Patents by Inventor Wen-Tsung Chang

Wen-Tsung Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11929418
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: March 12, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Patent number: 11881518
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Grant
    Filed: November 11, 2021
    Date of Patent: January 23, 2024
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Patent number: 11769841
    Abstract: A method for fabricating a junction barrier Schottky diode device is disclosed. The junction barrier Schottky device includes an N-type semiconductor layer, a plurality of first P-type doped areas, a plurality of second P-type doped areas, and a conductive metal layer. The first P-type doped areas and the second P-type doped are formed in the N-type semiconductor layer. The second P-type doped areas are self-alignedly formed above the first P-type doped areas. The spacing between every neighboring two of the second P-type doped areas is larger than the spacing between every neighboring two of the first P-type doped areas. The conductive metal layer, formed on the N-type semiconductor layer, covers the first P-type doped areas and the second P-type doped areas.
    Type: Grant
    Filed: September 19, 2022
    Date of Patent: September 26, 2023
    Assignee: TAIPEI ANJET CORPORATION
    Inventors: Nobuo Machida, Wen-Tsung Chang, Wen-Chin Wu
  • Patent number: 11646382
    Abstract: A junction barrier Schottky diode device and a method for fabricating the same is disclosed. In the junction barrier Schottky device includes an N-type semiconductor layer, a plurality of first P-type doped areas, a plurality of second P-type doped areas, and a conductive metal layer. The first P-type doped areas and the second P-type doped are formed in the N-type semiconductor layer. The second P-type doped areas are self-alignedly formed above the first P-type doped areas. The spacing between every neighboring two of the second P-type doped areas is larger than the spacing between every neighboring two of the first P-type doped areas. The conductive metal layer, formed on the N-type semiconductor layer, covers the first P-type doped areas and the second P-type doped areas.
    Type: Grant
    Filed: May 11, 2021
    Date of Patent: May 9, 2023
    Assignee: TAIPEI ANJET CORPORATION
    Inventors: Nobuo Machida, Wen-Tsung Chang, Wen-Chin Wu
  • Publication number: 20230021015
    Abstract: A method for fabricating a junction barrier Schottky diode device is disclosed. The junction barrier Schottky device includes an N-type semiconductor layer, a plurality of first P-type doped areas, a plurality of second P-type doped areas, and a conductive metal layer. The first P-type doped areas and the second P-type doped are formed in the N-type semiconductor layer. The second P-type doped areas are self-alignedly formed above the first P-type doped areas. The spacing between every neighboring two of the second P-type doped areas is larger than the spacing between every neighboring two of the first P-type doped areas. The conductive metal layer, formed on the N-type semiconductor layer, covers the first P-type doped areas and the second P-type doped areas.
    Type: Application
    Filed: September 19, 2022
    Publication date: January 19, 2023
    Inventors: Nobuo MACHIDA, Wen-Tsung CHANG, Wen-Chin Wu
  • Publication number: 20220367731
    Abstract: A junction barrier Schottky diode device and a method for fabricating the same is disclosed. In the junction barrier Schottky device includes an N-type semiconductor layer, a plurality of first P-type doped areas, a plurality of second P-type doped areas, and a conductive metal layer. The first P-type doped areas and the second P-type doped are formed in the N-type semiconductor layer. The second P-type doped areas are self-alignedly formed above the first P-type doped areas. The spacing between every neighboring two of the second P-type doped areas is larger than the spacing between every neighboring two of the first P-type doped areas. The conductive metal layer, formed on the N-type semiconductor layer, covers the first P-type doped areas and the second P-type doped areas.
    Type: Application
    Filed: May 11, 2021
    Publication date: November 17, 2022
    Inventors: Nobuo Machida, Wen-Tsung Chang, Wen-Chin Wu
  • Publication number: 20220077300
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Application
    Filed: November 11, 2021
    Publication date: March 10, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Publication number: 20220069102
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Application
    Filed: November 11, 2021
    Publication date: March 3, 2022
    Applicant: UNITED MICROELECTRONICS CORP.
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Patent number: 11239082
    Abstract: A method for fabricating semiconductor device includes the steps of first forming a gate dielectric layer on a substrate; forming a gate material layer on the gate dielectric layer, and removing part of the gate material layer and part of the gate dielectric layer to form a gate electrode, in which a top surface of the gate dielectric layer adjacent to two sides of the gate electrode is lower than a top surface of the gate dielectric layer between the gate electrode and the substrate. Next, a first mask layer is formed on the gate dielectric layer and the gate electrode, part of the first mask layer and part of the gate dielectric layer are removed to form a first spacer, a second mask layer is formed on the substrate and the gate electrode, and part of the second mask layer is removed to forma second spacer.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: February 1, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: I-Fan Chang, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, Jie-Ning Yang, Chi-Ju Lee, Chun-Ting Chiang, Bo-Yu Su, Chih-Wei Lin, Dien-Yang Lu
  • Patent number: 11222886
    Abstract: The present invention provides an ESD protection device with the mechanism of punch through to achieve low trigger voltage. At the same time, the structure of ESD protection device includes parasitic NPN and parasitic PNP. Parasitic NPN and parasitic PNP will form a silicon controlled rectifier (SCR) device with snapback behavior to increase the protection capability of ESD protection device.
    Type: Grant
    Filed: October 30, 2019
    Date of Patent: January 11, 2022
    Inventor: Wen-Tsung Chang
  • Patent number: 11205705
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Grant
    Filed: November 29, 2018
    Date of Patent: December 21, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Publication number: 20210066284
    Abstract: The present invention provides an ESD protection device with the mechanism of punch through to achieve low trigger voltage. At the same time, the structure of ESD protection device includes parasitic NPN and parasitic PNP. Parasitic NPN and parasitic PNP will form a silicon controlled rectifier (SCR) device with snapback behavior to increase the protection capability of ESD protection device.
    Type: Application
    Filed: October 30, 2019
    Publication date: March 4, 2021
    Inventor: Wen-Tsung Chang
  • Publication number: 20200144387
    Abstract: A gate structure includes a substrate divided into an N-type transistor region and a P-type transistor region. An interlayer dielectric covers the substrate. A first trench is embedded in the interlayer dielectric within the N-type transistor region. A first gate electrode having a bullet-shaped profile is disposed in the first trench. A gate dielectric contacts the first trench. An N-type work function layer is disposed between the gate dielectric layer and the first gate electrode. A second trench is embedded in the interlayer dielectric within the P-type transistor region. A second gate electrode having a first mushroom-shaped profile is disposed in the second trench. The gate dielectric layer contacts the second trench. The N-type work function layer is disposed between the gate dielectric layer and the second gate electrode. A first P-type work function layer is disposed between the gate dielectric layer and the N-type work function layer.
    Type: Application
    Filed: November 29, 2018
    Publication date: May 7, 2020
    Inventors: Jie-Ning Yang, Wen-Tsung Chang, Po-Wen Su, Kuan-Ying Lai, Bo-Yu Su, Chun-Mao Chiou, Yao-Jhan Wang
  • Patent number: 10602800
    Abstract: An electrically conductive shoe includes a shoe body having an upper, a midsole, and an outsole, and the outsole has a receiving chamber. The receiving chamber is communicated with a bore of the midsole. A conductive device is mounted on a bottom of the outsole. A flexible conductive member has an end electrically connected to the conductive device and an opposite end extending to an inner space of the upper through the receiving chamber of the outsole and the bore of the midsole and attached to an inner side of the upper.
    Type: Grant
    Filed: September 14, 2018
    Date of Patent: March 31, 2020
    Assignee: Haka Co., Ltd.
    Inventor: Wen Tsung Chang
  • Patent number: 10468493
    Abstract: The present invention provides a method of manufacturing a gate stack structure. The method comprises providing a substrate. A dielectric layer is then formed on the substrate and a gate trench is formed in the dielectric layer. A bottom barrier layer, a first work function metal layer and a top barrier layer are formed in the gate trench in sequence. Afterwards, a silicon formation layer is formed on the top barrier layer and filling the gate trench. A planarization process is performed, to remove a portion of the silicon formation layer, a portion of the bottom barrier layer, a portion of the first work function metal layer, and a portion of the top barrier layer. Next, the remaining silicon formation layer is removed completely, and a conductive layer is filled in the gate trench.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: November 5, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Ting Chiang, Chi-Ju Lee, Chih-Wei Lin, Bo-Yu Su, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, I-Fan Chang
  • Publication number: 20190307204
    Abstract: An electrically conductive shoe includes a shoe body having an upper, a midsole, and an outsole, and the outsole has a receiving chamber. The receiving chamber is communicated with a bore of the midsole. A conductive device is mounted on a bottom of the outsole. A flexible conductive member has an end electrically connected to the conductive device and an opposite end extending to an inner space of the upper through the receiving chamber of the outsole and the bore of the midsole and attached to an inner side of the upper.
    Type: Application
    Filed: September 14, 2018
    Publication date: October 10, 2019
    Inventor: Wen Tsung Chang
  • Publication number: 20190295849
    Abstract: A method for fabricating semiconductor device includes the steps of first forming a gate dielectric layer on a substrate; forming a gate material layer on the gate dielectric layer, and removing part of the gate material layer and part of the gate dielectric layer to form a gate electrode, in which a top surface of the gate dielectric layer adjacent to two sides of the gate electrode is lower than a top surface of the gate dielectric layer between the gate electrode and the substrate. Next, a first mask layer is formed on the gate dielectric layer and the gate electrode, part of the first mask layer and part of the gate dielectric layer are removed to form a first spacer, a second mask layer is formed on the substrate and the gate electrode, and part of the second mask layer is removed to forma second spacer.
    Type: Application
    Filed: June 11, 2019
    Publication date: September 26, 2019
    Inventors: I-Fan Chang, Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, Jie-Ning Yang, Chi-Ju Lee, Chun-Ting Chiang, Bo-Yu Su, Chih-Wei Lin, Dien-Yang Lu
  • Patent number: 10388749
    Abstract: A semiconductor device includes a substrate, a gate structure, a spacer, a mask layer, and at least one void. The gate structure is disposed on the substrate, and the gate structure includes a metal gate electrode. The spacer is disposed on sidewalls of the gate structure, and a topmost surface of the spacer is higher than a topmost surface of the metal gate electrode. The mask layer is disposed on the gate structure. At least one void is disposed in the mask layer and disposed between the metal gate electrode and the spacer.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: August 20, 2019
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Yen-Liang Wu, Wen-Tsung Chang, Jui-Ming Yang, I-Fan Chang, Chun-Ting Chiang, Chih-Wei Lin, Bo-Yu Su, Chi-Ju Lee
  • Patent number: D874277
    Type: Grant
    Filed: May 24, 2017
    Date of Patent: February 4, 2020
    Inventor: Wen-Tsung Chang
  • Patent number: D976701
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: January 31, 2023
    Inventor: Wen-Tsung Chang