Patents by Inventor Wei-Chi Cheng
Wei-Chi Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240194738Abstract: A semiconductor device includes a gate structure on a substrate, a spacer around the gate structure, and a buffer layer adjacent to the gate structure. Preferably, the buffer layer includes a crescent moon shape and the buffer layer includes an inner curve, an outer curve, and a planar surface connecting the inner curve and an outer curve along a top surface of the substrate, in which the planar surface directly contacts the outer curve on an outer sidewall of the spacer.Type: ApplicationFiled: February 27, 2024Publication date: June 13, 2024Applicant: UNITED MICROELECTRONICS CORPInventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Patent number: 11948975Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; and forming a buffer layer adjacent to the gate structure. Preferably, the buffer layer includes a crescent moon shape and the buffer layer includes an inner curve, an outer curve, and a planar surface connecting the inner curve and an outer curve along a top surface of the substrate, in which the planar surface directly contacts the outer curve on an outer sidewall of the spacer.Type: GrantFiled: October 24, 2021Date of Patent: April 2, 2024Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Publication number: 20230051313Abstract: A method for analyzing a specification parameter of an electronic component includes inputting a package type and at least one engineering drawing image of an electronic component; acquiring a probability value that in each view of the different viewing directions each of the plurality of specification parameter of the electronic component is labeled; taking the view of each of the plurality of specification parameters in the view direction with a highest probability value as a recommended view; performing a box selection on the plurality of specification parameters for at least one engineering drawing image with the same viewing direction as that of the recommended view by an object detection model; and identifying box-selected specification parameters to acquire a size value of identified specification parameters from the at least one engineering drawing image, and converting the size value into a corresponding editable text for output.Type: ApplicationFiled: August 11, 2021Publication date: February 16, 2023Inventors: YAN-JHIH WANG, KUN-YOU LIN, JUN-QIANG WEI, WEI-CHI CHENG, YI-TING CHEN
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Publication number: 20220045170Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; and forming a buffer layer adjacent to the gate structure. Preferably, the buffer layer includes a crescent moon shape and the buffer layer includes an inner curve, an outer curve, and a planar surface connecting the inner curve and an outer curve along a top surface of the substrate, in which the planar surface directly contacts the outer curve on an outer sidewall of the spacer.Type: ApplicationFiled: October 24, 2021Publication date: February 10, 2022Applicant: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Patent number: 11189695Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; and forming a buffer layer adjacent to the gate structure. Preferably, the buffer layer includes a crescent moon shape and the buffer layer includes an inner curve, an outer curve, and a planar surface connecting the inner curve and an outer curve along a top surface of the substrate, in which the planar surface directly contacts the outer curve on an outer sidewall of the spacer.Type: GrantFiled: December 4, 2019Date of Patent: November 30, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Patent number: 10978398Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a gate structure on the substrate; forming an epitaxial layer adjacent to the gate structure; forming an interlayer dielectric (ILD) layer on the gate structure; forming a first contact hole in the ILD layer adjacent to the gate structure; and forming a cap layer in the recess, in which a top surface of the cap layer is even with or lower than a top surface of the substrate.Type: GrantFiled: January 1, 2020Date of Patent: April 13, 2021Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Yu-Hsiang Hung, Wei-Chi Cheng, Ssu-I Fu, Jyh-Shyang Jenq
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Publication number: 20200135647Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a gate structure on the substrate; forming an epitaxial layer adjacent to the gate structure; forming an interlayer dielectric (ILD) layer on the gate structure; forming a first contact hole in the ILD layer adjacent to the gate structure; and forming a cap layer in the recess, in which a top surface of the cap layer is even with or lower than a top surface of the substrate.Type: ApplicationFiled: January 1, 2020Publication date: April 30, 2020Inventors: Chih-Kai Hsu, Yu-Hsiang Hung, Wei-Chi Cheng, Ssu-I Fu, Jyh-Shyang Jenq
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Publication number: 20200111871Abstract: A method for fabricating semiconductor device includes the steps of: forming a gate structure on a substrate; forming a spacer around the gate structure; and forming a buffer layer adjacent to the gate structure. Preferably, the buffer layer includes a crescent moon shape and the buffer layer includes an inner curve, an outer curve, and a planar surface connecting the inner curve and an outer curve along a top surface of the substrate, in which the planar surface directly contacts the outer curve on an outer sidewall of the spacer.Type: ApplicationFiled: December 4, 2019Publication date: April 9, 2020Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Patent number: 10566285Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a gate structure on the substrate; forming an epitaxial layer adjacent to the gate structure; forming an interlayer dielectric (ILD) layer on the gate structure; forming a first contact hole in the ILD layer adjacent to the gate structure; and forming a cap layer in the recess, in which a top surface of the cap layer is even with or lower than a top surface of the substrate.Type: GrantFiled: June 2, 2016Date of Patent: February 18, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Yu-Hsiang Hung, Wei-Chi Cheng, Ssu-I Fu, Jyh-Shyang Jenq
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Patent number: 10546922Abstract: A method for fabricating semiconductor device is disclosed. First, a substrate is provided, and a gate structure is formed on the substrate. Next, a recess is formed adjacent to two sides of the gate structure, and an epitaxial layer is formed in the recess, in which a top surface of the epitaxial layer is lower than a top surface of the substrate. Next, a cap layer is formed on the epitaxial layer, in which a top surface of the cap layer is higher than a top surface of the substrate.Type: GrantFiled: February 6, 2018Date of Patent: January 28, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq, Tsung-Mu Yang
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Patent number: 10541304Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate; forming a gate structure on the substrate; forming a spacer adjacent to the gate structure; forming a recess adjacent to the spacer; forming a buffer layer in the recess, wherein the buffer layer comprises a crescent moon shape; and forming an epitaxial layer on the buffer layer.Type: GrantFiled: May 17, 2018Date of Patent: January 21, 2020Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Publication number: 20180269288Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate; forming a gate structure on the substrate; forming a spacer adjacent to the gate structure; forming a recess adjacent to the spacer; forming a buffer layer in the recess, wherein the buffer layer comprises a crescent moon shape; and forming an epitaxial layer on the buffer layer.Type: ApplicationFiled: May 17, 2018Publication date: September 20, 2018Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Patent number: 10062604Abstract: A semiconductor device includes: a substrate, a gate structure on the substrate, and a spacer adjacent to the gate structure, in which the spacer extends to a top surface of the gate structure, a top surface of the spacer includes a planar surface, the spacer encloses an air gap, and the spacer is composed of a single material. The gate structure includes a high-k dielectric layer, a work function metal layer, and a low resistance metal layer, in which the high-k dielectric layer is U-shaped. The semiconductor device also includes an interlayer dielectric (ILD) layer around the gate structure and a hard mask on the spacer, in which the top surface of the hard mask is even with the top surface of the ILD layer.Type: GrantFiled: July 7, 2017Date of Patent: August 28, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ching-Yu Chang, Ssu-I Fu, Yu-Hsiang Hung, Chih-Kai Hsu, Wei-Chi Cheng, Jyh-Shyang Jenq
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Patent number: 10008569Abstract: A method for fabricating semiconductor device is disclosed. First, a substrate is provided, a gate structure is formed on the substrate, a recess is formed adjacent to the gate structure, a buffer layer is formed in the recess, and an epitaxial layer is formed on the buffer layer. Preferably, the buffer layer includes a crescent moon shape.Type: GrantFiled: September 8, 2016Date of Patent: June 26, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Publication number: 20180166532Abstract: A method for fabricating semiconductor device is disclosed. First, a substrate is provided, and a gate structure is formed on the substrate. Next, a recess is formed adjacent to two sides of the gate structure, and an epitaxial layer is formed in the recess, in which a top surface of the epitaxial layer is lower than a top surface of the substrate. Next, a cap layer is formed on the epitaxial layer, in which a top surface of the cap layer is higher than a top surface of the substrate.Type: ApplicationFiled: February 6, 2018Publication date: June 14, 2018Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq, Tsung-Mu Yang
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Patent number: 9929234Abstract: A method for fabricating semiconductor device is disclosed. First, a substrate is provided, and a gate structure is formed on the substrate. Next, a recess is formed adjacent to two sides of the gate structure, and an epitaxial layer is formed in the recess, in which a top surface of the epitaxial layer is lower than a top surface of the substrate. Next, a cap layer is formed on the epitaxial layer, in which a top surface of the cap layer is higher than a top surface of the substrate.Type: GrantFiled: May 3, 2016Date of Patent: March 27, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq, Tsung-Mu Yang
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Patent number: 9916978Abstract: The invention provides a method for fabricating a fin field effect transistor (FinFET), comprising: providing a substrate having a logic region and a large region; forming a plurality of fin structures in the logic region by removing a portion of the substrate in the logic region; forming an oxide layer on the substrate filling in-between the fin structures in the logic region; forming an first epitaxial structure in the large region by removing a portion of the substrate in the large region; exposing a portion of the fin structures and a portion of the epitaxial structure by removing a portion of the oxide layer; and forming a gate electrode on portions of the fin structures.Type: GrantFiled: June 2, 2016Date of Patent: March 13, 2018Assignee: UNITED MICROELECTRONICS CORPORATIONInventors: Chih-Kai Hsu, Yu-Hsiang Hung, Wei-Chi Cheng, Ssu-I Fu, Jyh-Shyang Jenq, Chao-Hung Lin
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Publication number: 20180047810Abstract: A method for fabricating semiconductor device is disclosed. First, a substrate is provided, a gate structure is formed on the substrate, a recess is formed adjacent to the gate structure, a buffer layer is formed in the recess, and an epitaxial layer is formed on the buffer layer. Preferably, the buffer layer includes a crescent moon shape.Type: ApplicationFiled: September 8, 2016Publication date: February 15, 2018Inventors: Chih-Kai Hsu, Ssu-I Fu, Yu-Hsiang Hung, Wei-Chi Cheng, Jyh-Shyang Jenq
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Patent number: 9847398Abstract: A semiconductor device is disclosed. The semiconductor device includes: a substrate; a gate structure on the substrate; a spacer around the gate structure; a contact etch stop layer (CESL) on the spacer; an interlayer dielectric (ILD) layer adjacent to one side of the gate structure and contacting the CESL; and a contact plug adjacent to another side of the gate structure and contacting the CESL.Type: GrantFiled: July 13, 2016Date of Patent: December 19, 2017Assignee: UNITED MICROELECTRONICS CORP.Inventors: Yu-Hsiang Hung, Chih-Kai Hsu, Ssu-I Fu, Wei-Chi Cheng, Jyh-Shyang Jenq
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Publication number: 20170352541Abstract: The invention provides a method for fabricating a fin field effect transistor (FinFET), comprising: providing a substrate having a logic region and a large region; forming a plurality of fin structures in the logic region by removing a portion of the substrate in the logic region; forming an oxide layer on the substrate filling in-between the fin structures in the logic region; forming an first epitaxial structure in the large region by removing a portion of the substrate in the large region; exposing a portion of the fin structures and a portion of the epitaxial structure by removing a portion of the oxide layer; and forming a gate electrode on portions of the fin structures.Type: ApplicationFiled: June 2, 2016Publication date: December 7, 2017Inventors: CHIH-KAI HSU, YU-HSIANG HUNG, WEI-CHI CHENG, SSU-I FU, JYH-SHYANG JENQ, CHAO-HUNG LIN