Abstract: A semiconductor device includes a semiconductor layer, a stack structure over the semiconductor layer, a first contact structure, and a second contact structure. The stack structure includes alternating first layers and first dielectric layers. The stack structure includes a first portion and a second portion adjacent to the first portion, the first layers of the first portion include second dielectric layers, and the first layers of the second portion include conductive layers. The first contact structure extends through the first portion and the semiconductor layer. The second contact structure extends through a part of the first portion and connects with one of the conductive layers.

Abstract: Three-dimensional (3D) memory devices and methods for forming the same are disclosed. In certain aspects, a 3D memory device includes a stack structure including interleaved conductive layers and dielectric layers, a doped semiconductor layer, and a channel structure extending through the stack structure and in contact with the doped semiconductor layer. The channel structure includes a composite dielectric film and a semiconductor channel along a first direction. The composite dielectric film includes a gate dielectric portion and a memory portion along a second direction perpendicular to the first direction. A part of the gate dielectric portion faces, along the first direction, one of the conductive layers that is closest to the doped semiconductor layer.

Abstract: A semiconductor structure comprises layers of transistors stacked in a vertical direction. Each layer of transistors comprises: a first array of transistors sharing a first common first-type terminal line; a second array of transistors sharing a second common first-type terminal line. The first array of transistors and the second array of transistors share a common second-type terminal line. The semiconductor structure further comprises a first common first-type terminal contact structure coupled with the first common first-type terminal line in a first first-type terminal contact region, a second common first-type terminal contact structure coupled with the second common first-type terminal line in a second first-type terminal contact region, and a common second-type terminal contact structure coupled with the common second-type terminal line in a common second-type terminal contact region.

Abstract: A three-dimensional (3D) memory device includes a memory array structure including a first and a second memory array structures, a staircase structure between the first and second memory array structures in a first lateral direction. The staircase structure includes a first staircase zone and a second staircase zone. The staircase structure includes a bridge structure connected with the first memory array structure and the second memory array structure, and the bridge structure includes a gate line slit structure extending along the first lateral direction. The bridge structure is between the first staircase zone and the second staircase zone in a second lateral direction perpendicular to the first lateral direction. The first staircase zone includes a plurality of stairs, and the second staircase zone includes a plurality of stairs. The first staircase zone includes a first pair of staircases. The first pair of staircases face each other in the first lateral direction and are at different depths.

Abstract: The present disclosure provides a method for forming a three-dimensional (3D) memory device. The method includes disposing an alternating dielectric stack over a substrate, wherein the alternating dielectric stack includes first dielectric layers and second dielectric layers alternatingly stacked on the substrate. The method also includes forming a channel structure penetrating through the alternating dielectric stack and extending into the substrate, wherein the channel structure includes a channel layer disposed on a sidewall of a memory film. The method further includes removing the substrate and a portion of the memory film that extends into the substrate to expose a portion of the channel layer; and disposing an array common source (ACS) on the exposed portion of the channel layer.

Abstract: The present disclosure describes a three-dimensional (3D) memory device includes first and second memory arrays disposed on a semiconductor layer. The 3D memory device can also include a staircase structure disposed between the first and second memory arrays. The staircase structure includes first and second staircase regions. The first staircase region includes a first staircase structure that contains a first plurality of stairs descending in a first direction. The second staircase region includes a second staircase structure that contains a second plurality of stairs descending in a second direction. The 3D memory device can also include a contact region disposed between the first and second staircase regions. The contact region includes a plurality of contacts the extending through an insulating layer and into the semiconductor layer.

Abstract: In certain aspects, a method for forming a three-dimensional (3D) memory device is disclosed. A first semiconductor structure including an array of NAND memory strings is formed on a first substrate. A second semiconductor structure including a recess gate transistor is formed on a second substrate. The recess gate transistor includes a recess gate structure protruding into the second substrate. The first semiconductor structure and the second semiconductor structure are bonded in a face-to-face manner, such that the array of NAND memory strings is coupled to the recess gate transistor across a bonding interface.

Abstract: Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a memory stack, a semiconductor layer, a supporting structure, a spacer structure, and a contact structure. The memory stack includes interleaved conductive layers and dielectric layers and includes a staircase region in a plan view. The semiconductor layer is in contact with the memory stack. The supporting structure overlaps the staircase region of the memory stack and is coplanar with the semiconductor layer. The supporting structure includes a material other than a material of the semiconductor layer. The spacer structure is outside the memory stack and is coplanar with the supporting structure and the semiconductor layer. The contact structure extends vertically and is surrounded by the spacer structure.

Abstract: A semiconductor device includes a stack including word line layers and insulating layers that are alternatingly stacked, a first block including a first staircase positioned in the stack that extends between first array regions, a second block including a second staircase positioned in the stack that extends between second array regions, a connection region positioned in the stack, wherein the first array regions and the first staircase are positioned at a first side of the connection region, and the second array regions and the second staircase are positioned at a second side of the connection region, and a slit structure positioned in the connection region between the first staircase and the second staircase. The slit structure includes a dielectric material and divides the connection region into a first portion and a second portion.

Abstract: A method includes disposing a layer stack on a substrate, the layer stack including a number of levels. A first control gate structure is formed in a first level of the number of levels by: forming a first opening through a dielectric layer of the first level and a sacrificial layer of the first level; removing a remaining portion of the sacrificial layer of the first level to form a first cavity; and disposing a first conductive layer in the first cavity. A second control gate structure is formed in a second level below the first level by: extending the first opening into a dielectric layer of the second level and a sacrificial layer of the second level to form a second opening; removing a remaining portion of the sacrificial layer of the second level to form a second cavity; and disposing a second conductive layer in the second cavity.

Abstract: Embodiments of three-dimensional memory devices and fabricating methods thereof are disclosed. One disclosed method for forming a memory structure comprises: forming a bottom conductive layer on a substrate; forming a dielectric stack on the bottom conductive layer, the dielectric stack comprising a plurality of alternatively arranged first dielectric layers and second dielectric layers; forming an opening penetrating the dielectric stack and exposing the bottom conductive layer; forming a cap layer on a bottom of the opening; forming a cylindrical body and a top contact on the cap layer and in the opening; and replacing the plurality of second dielectric layers with conductive layers.

Abstract: A method for data erasing of a non-volatile memory device is disclosed. The memory includes multiple memory cell strings each including a select gate transistor and multiple memory cells that are connected in series. The method comprises applying a step erase voltage to one memory cell string for an erase operation, the step erase voltage having a step-rising shaped voltage waveform. The method further comprises, during a period when the step erase voltage rises from an intermediate level to a peak level, raising a voltage of the select gate transistor from a starting level to a peak level, and raising a voltage of a predetermined region from a starting level to a peak level, such that a gate-induced drain leakage current is generated in the one memory cell string. The predetermined region is adjacent to the at least one select gate transistor and includes at least one memory cell.

Abstract: The present disclosure provides a method for forming a three-dimensional (3D) memory device. The method includes sequentially forming a first and a second dielectric stacks on a substrate. The first dielectric stack includes a first and a second dielectric layers alternatingly stacked in a first direction perpendicular to the substrate. The second dielectric stack comprises a third and a fourth dielectric layers stacked in the first direction. The method further includes forming an etch-stop layer on the second dielectric stack and forming a gate line slit (GLS) trench spacer to cover a sidewall of the etch-stop layer. The method further includes replacing the fourth and the second dielectric layers with conductive layers through a GLS opening to form a top select gate (TSG) film stack and a film stack of alternating conductive and dielectric layers, respectively.

Abstract: A three-dimensional (3D) memory device includes a first memory cell, a second memory cell, a control gate between the first and second memory cells, a top contact coupled to the first memory cell, and a bottom contact coupled to the second memory cell. The first memory cell can include a first pillar, a first insulating layer surrounding the first pillar, a first gate contact coupled to a first word line, and a second gate contact coupled to a first plate line. The second memory cell can include a second pillar, a second insulating layer surrounding the second pillar, a third gate contact coupled to a second word line, and a fourth gate contact coupled to a second plate line. The 3D memory device can utilize dynamic flash memory (DFM), increase storage density, provide multi-cell storage, provide a three-state logic, decrease leakage current, increase retention time, and decrease refresh rates.

Abstract: In an example, a method for forming a three-dimensional (3D) memory device is disclosed. A semiconductor layer is formed. A memory stack on the semiconductor is formed. A channel structure extending through the memory stack and the semiconductor layer is formed. An end of the channel structure abutting the semiconductor layer is exposed. A portion of the channel structure abutting the semiconductor layer is replaced with a semiconductor plug.

Abstract: Three-dimensional (3D) memory devices and methods for forming the same are disclosed. In certain aspects, a 3D memory device includes a stack structure including interleaved conductive layers and stack dielectric layers, a channel structure extending through the stack structure, and a doped semiconductor layer. The channel structure includes a memory film and a semiconductor channel. The semiconductor channel includes a doped portion and an undoped portion. A part of the doped portion of the semiconductor channel extends beyond the stack structure in a first direction. A part of the doped semiconductor layer is in contact with a sidewall of the part of the doped portion of the semiconductor channel that extends beyond the stack structure.

Abstract: A method for forming a three-dimensional (3D) memory device is provided. A dielectric stack including dielectric/sacrificial layer pairs are formed on a doped semiconductor layer. A channel structure extending vertically through the dielectric stack is formed. A slit extending vertically in the dielectric stack is formed to expose the doped semiconductor layer. A bottommost sacrificial layer in the dielectric/sacrificial layer pairs is removed to form a first cavity in the dielectric stack. A source select gate line is formed in the first cavity in the dielectric stack. Sacrificial layers in the dielectric/sacrificial layer pairs are removed to form second cavities in the dielectric stack. Word lines are formed in the second cavities in the dielectric stack.

Abstract: In certain aspects, a memory device includes a memory structure including memory strings, a first peripheral circuit coupled to the memory structure and including a first transistor including a first gate dielectric layer, a first semiconductor layer in contact with the first transistor, a second peripheral circuit coupled to the memory structure and including a second transistor including a second gate dielectric layer, and a second semiconductor layer in contact with the second transistor. The memory strings are between the first semiconductor layer and the second semiconductor layer in a first direction. A thickness of the first gate dielectric layer is greater than a thickness of the second gate dielectric layer in the first direction.

Abstract: In an example, a three-dimensional (3D) memory device includes a memory array structure including a first and a second memory array structures, a staircase structure between the first and a second memory array structures in a first lateral direction and including a first and a second staircase zones, and a bridge structure between the first and second staircase zones in a second lateral direction perpendicular to the first lateral direction. Each of the first and second staircase zones includes first and second sub-staircases arranged alternately. Each first sub-staircase includes ascending stairs at different depths. Each second sub-staircase includes descending stairs at different depths. At least one stair in each of the first and second sub-staircases is connected to at least one of the first and second memory array structures through the bridge structure.

Abstract: A semiconductor device includes a first structure having a first semiconductor layer and a first transistor of a memory cell, a second structure having a second semiconductor layer, a capacitor structure of the memory cell, and a third dielectric stack formed therein, and bonding structures formed between the first structure and the second structure. The bonding structures are configured to couple the first transistor to the capacitor structure to form the memory cell.