Patents by Inventor WEN-TING LAN

WEN-TING LAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device and method of forming vertical structure
    Patent number: 9755033
    Abstract: According to an exemplary embodiment, a method of forming a vertical structure is provided. The method includes the following operations: providing a substrate; providing the vertical structure having a source, a channel, and a drain over the substrate; shrinking the source and the channel by oxidation; forming a metal layer over the drain of the vertical structure; and annealing the metal layer to form a silicide over the drain of the vertical structure.
    Type: Grant
    Filed: June 13, 2014
    Date of Patent: September 5, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chih-Hao Wang, Wai-Yi Lien, Shi-Ning Ju, Kai-Chieh Yang, Wen-Ting Lan
  • SEMICONDUCTOR DEVICE AND METHOD OF FORMING VERTICAL STRUCTURE
    Publication number: 20150364560
    Abstract: According to an exemplary embodiment, a method of forming a vertical structure is provided. The method includes the following operations: providing a substrate; providing the vertical structure having a source, a channel, and a drain over the substrate; shrinking the source and the channel by oxidation; forming a metal layer over the drain of the vertical structure; and annealing the metal layer to form a silicide over the drain of the vertical structure.
    Type: Application
    Filed: June 13, 2014
    Publication date: December 17, 2015
    Inventors: CHIH-HAO WANG, WAI-YI LIEN, SHI-NING JU, KAI-CHIEH YANG, WEN-TING LAN