Abstract: A device includes a waveguide grating out-coupler, and a tunable uniform phase shifter communicating with the waveguide grating out-coupler. The tunable uniform phase shifter steers a Hat phase front along a first angle in a first plane. Optionally, the waveguide grating out-coupler includes a modulated refractive index and a physical grating period. The tunable uniform phase shifter controls the refractive index, thereby controlling an effective grating period. The grating period relates to die modulated refractive index, and the physical grating period. Optionally, the tunable uniform phase shifter includes a first thermo-optic phase shifter, a first electro-optic phase shifter, or a first micro-electro-mechanical system index perturbation phase shifter. Optionally, the tunable linear gradient phase shifter communicates with the waveguide grating out-coupler and steers a beam along the flat phase front along a second angle in a second plane, which is perpendicular to the first plane.

Abstract: A device includes a waveguide grating out-coupler, and a tunable uniform phase shifter communicating with the waveguide grating out-coupler. The tunable uniform phase shifter steers a flat phase front along a first angle in a first plane. Optionally, the waveguide grating out-coupler includes a modulated refractive index and a physical grating period. The tunable uniform phase shifter controls the refractive index, thereby controlling an effective grating period. The grating period relates to the modulated refractive index, and the physical grating period. Optionally, the tunable uniform phase shifter includes a first thermo-optic phase shifter, a first electro-optic phase shifter, or a first micro-electro-mechanical system index perturbation phase shifter. Optionally, the tunable linear gradient phase shifter communicates with the waveguide grating out-coupler and steers a beam along the flat phase front along a second angle in a second plane, which is perpendicular to the first plane.

Abstract: A device includes an optical splitter comprising a plurality of splitter outputs. The splitter outputs are out of phase and include a non-uniform phase front. The device includes a one-dimensional phase compensation array communicating with the optical splitter. The phase compensation array receives the non-uniform phase front and outputs a uniform phase front. The phase compensation array includes a plurality of array outputs. The device includes a tunable linear gradient phase shifter communicating with said phase compensation array to impart a linearly-varying phase shift across said plurality of array outputs, thereby steering a beam along a first angle in a first plane. The device includes a waveguide grating out-coupler communicating with said linear gradient phase shifter, and a uniform phase shifter communicating with the waveguide grating out-coupler. The uniform phase shifter steers the flat phase front along a second angle in a second plane perpendicular to said first plane.

Abstract: A method and system described for sensing a displacement by receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface. A movable perturber can be positioned so the perturber interacts with the evanescent optical field above the waveguide surface. An optical phase shift can be induced in the waveguide when the movable perturber is displaced in the evanescent optical field, and the optical phase shift can be measured with an optical readout circuit.

Abstract: A device includes an optical splitter comprising a plurality of splitter outputs. The splitter outputs are out of phase and include a non-uniform phase front. The device includes a one-dimensional phase compensation array communicating with the optical splitter. The phase compensation array receives the non-uniform phase front and outputs a uniform phase front. The phase compensation array includes a plurality of array outputs. The device includes a tunable linear gradient phase shifter communicating with said phase compensation array to impart a linearly-varying phase shift across said plurality of array outputs, thereby steering a beam along a first angle in a first plane. The device includes a waveguide grating out-coupler communicating with said linear gradient phase shifter, and a uniform phase shifter communicating with the waveguide grating out-coupler. The uniform phase shifter steers the flat phase front along a second angle in a second plane perpendicular to said first plane.

Abstract: A method and system described for sensing a displacement by receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface. A movable perturber can be positioned so the perturber interacts with the evanescent optical field above the waveguide surface. An optical phase shift can be induced in the waveguide when the movable perturber is displaced in the evanescent optical field, and the optical phase shift can be measured with an optical readout circuit.

Abstract: A method and system described for sensing a displacement by receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface. A movable perturber can be positioned so the perturber interacts with the evanescent optical field above the waveguide surface. An optical phase shift can be induced in the waveguide when the movable perturber is displaced in the evanescent optical field, and the optical phase shift can be measured with an optical readout circuit.

Abstract: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals.

Abstract: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals.

Abstract: A waveguide device for frequency mixing or conversion through birefringent phase matching, having a horizontal waveguide suspended above a substrate. The waveguide is formed of a zinc blend type III-V semiconductor material with a high nonlinear susceptibility.

Abstract: A method and system described for sensing a displacement by receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface. A movable perturber can be positioned so the perturber interacts with the evanescent optical field above the waveguide surface. An optical phase shift can be induced in the waveguide when the movable perturber is displaced in the evanescent optical field, and the optical phase shift can be measured with an optical readout circuit.

Abstract: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals.

Abstract: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals.

Abstract: A waveguide device for frequency mixing or conversion through birefringent phase matching, having a horizontal waveguide suspended above a substrate. The waveguide is formed of a zinc blende type III-V semiconductor material with a high nonlinear susceptibility.

Abstract: A change in mass of a microbridge in a mass sensor can be sensed by applying a time-varying amplitude modulated electrostatic force to excite the microbridge into resonance at the frequency of amplitude modulation. An optical energy is then transmitted at a wavelength close to a resonant wavelength of a Fabry-Perot microcavity, which is formed by etching a movable reflective mirror into a region of the microbridge and by etching a fixed reflective minor in a region spaced apart from the microbridge. The two mirrors are interconnected by an optical waveguide. The movable mirror and fixed mirror reflect the optical energy to a receiver, and a change in the Fabry-Perot microcavity's reflectivity is interferometrically determined. The change in reflectivity indicates a change in the microbridge's resonant frequency due to increased mass of the microbridge resulting from sorption of a target chemical by a layer of chemoselective material deposited on the microbridge.

Abstract: Micro-opto-mechanical chemical sensors and methods for simultaneously detecting and discriminating between a variety of vapor-phase analytes. One embodiment of the sensor is a photonic microharp chemical sensor with an array of closely spaced microbridges, each differing slightly in length and coated with a different sorbent polymer. The microbridges can be excited photothermally, and the microbridges can be optically interrogated using microcavity interferometry. Other actuation methods include piezoelectric, piezoresistive, electrothermal, and magnetic. Other read-out techniques include using a lever arm and other interferometric techniques.

Abstract: A waveguide device for frequency mixing or conversion through birefringent phase matching, having two suspended horizontal waveguides with an air-filled horizontal nanoslot between them. The waveguides are formed of a material with a high nonlinear susceptibility, and one waveguide can be n-doped with the other waveguide slab being p-doped. The system can be tuned to operate at different frequencies by varying the nanoslot gap distance by electrostatically actuating the suspended air-clad waveguides.

Abstract: A modulating retroreflector system includes a modulating retroreflector having a plurality of multiple quantum well modulator pixels and at least one transimpedance amplifier. The transimpedance amplifier receives a photocurrent generated by at least one of the plurality of modulator pixels. Each pixel is capacitively coupled to a current driver, which applies a high frequency digital electrical signal to the pixel when the voltage at the output of the transimpedance amplifier exceeds a threshold value. The modulated output of the retroreflector is reflected toward the source of the received optical beam. The system activates high frequency current drivers for only the illuminated pixels, eliminating the need for a separate angle of incidence sensor and reducing power requirements.

Abstract: An electro-optic device with a doped semiconductor base and a plurality of pixels on the semiconductor base. Pixels include oppositely doped semiconductor layer and a top electrode formed on the oppositely doped semiconductor layer. The top electrode has a grid pattern with at least one busbar and a plurality of fingers extending from the busbar, and spacing between the fingers decreases with distance from the bondpad along the busbar. Each pixel can also include a multiple quantum well formed on the semiconductor base. The top electrode shape produces an approximately uniform lateral resistance in the pixel. An embodiment is a large area modulator for modulating retro-reflector systems, which typically use large area surface-normal modulators with large lateral current flow. Uniform resistance to each part of the modulator decreases location dependence of frequency response. A chirped grid electrode balances semiconductor sheet resistance and metal line resistance components of the series resistance.

Abstract: A modulating retroreflector system includes a modulating retroreflector having a plurality of multiple quantum well modulator pixels and at least one transimpedance amplifier. The transimpedance amplifier receives a photocurrent generated by at least one of the plurality of modulator pixels. Each pixel is capacitively coupled to a current driver, which applies a high frequency digital electrical signal to the pixel when the voltage at the output of the transimpedance amplifier exceeds a threshold value. The modulated output of the retroreflector is reflected toward the source of the received optical beam. The system activates high frequency current drivers for only the illuminated pixels, eliminating the need for a separate angle of incidence sensor and reducing power requirements.