Abstract: A manifold having a plurality of outlets each equally spaced from the inlet in the radial direction is provided. The equal spacing of the outlets from the inlet provides substantially equal flow across each outlet. Preferably, the manifold has a main body, an inlet coaxial with the main body and a plurality of outlets carried by the main body equally spaced from the inlet. A stop valve can be provided adjacent each outlet to allow each outlet to be independently closed while maintaining a substantially equal flow through the open outlets.

Abstract: This invention describes a new method of forming a double layer attenuating phase shifting mask. A first pattern is formed in a layer of attenuating phase shifting material and an alignment pattern is formed in a layer of opaque material. A first resist is used to form the first pattern. A pellicle is used to restrict the deposition of a second resist to the alignment region of the mask only and as a result neither the first resist nor the second resist must withstand dry etching steps. The first resist is removed before the step of forming the first pattern in the attenuating phase shifting material and cleaning before is step is carried out is thereby improved.

Abstract: A mask and a method of forming a mask having a binary mask pattern in a first region of a transparent mask substrate and a rim type attenuating phase shifting mask pattern in a second region of the same transparent mask substrate. The rim type attenuating phase shifting mask pattern is used to form small contact holes and the binary mask pattern is used to form larger contact holes in an integrated circuit wafer. The use of the rim type attenuating phase shifting mask pattern and the binary mask pattern avoids the problems due to side lobe effect for cases where different size contact holes are required on the same layer in an integrated circuit wafer. The formation of the rim type attenuating phase shifting mask pattern and the binary mask pattern on the same transparent mask substrate increases throughput and decreases cost in the fabrication of integrated circuit wafers.

Abstract: An incremental multiple-forced vise of epicyclic gear train type mainly comprises basic components of vise's main body and movable jaw etc. to accommodate a lead screw, two sets ( i.e. double-layer ) of epicyclic gear train and a buffer device.

Abstract: This invention describes a new method of forming a double layer attenuating phase shifting mask. A first pattern is formed in a layer of attenuating phase shifting material and an alignment pattern is formed in a layer of opaque material. A first resist is used to form the first pattern. A pellicle is used to restrict the deposition of a second resist to the alignment region of the mask only and as a result neither the first resist nor the second resist must withstand dry etching steps. The first resist is removed before the step of forming the first pattern in the attenuating phase shifting material and cleaning before this step is carried out is thereby improved.

Abstract: An apparatus for the guiding an air current of equipment used in a clean room is disclosed which comprises a chassis for protecting the equipment, a cooling fan for bringing warm air generated inside the chassis, and a guiding panel being attached on one side of the chassis for guiding the warm air brought by the cooling fan to conform downwards to the direction of the vertical air flow in a clean room for reducing particulate contamination. The present invention also provides a way for preventing buidup of static charges on the equipment.

Abstract: A new process for fabricating an attenuated phase-shifting photomask is described. A photomask blank is provided comprising a phase-shifting layer overlying a substrate, a chromium layer overlying the phase-shifting layer, and a resist layer overlying the chromium layer. The resist layer of the photomask blank is exposed to electron-beam energy wherein a main pattern area of the photomask blank is exposed to a first dosage of the electron-beam energy and wherein a border area surrounding the main pattern area is not exposed to the electron-beam energy and wherein a secondary pattern area between the main pattern area and the border area is exposed to a second dosage of electron-beam energy wherein the second dosage is lower than the first dosage. The exposed resist layer is developed wherein the resist within the main pattern area is removed to expose the chromium layer. The exposed chromium layer is etched through to expose the underlying phase-shifting layer.

Abstract: The present invention relates to an automatic temperature controlling system for semiconductor process, when one of the chillers in the temperature controlling system is out of order, then another chiller will automatically take over the function of the broken one by using the second temperature controlling path.

Abstract: A bipolar plate assembly includes a frame member having a center opening therethrough between parallel opposed surfaces, the opening being countersunk on one side of frame the member defining a mounting shoulder, and a bipolar element including a thin lead foil substrate having positive and negative active electrode material disposed on opposite surfaces, the bipolar element being mounted in the opening of the frame member with the marginal edge of the substrate located on the mounting shoulder and secured thereto by an adhesive resin, securing the bipolar element to said frame member, one or more such bipolar plate assemblies being stacked together between first and second terminal electrode assemblies to form a single or multi-element bipolar module having positive and negative terminals, and a plurality of the bipolar modules can be stacked together with their terminals electrically interconnected to form a multi-cell bipolar battery structure.

Abstract: A module containing digital compression and decompression circuitry is used in conjunction with a system whereby a video program may be communicated over a telephone line to an RF broadcaster to be received by individuals at remote locations equipped with one of the modules. In the preferred embodiment, the RF transmitter is an FM transmitter, and the video broadcasts are modulated onto a subcarrier, such as an SCA subcarrier. The module has various other inputs and outputs adapted for connection to other video-related devices and/or a personal computer which may be used for control or program production. A configuration is also described whereby multiple modules may be used in conjunction with a conference control module enabling multiple participants to view one another as part of a gathering such as a classroom instruction situation.

Abstract: A grid for a lead acid battery plate with a conductive frame having a top element and a bottom frame element, with conductive wires extending from the bottom element to the top element which includes an enlarged section beneath a current collection lug and being of a size and shape so as to optimize the current flow to the lug. Other features disclosed are the conductive wire shape and spacing so that the amount of conductive material such as lead is reduced where it has been predetermined that the current flow is minimal. In addition, the grid is designed to have equidistant potential points relative to the lug to optimize current flow. The advantage of such a grid is that it maximizes performance of the battery while keeping its weight at a minimum.

Abstract: A cast-on strap for use in connecting current collecting lugs in battery systems is disclosed. In the most preferred embodiment, the invention includes a caston strap formed of electrically conductive material, such as lead, having a first elongate portion in electrical contact with a line of spaced apart battery plate lugs. The connector strap includes a second portion lying in a plane which is perpendicular to that of the elongate portion so that the latter is laterally displaced. The preferred cast-on strap also includes an angularly extending portion between the elongate portion and the second portion. Increased current transfer efficiency is achieved using the strap of the present invention.

Abstract: The invention is a process for making high molecular weight polymers of monoalkenyl arene monomers comprising:1) copolymerizing vinylbenzocyclobutene with the monoalkenyl arene monomer through the vinyl moiety;2) submitting the thus formed copolymer to conditions sufficient to open the side rings of the benzocyclobutene moieties;wherein the amount of vinylbenzocyclobutene in the copolymer is such that the polymer formed by step 2) does not reach a gel point. Such copolymers allow the building of molecular weight after the initial polymerization.

Abstract: A thermocell includes a negative electrode, such as a lead-acid electrode, and a porous oxygen (air) electrode disposed in a housing and separated by a separator. During discharge, oxygen is allowed to permeate through the oxygen electrode and separator to reach the negative electrode. Chemical oxidation of the negative electrode by oxygen in the presence of sulfuric acid yields water, lead sulfate, and heat. The heat can be used in many ways, such as warming up an adjoining automotive battery in winter, or as a personal heating pad. The heating rate is controlled by the rate of oxygen ingress. When not in use, the oxygen electrode is sealed by taping or by other means to stop ingress of oxygen. The used thermocell can be recharged by charging the negative electrode while evolving oxygen at the oxygen electrode.

Abstract: An grid for a lead acid battery plate includes a central plate lug, the lug preferably having an expanded base for the collection of current and the grid being constructed in such a manner that the amount of metal is concentrated in the vicinity of the lug. A unique cast-on strap design for use with the grids is also disclosed. Substantial manufacturing advantages result from the use of such grids, and the performance of the battery can be increased to the point that individual battery plates may be eliminated, resulting in lighter weight batteries and material cost savings.

Abstract: An electrode suitable for use as a lead-acid battery plate is formed of a paste composition which enhances the performance of the plate. The paste composition includes a basic lead sulfate, a persulfate and water. The paste may also include lead oxide and fibers. An electrode according to the invention is characterized by good strength in combination with high power density, porosity and surface area.

Abstract: A system for maintaining the security of information transmitted between facsimile machines includes a transmitting/receiving facsimile machine for receiving input sheets having an encryption zone; an image sensor for detecting the encryption zones; an encryption device for scrambling messages that appear within an encryption zone. Further the system includes means for sensing encryption zones on transmitted messages and for decoding messages that have been scrambled within the encryption zones.

Abstract: A process for coating a solid substrate with a layer of barium metaplumbate includes steps of forming a layer of lead oxide on the substrate, if not already present, and then reacting this layer with a barium salt at an elevated temperature to form a layer of coating of barium metaplumbate. Reaction temperature is a key aspect of this process, along with use of a barium salt which will react at the temperature selected. In particular, the reaction temperature must be sufficiently high to allow the reaction to proceed, but lower than the melting point of the substrate. The described process eliminates the need to preform BaPbO.sub.3 prior to coating and can be conducted at a much lower range of temperatures than prior processes.

Abstract: An electrode suitable for use as a lead-acid battery plate contains an inorganic metal oxide additive which enhances the formation of the plate. The additive is electrically conductive, stable in aqueous solutions of sulfuric acid, but does not participate in the electrode reaction. Suitable metal oxides include barium metaplumbate and other ceramic perovskite materials having similar properties. The conductive ceramic may also be used in electrodes for bipolar lead-acid batteries and in an electrode, particularly an anode (positive electrode), used in electrolytic processes.

Abstract: Electrodes having high electrocatalytic activity are prepared by coating a base member of conductive material (preferably glassy carbon) with a layer of a porous polymeric material and then electrodepositing microparticles of metal within the polymeric layer by electrolysis using the electrode in a solution of the appropriate metal. The metal particles deposited within the polymer layer are typically less than about 100 nm. in diameter and their imbedding within the polymeric layer helps prevent poisoning of catalytically active metal by absorbed macromolecules.