Abstract: A process for producing a filter including a microporous membrane and a supporting structure connected thereto, including producing a mold for the membrane and the supporting structure, filling the mold with a molding material whose solubility can be changed by high energy radiation, and forming the micropores by partial irradiation of the membrane with high energy radiation and removal of the regions having increased solubility. The filter produced according to the above method is a unitary structure with the supporting structure integrally connected to the membrane.

Abstract: A cross flow microfilter comprises a filter housing having a flow chamber wherein a fluid is introduced on one side and a concentrate is removed on the opposite side a collection chamber from which a filtrate is removed, and at least one microporous membrane over whose one surface the fluid to be filtered flows in a parallel stream and whose other surface is oriented toward the collection chamber, the membrane having pores of a width between about 0.1 micron and 30 micron, the improvement wherein the pores of the membrane have slit-shaped cross-sections and given profiles, and are formed by a plurality of webs arranged in rows with predetermined spacing and by terminating plates which cover the webs, and the webs are applied onto one of the two plates by X-ray lithographic means, X-ray depth lithographic-galvanoplastic means, or molding and galvanoplastic means.

Abstract: A method of producing a passive optical device having optical components including at least one reflection grating, at least one port for polychromatic light and a plurality of ports for monochromatic light. The method includes producing the optical components of the device utilizing X-ray depth lithography so that the grating lines of the reflection grating are parallel to the direction of X-ray radiation emitted as part of the X-ray depth lithography.

Abstract: A method of producing a plate-shaped bearing member for sliding bearings, the structure being composed of a patterned body of supporting bearing material and a lubricant, utilizing a galvanoplastic fabrication step, the method including: producing a mold provided with a pattern of recesses, the step of producing including performing an X-ray deep-etch lithography procedure; filling the recesses to form the body of bearing material; removing the mold from the body of bearing material so that spaces are left in the bearing material; and filling the thus produced spaces with the lubricant.

Abstract: A spinning nozzle plate having nozzle capillaries is produced by depositing a layer 11 of a material whose characteristics can be changed by high-energy radiation (resist material) on a galvanic electrode 12. After resist layer 11 is irradiated in a predetermined pattern and after resist material is selectively removed by a treatment which utilizes the different material characteristics resulting from the irradiation, columns of resist material remain on galvanic electrode 12 to serve as negatives 21 of the nozzle capillaries. A galvanic layer 31 which encloses the negatives 21 of the nozzle capillaries is then produced on the galvanic electrode 12. Then the galvanic layer 31 is levelled and the negatives 21 are removed, as is the galvanic electrode 12. The process is particularly useful for producing spinning nozzle plates having nozzle capillaries with profiles of a special shape, essentially if the cross-sectional dimensions of the nozzle capillaries are small.

Abstract: Method for producing a plurality of deformable connecting elements for electrically joining microelectronic components.

Abstract: A method for producing a mask for deep-etch x-ray lithography in which the mask pattern of a thin-film mask having thin absorber structures is transferred by recopying with soft X-ray radiation to an X-ray resist layer whose layer thickness corresponds to the thickness of the absorber structures of the mask to be subsequently produced. Transfer errors during recopying are avoided by producing the thin-film mask directly on one side of a carrier membrane; applying a positive X-ray resist layer on the other side of the carrier membrane; irradiating the positive X-ray resist layer with approximately parallel X-ray radiation through the thin-film mask to produce irradiated portions in the positive X-ray resist layer; removing the irradiated portions of the positive X-ray resist layer to expose portions of the carrier membrane; electrolytically depositing elements having a high atomic number, e.g.

Abstract: The present invention relates to a method for producing spinning nozzle plates having funnel-shaped preliminary channels in flow communication with nozzle capillaries. Two embodiments of the method are provided which use photolithographic and electrodeposition techniques. Common to both embodiments of the method is the use of a metal plate provided with funnel-shaped preliminary channels as a self-aligning irradiation mask for irradiating a photoresist layer provided on the metal plate. Nozzle capillaries subsequently defined either in an electrodeposited layer according to a first embodiment of the invention or in electrodeposited tubular projections according to a second embodiment of the invention, have an offset-free, continuous transition between themselves and the preliminary channels. Photolithographic and electrodeposition techniques may also be used to define the funnel-shaped preliminary channels in the metal plates.

Abstract: A method for producing spinning nozzle plates having spinning nozzle channels employs a mold plate which contains mold channels corresponding to the spinning nozzle channels. The mold plate is initially connected with a galvanic electrode containing feed channels which communicate with the mold channels. Then negatives of the spinning nozzle channels are produced by filling the mold channels and the feed channels with an electrically insulating molding material and thereafter removing the mold plate, so that columns of molding material remain connected to the galvanic electrode. Finally, a galvanic layer enclosing the negatives of the spinning nozzle channels is produced, the galvanic layer is leveled, and the negatives as well as the remaining mold material are removed.

Abstract: In order to produce a plurality of plate shaped metal bodies containing a microstructure from a single molding tool constituting a master for the bodies, a negative mold is formed by filling the recesses in the microstructure of the tool with electrically insulating material and fastening to the insulating material an electrically conductive material which contacts the end faces of the microstructure of the tool.

Abstract: A method for producing a multichannel plate containing metal dynodes and having a plurality of generally parallel channels for use in structures for amplifying or converting optical images or other two-dimensional signal patterns by secondary electron multiplication, which method includes:producing a negative mold of the plate by:(i) providing a body having at least the thickness of the plate to be produced and made of an electrically insulating material whose ability to be removed from the body is altered by exposure to a selected radiation;(ii) irradiating the body with the selected radiation in a pattern corresponding to the plate to be produced and in a manner to render portions of the body having the form of a grid surrounding the channels more easily removable than the remaining portions of the body; and(iii) removing the more easily removable portions of the body to leave columnar structures corresponding to the channels in the plate;depositing metal layers and intermediate layers alternatingly in the

Abstract: A method for producing a multichannel plate containing a plurality of generally parallel channels for use in structures for amplifying or converting optical images or other two-dimensional signal patterns by secondary electron multiplication, which method includes:producing a positive mold of the plate, by the steps of: (i) providing a body having the external shape of the plate to be produced and made of a material whose ability to be removed from the body is altered by exposure to a selected radiation; (ii) irradiating the body with the selected radiation in a pattern corresponding to the plate to be produced and in a manner to render the portions of the body corresponding to the channels more easily removable than the remaining portions of the body; and (iii) removing the more easily removable portions of the body;forming a metal negative mold, by the steps of: (i) attaching the positive mold to a metal electrode; (ii) electrolytically depositing metal on the electrode and in the openings created in the po

Abstract: A process for the separation of light additive gas at the end of and/or at the location of the change in stage sizes in a separating nozzle cascade which is operated with a mixture of gaseous or vaporous substances to be separated. The separation of the light additive gas is effected by using a separating nozzle stage. A double deflection separating nozzle is employed as the separating nozzle stage.

Abstract: Method for producing a separating nozzle element including a separating body and terminal plates, for the separation of a gaseous or vaporous mixture, wherein the separating body comprises separating structures which penetrate the separating body and define separating chambers and gas conduits, and the terminal plates are provided with channels for the intake and discharge of gas streams. A mold layer is produced which contains negative outlines of the separating structures. Thereafter, the negative outlines of the mold layer are filled with a structure material which is compatible with the gaseous or vaporous mixture to be separated to form the separating structures. The mold layer containing the negative outlines of the separating structure is produced by shaping the mold layer from a reusable tool provided with the positive outlines of the separating structures.

Abstract: A motionless mixer has a tubular casing, a fluid inlet and a fluid outlet axially spaced from one another in the casing and defining a flow direction of the fluid, a plurality of discs each having throughgoing apertures for allowing passage of the fluid. The discs have a periphery conforming to the inner cross-sectional contour of the casing. The discs are supported in the casing in a face-to-face oriented relationship to form an axially extending disc stack. The apertures in the discs form a core channel and fringe channels in the stack for dividing a fluid stream into a core stream and fringe streams in a first zone, for dividing the core stream into fringe streams in a second zone and for centripetally combining the fringe streams into a central stream in a third zone. A mechanism prevents the discs from angular displacements relative to one another.

Abstract: A separating nozzle element composed of a separating body and two cover plates between which the body is interposed, the nozzle element being used for the separation of gaseous or vaporous mixtures, is produced by providing a layer of a material whose ability to be removed from the layer can be altered by irradiation, the thickness of the layer being approximately equal to the thickness of the separating body, irradiating the layer, starting at one surface, with radiation which has a penetration depth into the material of the layer which is less than the thickness of the layer, in a pattern corresponding to the cross section of the separating body structure, and removing from the layer material which is more easily removable as a result of the irradiation, to thereby permit the radiation to penetrate to greater distances from the one surface, while continuing the removal of material until the entire thickness of the layer has been subjected to radiation and removal, to form a mold of the separating body.

Abstract: A method for producing a component of a separation element for separating a aseous or vaporous mixture into fractions, which element is composed of a plurality of separating nozzle structures presenting passages defining mixture supply channels, separating chambers and fraction discharge channels, which method includes: forming a negative mold of the component by: providing a plate of a selected material whose ability to be removed from the plate is influenced by application of selected radiation; irradiating portions of the plate with such radiation in a pattern corresponding to the passages presented by the nozzle structure and to an extent such that material outside of the regions delimiting the passages is removable more easily than material within those regions; and removing the more easily removable material from the plate to create the negative mold of the component and forming the component by: filling the openings in the negative mold with a second material to create a solid plate-shaped member; and

Abstract: A separating nozzle element composed of a separating body and end plates enclosing the body, for separating components of gaseous or vaporous mixtures, the separating body being provided with separating structures which delimit separating chambers and gas conduits and the end plates being provided with channels for supplying gas to, and removing gas streams from, the separating chambers and conduits, in which the separating body is produced in successive contiguous layers by carrying out the following sequence of steps a plurality of times until a given separating body thickness is achieved: providing a mold layer; irradiating selected portions of the layer with radiation in a spatial pattern corresponding to the separating structures to render only selected regions of the layer which correspond to the separating structures removable in a predetermined manner; removing the selected regions; and filling the spaces thus created in the layer with a material which is compatible with the gaseous or vaporous mixtur

Abstract: In order to separate gaseous or vaporous substances having different molecular weights and/or different gas kinetically effective cross sections, by conducting the mixture to be separated together with a lighter additive gas into a separating chamber through two slit-shaped nozzles to form, in the chamber, two jets which are directed toward, and deflect, one another, the flow lines of each jet converging in the flow direction, dividing the thus deflected jets by means of separating baffles into partial streams of respectively different compositions, and discharging the partial streams separately from the chamber.

Abstract: In a method for separating a gaseous or vaporous mixture into components having different molecular weights and/or different gas kinetically effective cross sections by conducting the mixture through a nozzle into a separating chamber and deflecting the mixture in the chamber by mutual jet deflection, dividing the deflected mixture into partial streams having respectively different compositions by means of at least one separating baffle which protrudes into the mixture flow path, and separately removing the partial streams, the mixture is conducted through the nozzle by being distributed substantially uniformly around the axis of the separating chamber by being fed into the chamber from all sides thereof in radial directions along a plane, and the partial streams are removed by causing at least the lightest partial stream to flow radially out of the separating chamber substantially uniformly around the axis of the separating chamber and in a plane approximately parallel with the plane along which the mixture