Abstract: A method includes forming a first conductive feature, depositing a passivation layer on a sidewall and a top surface of the first conductive feature, etching the passivation layer to reveal the first conductive feature, and recessing a first top surface of the passivation layer to form a step. The step comprises a second top surface of the passivation layer. The method further includes forming a planarization layer on the passivation layer, and forming a second conductive feature extending into the passivation layer to contact the first conductive feature.

Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a semiconductor substrate, active devices and transparent conductive patterns. The active devices are formed on the semiconductor substrate. The transparent conductive patterns are formed over the active devices and electrically connected to the active devices. The transparent conductive patterns are made of a metal oxide material. The metal oxide material has a first crystalline phase with a prefer growth plane rich in oxygen vacancy, and has a second crystalline phase with a prefer growth plane poor in oxygen vacancy.

Abstract: A method includes forming a first package component, which formation process includes forming a first plurality of openings in a first dielectric layer, depositing a first metallic material into the first plurality of openings, performing a planarization process on the first metallic material and the first dielectric layer to form a plurality of metal pads in the first dielectric layer, and selectively depositing a second metallic material on the plurality of metal pads to form a plurality of bond pads. The first plurality of bond pads comprise the plurality of metal pads and corresponding parts of the second metallic material. The first package component is bonded to a second package component.

Abstract: A micro electro mechanical system (MEMS) includes a circuit substrate comprising electronic circuitry, a support substrate having a recess, a bonding layer disposed between the circuit substrate and the support substrate, through holes passing through the circuit substrate to the recess, a first conductive layer disposed on a front side of the circuit substrate, and a second conductive layer disposed on an inner wall of the recess. The first conductive layer extends into the through holes and the second conductive layer extends into the through holes and coupled to the first conductive layer.

Abstract: The present disclosure provides a measuring apparatus including a platform, a measuring head movably arranged on the platform, pneumatic balls supporting the platform, an inflator, and a controlling device controlling the inflator to inflate the pneumatic balls while the measuring head is moving towards a next measuring point from a current measuring point. The controlling device controls the inflator to inflate the pneumatic balls with the required air inflation amount within the required time evenly during the movement of the measuring head, therefore, the vibration of the platform during the movement of the measuring head and the inflation of the pneumatic ball can be reduced, which can keep the platform horizontal quickly after the measuring head stops moving, reduce the measurement errors of the measuring head, further improve the productivity of the liquid crystal panel. The present disclosure further provides a controlling method of the above measuring apparatus.

Abstract: The present disclosure provides a repairing method, a repairing structure and a repairing system for a disconnected defect, the repairing method includes: forming a first repairing line connecting two ends of a disconnected portion of a scanning line; forming an insulation layer covering the first repairing line; and forming a second repairing line connecting two ends of a disconnected portion of a data line with the insulation layer located at an intersection of the first repairing line and the second repairing line. By forming the insulation layer between the first repairing line and the second repairing line, the present disclosure avoids the short circuit generated after the scanning line and the data line are repaired, repairs the disconnected defect at the intersection of two metal layers, improves the yield rate of the repairing of the disconnected defect, and reduces manufacturing cost.

Abstract: Disclosed is an inspection device for a glass substrate, comprising at least one probe, a holder, a stretch controller and a control circuit. The probe is installed on the stretch controller, the stretch controller is employed to stretch the probe out of the holder as an electrical signal is received; and to retract the probe backward in the holder as the electrical signal stops. The present invention promotes the inspection efficiency for the glass substrate.

Abstract: The present disclosure provides a positioning method and a positioning device. The positioning device includes: an emitter for emitting light beams to a to-be-positioned point and auxiliary positioning points; a receiver for receiving reflected light beams reflected by the to-be-positioned point and the auxiliary positioning points; a judging module for judging whether the reflected light beam reflected by the to-be-positioned point is received or not; and a calculating module for receiving a judging result from the judging module and determining height information of the to-be-positioned point according to the reflected light beams reflected by the to-be-positioned point and the auxiliary positioning points.

Abstract: A repairing method, repairing device and repairing structure for repairing a signal line of an array substrate having the disconnected defect, including: setting a repairing route according to a position of the disconnected defect and determining a position at which a filling portion is required to be formed according to the repairing route; forming the filling portion at the position at which the filling portion is required to be formed; and forming a repairing line along the repairing route. By detecting the repairing route before repairing the disconnected defect by forming the filling portion according to the repairing route, the present disclosure can avoid the disconnection of the repairing line caused by great height differences of the surface under the repairing line and improve the repairing success rate of the disconnected defect.

Abstract: An apparatus and method for repairing array substrate are provided, wherein the apparatus comprises the following components: a laser source, operable to repair excess photoresist on the array substrate; a detection device, operable to detect whether there is excess photoresist on the array substrate; a filter lens, operable to make the light emitted from the laser source project onto the excess photoresist on the array substrate; the filter lens is arranged above the array substrate, the laser source is arranged above the filter lens, and the detection device is arranged above the array substrate. The apparatus and method for repairing array substrate of the present invention can be used for quick and accurate repair to an array substrate.

Abstract: A conveyor control apparatus of liquid crystal panel substrates and a control method thereof is disclosed. The apparatus has multiple first side pillars and multiple second side pillars mounted opposite to the first side pillars. A movement control assembly is mounted outside the first side pillars and the second side pillars. The movement control assembly is used to move to a slot where the liquid crystal panel substrate is to move is inserted, and control the certain liquid crystal panel substrate inserted in the slot to move out from the conveyor control apparatus.

Abstract: The present disclosure provides a measuring apparatus including a platform, a measuring head movably arranged on the platform, pneumatic balls supporting the platform, an inflator, and a controlling device controlling the inflator to inflate the pneumatic balls while the measuring head is moving towards a next measuring point from a current measuring point. The controlling device controls the inflator to inflate the pneumatic balls with the required air inflation amount within the required time evenly during the movement of the measuring head, therefore, the vibration of the platform during the movement of the measuring head and the inflation of the pneumatic ball can be reduced, which can keep the platform horizontal quickly after the measuring head stops moving, reduce the measurement errors of the measuring head, further improve the productivity of the liquid crystal panel. The present disclosure further provides a controlling method of the above measuring apparatus.

Abstract: The present disclosure provides a positioning method and a positioning device. The positioning device includes: an emitter for emitting light beams to a to-be-positioned point and auxiliary positioning points; a receiver for receiving reflected light beams reflected by the to-be-positioned point and the auxiliary positioning points; a judging module for judging whether the reflected light beam reflected by the to-be-positioned point is received or not; and a calculating module for receiving a judging result from the judging module and determining height information of the to-be-positioned point according to the reflected light beams reflected by the to-be-positioned point and the auxiliary positioning points.

Abstract: The present disclosure provides a light converging device and a repairing machine having the light converging device. The light converging device includes a transparent plate, and a number of protrusions arranged on the transparent plate each which has a convex surface. The convex surfaces of the protrusions form a light emitting side of the light converging device. With the light converging device with the light emitting side being formed by a number of protrusions, the light can be converged by the light converging device to evenly distribute the energy of the light corresponding to the to-be-repaired position and further improve the yield rate of the repairing operation.

Abstract: A repairing method, repairing device and repairing structure for repairing a signal line of an array substrate having the disconnected defect , including: setting a repairing route according to a position of the disconnected defect and determining a position at which a filling portion is required to be formed according to the repairing route; forming the filling portion at the position at which the filling portion is required to be formed; and forming a repairing line along the repairing route. By detecting the repairing route before repairing the disconnected defect by forming the filling portion according to the repairing route, the present disclosure can avoid the disconnection of the repairing line caused by great height differences of the surface under the repairing line and improve the repairing success rate of the disconnected defect.

Abstract: The present invention provides an apparatus and a method for repairing a broken line of an array substrate. The apparatus includes a repair unit and a heating unit. The repair unit forms a repair line on a broken-line defect of a wire on the array substrate. The heating unit heats the repair line, so that the molecules constituting the repair line are arranged in sequence according a predetermined rule. The present invention can achieve the repair for a longer broken-line defect.

Abstract: A manufacturing method of a liquid crystal panel, includes: cleaning a thin film transistor array substrate of the liquid crystal panel; performing an array detection on the cleaned thin film transistor array substrate; and processing the thin film transistor array substrate according to detecting result of the array detection. In the present disclosure, the TFT array substrate is cleaned after the array manufacturing process and is detected to determine whether the lines thereon are disconnected, and the disconnected lines are further repaired, which prevents the TFT array substrate with the disconnected lines from entering the cell device and reduces the scrap rate of the liquid crystal panel. Meanwhile, since the TFT array substrate is at first cleaned by the cleaning mechanism to remove the particles thereon and further is detected by the array detector, thus, the particles on the TFT array substrate is prevented from damaging the array detector.

Abstract: A repairing device for repairing disconnected lines, including a suction pipe, a number of blowing pipes surrounding the suction pipe and is noncoplanar with the suction pipe, each of the blowing pipes includes a blowing opening inclined toward the suction pipe; and a number of vapor coating pipes located between the suction pipe and the blowing pipes and being parallel with the suction pipe. With the configurations of the blowing pipes, the suction pipe, and the vapor coating pipes, the inert gas blown from the blowing pipes spreads from outside to inside, thus, molecules of the coating material ejected from the vapor coating pipes can be drawn close to the disconnected portion of the disconnected line, which avoids the short circuit caused by the spread molecules of the coating material in the present coating technology and increases the success rate of the coating operation.

Abstract: A cleaning device includes a suction pipe and a number of blowing pipes surrounding the suction pipe. Each of the blowing pipes is noncoplanar with the suction pipe and includes a blowing opening inclined toward the suction pipe. With the cleaning device of the present disclosure, the impurities on the array substrate can be removed in the array fabricating process, therefore, when the data liens or scan lines on the array substrate are coated, the coating material can be prevented from dropping off in the following cleaning process, which improves the success rate of coating the disconnected lines.

Abstract: A detecting method for a substrate includes the following steps: positioning the substrate; optically scanning the substrate and determining whether there is any defect on the substrate, if there is at least one defect on the substrate, determining the position of the at least one defect; obtaining a plurality of size images of a plurality of measuring areas of the substrate and transferring the size images; and calculating a width of each line on the substrate, and simultaneously obtaining a defection image of the at least one defect. The present disclosure further provides a detecting device for the substrate. With the detecting method and device, the defect detecting and measurement of the width of each line can be carried out simultaneously, which reduces the manufacturing time of the substrate and improves the manufacturing efficiency thereof.