb·[Dmax/D(x)]2?Vb(x)?Vb·[Dmax/D(x)]3??(1) where Vb represents a reference speed, Dmax represents a maximum outer diameter of the optical fiber base material, D(x) represents an outer diameter at a heated position x of the optical fiber base material, and Vb(x) represents a relative moving speed of the heating device relative to the optical fiber base material at the heated position x.

Abstract: The present invention provides an electrostatic chuck with a built-in heater, with which the apparatus can start operation rapidly at the wafer chucking surface, and a uniform temperature distribution can be rapidly established over the wafer. Gas-escape grooves which communicate with the outer periphery are provided to one or both sides of the electrostatic chuck. The chucking function of the electrostatic chuck with a built-in heater of the present invention is exhibited by stacking an insulating underlayer, an electroconductive layer, and an insulating topmost layer by the CVD method on a heat-conductive base body. It is preferable that the gas-escape groove has a cross section smoothly dropping off from the flat surface area of the insulating topmost layer to the bottom of the groove, and that the gas-escape groove has a width of 1 to 3 mm and a depth of 0.03 to 0.2 mm with a spacing between grooves of 5 to 15 mm.

Abstract: A method for manufacturing an optical fiber comprises setting a heating condition for heating a glass rod, which is a parent material of the optical-fiber, and an elongating speed of the glass rod based on a prescribed numerical value which changes with a progress of elongation of the glass rod; heating and elongating the glass rod to generate a preform based on the heating condition and the elongating speed which are set by the setting; and drawing the preform to a filament-like form by further heating the preform to generate the optical fiber.

Abstract: A method for manufacturing an optical fiber comprises setting a heating condition for heating a glass rod, which is a parent material of the optical fiber, and an elongating speed of the glass rod based on a prescribed numerical value which changes with a progress of elongation of the glass rod; heating and elongating the glass rod to generate a preform based on the heating condition and the elongating speed which are set by the setting; and drawing the preform to a filament-like form by further heating the preform to generate the optical fiber.

Abstract: A method for fabricating a smaller-sized glass rod by elongation of a glass matrix comprises providing a glass matrix, applying steam to surfaces of said glass matrix, and heating the thus applied glass matrix to soften the glass matrix to an extent sufficient for subsequent elongation. The softened glass matrix is elongated to provide a glass rod having a substantially dirt-free, clean surface.

Abstract: A method for manufacturing a glass rod (106), which is a parent material of an optical fiber (350), comprising: adjusting a vertical inclination of a standard rod (138) having a predetermined straightness; and heating and elongating a base material (102), which is a parent material of the glass rod (106), along an axis of the standard rod (138), the vertical inclination of which is adjusted, to generate the glass rod (106).

Abstract: A method for manufacturing an optical fiber comprises setting a heating condition for heating a glass rod, which is a parent material of the optical fiber, and an elongating speed of the glass rod based on a prescribed numerical value which changes with a progress of elongation of the glass rod; heating and elongating the glass rod to generate a preform based on the heating condition and the elongating speed which are set by the setting; and drawing the preform to a filament-like form by further heating the preform to generate the optical fiber.

Abstract: A method for manufacturing a glass rod (106), which is a parent material of an optical fiber (350), comprising: adjusting a vertical inclination of a standard rod (138) having a predetermined straightness; and heating and elongating a base material (102), which is a parent material of the glass rod (106), along an axis of the standard rod (138), the vertical inclination of which is adjusted, to generate the glass rod (106).

Abstract: The glass base material drawing apparatus for heating and drawing a glass base material has a storage unit for storing the glass base material having an opening unit that is opened along the longitudinal direction of the storage unit when the glass base material is placed inside the storage unit, a heating unit for heating the glass base material that has been stored inside the storage unit via the opening unit, and a pull-out unit for pulling out the glass base material heated by the heating unit. The opening unit may be opened in such a manner that the glass base material is moved from a side direction of the storage unit into the interior of the storage unit. A main axis for supporting the glass base material is connected to the glass base material. The storage unit may have a penetration hole through which the main axis is inserted when the opening unit is closed.

Abstract: A method for manufacturing an optical fiber comprises setting a heating condition for heating a glass rod, which is a parent material of the optical fiber, and an elongating speed of the glass rod based on a prescribed numerical value which changes with a progress of elongation of the glass rod; heating and elongating the glass rod to generate a preform based on the heating condition and the elongating speed which are set by the setting; and drawing the preform to a filament-like form by further heating the preform to generate the optical fiber.