Abstract: An apparatus for removing particles from a gas in a high purity flowing gas system is provided which includes a flow tube inserted inline in the flowing gas system having an inlet and an outlet, a pressure sealed, electrically insulated feed-through integral to the flow tube, an emitter inserted through the feed-through into the flow tube to create a plasma in the gas to charge particles in the gas, and a collector surface in proximity to the emitter; whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface.

Abstract: An apparatus and a method are disclosed for detecting particles in a particle-containing gas at a pressure greater than about 0 psig. The apparatus includes a gas distribution line containing a pressurized gas having a pressure greater than about 0 psig and a condensation nucleus counter in fluid communication with the pressurized gas in the gas distribution line. The condensation nucleus counter is adapted to receive a stream of the pressurized gas at a pressure substantially equal to the pressure of the pressurized gas in the gas distribution line. The condensation nucleus counter is constructed of materials resistant to corrosion and to reaction with the pressurized gas, which may be one or more reactive or toxic gases, such as those used in microchip processing, or an inert gas.

Abstract: An apparatus for removing particles from a gas in a high purity flowing gas system is provided which includes a flow tube inserted inline in the flowing gas system having an inlet and an outlet, a pressure sealed, electrically insulated feed-through integral to the flow tube, an emitter inserted through the feed-through into the flow tube to create a plasma in the gas to charge particles in the gas, and a collector surface in proximity to the emitter; whereby an electric field between the emitter and the collector surface draws the particles in the gas to the collector surface.

Abstract: An apparatus and process for separating perfluorocarbon compounds from a gas mixture passes an incoming stream of a gas into a cold trap, the gas stream including a plurality of perfluorocarbon compounds. The gas mixture is cooled within the cold trap to a temperature below −100° C. to produce a condensate that is enriched in at least one perfluorocarbon compound and a non-condensed stream from which the condensate was separated. The condensate is withdrawn from the cold trap. The condensate may be withdrawn by warming the cold trap to vaporize the condensate and thereafter flowing the vaporized condensate into a storage vessel. The non-condensed stream may be vented to the atmosphere, re-circulated into the cold trap or flowed through subsequent separation processes to extract additional perfluorocarbon compounds.

Abstract: A method and apparatus for pressurizing a high purity gas in liquefied form to an ultra high pressure gas in vapor form using a constant volume, heated vaporization vessel.

Abstract: A portable contamination-sensitive component transport container provides a continuously purged environment for the components. The container includes an attached cryogenically liquefied inert gas insulated storage vessel from which vaporized liquefied inert gas is used to generate a gaseous nitrogen purge to the container.