Patents by Inventor Wilman Tsai

Wilman Tsai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200135577
    Abstract: In a method of manufacturing a circuit including a MOSFET disposed in a MOSFET region and a negative capacitance FET (NCFET) disposed in a NCFET region, a dielectric layer is formed over a channel layer in the MOSFET region and the NCFET region. A first metallic layer is formed over the dielectric layer in the MOSFET region and the NCFET region. After the first metallic layer is formed, an annealing operation is performed only in the NCFET region. After the annealing operation, the first metallic layer is removed from the MOSFET region and the NCFET region. The annealing operation includes irradiating the first metallic layer and the dielectric layer in the NCFET region with an energy beam.
    Type: Application
    Filed: December 23, 2019
    Publication date: April 30, 2020
    Inventors: Ling-Yen YEH, Carlos H. DIAZ, Wilman TSAI
  • Publication number: 20200098407
    Abstract: A spin-orbit-torque (SOT) magnetic device includes a bottom metal layer, a first magnetic layer disposed over the bottom metal layer, a spacer layer disposed over the first magnetic layer, and a second magnetic layer disposed over the spacer layer. A diffusion barrier layer for suppressing metal elements of the first magnetic layer from diffusing into the bottom metal layer is disposed between the bottom metal layer and the first magnetic layer.
    Type: Application
    Filed: May 30, 2019
    Publication date: March 26, 2020
    Inventors: Wilman TSAI, Shy-Jay LIN, Mingyuan SONG
  • Publication number: 20200052087
    Abstract: A semiconductor device includes a first potential supply line for supplying a first potential, a second potential supply line for supplying a second potential lower than the first potential, a functional circuit, and at least one of a first switch disposed between the first potential supply line and the functional circuit and a second switch disposed between the second potential supply line and the functional circuit. The first switch and the second switch are negative capacitance FET.
    Type: Application
    Filed: November 4, 2019
    Publication date: February 13, 2020
    Inventors: Chien-Hsing LEE, Chih-Sheng CHANG, Wilman TSAI, Chia-Wen CHANG, Ling-Yen YEH, Carlos H. DIAZ
  • Publication number: 20200044091
    Abstract: In a method of manufacturing a negative capacitance structure, a ferroelectric dielectric layer is formed over a first conductive layer disposed over a substrate, and a second conductive layer is formed over the ferroelectric dielectric layer. The ferroelectric dielectric layer includes an amorphous layer and crystals.
    Type: Application
    Filed: September 27, 2019
    Publication date: February 6, 2020
    Inventors: Wilman TSAI, Ling-Yen YEH
  • Publication number: 20200013904
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate including a first fin portion, a first nanostructure over the first fin portion. The first nanostructure has a dumbbell shape. The first nanostructure includes a semiconductor material layer over the first fin portion, and a cladding layer surrounding the semiconductor material layer. The semiconductor material layer has a rectangular shape, and the cladding layer has a hexagonal or quadrilateral shape. The semiconductor device structure includes a first gate structure surrounding the first nanostructure.
    Type: Application
    Filed: September 18, 2019
    Publication date: January 9, 2020
    Inventors: Wilman TSAI, Cheng-Hsien WU, I-Sheng CHEN, Stefan RUSU
  • Patent number: 10516061
    Abstract: A semiconductor device including a field effect transistor (FET) device includes a substrate and a channel structure formed of a two-dimensional (2D) material. An interfacial layer is formed on the channel structure. A gate stack including a gate electrode layer and a gate dielectric layer is formed over the interfacial layer. Source and drain contacts are formed over openings in the interfacial layer. The source and drain contacts have a side contact with the interfacial layer and a side contact and a surface contact with the channel structure.
    Type: Grant
    Filed: February 27, 2018
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ling-Yen Yeh, Chih-Sheng Chang, Wilman Tsai, Yu-Ming Lin
  • Patent number: 10515857
    Abstract: In a method of manufacturing a circuit including a MOSFET disposed in a MOSFET region and a negative capacitance FET (NCFET) disposed in a NCFET region, a dielectric layer is formed over a channel layer in the MOSFET region and the NCFET region. A first metallic layer is formed over the dielectric layer in the MOSFET region and the NCFET region. After the first metallic layer is formed, an annealing operation is performed only in the NCFET region. After the annealing operation, the first metallic layer is removed from the MOSFET region and the NCFET region. The annealing operation includes irradiating the first metallic layer and the dielectric layer in the NCFET region with an energy beam.
    Type: Grant
    Filed: January 30, 2018
    Date of Patent: December 24, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ling-Yen Yeh, Carlos H. Diaz, Wilman Tsai
  • Patent number: 10431696
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate including a first fin portion and a first nanowire over the first fin portion. The first nanowire has a polygonal cross-section. The semiconductor device structure also includes a first gate structure surrounding the first nanowire, and two first source/drain portions adjacent to the first nanowire.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: October 1, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wilman Tsai, Cheng-Hsien Wu, I-Sheng Chen, Stefan Rusu
  • Patent number: 10355112
    Abstract: In one embodiment, the present invention includes an apparatus having a substrate, a buried oxide layer formed on the substrate, a silicon on insulator (SOI) core formed on the buried oxide layer, a compressive strained quantum well (QW) layer wrapped around the SOI core, and a tensile strained silicon layer wrapped around the QW layer. Other embodiments are described and claimed.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: July 16, 2019
    Assignee: Intel Corporation
    Inventors: Chi On Chui, Prashant Majhi, Wilman Tsai, Jack T. Kavalieros
  • Publication number: 20190140105
    Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate including a first fin portion and a first nanowire over the first fin portion. The first nanowire has a polygonal cross-section. The semiconductor device structure also includes a first gate structure surrounding the first nanowire, and two first source/drain portions adjacent to the first nanowire.
    Type: Application
    Filed: January 18, 2018
    Publication date: May 9, 2019
    Inventors: Wilman TSAI, Cheng-Hsien WU, I-Sheng CHEN, Stefan RUSU
  • Publication number: 20190096767
    Abstract: In a method of manufacturing a circuit including a MOSFET disposed in a MOSFET region and a negative capacitance FET (NCFET) disposed in a NCFET region, a dielectric layer is formed over a channel layer in the MOSFET region and the NCFET region. A first metallic layer is formed over the dielectric layer in the MOSFET region and the NCFET region. After the first metallic layer is formed, an annealing operation is performed only in the NCFET region. After the annealing operation, the first metallic layer is removed from the MOSFET region and the NCFET region. The annealing operation includes irradiating the first metallic layer and the dielectric layer in the NCFET region with an energy beam.
    Type: Application
    Filed: January 30, 2018
    Publication date: March 28, 2019
    Inventors: Ling-Yen YEH, Carlos H. DIAZ, Wilman TSAI
  • Publication number: 20190088760
    Abstract: A semiconductor device includes a first potential supply line for supplying a first potential, a second potential supply line for supplying a second potential lower than the first potential, a functional circuit, and at least one of a first switch disposed between the first potential supply line and the functional circuit and a second switch disposed between the second potential supply line and the functional circuit. The first switch and the second switch are negative capacitance FET.
    Type: Application
    Filed: September 18, 2017
    Publication date: March 21, 2019
    Inventors: Chien-Hsing LEE, Chih-Sheng CHANG, Wilman TSAI, Chia-Wen CHANG, Ling-Yen YEH, Carlos H. DIAZ
  • Publication number: 20190067488
    Abstract: In a method of manufacturing a negative capacitance structure, a ferroelectric dielectric layer is formed over a first conductive layer disposed over a substrate, and a second conductive layer is formed over the ferroelectric dielectric layer. The ferroelectric dielectric layer includes an amorphous layer and crystals.
    Type: Application
    Filed: February 28, 2018
    Publication date: February 28, 2019
    Inventors: Wilman TSAI, Ling-Yen YEH
  • Publication number: 20180350800
    Abstract: A semiconductor device includes a first channel region disposed over a substrate, and a first gate structure disposed over the first channel region. The first gate structure includes a gate dielectric layer disposed over the channel region, a lower conductive gate layer disposed over the gate dielectric layer, a ferroelectric material layer disposed over the lower conductive gate layer, and an upper conductive gate layer disposed over the ferroelectric material layer. The ferroelectric material layer is in direct contact with the gate dielectric layer and the lower gate conductive layer, and has a U-shape cross section.
    Type: Application
    Filed: July 30, 2018
    Publication date: December 6, 2018
    Inventors: Chia-Wen CHANG, Hong-Nien LIN, Chien-Hsing LEE, Chih-Sheng CHANG, Ling-Yen YEH, Wilman TSAI, Yee-Chia YEO
  • Publication number: 20180350914
    Abstract: Molecular Graphene (MG) of a physical size and bonding character that render the molecule suitable as a channel material in an electronic device, such as a tunnel field effect transistor (TFET). The molecular graphene may be a large polycyclic aromatic hydrocarbon (PAH) employed as a discrete element, or as a repeat unit, within an active or passive electronic device. In some embodiments, a functionalized PAH is disposed over a substrate surface and extending between a plurality of through-substrate vias. Heterogeneous surfaces on the substrate are employed to direct deposition of the functionalized PAH molecule to surface sites interstitial to the array of vias. Vias may be backfilled with conductive material as self-aligned source/drain contacts. Directed self-assembly techniques may be employed to form local interconnect lines coupled to the conductive via material. In some embodiments, graphene-based interconnects comprising a linear array of PAH molecules are formed over a substrate.
    Type: Application
    Filed: December 17, 2015
    Publication date: December 6, 2018
    Applicant: Intel Corporation
    Inventors: Paul A. ZIMMERMAN, Ian A. YOUNG, Wilman TSAI
  • Patent number: 10056498
    Abstract: A semiconductor device including a field effect transistor (FET) device includes a substrate and a channel structure formed of a two-dimensional (2D) material. An interfacial layer is formed on the channel structure. A gate stack including a gate electrode layer and a gate dielectric layer is formed over the interfacial layer. Source and drain contacts are formed over openings in the interfacial layer. The source and drain contacts have a side contact with the interfacial layer and a side contact and a surface contact with the channel structure.
    Type: Grant
    Filed: January 9, 2017
    Date of Patent: August 21, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ling-Yen Yeh, Chih-Sheng Chang, Wilman Tsai, Yu-Ming Lin
  • Publication number: 20180190833
    Abstract: A semiconductor device including a field effect transistor (FET) device includes a substrate and a channel structure formed of a two-dimensional (2D) material. An interfacial layer is formed on the channel structure. A gate stack including a gate electrode layer and a gate dielectric layer is formed over the interfacial layer. Source and drain contacts are formed over openings in the interfacial layer. The source and drain contacts have a side contact with the interfacial layer and a side contact and a surface contact with the channel structure.
    Type: Application
    Filed: February 27, 2018
    Publication date: July 5, 2018
    Inventors: Ling-Yen YEH, Chih-Sheng CHANG, Wilman TSAI, Yu-Ming LIN
  • Publication number: 20180151751
    Abstract: A semiconductor device including a field effect transistor (FET) device includes a substrate and a channel structure formed of a two-dimensional (2D) material. An interfacial layer is formed on the channel structure. A gate stack including a gate electrode layer and a gate dielectric layer is formed over the interfacial layer. Source and drain contacts are formed over openings in the interfacial layer. The source and drain contacts have a side contact with the interfacial layer and a side contact and a surface contact with the channel structure.
    Type: Application
    Filed: January 9, 2017
    Publication date: May 31, 2018
    Inventors: Ling-Yen YEH, Chih-Sheng CHANG, Wilman TSAI, Yu-Ming LIN
  • Publication number: 20180151745
    Abstract: A semiconductor device includes a first channel region disposed over a substrate, and a first gate structure disposed over the first channel region. The first gate structure includes a gate dielectric layer disposed over the channel region, a lower conductive gate layer disposed over the gate dielectric layer, a ferroelectric material layer disposed over the lower conductive gate layer, and an upper conductive gate layer disposed over the ferroelectric material layer. The ferroelectric material layer is in direct contact with the gate dielectric layer and the lower gate conductive layer, and has a U-shape cross section.
    Type: Application
    Filed: March 31, 2017
    Publication date: May 31, 2018
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Wen CHANG, Hong-Nien LIN, Chien-Hsing LEE, Chih-Sheng CHANG, Ling-Yen YEH, Wilman TSAI, Yee-Chia YEO
  • Publication number: 20180122916
    Abstract: The present disclosure provides a method of forming a nanolaminate structure. First, a pre-treatment is performed on a semiconductor substrate, in which the semiconductor substrate includes SiGe. Then, a first metal oxide layer is formed on the semiconductor substrate. Then, at least one second metal oxide layer and at least one third metal oxide layer are alternately stacked on the first metal oxide layer, thereby forming a nanolaminate structure. And, a conductive gate layer is formed on the nanolaminate structure.
    Type: Application
    Filed: August 22, 2017
    Publication date: May 3, 2018
    Inventors: Zi-Wei FANG, Hong-Fa LUAN, Wilman TSAI, Kasra SARDASHTI, Maximillian CLEMONS, Scott UEDA, Mahmut KAVRIK, Iljo KWAK, Andrew KUMMEL, Hsiang-Pi CHANG