Abstract: The present invention relates to a method of providing a reaction chamber (10) for a laser evaporation system (100), the reaction chamber (10) comprising at least one wall section (20) with an inner surface (22) facing a reaction volume (12) of the laser evaporation system (100). In addition, the present invention relates to a reaction chamber (10) for a laser evaporation system (100), the reaction chamber (10) comprising at least one wall section (20) with an inner surface (22) enclosing a reaction volume (12). Further, the present invention relates to a laser evaporation system (100) comprising a reaction chamber (10).

Abstract: The present invention is related to a thermal laser evaporation system (10), the thermal laser evaporation system (10) comprising: a reaction chamber (20) with a chamber wall (30) for enclosing a reaction volume (22); a target (12) arranged in the reaction volume (22), the target comprising one or more materials (M) to be evaporated; a laser light source (40) for providing a thermal laser beam (42) for evaporating said one or more materials (M) from the target (12), the thermal laser beam having a general propagation direction (46); and a chamber window (38) in the chamber wall (30) for conducting the thermal laser beam (42) into the reaction volume (22);

Abstract: The present invention is related to a method for running a laser system (10) for providing a laser beam (22) for heating a surface (68) of a target (66) located in a reaction chamber (62) of an evaporation system (60), the laser system (10) comprising a laser light source (20) for providing an at least essentially parallel laser beam (22) with an at least essentially centrally peaked intensity profile (24). In addition, the present invention is related to a laser system (10) for heating a surface (68) of a target (66) located in a reaction chamber (62) of an evaporation system (60), the reaction chamber (62) comprising a chamber window (64), and the laser system (10) comprising a laser light source (20) for providing an at least essentially parallel laser beam (22) with an at least essentially centrally peaked intensity profile (24).

Abstract: The present invention relates to an aperture (10) for electromagnetic radiation (100), preferably electromagnetic radiation (100) comprising a wavelength between 1 nm and 20 ?m, comprising an aperture body (20) made of a body material (22) transparent for the electromagnetic radiation (100). Further, the present invention relates to a method for aligning an aperture (10), and additionally to a system (70) for applying electromagnetic radiation (100) onto a source material and a dispersing element (90) for such a system (70).

Abstract: The present invention relates to a method for controlling a flux distribution (30) of evaporated source material (20) in a system (10) for thermal evaporation with electromagnetic radiation (120), wherein the system (10) comprises an electromagnetic radiation source (110) for providing an electromagnetic radiation (120), a vacuum chamber (12) containing a reaction atmosphere (16) and a detector (40) for measuring electromagnetic radiation (120), wherein a source material (20) and a target material (18) to be coated are arranged in the vacuum chamber (12) and the radiation source is arranged such that its electromagnetic radiation (120) impinges at an angle, preferably at an angle of 45°, on a source surface (22) of the source material (20) for a thermal evaporation and/or sublimation of the source material (20) below the plasma threshold, and wherein the detector (40) for measuring electromagnetic radiation (120) is arranged such that electromagnetic radiation (120) reflected on the source surface (22) reache

Abstract: A radial foil bearing for supporting a shaft includes a sleeve-like bearing housing with an inner circumference and at least three foil packs distributed over the inner circumference and covering a portion of the inner circumference. Each of the at least three foil packs has an elastic corrugated foil resting against the inner circumference and a top foil. The elastic corrugated foil includes axially opposite side edges running in a circumferential direction and a narrowed portion disposed on at least one of the axially opposite side edges to reduce an axial width and a radial spring rigidity of the elastic corrugated foil at the narrowed portion. The top foil has an underside resting on the elastic corrugated foil and a top side forming a bearing surface for the shaft.

Abstract: The present invention relates to a method for controlling an evaporation rate of source material (20) in a system (10) for thermal evaporation with electromagnetic radiation (120), wherein the system (10) comprises an electromagnetic radiation source (110) for providing an electromagnetic radiation (120), a vacuum chamber (12) containing a reaction atmosphere (16) and a main detector (40, 100) for measuring electromagnetic radiation (120), wherein a source material (20) and a target material (18) to be coated are arranged in the vacuum chamber (12) and the electromagnetic radiation source (110) is arranged such that its electromagnetic radiation (120) impinges at an angle, preferably at an angle of 45°, on a source surface (22) of the source material (20) for a thermal evaporation and/or sublimation of the source material (20) below the plasma threshold, and wherein the main detector (40, 100) for measuring electromagnetic radiation (120) is arranged such that electromagnetic radiation (120) reflected on the

Abstract: The present invention is related to a thermal laser evaporation system (10), the thermal laser evaporation system (10) comprising: a laser light source (30) for providing a thermal laser beam (34) for evaporating one or more materials (22) from a source (20); a thermal laser beam shaping system (40) comprising a collimation lens (42) and a focusing lens (44) for directing the thermal laser beam (34) onto the source (20); a vacuum chamber (12); a vacuum window (14) for conducting the thermal laser beam (34) into the vacuum chamber (12); and an aperture (16) arranged within the vacuum chamber (12) between the vacuum window (14) and the source (20).

Abstract: A method and a device for locating faults along an energy supply chain for DC current systems. To provide a reliable fault location for DC current systems, at least one reference short circuit is generated at a known reference fault location of the energy supply chain and at least one physical property of the energy supply chain is determined during the reference short circuit. At least one physical property of the energy supply chain during the operational short circuit is determined, and a fault location of the operational short circuit is determined, taking into account at least the determined physical properties during the reference short circuit and the operational short circuit and the reference fault location.

Abstract: The present invention relates to an apparatus for sliding friction free and lubricant free movement in vacuum, wherein the apparatus has a fixed position rail and a rail movable relative thereto by means of magnetic force. The invention further relates to a vacuum chamber, for example for a coating plant having an apparatus in accordance with the invention.

Abstract: The invention relates to a source arrangement for a deposition apparatus with a direct surface heater for applying a heating power onto a source surface of a source element, comprising a holding structure with a support and at least one source element arranged at the support, the source element comprising a source surface and a second surface opposite to the source surface, wherein the source material can be vaporized and/or sublimated from a source area on the source surface when heated by the surface heater of the deposition apparatus. Further, the invention is related to a deposition apparatus comprising such a source arrangement and to a method for depositing source material on a target material in the deposition apparatus, whereby the deposition apparatus comprises a surface heater and such a source arrangement.

Abstract: The present invention relates to an apparatus for sliding friction free and lubricant free movement in vacuum, wherein the apparatus has a fixed position rail and a rail movable relative thereto by means of magnetic force. The invention further relates to a vacuum chamber, for example for a coating plant having an apparatus in accordance with the invention.

Abstract: The present invention relates to a coating apparatus for coating a substrate of a substrate material with at least one material layer of a layer material. The present invention also relates to a process chamber for a coating apparatus for coating a substrate of a substrate material with at least one material layer of a layer material. The present invention further relates to a method of coating a substrate of a substrate material with at least one material layer of a layer material in a coating apparatus. A further aspect of the invention relates to a substrate coated with at least one material layer, comprising the substrate of a substrate material that is coated with at least one material layer of a layer material.

Abstract: A method and a device for locating faults along an energy supply chain for DC current systems. To provide a reliable fault location for DC current systems, at least one reference short circuit is generated at a known reference fault location of the energy supply chain and at least one physical property of the energy supply chain is determined during the reference short circuit. At least one physical property of the energy supply chain during the operational short circuit is determined, and a fault location of the operational short circuit is determined, taking into account at least the determined physical properties during the reference short circuit and the operational short circuit and the reference fault location.

Abstract: A camshaft adjuster for adjusting the phase angle between a crankshaft and a camshaft of an internal combustion engine comprises an actuator, in particular, an electric motor, and an adjustment module, which comprises a drive element, which can be driven by the crankshaft, and an output element, which can be rotated relative to the drive element to a limited extent and which is provided to be securely coupled to the camshaft, wherein a signal generator, which is arranged so as to be fixed in position on the internal combustion engine and which has an inductance, is inductively coupled to a measurement circuit, which is integrated into the adjustment module and which has at least one resonant circuit component having electrical properties that depend on the said phase angle.

Abstract: A foil bearing for supporting a shaft includes a sleeve-type baring housing, at least one elastic corrugated foil arranged on the inner circumference of the bearing housing, and a respective top foil covering each corrugated foil and forming a bearing surface. The bearing housing includes insertion grooves defined therein that extend from the inner surface of the bearing housing and outwardly. The fop foil and the corrugated foil each have ends that are inserted into and received by the insertion grooves.

Abstract: A foil bearing for supporting a shaft includes a sleeve-type bearing housing with three foil arrangements distributed around the inner circumference of the baring housing. Each foil arrangement covers a circumferential segment of the bearing housing. Each foil arrangement has a corrugated foil lying against an inner wall of the housing, and a top foil covering the corrugated foil. Each of the corrugated foil and the top foil has respective end edges. Each of the end edges are supported within the inner wall of the housing in a sliding manner. In particular, insertion grooves are formed in the inner surface of the housing which extend obliquely into the housing wall outwardly. The insertion grooves receive the end edges of the corrugated foil and the top foil.

Abstract: A foil bearing for supporting a shaft includes a sleeve-type baring housing, at least one elastic corrugated foil arranged on the inner circumference of the bearing housing, and a respective top foil covering each corrugated foil and forming a bearing surface. The bearing housing includes insertion grooves defined therein that extend from the inner surface of the bearing housing and outwardly. The fop foil and the corrugated foil each have ends that are inserted into and received by the insertion grooves.

Abstract: A drive device (1) for motorized actuation of a functional element of a motor vehicle has an electric motor (2) with a motor shaft (3) and also has a worm shaft (4) of a worm gearing. A first end of the worm shaft is connected to the motor shaft (3) and a second end is received in a radial bearing (5). The radial bearing (5) has a bearing body (21) with an outer surface mounted in a housing (11) and at least one annular bearing element (24) is mounted to the worm shaft (4). The bearing element (24) is elastic at least in a partial region to ensure compensation for tolerances in the region of the radial bearing.

Abstract: An arrangement for connecting a railway power supply for a railway track to a three-phase supply network. The arrangement has a three-phase AC transformer and a balancing device for a uniform electric load of the three phases of the three-phase supply network. The three-phase AC transformer is configured for connecting to the three-phase supply network on the primary side and is connected to the balancing device on the secondary side. The three-phase AC transformer is configured for connecting to a railway power supply which has an autotransformer system with two contact lines and two conductors that are carried along the railway track in an insulated manner.