Abstract: A film element of an EUV-transmitting wavefront correction device is arranged in a beam path and includes a first layer of first layer material having a first complex refractive index n1=(1??1)+iß1, with a first optical layer thickness, which varies locally over the used region in accordance with a first layer thickness profile, and a second layer of second layer material having a second complex refractive index n2=(1??2)+iß2, with a second optical layer thickness, which varies locally over the used region in accordance with a second layer thickness profile. The first and second layer thickness profiles differ. The deviation ?1 of the real part of the first refractive index from 1 is large relative to the absorption coefficient ß1 of the first layer material and the deviation ?2 of the real part of the second refractive index from 1 is small relative to the absorption coefficient ß2 of the second layer material.

Abstract: An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.

Abstract: When individual persons or vehicles move through a transportation network, they are likely to be both actively and passively creating information that reflects their location and current behavior. In this patent, we propose a system that makes complete use of this information. First, through a broad web of sensors, our system collects and stores the full range of information generated by travelers. Next, through the use of previously-stored data and active computational analysis, our system deduces the identity of individual travelers. Finally; using advanced data-mining technology, our system selects useful information and transmits it back to the individual, as well as to third-party users; in short, it forms the backbone for a variety of useful location-related end-user applications.

Abstract: A film element of an EUV-transmitting wavefront correction device is arranged in a beam path and includes a first layer of first layer material having a first complex refractive index n1=(1??1)+i?1, with a first optical layer thickness, which varies locally over the used region in accordance with a first layer thickness profile, and a second layer of second layer material having a second complex refractive index n2=(1??2)+i?2, with a second optical layer thickness, which varies locally over the used region in accordance with a second layer thickness profile. The first and second layer thickness profiles differ. The deviation ?1 of the real part of the first refractive index from 1 is large relative to the absorption coefficient ?1 of the first layer material and the deviation ?2 of the real part of the second refractive index from 1 is small relative to the absorption coefficient ?2 of the second layer material.

Abstract: A mirror arrangement for an EUV projection exposure apparatus for microlithography comprises a plurality of mirrors each having a layer which is reflective in the EUV spectral range and to which EUV radiation can be applied, and having a main body. In this case, at least one mirror of the plurality of mirrors has at least one layer comprising a material having a negative coefficient of thermal expansion. Moreover, a method for operating the mirror arrangement and a projection exposure apparatus are described. At least one heat source is arranged, in order to locally apply heat in a targeted manner to the at least one layer having a negative coefficient of thermal expansion of the at least one mirror.

Abstract: An architecture is provided for a widely distributed security system (SDI-SCAM) that protects computers at individual client locations, but which constantly pools and analyzes information gathered from machines across a network in order to quickly detect patterns consistent with intrusion or attack, singular or coordinated. When a novel method of attack has been detected, the system distributes warnings and potential countermeasures to each individual machine on the network. Such a warning may potentially include a probability distribution of the likelihood of an intrusion or attack as well as the relative probabilistic likelihood that such potential intrusion possesses certain characteristics or typologies or even strategic objectives in order to best recommend and/or distribute to each machine the most befitting countermeasure(s) given all presently known particular data and associated predicted probabilistic information regarding the prospective intrusion or attack.

Abstract: When individual persons or vehicles move through a transportation network, they are likely to be both actively and passively creating information that reflects their location and current behavior. In this patent, we propose a system that makes complete use of this information. First, through a broad web of sensors, our system collects and stores the full range of information generated by travelers. Next, through the use of previously-stored data and active computational analysis, our system deduces the identity of individual travelers. Finally; using advanced data-mining technology, our system selects useful information and transmits it back to the individual, as well as to third-party users; in short, it forms the backbone for a variety of useful location-related end-user applications.

Abstract: An architecture is provided for a widely distributed security system (SDI-SCAM) that protects computers at individual client locations, but which constantly pools and analyzes information gathered from machines across a network in order to quickly detect patterns consistent with intrusion or attack, singular or coordinated. When a novel method of attack has been detected, the system distributes warnings and potential countermeasures to each individual machine on the network. Such a warning may potentially include a probability distribution of the likelihood of an intrusion or attack as well as the relative probabilistic likelihood that such potential intrusion possesses certain characteristics or typologies or even strategic objectives in order to best recommend and/or distribute to each machine the most befitting countermeasure(s) given all presently known particular data and associated predicted probabilistic information regarding the prospective intrusion or attack.

Abstract: A reflective optical element for a microlithographic projection exposure apparatus, a mask inspection apparatus or the like. The reflective optical element has an optically effective surface, an element substrate (12, 32, 42, 52), a reflection layer system (14, 34, 44, 54) and at least one deformation reduction layer (15, 35, 45, 55, 58). When the optically effective surface (11, 31, 41, 51) is irradiated with electromagnetic radiation, a maximum deformation level of the reflection layer system is reduced in comparison with a deformation level of an analogously constructed reflective optical element without the deformation reduction layer.

Abstract: When individual persons or vehicles move through a transportation network, they are likely to be both actively and passively creating information that reflects their location and current behavior. In this patent, we propose a system that makes complete use of this information. First, through a broad web of sensors, our system collects and stores the full range of information generated by travelers. Next, through the use of previously-stored data and active computational analysis, our system deduces the identity of individual travelers. Finally; using advanced data-mining technology, our system selects useful information and transmits it back to the individual, as well as to third-party users; in short, it forms the backbone for a variety of useful location-related end-user applications.

Abstract: A mirror for a microlithographic projection exposure apparatus and a method for processing a mirror. The mirror includes an optically effective surface, a mirror substrate and a multiple layer system configured to reflect electromagnetic radiation with an operational wavelength of the projection exposure apparatus which is incident on the optically effective surface. The multiple layer system has a plurality of reflection layer stacks (16a, 16b, 16c, 26a, 26b), between each of which a respective separation layer (15a, 15b, 15c, 25a, 25b) is arranged. This separation layer is produced from a material which has a melting temperature that is at least 80° C. but less than 300° C.

Abstract: An optical assembly, in particular for a lithography system for imaging lithographic micro- or nanostructures, includes at least two optical elements arranged successively in a beam path of the optical assembly, an acquisition device designed to acquire radiation signals from marking elements on or at the at least two optical elements, and a control device coupled to the acquisition device and which is designed to determine the plurality of properties of the optically active surface of the at least two optical elements as a function of the information contained in the radiation signals originating from the marking elements. The disclosure also relates to a method for operating the optical assembly.

Abstract: A key-board assembly (10) is described that has a key-mat and a keyboard PCB (3) aligned with respect to each other instead of first to a housing of an input device. First, such alignment is achieved by adding pins (6) to the key-mat that fit tightly in holes (5) of the PCB. Secondly the key-mat has hooks (14) that can be clicked around the PCB and/or ribs (4) around the edges/carve-outs of the PCB that hold to the PCB with tight tolerances.

Abstract: System and methods for licensing of dynamic mobile applications are disclosed herein. In one embodiment, a non-transitory computer readable medium storing executable instructions is provided. The instructions, when executed by a processor, cause the processor to communicatively couple to a mobile device and to receive a user login, a user password, and a client identification from the mobile device. The instructions additionally cause the processor to validate a client as a licensed client based on the based on the user login, user password, and client identification and to derive a connectivity data based on the user login, user password, and client identification if the client is a valid licensed client, wherein the connectivity data comprises a first connectivity data configured to communicatively couple the mobile device to a first system; and wherein the mobile device is configured to download a first API from the first system.

Abstract: A mirror arrangement for an EUV projection exposure apparatus for microlithography comprises a plurality of mirrors each having a layer which is reflective in the EUV spectral range and to which EUV radiation can be applied, and having a main body. In this case, at least one mirror of the plurality of mirrors has at least one layer comprising a material having a negative coefficient of thermal expansion. Moreover, a method for operating the mirror arrangement and a projection exposure apparatus are described. At least one heat source is arranged, in order to locally apply heat in a targeted manner to the at least one layer having a negative coefficient of thermal expansion of the at least one mirror.

Abstract: A method for encoding a frame of visual data which includes the steps of encoding an original full resolution frame, storing coded data for the encoded full resolution frame, reconstructing and storing encoded full resolution frame, downsampling the original full resolution frame to render it a reduced spatial resolution frame, encoding the reduced spatial resolution frame, storing coded data for the reduced spatial resolution frame, reconstructing and storing the reduced spatial resolution frame, upsampling and storing the reconstructed reduced spatial resolution frame, comparing a characteristic in the reconstructed full resolution frame with said characteristic in the original full resolution frame to determine the deviation of the reconstructed full resolution frame from the original full resolution frame with respect to said characteristic, comparing said characteristic in the upsampled reconstructed spatial reduced resolution frame with said characteristic in the original full resolution frame to determ

Abstract: A reflective optical element for a microlithographic projection exposure apparatus, a mask inspection apparatus or the like. The reflective optical element has an optically effective surface, an element substrate (12, 32, 42, 52), a reflection layer system (14, 34, 44, 54) and at least one deformation reduction layer (15, 35, 45, 55, 58). When the optically effective surface (11, 31, 41, 51) is irradiated with electromagnetic radiation, a maximum deformation level of the reflection layer system is reduced in comparison with a deformation level of an analogously constructed reflective optical element without the deformation reduction layer.

Abstract: System and methods for dynamic mobile applications are disclosed herein. In one embodiment, a non-transitory computer readable medium storing executable instructions is provided. The instructions, when executed by a processor, cause the processor to authenticate a user and to retrieve a connectivity data. The instructions further cause the processor to connect with at least one external system based on the connectivity data and to retrieve an application programming interface (API) from the at least one external system.

Abstract: System and methods for licensing of dynamic mobile applications are disclosed herein. In one embodiment, a non-transitory computer readable medium storing executable instructions is provided. The instructions, when executed by a processor, cause the processor to communicatively couple to a mobile device and to receive a user login, a user password, and a client identification from the mobile device. The instructions additionally cause the processor to validate a client as a licensed client based on the based on the user login, user password, and client identification and to derive a connectivity data based on the user login, user password, and client identification if the client is a valid licensed client, wherein the connectivity data comprises a first connectivity data configured to communicatively couple the mobile device to a first system; and wherein the mobile device is configured to download a first API from the first system.

Abstract: A widely distributed security system (SDI-SCAM) that protects computers at individual client locations, but which constantly pools and analyzes information gathered from machines across a network in order to quickly detect patterns consistent with intrusion or attack, singular or coordinated. When a novel method of attack has been detected, the system distributes warnings and potential countermeasures to each individual machine on the network. Such a warning may potentially consist of a probability distribution of the likelihood of an intrusion or attack as well as the relative probabilistic likelihood that such potential intrusion possesses certain characteristics or typologies or even strategic objectives in order to best recommend and/or distribute to each machine the most befitting countermeasure(s) given all presently known particular data and associated predicted probabilistic information regarding the prospective intrusion or attack.