Patents by Inventor Willi Anderl

Willi Anderl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND METHOD FOR IMPROVING THE TRANSIENT THERMAL BEHAVIOR OF AN OPTICAL COMPONENT
    Publication number: 20110211180
    Abstract: An optical component includes an optical element, a mount for the optical element, and a temperature control device configured to control a temperature of a part of the mount based on at least one parameter selected from the group consisting of a coefficient of expansion of a substrate of the optical element, and a coefficient of expansion of a material of the mount.
    Type: Application
    Filed: May 10, 2011
    Publication date: September 1, 2011
    Applicant: CARL ZEISS SMT GMBH
    Inventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
  • Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component
    Patent number: 7965456
    Abstract: An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.
    Type: Grant
    Filed: September 30, 2008
    Date of Patent: June 21, 2011
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
  • REFLECTIVE OPTICAL ELEMENT FOR USE IN AN EUV SYSTEM
    Publication number: 20110051267
    Abstract: A reflective optical element (10) for use in an EUV system is disclosed. The reflective optical element includes a base body, which is produced at least partly from a substrate material. At least one cooling channel through which a cooling medium can flow is arranged in the base body. A material having a thermal conductivity of greater than 50 W/mK is provided as substrate material. The reflective optical element also includes a polishing layer, which is applied on the substrate material. The polishing layer includes an amorphous material which can be processed via polishing.
    Type: Application
    Filed: August 5, 2010
    Publication date: March 3, 2011
    Applicant: CARL ZEISS LASER OPTICS GMBH
    Inventors: Holger Kierey, Michel Le Maire, Willi Anderl, Hubert Holderer, Anton Lengel
  • Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component
    Patent number: 7483223
    Abstract: An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.
    Type: Grant
    Filed: October 6, 2005
    Date of Patent: January 27, 2009
    Assignee: Carl Zeiss SMT AG
    Inventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
  • Optical Component Having an Improved Transient Thermal Behavior and Method for Improving the Transient Thermal Behavior of an Optical Component
    Publication number: 20090021950
    Abstract: An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.
    Type: Application
    Filed: September 30, 2008
    Publication date: January 22, 2009
    Inventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt
  • Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component
    Publication number: 20060093253
    Abstract: An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.
    Type: Application
    Filed: October 6, 2005
    Publication date: May 4, 2006
    Inventors: Wilhelm Egle, Wolfgang Hafner, Willi Anderl, Ulrich Bingel, Holger Muenz, Thomas Neidhardt