Abstract: A lens driving apparatus includes a holder, a metal cover, a carrier, a sensing magnet, a printed circuit board, a position sensor, a coil and at least one driving magnet. The metal cover is coupled with the holder and has an opening. The carrier is assembled to a lens assembly having an optical axis, wherein the carrier is disposed in the metal cover and is movable along a direction parallel to the optical axis. The sensing magnet is coupled with the carrier. The printed circuit board is disposed near to one of the four lateral sides of the holder. The position sensor is disposed on the printed circuit board and corresponds to the sensing magnet. The coil is disposed on an outer surface of the carrier. One of the driving magnet is disposed in the metal cover and corresponds to the coil.

Abstract: A voice coil motor includes a holder, a metal yoke, a carrier, a plurality of magnets, a coil and at least two spring plates. The holder includes a first opening and a cylindrical sidewall disposed around the first opening. The metal yoke coupled to the holder includes a second opening and a front end portion. The cylindrical sidewall extends from the first opening towards the second opening. The carrier movably disposed in the metal yoke includes a covering portion disposed on one side of the carrier towards the holder and correspondingly to the cylindrical sidewall, wherein the covering portion surrounds the cylindrical sidewall and farther from the first opening than the cylindrical sidewall. The magnets are disposed in the metal yoke. The coil is wound around the carrier and adjacent to the magnets. Each of the spring plates is flat sheet and coupled to the carrier.

Abstract: An apparatus includes a substrate stage configured to secure a substrate thereon and a motion mechanism configured to rotate the substrate stage. The substrate stage includes a plurality of holding pins for holding an edge of the substrate. Rotating the substrate stage causes a chemical solution dispensed on an upper surface of the substrate to spread outwardly toward the edge of the substrate. At least one of the plurality of holding pins includes at least one opening or at least one tapered side surface, or both, for guiding the chemical solution to flow off the substrate.

Abstract: A lens driving apparatus is for driving a lens assembly and includes a holder, a metal cover, a carrier, at least one detection magnet, at least one position detection unit, a coil and at least two driving magnets. The position detection unit is disposed on the holder, wherein the position detection unit is for detecting a displacement along a direction parallel to a central axis of the detection magnet. The holder further includes a plurality of terminal portions and a plurality of conductive portions. The terminal portions are extended outward from the holder along the direction parallel to the central axis. The conductive portions are exposed on a surface of the holder, wherein four of the conductive portions are arranged as a grid array of two rows and two columns, and the four of the conductive portions are disposed correspondingly to the position detection unit.

Abstract: A lens driving apparatus is for driving a lens assembly and includes a holder, a metal cover, a carrier, at least one detection magnet, a circuit board, at least one position detection unit, a coil and at least three driving magnets. The holder has a rectangular appearance, wherein the holder includes a holder opening and four sides. The carrier is displaceable relative to the holder along a direction parallel to a central axis. The holder further includes at least three first terminals and a plurality of second terminals. The first terminals are positioned close to only one of the four sides of the holder and extended outward from the holder along the direction parallel to the central axis, wherein the position detection unit is positioned close to another one of the four sides. The second terminals are fixedly connected to the circuit board.

Abstract: A lens driving module includes a holder, a cover, a carrier, at least one first magnet, a first coil, at least two second magnets, at least one first sensor and at least one second sensor. The holder includes an opening hole. The cover is made of metal material and coupled to the holder. The carrier is movably disposed in the cover and for coupling to a lens. The first magnet is movably disposed in the cover. The first coil is wound around an outer side of the carrier. The second magnets are disposed on one end of the carrier. The first sensor is for detecting a magnetic field of the second magnets. The second sensor is for detecting a magnetic field of the first magnet.

Abstract: A lens driving apparatus includes a holder, a metal cover, a carrier, a sensing magnet, a printed circuit board, a position sensor, a coil and at least one driving magnet. The metal cover is coupled with the holder and has an opening. The carrier is assembled to a lens assembly having an optical axis, wherein the carrier is disposed in the metal cover and is movable along a direction parallel to the optical axis. The sensing magnet is coupled with the carrier. The printed circuit board is disposed near to one of the four lateral sides of the holder. The position sensor is disposed on the printed circuit board and corresponds to the sensing magnet. The coil is disposed on an outer surface of the carrier. One of the driving magnet is disposed in the metal cover and corresponds to the coil.

Abstract: A lens driving apparatus includes a holder, a cover, a carrier, a first magnet, a coil, a spring, two second magnets and a hall sensor. The holder includes an opening hole. The cover is made of metal material and coupled to the holder. The carrier is movably disposed in the cover, and for coupling to a lens. The first magnet is connected to an inner side of the cover. The coil is wound around an outer side of the carrier, and adjacent to the first magnet. The spring is coupled to the carrier. The second magnets are disposed on one end of the carrier which is toward the holder. The hall sensor is for detecting a magnetic field of any one of the second magnets, wherein the magnetic field is varied according to a relative displacement between the hall sensor and the second magnet which is detected.

Abstract: A semiconductor wafer cleaning apparatus is provided. The semiconductor wafer cleaning apparatus includes a spin base having a through hole. The semiconductor wafer cleaning apparatus further includes a spindle extending through the through hole. The semiconductor wafer cleaning apparatus also includes a clamping member. The clamping member covers the through hole and connected to the spindle. A gap that communicates with the through hole is formed between the spin base and the clamping member. In addition, the semiconductor wafer cleaning apparatus includes a sealing ring. The sealing ring is positioned adjacent to the gap and located farther away from the spindle than the gap.

Abstract: A lens driving module includes a holder, a cover, a carrier, at least one first magnet, a first coil, at least two second magnets, at least one first sensor and at least one second sensor. The holder includes an opening hole. The cover is made of metal material and coupled to the holder. The carrier is movably disposed in the cover and for coupling to a lens. The first magnet is movably disposed in the cover. The first coil is wound around an outer side of the carrier. The second magnets are disposed on one end of the carrier. The first sensor is for detecting a magnetic field of the second magnets. The second sensor is for detecting a magnetic field of the first magnet.

Abstract: A lens driving apparatus is for driving a lens assembly and includes a base, a metal cover, a carrier, a first coil, at least one first magnet, at least one second magnet, a frame and a spring set. At least one lower leaf spring of the spring set includes a frame connecting section, a carrier connecting section and a resilient section. The carrier connecting section and the second magnet are arranged along the first direction. The carrier connecting section includes an opening portion and a shielding portion, and the opening portion and the shielding portion both corresponding to the second magnet along the first direction are respectively for a part of the second magnet to be exposed through the opening portion and another part of the second magnet to be shielded by the shielding portion.

Abstract: A lens driving apparatus includes a holder, a cover, a carrier, a first magnet, a coil, a spring, two second magnets and a hall sensor. The holder includes an opening hole. The cover is made of metal material and coupled to the holder. The carrier is movably disposed in the cover, and for coupling to a lens. The first magnet is connected to an inner side of the cover. The coil is wound around an outer side of the carrier, and adjacent to the first magnet. The spring is coupled to the carrier. The second magnets are disposed on one end of the carrier which is toward the holder. The hall sensor is for detecting a magnetic field of any one of the second magnets, wherein the magnetic field is varied according to a relative displacement between the hall sensor and the second magnet which is detected.

Abstract: A voice coil motor includes a holder, a metal yoke, a carrier, a plurality of magnets, a coil and at least two spring plates. The holder includes a first opening and a cylindrical sidewall disposed around the first opening. The metal yoke coupled to the holder includes a second opening and a front end portion. The cylindrical sidewall extends from the first opening towards the second opening. The carrier movably disposed in the metal yoke includes a covering portion disposed on one side of the carrier towards the holder and correspondingly to the cylindrical sidewall, wherein the covering portion surrounds the cylindrical sidewall and farther from the first opening than the cylindrical sidewall. The magnets are disposed in the metal yoke. The coil is wound around the carrier and adjacent to the magnets. Each of the spring plates is flat sheet and coupled to the carrier.

Abstract: A voice coil motor includes a holder, a metal yoke, a carrier, a plurality of magnets, a coil and at least two spring plates. The holder includes a first opening and a cylindrical sidewall disposed around the first opening. The metal yoke coupled to the holder includes a second opening and a front end portion. The cylindrical sidewall extends from the first opening towards the second opening. The carrier movably disposed in the metal yoke includes a covering portion disposed on one side of the carrier towards the holder and correspondingly to the cylindrical sidewall, wherein the covering portion surrounds the cylindrical sidewall and farther from the first opening than the cylindrical sidewall. The magnets are disposed in the metal yoke. The coil is wound around the carrier and adjacent to the magnets. Each of the spring plates is flat sheet and coupled to the carrier.

Abstract: A dual lens driving apparatus includes a holder, a metal yoke, a carrier, a first coil, at least one magnet and at least one first sensing component. The carrier is movably disposed in the metal yoke, wherein the carrier includes a first receiving space and a second receiving space, the first receiving space and the second receiving space are for receiving a first lens assembly and a second lens assembly respectively, a central axis of the first receiving space and a central axis of the second receiving space are parallel, the carrier can be moved at least along a first direction, and the first direction is parallel to the two central axes. The magnet is movably disposed in the metal yoke, wherein the magnet can be moved at least along a second direction, and the second direction is vertical to the two central axes.

Abstract: A dual lens driving apparatus includes a holder, a metal yoke, a carrier, a coil, a first magnet, a first elastic element and a second elastic element. The metal yoke is corresponding to the holder and includes a front end which includes a plate surface and a plurality of step portions, and a level difference is between each of the step portions and the plate surface. The carrier is movably disposed in the metal yoke. The coil is disposed around the carrier. The first magnet is disposed in the metal yoke. The first elastic element is assembled on a side of the carrier facing the front end of the metal yoke. The second elastic element is assembled on another side of the carrier facing the holder.

Abstract: A voice coil motor includes a holder, a metal yoke, a carrier, a plurality of magnets, a coil and at least two spring plates. The magnets are disposed in the metal yoke. The coil is wound around the carrier and adjacent to the magnets. The spring plates are coupled to the carrier. The holder includes a first opening, a cylindrical sidewall and at least two radial protrusions. The cylindrical sidewall is disposed around the first opening. The radial protrusions protrude from the cylindrical sidewall. The metal yoke is coupled to the holder and includes a second opening and a plurality of inner walls. The carrier is movably disposed in the metal yoke and includes at least two radial enlarged portions and a plurality of notches. Each of the radial enlarged portions is disposed correspondingly to each of the radial protrusions.

Abstract: A lens driving apparatus includes a holder, a cover, a carrier, a first magnet, a coil, a spring, two second magnets and a hall sensor. The holder includes an opening hole. The cover is made of metal material and coupled to the holder. The carrier is movably disposed in the cover, and for coupling to a lens. The first magnet is connected to an inner side of the cover. The coil is wound around an outer side of the carrier, and adjacent to the first magnet. The spring is coupled to the carrier. The second magnets are disposed on one end of the carrier which is toward the holder. The hall sensor is for detecting a magnetic field of any one of the second magnets, wherein the magnetic field is varied according to a relative displacement between the hall sensor and the second magnet which is detected.

Abstract: A lens driving apparatus includes a holder, a cover, a carrier, a first magnet, a coil, a spring, two second magnets and a hall sensor. The holder includes an opening hole. The cover is made of metal material and coupled to the holder. The carrier is movably disposed in the cover, and for coupling to a lens. The first magnet is connected to an inner side of the cover. The coil is wound around an outer side of the carrier, and adjacent to the first magnet. The spring is coupled to the carrier. The second magnets are disposed on one end of the carrier which is toward the holder. The hall sensor is for detecting a magnetic field of any one of the second magnets, wherein the magnetic field is varied according to a relative displacement between the hall sensor and the second magnet which is detected.

Abstract: A voice coil motor includes a holder, a metal yoke, a carrier, a plurality of magnets, a coil and at least two spring plates. The magnets are disposed in the metal yoke. The coil is wound around the carrier and adjacent to the magnets. The spring plates are coupled to the carrier. The holder includes a first opening, a cylindrical sidewall and at least two radial protrusions. The cylindrical sidewall is disposed around the first opening. The radial protrusions protrude from the cylindrical sidewall. The metal yoke is coupled to the holder and includes a second opening and a plurality of inner walls. The carrier is movably disposed in the metal yoke and includes at least two radial enlarged portions and a plurality of notches. Each of the radial enlarged portions is disposed correspondingly to each of the radial protrusions.